KR20020010718A - 폴딩으로 제조된 다층 구조를 가진 압전 소자 - Google Patents

폴딩으로 제조된 다층 구조를 가진 압전 소자 Download PDF

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Publication number
KR20020010718A
KR20020010718A KR1020017016256A KR20017016256A KR20020010718A KR 20020010718 A KR20020010718 A KR 20020010718A KR 1020017016256 A KR1020017016256 A KR 1020017016256A KR 20017016256 A KR20017016256 A KR 20017016256A KR 20020010718 A KR20020010718 A KR 20020010718A
Authority
KR
South Korea
Prior art keywords
piezoelectric
electrodes
piezoelectric element
folding
notches
Prior art date
Application number
KR1020017016256A
Other languages
English (en)
Korean (ko)
Inventor
주그베르트람
뵈킹프리드리히
Original Assignee
클라우스 포스, 게오르그 뮐러
로베르트 보쉬 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 클라우스 포스, 게오르그 뮐러, 로베르트 보쉬 게엠베하 filed Critical 클라우스 포스, 게오르그 뮐러
Publication of KR20020010718A publication Critical patent/KR20020010718A/ko

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
KR1020017016256A 1999-06-19 2000-04-28 폴딩으로 제조된 다층 구조를 가진 압전 소자 KR20020010718A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19928188A DE19928188B4 (de) 1999-06-19 1999-06-19 Piezoelement mit einem Mehrschichtaufbau von Piezolagen und ein Verfahren zu dessen Herstellung
DE19928188.2 1999-06-19
PCT/DE2000/001342 WO2000079610A1 (de) 1999-06-19 2000-04-28 Piezoelement mit einem mittels faltung hergestellten mehrschichtaufbau

Publications (1)

Publication Number Publication Date
KR20020010718A true KR20020010718A (ko) 2002-02-04

Family

ID=7911890

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020017016256A KR20020010718A (ko) 1999-06-19 2000-04-28 폴딩으로 제조된 다층 구조를 가진 압전 소자

Country Status (7)

Country Link
EP (1) EP1192670A1 (ja)
JP (1) JP2003502871A (ja)
KR (1) KR20020010718A (ja)
CN (1) CN1357159A (ja)
DE (1) DE19928188B4 (ja)
HU (1) HUP0201732A2 (ja)
WO (1) WO2000079610A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010030432A1 (de) * 2010-06-23 2011-12-29 Robert Bosch Gmbh Piezoelektrischer Aktor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4725994A (en) * 1984-06-14 1988-02-16 Kabushiki Kaisha Toshiba Ultrasonic transducer with a multiple-folded piezoelectric polymer film
JPH0197604A (ja) * 1987-10-09 1989-04-17 Mitsubishi Kasei Corp 積層セラミックス製造法
US5761782A (en) * 1994-08-29 1998-06-09 Oceaneering International, Inc. Method of fabrication of piezoelectric bender elements
WO1998005080A1 (en) * 1996-07-25 1998-02-05 Materials Systems Incorporated Multilayer piezoelectric ceramic transducer and fabrication method
DE19648545B4 (de) * 1996-11-25 2009-05-07 Ceramtec Ag Monolithischer Vielschichtaktor mit Außenelektroden

Also Published As

Publication number Publication date
WO2000079610A1 (de) 2000-12-28
DE19928188B4 (de) 2004-04-15
JP2003502871A (ja) 2003-01-21
EP1192670A1 (de) 2002-04-03
DE19928188A1 (de) 2001-12-06
CN1357159A (zh) 2002-07-03
HUP0201732A2 (en) 2002-09-28

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WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid