KR20010089994A - Oxide magnetic materials, chip components using the same, and method for producing oxide magnetic materials and chip components - Google Patents

Abstract

PURPOSE: To provide a Ni-Cu-Zn oxide base magnetic material in which the internal conductor is stabilized at very low sintering temperature and which is excellent in characteristics in high frequency region of 100 MHz or higher by adding an additive for minimizing the deterioration of electromagnetic characteristics even though the additive reacts with the principal component of a parent material and also minimizing the deterioration of the temperature characteristics of the inductance. CONSTITUTION: This oxide magnetic material consists of 35.0-51.0 mole % Fe2O3, 1.0-35.0 mole % CuO, 38.0-64.0 mole % NiO and 0-10.0 mole % (including 0) ZnO.

Description

OXIDE MAGNETIC MATERIALS, CHIP COMPONENTS USING THE SAME, AND METHOD FOR PRODUCING OXIDE MAGNETIC MATERIALS AND CHIP COMPONENTS}

The present invention relates to an oxide magnetic material used for chip inductors, chip components such as chip beads, or shielding parts for electromagnetic waves such as bulk inductors, and a method of manufacturing the same, and to a bulk coil component or a laminated coil component using the oxide magnetic material, and a method of manufacturing the same. It is about. More particularly, the present invention relates to an oxide magnetic material capable of firing below the melting point of Ag used in the inner conductor of a chip component and having excellent high frequency characteristics, and a method of manufacturing a bulk or chip inductor using the same.

The recent remarkable development of electronic and communication devices is based on the miniaturization of electronic components, thinning of film, and improvement of mountability, but the construction of a new industrial structure is a new problem that has previously been ignored, namely environment and By causing communication problems, etc., both sides have social problems.

In particular, due to the strengthening of the electromagnetic interference regulations of various countries regarding the electromagnetic environment that is worsened by the common use of wireless communication devices, for example, the development of electromagnetic interference elimination (EMI / EMC) devices that do not cause harmful radio waves is required. As demand grows rapidly, it is developing with high efficiency such as complicated functions such as magnetic and temperature characteristics, high integration, and wide high frequency band.

Therefore, the application range of the oxide magnetic material used for the electromagnetic interference removing device or the electronic component such as the power transformer is also subdivided by characteristics, for example, the frequency band, and the manufacturing method is also conventional powder In the manufacturing method, the research of the manufacturing method of the laminated component is actively progressed and it has been practically used. Recently, it has become a technology for manufacturing small chip components in the ceramic electronic component manufacturing field.

In general, oxide magnetic materials used in chip components such as chip inductors, chip LC filters, and chip transformers require high inductance, and in such oxide magnetic materials, Mn-Zn ferrite, Ni ferrite, Ni-Zn ferrite, or Ni -Cu-Zn etc. are mentioned.

Mn-Zn ferrite is used for magnetic core materials such as power transformers and power line filters because of its high transmittance and very low power loss. However, Mn-Zn ferrite has a disadvantage in that it is difficult to apply in a frequency band of 1 MHz or more because of its low frequency characteristics. Ni-ferrite, Ni-Zn ferrite, Ni-Cu-Zn ferrite, etc. are used as a magnetic core material currently used in the high frequency band.

On the other hand, in the conventional method for producing the oxide magnetic material, the firing step is performed at about 1000 to 1400 ° C for about 1 to 5 hours. However, internal conductors of electronic parts such as stacked chip inductors usually use Ag electrodes, but the above firing temperature exceeds the melting point (960 ° C) of Ag of the internal conductors, and the components manufactured under very high temperature conditions are difficult for Ag to dissolve. This has the disadvantage that the loss is very high at high frequencies, and it is difficult to realize the required inductance.

Therefore, CoO is generally used as an additive used to lower the firing temperature to obtain a chip with low loss at high frequencies (Japanese Patent Laid-Open No. 9-63826). However, CoO has a problem in that it affects the reliability of the product by deteriorating the temperature characteristic of the inductance in proportion to the addition amount.

