KR20010077654A - System for temperature control of polymerized material in plasma polymerizing apparatus - Google Patents

Abstract

PURPOSE: The subject sample temperature control system having a sample heating and cooling device capable of controlling the sample temperature at high speed is provided, which is useful for controlling the temperature of a sample in sheet shape to be moved in a closed polymerization chamber. CONSTITUTION: This sample temperature control system consists of: a cylindrical rotary bar(12); a heat transfer body comprising a cylindrical inner rod(13), a plurality of cylindrical heat transfer caps(11) disposed around the inner rod in the rotary bar and a supporting bar(23) for fixing a rotary bar to an inner wall surface of a chamber; a cooling water feed apparatus(17) for supplying cooling water to a cooling part(15) formed in the inner rod; and a temperature control part(16) for controlling the supply of cooling water and the temperature of a heating part.

Description

Sample temperature control system of plasma polymerization apparatus {SYSTEM FOR TEMPERATURE CONTROL OF POLYMERIZED MATERIAL IN PLASMA POLYMERIZING APPARATUS}

The present invention relates to a sample temperature control system of a plasma polymerization apparatus.

When a thin film is coated on the surface of a sample such as a metal plate using plasma, a coating layer having excellent hardness, wear resistance, and the like is formed. Products with a coating layer are used for magnetic disks, optical disks, ultra hard tools, and the like. In addition, when the coating film formed on the surface of the steel sheet is subjected to plasma treatment, the coated steel sheet is hardened and excellent in durability, corrosion resistance and the like is obtained. In particular, the surface modification effect of improving the hydrophilicity or hydrophobicity can be obtained by polymerizing the surface of the sample, and the surface-modified material has been applied to various ranges.

In order to modify the surface of the sample by synthesizing the polymer, conventionally, ion implantation or ion beam irradiation using high energy (tens of keV to several MeV) is used, or relatively low energy (0 to several keV) is used. Polymers on the surface of the sample using ion beam sputtering deposition, multi ion beam deposition, or ion assisted deposition The deposition method was used.

However, since this method requires a relatively high energy and low vacuum state, the synthesis of the polymer is not easy and the cost required is high.

Therefore, a surface treatment method using a plasma capable of forming a polymer polymer on a sample substrate in a low energy and low vacuum state has been developed. In the above method, a vacuum is applied to the chamber, a reactive gas of monomers of the material to be synthesized is injected into the chamber, and then discharged at a direct current or high frequency using a power supply device. Plasma is generated, and predetermined ions are transferred to the sample substrate or the electrode to synthesize the predetermined polymer thereon. At this time, various chemical bonds are made according to the type and mixing ratio of the reaction gas, DC current, voltage, high frequency power or deposition time, and the polymer polymer having the required physical properties such as surface strength, adhesion and adsorption, hydrophilicity and hydrophobicity is sampled. By depositing on the surface, the sample surface can be modified without affecting the inherent properties of the sample substrate.

1 shows an example of a plasma polymerization apparatus. When the inside of the polymerization chamber 1 is made into a pressure of about 10 ^-3 torr using a vacuum pump (not shown), an organic monomer gas is injected, and a high voltage is applied, the monomer gas is ionized to become a plasma state. The positively charged ions move to the cathode (3), and the negatively charged ions move to the anode having the opposite polarity by the potential difference across the electrode to the anode, which is the sample (2) to be transported, and chemically bonds to each other to form a polymer film. .

In the above apparatus, the sample 2 is moved into the polymerization chamber during the plasma polymerization process and is continuously surface treated, and it is advantageous to maintain the temperature of the sample appropriately to improve the properties of the polymerization film. In particular, the sample on the sheet (heat) is a fast heat transfer it is difficult to maintain the proper temperature of the sample, it is important to change the temperature of the sample as quickly as possible. Conventionally, in order to control the temperature of a sample, the sample temperature was controlled by adjusting the temperature of the method by thermal conductivity, for example, the polymerization chamber or the unwinder chamber (the left chamber of the polymerization chamber) to which the sample was wound. However, this method is difficult to control the temperature of the sample quickly in the continuous polymerization process and is poor in terms of efficiency.

Accordingly, an object of the present invention is to provide a sample heating and cooling means for controlling the temperature of a sample at high speed, and in particular, minimizing the physical influence on the surface of the sample on the sheet to be continuously polymerized.

1 is a schematic view showing an example of a plasma polymerization processing apparatus.

2 is a block diagram showing an embodiment of the present invention.

3A is a perspective view illustrating the rotating bar of FIG. 2.

3B is a perspective view illustrating the heat transfer cap of FIG. 2.

4A is a cross-sectional view illustrating the heat transfer body of FIG. 2.

Figure 4b is a schematic diagram showing the rotation of the heat transfer body of Figure 4a.

*** Explanation of symbols for main parts of drawing ***

11: Heat transfer cap 12: Rotating bar

13: Inner rod 14: Electric heating part

15: cooling unit 16: temperature control unit

17: cooling water supply device

The present invention is a cylindrical inner rod having a cylindrical rotating bar, a heat transfer portion formed by a small tube inside the rotating bar and a cooling portion, and a small cylindrical shape provided around the inner rod in the rotating bar. A heat transfer body comprising a plurality of heat transfer caps, a support body attached to one side of the rotating bar and fixing the rotating bar to the inner wall of the chamber, a cooling water supply device for supplying cooling water to a cooling unit formed in the inner rod, and the cooling water supply. Provided is a sample temperature control system of a plasma polymerization apparatus comprising a temperature control unit for turning on / off a supply of cooling water to a device and controlling a temperature of a heat transfer part formed in the inner rod.

