KR200195327Y1 - The burn-in sorter head of plural head type - Google Patents

Abstract

1. TECHNICAL FIELD OF THE INVENTION

The present invention relates to a multi-head burn-in sorter head, and more particularly, to a multi-head burn-in sorter head for improving the classification and identification efficiency of semiconductor devices.

2. The technical problem to be solved by the invention

The purpose of the present invention is to provide a multi-head burn-in sorter head which can improve productivity as well as reduce manpower.

3. Summary of solution

A horizontal frame and a bend bar coupled to the groove of the horizontal frame by a link pin, which can form a W shape when bent, and a plurality of heads mounted on the bent portion of the bend bar to adjust respective separation distances on the horizontal frame. And a multi-head burn-in sorter head made of a cylinder having a rod coupled to an end of the bending bar.

4. Significant Uses of the Invention.

The present invention can be used for the reliability task process which is the last task process in the semiconductor production process.

Description

Burn-in sorter head

The present invention relates to a multi-head burn-in sorter head, and more particularly, to a multi-head burn-in sorter head for improving the classification and identification efficiency of semiconductor devices.

In general, the device is loaded on a burn-in board for the reliability test of the device in the semiconductor device task equipment. The device loaded onto the burn-in board sits in a socket on top of the burn-in board. After that, to check the reliability of the device to form a constant voltage and temperature to the device and send a signal. The device then checks for damage to the device as it becomes less reliable or transported by temperature, voltage and signal. Damaged or unreliable devices will be separated. On the other hand, the socket is a device for checking the reliability of the device after seating the device. The burn-in board has a plurality of sockets fixed in a plurality of rows at the top, and can be moved horizontally by a robot.

A picker is used to seat the above-mentioned device in the socket on the top of the burn-in board, and the picker has a head for holding the device at the bottom. The head had a socket guide formed integrally with the head, without separately configuring the socket guide.

In the conventional sorter driving method, each rod is moved by the rotation of the cam shaft by contacting the cam shaft moving rods vertically or horizontally. By the movement of the rod, the required clearance is obtained. By the way, the one-headed sorter described above has a problem that the efficiency is lowered and, as a result, a factor that inhibits productivity.

The present invention is to solve the above-mentioned problems, the object of the present invention is to provide a multi-modal burn-in sorter head that can improve the productivity as well as reduce the workforce.

The present invention for achieving the above object is a plurality of sockets are located on the horizontally movable burn-in board, the head is configured to move up and down to insert the semiconductor element in the socket for the classification and identification of semiconductor devices In the burner insulator, the head is mounted and the horizontal frame is formed laterally groove, coupled to the groove of the horizontal frame by a link pin, a bending bar that can form a W when bending and at the same time made of a plurality of bars, A plurality of heads mounted on the bent portion of the bent bar to adjust each separation distance on the horizontal frame, and a rod coupled to an end of the bent bar to move the bent bar. This is accomplished by the burn-in sorter head in a multi-head manner.

1 (a) is a plan view of the burn-in sorter head of the multi-head method according to the present invention.

Figure 1 (b) is a plan view showing a horizontal frame which is part of the present invention and a bending bar mounted thereto.

Figure 1 (c) is a plan view of a state in which a plurality of heads mounted on the bending bar according to the present invention.

Figure 2 is a side view of a state equipped with a burn-in sorter head of the multi-head system according to the present invention.

3 is a front view of a state in which the burn-in sorter head of the multi-head system according to the present invention is attached to the burn-in sorter.

<Description of the symbols for the main parts of the drawings>

10: horizontal frame 11: cylinder

16: bending bar 20: head

40: rack 50: guide shaft

70: socket guide 80: burn-in board

90: socket

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Figure 1 (a) is a plan view of the burn-in sorter head of the multi-head method according to the present invention, Figure 1 (b) is a plan view showing a horizontal frame 10 and a bending bar mounted thereon as part of the present invention, Figure 1 (c) Is a plan view of a state in which a plurality of heads 20 are mounted on the bending bar 16 according to the present invention. 2 is a side view of a state in which the burn-in sorter head 20 of the multi-head 20 system according to the present invention is mounted on the burn-in sorter.

Horizontal frame 10 has a groove 17 is formed in the longitudinal direction, a plurality of threaded portion is formed on the side, the groove 17 is formed on the upper side.

The cylinder 11 is mounted on the side of the horizontal frame 10, the cylinder 11 is supported by a plurality of shafts (11a), the shaft (11a) is coupled to the shaft bracket (11b). On the other hand, the stopper 14 is mounted at the end of the horizontal frame 10 to limit the moving range of the cylinder. In other words, when the stopper 14 is pressed while the cylinder 11 moves forward, the stopper 14 sends a signal to a solenoid valve (not shown) which drives the cylinder 11 to stop the cylinder.

The bending bar 16 is composed of a plurality of bars, and each of the plurality of bars is coupled using the link pin 13. The plurality of bars 16 are capable of contraction of the kidney about the bent portion 15.