The present invention stabilizes the inner conductor at a very low firing temperature by adding an additive which minimizes the deterioration of the electromagnetic characteristics and reacts with the main component of the base material to minimize the deterioration of the temperature characteristics of the inductance. The Ni-Cu-Zn-based oxide magnetic material having excellent characteristics in the high frequency band of 100 MHz or more, a chip component and oxide magnetic material manufacturing method using the oxide magnetic material, and a method of manufacturing the chip component are provided. For the purpose of

In order to achieve the above object, the present invention provides an oxide magnetic material (1) to (9) below, a chip component and an oxide magnetic material manufacturing method using the oxide magnetic material, and a method of manufacturing the chip component.

(1) characterized by comprising a (including 0), Fe ₂ O ₃ is 35.0 ~ 51.0 mol%, CuO 1.0 to 35.0 mol%, NiO is 38.0 ~ 64.0 mol% and ZnO is 0 to 10.0 mole%.

(2) The oxide magnetic material described in the above (1) is characterized by containing Ca 0.3 wt% or less (0 is not included).

(3) The oxide magnetic material according to the above (2), wherein the content of CoO is 0.7 wt% or less (0 is not included).

(4) In the method of producing the oxide magnetic material, Fe ₂ O ₃ is 35.0-51.0 mol%, CuO is 1.0-35.0 mol%, NiO is 38.0-664.0 mol% and ZnO is 0-10.0 mol% (contains 0). And Ca ₃ (PO ₄ ) ₂ is contained in an oxide magnetic material consisting of ₃ wt% or less (without 0) and calcined.

(5) In the manufacturing method of the oxide magnetic material as described in said (4), it is characterized by baking by containing CoO below 0.7 wt%.

(6) A chip component comprising 35.0-51.0 mol% of Fe ₂ O ₃ , 1.0-35.0 mol% of CuO, 38.0-664.0 mol% of NiO, and 0-10.0 mol% (including 0) of ZnO. Oxide magnetic material or containing 0.3 wt mol% or less (without 0) of Ca and also 0.3 wt mol% or less (without 0) of Ca and 0.7 wt mol% or less (without 0) of CoO A bulk type coil component is constructed using a sintered body of an oxide magnetic material.

(7) A chip component comprising 35.0-51.0 mol% of Fe ₂ O ₃ , 1.0-35.0 mol% of CuO, 38.0-664.0 mol% of NiO, and 0-10.0 mol% (including 0) of ZnO. Oxide magnetic material or Ca containing 0.3 wt% or less (without zero), Ca 0.3 wt% or less (without zero) and CoO 0.7 wt% or less (without zero) A laminated coil component is constructed by using a sintered body of an oxide magnetic material and having a conductor layer in the sintered body.

(8) The chip component according to the above (7), wherein the inner conductor is composed of Ag or a conductor mainly composed of an alloy of Ag and Pd.

(9) In the method of manufacturing a chip component, Fe ₂ O ₃ is 35.0 to 51.0 mol%, CuO is 1.0 to 35.0 mol%, NiO is 38.0 to 6.40 mol%, ZnO is 0 to 10.0 mol% (contains 0 ) Oxide magnetic material consisting of or containing 0.3 wt% or less (without 0) of Ca or 0.3 wt% or less (without 0) of Ca and 0.7 wt% or less (without 0) of CoO In the method of manufacturing a chip component using a sintered body of an oxide magnetic material containing and a conductor having a main component of Ag or an alloy of Ag and Pd as a conductor layer or conductor in the sintered body, the oxide magnetic material and the inner conductor crushed It is characterized by firing at 880 ℃ ~ 920 ℃. Accordingly, the following effects can be exhibited.

(1) Oxide magnetic material capable of low-temperature firing and low initial permeability, high sintered body density, low eddy current loss, and low-temperature firing can be obtained in the high frequency band of 100MHz or more.

(2) An oxide magnetic material having good initial temperature and low inductance temperature characteristics having a high initial permeability and a high sintered compact can be obtained by adding Ca or less than 0.3 wt%.

(3) An oxide magnetic material having good initial characteristics with low initial permeability and good temperature characteristics of inductance having a high sintered compact density can be obtained by adding Ca or less in an amount of 0.3 wt% or less and CoO in an amount of 0.7 wt% or less.