It is a feature of the present invention to use a system using a heat transfer cap to heat exchange at high speed to a contact object in a vacuum. Such a system is particularly useful for controlling sample temperature in a sheet-like sample that is moved in a closed polymerization chamber.

Hereinafter, the features of the present invention will be described in detail with reference to the accompanying drawings.

2 shows an embodiment of the present invention. First, the body of the system is an inner rod (13) having a heat transfer portion (14) and a cooling portion (15) formed of a small tube inside the cylindrical rotating bar (12), and the inner rod in the rotating bar (12). (13) It consists of a plurality of small cylindrical heat transfer caps 11 formed around and a support 23 attached to one side of the rotating bar and fixing the rotating bar to the inner wall of the chamber. The heat transfer unit 14 and the cooling unit 15 is formed of a small tube of the U-shape.

Cooling water supply unit 17 to the outside of the body is connected to the cooling unit 15 formed in the inner rod 13 of the rotary bar 12 through the cooling water supply pipe 18. In addition, the temperature control unit 16 is connected to the heating unit 14 formed in the inner rod 13 of the rotary bar 12 through the heating wire 20. The coolant on / off line 21 is connected between the coolant supply unit 17 and the temperature control unit 16 so that the temperature control unit 16 controls the driving of the coolant supply unit 17. On the other hand, the temperature control unit 16 is connected to the non-contact thermometer 19, the non-contact thermometer 19 detects the temperature of the sample 22 in a non-contact state and transmits to the temperature control unit 16. 3a and 3b show the shape of the heat transfer cap installed in the rotary bar and the rotary bar, respectively. The rotating bar and the heat transfer cap are cylindrical to facilitate rotation or rolling. In addition, the material is preferably made of metal to facilitate heat transfer. The heat transfer cap 11 rotates in the rotating bar, and the rotating bar also rotates independently. This rotation allows effective heat transfer to the system of the present invention while the sample is being transferred, in particular without disturbing the movement of the sample when in contact with the surface of the rotating bar.

The driving principle of the sample temperature control system of the present invention is as follows. According to the temperature sensed by the non-contact thermometer 19, the temperature controller 16 controls the cooling water supply device 17 to adjust the cooling water flowing into the cooling unit 15. In addition, the temperature controller 16 controls the temperature of the heating wire to adjust the temperature of the heating portion 14 in the inner rod 13 of the rotary bar 12. A heat transfer part can use materials, such as an enameled wire. By controlling the cooling water and the heat transfer in this way, the temperature of the inner rod 13 is adjusted. The change in temperature of the inner rod allows a plurality of small cylindrical heat transfer caps 11 installed around the inner rod to rotate rapidly around the inner rod to enable heat transfer to the rotating bar 12. On the other hand, the rotation bar also rotates and rapidly heat transfers to the sample 22 in motion in contact with the rotation bar.

Figure 4a shows a cross section of the rotating bar of the system of the present invention. In the drawing, the heat transfer cap 11 is rotated in contact with the inner surface of the rotating bar and the outer wall of the inner bar 13 when the rotating bar 12 is rotated. Such dual rotation enables high speed heat transfer to an object in motion by contacting the rotating bar as well as heat transfer to a stationary sample, and heat transfer in a vacuum or atmospheric pressure is also effective. This method is a temperature control is much faster than the method by the general heat conduction, and thus the rapid temperature control is also made to the object that is moved or wound in contact with the outer surface of the rotary bar. The temperature of the object moved in contact with the rotating bar is inspected by a non-contact thermometer and input through the temperature control unit 16 to turn on / off the cooling unit or the heating unit in comparison with the reference temperature or the target temperature.

The heat transfer cap 11, which is a heat transfer part, is preferably a metal material having high heat conductivity, and has a hollow cylindrical shape. When the rotation bar 12 is rotated, after absorbing the temperature at the inner rod 13 on the surface of the heat transfer cap, each heat transfer cap 11 is also rotated together to make heat transfer while being in contact with the surface of the rotation bar. Rotating bar 12 is also preferably a metal material with high thermal conductivity, it is a hollow cylinder, the thickness of the cylinder is 5mm or less is appropriate, but is not necessarily limited to this range. 4b is shown the rotation 30 of the heat transfer cap with the rotation 31 of the rotary bar.

The sample temperature control system of the present invention can be installed not only in the polymerization chamber but also in any place where temperature control of the sample is required, such as a winder chamber or an unwinder chamber.

According to the present invention, unlike the conventional heat transfer method, it is possible to control the temperature of the sample at high speed, and in particular, to facilitate heating and cooling of the sample while minimizing the physical influence on the surface of the sample on the sheet to be continuously polymerized. Can be.

Claims (1)

A cylindrical inner rod having a cylindrical rotating bar, a heat transfer part formed inside the rotating bar and a cooling part, and a plurality of small cylindrical heat transfer caps installed around the inner bar in the rotating bar; A heat transfer body attached to one side of the rotating bar and made of a support for fixing the rotating bar to the inner wall of the chamber; A cooling water supply device for supplying cooling water to a cooling unit formed in the inner rod, and And a temperature control unit configured to turn on / off the supply of cooling water from the cooling water supply device and to control the temperature of the heat transfer part formed in the inner rod.