The heads 20 and 20 of the sorter are mounted on the bent portion of the bent bar 16 and the bent portion is moved so that the bent bar 16 forms a ｗ shape, and the spacing between the respective heads 20 is narrow. I will. On the other hand, the head 20 of such a structure is installed facing each other, of course, are installed spaced apart from each other. On the other hand, the cylinders 11 are attached to the pair of horizontal frames 10 facing each other. The head 20 is moved up and down by the driving means above the head 20. Here, the driving means for moving the head 20 up and down is movable up and down using a mechanical means such as a cam or cylinder. In this case, four heads 20 mounted on the frame 10 and movable up and down as well as vertically movable face each other.

Vertical frames 30 are formed at both ends of the horizontal frame 10, and the rack driving unit 31 is mounted on the vertical frame 30 to drive the rack 40. Four heads 20 face each other in one rack. Therefore, one rack 40 can be equipped with eight heads 20.

On the other hand, four guide shafts 50 are vertically formed outside the rack 40. The plate 60 is fixed to the upper portion of the guide shaft 50, and the ball bush housing 51 is mounted on each guide shaft 50 to move up and down. On the other hand, the head 20 is mounted to the rack drive unit 31 by the picker plate. The height of the rack 40 can be moved by moving the ball bushing housing 51 up and down, and of course, the working height of the rack 40 is adjusted as the ball bushing housing 51 moves.

On the other hand, the driving of the head 20 causes the head 20 to move up and down by driving the motor 70 mounted on the side of the picker plate. The means for moving the head 20 up and down is possible by a device such as a cam.

A socket guide 70 is formed below the head 20, and the socket guide 70 guides the semiconductor device transferred by the head 20 to be stably inserted into the socket 90. .

The socket 70 under the socket guide 70 is fixed on the burn-in board 80 to move horizontally. After testing the device inserted into the socket 70, the socket 70 is loaded and unloaded and moved. The movement of the socket 70 is made by a robot or the like moving the burn-in board (80).

Hereinafter, the operation and function of the present invention will be described.

3 is a front view of a state in which the burn-in sorter head 20 of the multi-head 20 system according to the present invention is mounted on the burn-in sorter.

The socket guide 70 is located under the burner sorter head 20 of the multi-head 20 type. The socket 90 is positioned below the socket guide 70. In the socket 90, the reliability of the device is tested. On the other hand, the equipment rack drive unit 31 can be equipped with eight semiconductor elements per rack, the equipment can accommodate two racks. The operator inserts 2 racks and presses the start switch. The device first pushes the upper rack 40 using a rack moving cylinder.

The device rack elevator then moves the rack up and down to the position of the rack's first device reliability tag. The device then checks the reliability of the device. At this point, the device verifies that the device's reliability and the device you're working with match everything. When the verification is completed, it is transferred to the X-Y table (not shown) by the element carrier. The elements transferred by transport to the X-Y table are automatically transferred to the position to be loaded and sorted after setting the reference point. When the next device completes the device reliability check, it waits in the rack.

The device moved to the loading and sorting position is precisely pressed by 24 socket multi-presses. Afterwards, the first head 20 completes the DC task and picks up four devices and waits. At this time, the second head 20 transfers the device to be loaded to an open short check station.

First, the unloading head 20 unloads four devices. The X-Y table moves by row, and the loading head 20 loads the empty socket. Meanwhile, when the unloaded device is placed in the unload station, the second sorting head 20 automatically sorts.

Before unloading one furnace, a 12-socket check is required. The unloaded device is also placed in an empty tray (TRAY) and automatically transferred to the unloading buffer unit. On the other hand, the material to be loaded is automatically transferred from the loading buffer unit.

Once unloading and loading are complete, the device is automatically transferred to the rack. After the reliability check is completed, the device is automatically transferred to the X-Y table by the carrier to continue the operation. When one rack is finished, the rack elevator transfers it to the rack stocker. After completion, it is automatically transported to work on the underlying rack. The worker collects the completed rack and puts in a new rack to stack. When the job is finished, the device will automatically initialize and prepare for the next job.

Increasing the production compared to the equipment, the number of equipment required can be reduced by half, which can reduce the cost, and because the worker can operate six equipment, there is an excellent effect of reducing the manpower.

Specifically, the effect of the present invention, when using the multi-head burn-in sorter head according to the present invention can be expected to produce 2400 units per hour, as well as 50400 units per day output per unit. In addition, the monthly production effect per equipment is 1512000 units.

Claims (3)

In the burner insulator for classifying and verifying semiconductor devices, a plurality of sockets are positioned on a horizontally movable burn-in board, and a head is movable up and down to insert a semiconductor device into the socket. A horizontal frame in which the head is mounted and a groove is formed laterally; A bending bar coupled to the groove of the horizontal frame by a link pin, the bending bar being made of a plurality of bars and forming a W letter at the same time, A plurality of heads mounted on the bent portion of the bent bar and configured to adjust respective separation distances on the horizontal frame; The burner sorter head of the multi-head method characterized in that the rod is coupled to the end of the bending bar to include a cylinder capable of moving the bending bar. The method of claim 1, The plurality of heads to face each other in pairs, the plurality of heads facing the pair of the burn-in sorter head characterized in that spaced apart are installed. The method of claim 1, The burner sorter head of the multi-head method, characterized in that the stopper is installed at one end of the horizontal frame to control the driving of the cylinder.