(4) By adding Ca ₃ (PO ₄ ) ₂ to 0.5 wt% or less, an oxide magnetic material having low initial permeability, high sintered body density, and good inductance temperature characteristics can be obtained.

(5) In addition to Ca ₃ (PO ₄ ) ₂ , since CoO was added in an amount of 0.7 wt% or less, an oxide magnetic body having low initial permeability and good temperature characteristics of inductance having a high sintered body density can be obtained.

(6) Since the chip components are composed of an oxide magnetic material having a low initial permeability, a high sintered compact density, and good inductance temperature characteristics, excellent chip components having good respective characteristics can be provided.

(7) Laminated coil parts are composed of oxide magnetic material with low initial permeability, high sintered body density, and low firing temperature with good inductance temperature characteristics. Therefore, multilayer coil parts with excellent inductance quality factor Q having excellent characteristics are provided. can do.

(8) The chip parts are composed of an oxide magnetic material having a low initial permeability, a high sintered body density, a low firing temperature having good inductance temperature characteristics, and an inner conductor composed of a conductor mainly composed of Ag or Ag / Pd alloy. A chip component having excellent inductance quality factor Q having good characteristics can be provided.

(9) Chips are prepared by using oxide magnetic material with low initial permeability, high density of sintered body and good inductance temperature characteristics, and firing at temperatures of 880 ℃ ~ 920 ℃ with inner conductors mainly composed of Ag or Ag · Pd alloy Since the parts are manufactured, chip parts having good respective characteristics and excellent inductance quality factor Q can be manufactured.

Next, an embodiment of the present invention will be described. Magnetic materials generally differ in their characteristics by frequency band depending on their composition. In the present invention, in the high frequency band of 100 MHz or more, suitable Ni-Cu-Zn ferrite uses soft magnetic ferrite having a small amount of ZnO and a relatively high NiO component.

In one embodiment of the present invention, in the Ni-Cu-Zn-based oxide magnetic material, Fe ₂ O ₃ is 35.0 ~ 51.0 mol%, CuO is 1.0 ~ 35.0 mol%, NiO is 38.0 ~ 66.0 mol% and ZnO 0 ~ 10.0 To provide a mol% oxide magnetic material.

The impurities may contain Si, Al, B, Mn, Mg, Ba, Sr, Bi, Pb, W, V, Mo, and the like as long as they do not affect the permeability, the sintered body density, the temperature characteristics of the inductance, and the like.

As a result, an oxide magnetic material having an initial permeability of 25 or less, a sintered compact of 4.75 g / cm 3 or more, and an inductance having a temperature characteristic of within ± 20% is obtained.

When the Fe ₂ O ₃ constituting the main phase is less than 35.0 mol%, the sintered density is 4.75 g / cm3 or less, and if it exceeds 51.0 mol%, the electrical resistivity decreases and the eddy current loss increases, leading to an increase in magnetic loss. do.

CuO has an effect of promoting low-temperature sintering, and in that sense, the amount may be increased, but if it exceeds 35.0 mol%, it precipitates as an abnormal phase in the grain boundary, and grain stress occurs and the temperature characteristic of the inductance deteriorates. Moreover, when CuO is 1 mol% or less, the sintered compact density deteriorates.

ZnO affects the initial permeability. The frequency characteristic depends on the initial permeability, and the higher the frequency band to be obtained, the lower the initial permeability needs to be. The initial permeability is preferably 25 or less, more preferably 18 or less, even more preferably 13 or less. Since the initial permeability increases in proportion to the content of ZnO, ZnO is 10 mol% or less in the oxide magnetic material used in the band of 100 MHz to 500 MHz or more.

Therefore, it is necessary to make NiO which replaces a remainder into 38.0-64.0 mol%.

In the present invention, in the Ni-Cu-Zn oxide oxide magnetic material, Fe ₂ O ₃ is 35.0-51.0 mol%, CuO is 1.0-35.0 mol%, NiO is 38.0-664.0 mol% and ZnO is 0-10.0 mol%. In the oxide magnetic material consisting of: 0.3 wt% or less of Ca, 0.3 wt% or less of Ca and 0.7 wt% or less of CaO, or calcining by adding Ca ₃ (PO ₄ ) ₂ or less of 0.5 wt%, Ca ₃ (PO _{4) 2} was added to 0.5wt% or less and then fired, or Ca ₃ (PO _{4) 2} for thereby forming a 0.5wt% or less and the addition of CoO less than 0.7wt%.

An embodiment of the present invention will be described. Ni-Cu-Zn ferrite, i.e., a material bead having a diameter of 3 mm as a medium bead for a material composed of 45.5 mol% of NiO, 6.0 mol% of CuO, 0 mol% of ZnO, and 48.5 mol% of Fe ₂ O ₃ as a main component of the oxide magnetic material Partially stabilized zirconia (Paritially Stabilized Zirconia: PSZ) was used, wet mixed by means of a wet internal circulation media agitated mill, dried and plasticized at 780 ° C.

Next, the plasticized material was finely pulverized by using PSZ as a medium bead and wetted again by wet internal circulation type median agitation mill with a concentration of 33%. At this time, CoO, Ca ₃ (PO ₄ ) ₂ , Ca, and P were selected and added to the plasticized powder as shown in Table 1, and then ground. In addition, in the Table 1 CoO, Ca, P indicates that the addition of _{Co 3 O 4, CaCO 3,} P 2 O 5.

The final powder was obtained by drying at a place where the average particle diameter of the material was 0.5 µm, that is, the specific surface area was 8 m 2 / g.

The dried powder was taken out as a uniform particle through a sieve, and then a 3% aqueous solution of PVA124 was added as a binder to make 10% by weight of particles, and a molded product obtained by molding into a predetermined shape under the measurement conditions described below was formed at 910 ° C in air. It was prepared by firing at 2 hours.

Addition amount (wt%) Initial Permeability μi Sintered compact density (g / cm 3) Temperature characteristic of inductance (%) briefs Example CaO Ca ₃ (PO ₄ ) ₂ Ca P -20 ~ 20 ℃ 20 ~ 80 ℃ Inventive Example Sample 1 20.9 5.03 5.00 3.38 Comparative example Sample 2 0.70 14.5 5.11 21.56 13.45 Comparative example Sample 3 0.75 14.3 5.11 24.48 15.39 Comparative example Sample 4 1.00 11.1 5.04 29.04 36.38 Inventive Example Sample 5 0.025 20.1 5.08 4.86 4.06 Inventive Example Sample 6 0.05 19.4 5.01 4.43 3.54 Inventive Example Sample 7 0.10 17.8 4.95 3.12 2.38 Inventive Example Sample 8 0.20 16.7 4.86 2.44 1.95 Inventive Example Sample 9 0.30 15.9 4.77 1.89 1.14 Comparative example Sample 10 0.40 13.2 4.72 1.01 0.56 Comparative example Sample 11 0.025 12.8 4.65 -1.21 0.37 Comparative example Sample 12 0.05 10.1 4.31 -0.90 -0.45 Comparative example Sample 13 0.10 6.7 3.68 -0.45 -1.00 Inventive Example Sample 14 0.0025 20.4 5.14 4.36 3.60 Inventive Example Sample 15 0.005 20.2 5.13 4.03 3.29 Inventive Example Sample 16 0.05 16.7 4.94 2.26 1.22 Inventive Example Sample 17 0.10 16.0 4.93 1.98 1.16 Inventive Example Sample 18 0.50 12.8 4.76 1.17 0.32 Comparative example Sample 19 1.00 9.6 4.58 0.36 -0.52 Inventive Example Sample 20 0.70 0.10 14.0 4.91 19.01 11.44 Inventive Example Sample 21 0.70 0.20 12.9 4.82 18.12 10.88 Inventive Example Sample 22 0.50 0.025 15.0 5.11 4.78 6.02 Inventive Example Sample 23 0.65 0.005 14.3 5.10 11.34 7.64 Inventive Example Sample 24 0.50 0.10 12.4 4.80 2.89 7.44 Inventive Example Sample 25 0.70 0.10 11.7 4.88 19.57 11.51 Inventive Example Sample 26 1.00 0.10 9.1 4.71 24.75 30.44 Comparative example

Sample 1 of Table 1 is granulated and molded in the same manner as above without adding an additive to the plastic, finely divided main component, and calcined at 910 ° C for 2 hours in air.

Samples 2 to 4 were granulated, molded and calcined in the same manner as described above by adding only Co ₃ O ₄ as the additives shown in Table 1 in terms of CoO as additives to the plastic, finely ground main component.

Samples 5 to 10 were granulated, molded, and calcined in the same manner as described above by adding only the addition amounts shown in Table 1 in terms of Ca to CaCo ₃ as additives to the plastic, finely ground main component.

Samples 11 to 13 were granulated, molded, and fired in the same manner as described above by adding only the amounts of the amounts shown in Table 1 in terms of P to P ₂ O ₅ as additives to the plastic, finely ground main component.

Samples 14 to 19 were granulated, molded, and fired in the same manner as described above by adding only Ca ₃ (PO ₄ ) ₂ as an additive to the plastic, finely ground main component as an additive. For example, when 0.5 wt% of Ca ₃ (PO ₄ ) ₂ is added as in Sample 18, 0.2 wt% of Ca and 0.1 wt% of P exist in the oxide magnetic material after firing.

Samples 20 and 21 were granulated, molded, and calcined in the same manner as described above by adding only the amounts of Co ₃ O ₄ and CaCO _{3 added} to CoO and Ca in terms of CoO and Ca as additives to the plastic, finely ground main component.

Samples 22-26 are an additive to the plastic and fine-ground main component Co ₃ O ₄ and Ca ₃ (PO _{4) 2} a, Co ₃ for O ₄ man addition amount shown in Table 1 as CoO terms of Ca ₃ (PO ₄ ) About ₂ , only the addition amount shown in Table 1 is added and it assembles, shape | molded, and baked similarly to the above.

Evaluation as a magnetic material was performed by evaluating the initial permeability, the appearance density, and the temperature characteristic of inductance shown in Table 1.

The measurement of the initial permeability and temperature characteristics of inductance were made to be a toroidal type of 18mm in outer diameter, 10mm in inner diameter and 3.1mm in height, firing at the predetermined temperature in air, winding the wire 20 times, and actually constructing a coil and performing an impedance analyzer (HP 4291A) was used to apply a magnetic field of 0.4 A / m, and the inductance of 100 KHz was measured and calculated from the constant obtained from the shape to obtain the initial permeability.

Here, the initial permeability is to see the high frequency characteristics of the sintered body. And as the initial permeability is low, the peak frequency moves to the high frequency side. The initial permeability to obtain the characteristics in the frequency band where the conditions of the present invention are satisfied is preferably 25 or less (100 MHz band), more preferably 18 or less (300 MHz band), even more preferably 13 or less. (500MHz ~).

The temperature characteristic of the inductance changes the temperature between -20 and + 80 ° C based on the inductance value L at 20 ° C when measuring the characteristics of the sintered body, and the rate of change with the reference inductance value L at each obtained temperature (ΔL / L Since the temperature characteristics of the inductance obtained in the above) are directly related to the reliability, it is necessary to suppress the change rate as much as possible. The temperature characteristic of the inductance capable of ensuring reliability is preferably within ± 20%, more preferably within ± 15%.

The apparent density calculated | required the volume from the dimension of the sintered compact, and the mass was divided and calculated | required from this volume. Here, the appearance density is intended to show good and bad sinterability of the sintered compact. The low appearance density indicates a large number of hollow holes in the sintered body. In the case of element formation, the use of high temperature and humidity causes the presence of these hollow holes, which affects reliability such as short defects and physical strength. There is a problem of being glazed. The apparent density which does not cause such a problem is generally 4.75 g / cm 3 or more, which is 90% or more of the theoretical density of 5.24 g / cm 3 of Ni-Cu-Zn ferrite.

By the above, the following is understood.

Sample 1, that is, the basic composition of the present invention has a characteristic in which the initial permeability is as small as 25 or less, the sintered body density is 4.75 g / cm 3 or more, and the temperature characteristic of the inductance is ± 20% or less.

As shown in Samples 2 to 4, even if CoO is added to the basic composition alone, the temperature characteristics of the inductance are large and fall outside the scope of the present invention.

As shown in Samples 5 to 9, when Ca is 0.3 wt% or less (not including 0), initial permeability, sintered body density, temperature characteristics of inductance, etc. satisfy the predetermined values, but as shown in Sample 10, When it exceeds 0.3 wt%, the sintered compact becomes small and does not satisfy a predetermined value.

As shown in Samples 11 to 13, even if P is added alone, the sintered compact is small and cannot satisfy a predetermined value.

As shown in Samples 14 to 18, when Ca ₃ (PO ₄ ) ₂ was added at 0.5 wt% or less (not containing 0) and fired, the initial permeability, sintered compact density, inductance temperature characteristics, etc. Although satisfactory, when the addition amount of Ca ₃ (PO ₄ ) ₂ exceeds 0.5wt% as in Sample 19, the sintered compact is small and cannot satisfy a predetermined value.

As shown in Samples 20 and 21, by containing 0.3 wt% or less of Ca and by containing 0.7 wt% or less of CoO, the initial permeability is small and the temperature characteristics of the inductance having a high sintered compact are good.

As shown in Samples 22 to 25, when Ca ₃ (PO ₄ ) ₂ is added in an amount of 0.5 wt% or less, when CaO is contained in an amount of 0.7 wt% or less, initial permeability, sintered compact density, inductance temperature characteristics, etc. However, when CoO exceeds 0.7 wt% as in Sample 26, the sintered compact density becomes smaller than the predetermined value and the temperature characteristic of the inductance becomes large and exceeds the predetermined value so that the predetermined value cannot be satisfied.

In addition, the core for a bulk coil according to the present invention is made as described above by adding a binder to the plastic material, wet-pulverized oxide magnetic material to form particles, and then molded and processed into a predetermined shape and fired to about 900 ~ 1300 ℃ in the air. In addition, you may process this core after baking. Then, for example, a wire made of Au, Ag, Cu, Fe, Pt, Sn, Ni, Pb, Al, Co, or an alloy thereof is wound around this core.

On the other hand, in the multilayer coil, an external electrode is formed on the surface of a sintered body obtained by laminating and integrating a magnetic layer paste made of an oxide magnetic material and an inner conductor layer by a thick film technique such as a printing method or a doctor blade method. It is manufactured by printing and baking for a paste. The paste for internal conductors usually contains a conductive element, a binder, and a solvent. The material of the conductive element is Ag or Ag · Pd alloy is suitable for the reason that the quality factor Q of the inductor is improved. The firing conditions and the minor component crisis may be appropriately determined depending on the magnetic material, the material of the conductive element, and the like, but the firing temperature is preferably 800 to 950 ° C, more preferably about 880 to 920 ° C. If the firing temperature is less than 880 ° C, it is likely to be insufficient sintering, so it is necessary to bake for a long time. If the firing temperature is higher than 920 ° C, the electrode material is easily diffused in the ferrite and the electromagnetic properties of the chip are deteriorated. If the temperature is lower than 800 ° C, the sintering failure occurs, and if the temperature exceeds 950 ° C, the electrode material diffuses. Moreover, firing time is about 5 minutes-3 hours at 880-920 degreeC.

According to the present invention, the following effects can be obtained.

(1) Oxide magnetic material capable of low-temperature firing and low initial permeability, high sintered body density, low eddy current loss and low-temperature sintering can be obtained in the high frequency band of 100MHz or more.

(2) An oxide magnetic material having good initial temperature and low inductance temperature characteristics having a high initial permeability and a high sintered compact can be obtained by adding Ca or less than 0.3 wt%.

(3) An oxide magnetic material having good initial characteristics with low initial permeability and good temperature characteristics of inductance having a high sintered compact density can be obtained by adding Ca or less in an amount of 0.3 wt% or less and CoO in an amount of 0.7 wt% or less.

(4) By adding Ca ₃ (PO ₄ ) ₂ to 0.5 wt% or less, an oxide magnetic body having low initial permeability and good temperature characteristics of inductance having a high sintered body density can be obtained.

(5) In addition to Ca ₃ (PO ₄ ) ₂ , since CoO was added in an amount of 0.7 wt% or less, an oxide magnetic body having a low initial permeability and good temperature characteristics of inductance having a high sintered body density can be obtained.

(6) Since the chip components are composed of an oxide magnetic material having a low initial permeability, a high sintered compact density, and good inductance temperature characteristics, excellent chip components having good respective characteristics can be provided.

(7) Laminated coil parts are composed of oxide magnetic material with low initial permeability, high sintered body density, and low firing temperature with good inductance temperature characteristics. Therefore, multilayer coil parts with excellent inductance quality factor Q having excellent characteristics are provided. can do.

(8) Oxide magnetic material with low initial permeability, high sintered density and low firing temperature with good inductance temperature characteristics, and internal components composed of chip components as conductors mainly composed of Ag or Ag / Pd alloy. A chip component having excellent inductance quality factor Q having good characteristics can be provided.

(9) Chips are prepared by using oxide magnetic material with low initial permeability, high density of sintered body and good inductance temperature characteristics, and firing at temperatures of 880 ℃ ~ 920 ℃ with inner conductors mainly composed of Ag or Ag · Pd alloy Since parts are manufactured, each of these characteristics is good and a chip part having excellent inductance quality factor Q can be manufactured.

Claims (15)

Fe ₂ O ₃ is 35.0-51.0 mol%, CuO is 1.0-35.0 mol%, NiO is 38.0-64.0 mol%, Oxide magnetic material, characterized in that ZnO is made from 0 to 10.0% (including 0). The method of claim 1, An oxide magnetic material, containing Ca 0.3 wt% or less (0 is not included). The method of claim 2, Oxide magnetic material, characterized in that it contains 0.7 wt% or less (0 is not included). Preparing an oxide magnetic material comprising Fe ₂ O ₃ of 35.0 to 51.0%, CuO of 1.0 to 35.0, NiO of 38.0 to 66.0%, and ZnO of 0 to 10.0% (containing 0), Including Ca ₃ (PO ₄ ) 0.5wt% or less (not including 0) in the oxide magnetic material, The oxide magnetic material is calcined, Method for producing an oxide magnetic material, characterized in that provided. The method of claim 4, wherein The method of producing an oxide magnetic material, characterized in that it further comprises the step of containing less than 0.7wt% CoO. It contains a sintered body of an oxide magnetic material containing 35.0-51.0 mol% of Fe ₂ O ₃ , 1.0-35.0 mol% of CuO, 38.0-364.0 mol% of NiO, and 0-10.0 mol% (including 0) of ZnO. Bulk chip parts, characterized in that. The method of claim 6, The sintered body of the oxide magnetic material further contains 0.3 wt% or less of Ca (not including 0). The method of claim 7, wherein The sintered compact of the oxide magnetic material further contains 0.7 wt% or less of CoO (not including 0). Containing a sintered body of the oxide magnetic material consisting of 35.0-51.0 mol% Fe ₂ O ₃ , 1.0-35.0 mol% CuO, 38.0-364.0 mol% NiO, 0-10.0 mol% (containing 0) ZnO Stacked Coil Parts. The method of claim 9, The sintered body of the magnetic material is a laminated coil component, characterized in that it further contains 0.3 wt% or less (not including 0). The method of claim 10, The sintered body of the magnetic material is a laminated coil component, characterized in that it further contains 0.7 wt% or less (not including 0) CoO. The method of claim 9, A chip component further comprising an inner conductor composed of Ag or a conductor mainly composed of an alloy of Ag and Pd. A sintered body of an oxide magnetic material composed of 35.0 to 51.0 mol% of Fe ₂ O ₃ , 1.0 to 35.0 mol% of CuO, 38.0 to 6,0 mol% of NiO, and 0 to 10.0 mol% of ZnO (containing 0) is provided. Steps, Providing an inner conductor having a main component of Ag or Ag-Pd alloy used in the sintered body as an electric conductor layer or an electric conductor, Firing the oxide magnetic material and the inner conductor at 880 ° C to 920 ° C. Chip component manufacturing method characterized in that it comprises. The method of claim 13, Chip component manufacturing method comprising the step of adding less than 0.3wt% Ca (does not include 0). The method of claim 14, Chip component manufacturing method further comprises the step of adding CoO 0.7 wt% or less.