KR20010051405A - 유전체 배리어 방전 램프 장치 - Google Patents
유전체 배리어 방전 램프 장치 Download PDFInfo
- Publication number
- KR20010051405A KR20010051405A KR1020000064872A KR20000064872A KR20010051405A KR 20010051405 A KR20010051405 A KR 20010051405A KR 1020000064872 A KR1020000064872 A KR 1020000064872A KR 20000064872 A KR20000064872 A KR 20000064872A KR 20010051405 A KR20010051405 A KR 20010051405A
- Authority
- KR
- South Korea
- Prior art keywords
- dielectric barrier
- barrier discharge
- discharge lamp
- storage case
- processed
- Prior art date
Links
- 230000004888 barrier function Effects 0.000 title claims abstract description 57
- 238000003860 storage Methods 0.000 claims description 50
- 238000010276 construction Methods 0.000 abstract 1
- 238000001816 cooling Methods 0.000 description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000012466 permeate Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000010485 coping Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—Production of X-ray radiation generated from plasma
- H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
- H05B3/04—Waterproof or air-tight seals for heaters
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
Description
Claims (1)
- 길이 방향으로 이어지는 측벽과 상기 측벽의 양단에 설치된 단벽에 의해 밀폐된 수납 케이스 내에, 적어도 하나 이상의 유전체 배리어 방전 램프가 배치되고,상기 수납 케이스의 측벽의 적어도 일부가 유전체 배리어 방전 램프로부터 방사된 광을 투과하는 창부로 되어 있고,상기 수납 케이스의 단벽에는 수납 케이스 내를 불활성 상태로 하는 가스가 유통하는 유통로가 형성됨과 동시에, 상기 수납 케이스의 적어도 한쪽 단벽은 유전체 배리어 방전 램프를 출입시키기 위한 개폐문을 겸하고 있고,상기 수용 케이스의 창부가 각각 피처리물 방향으로 향하도록 수납 케이스를 복수개 나란히 배치한 것을 특징으로 하는 유전체 배리어 방전 램프 장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP99-312155 | 1999-11-02 | ||
JP31215599A JP3591393B2 (ja) | 1999-11-02 | 1999-11-02 | 誘電体バリア放電ランプ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010051405A true KR20010051405A (ko) | 2001-06-25 |
KR100470934B1 KR100470934B1 (ko) | 2005-02-21 |
Family
ID=18025913
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2000-0064872A KR100470934B1 (ko) | 1999-11-02 | 2000-11-02 | 유전체 배리어 방전 램프 장치 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6657367B1 (ko) |
EP (1) | EP1100113B1 (ko) |
JP (1) | JP3591393B2 (ko) |
KR (1) | KR100470934B1 (ko) |
TW (1) | TW457513B (ko) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000349348A (ja) * | 1999-03-31 | 2000-12-15 | Toyoda Gosei Co Ltd | 短波長ledランプユニット |
JP5098126B2 (ja) * | 2001-08-07 | 2012-12-12 | 株式会社ニコン | X線発生装置、露光装置、露光方法及びデバイス製造方法 |
WO2006114988A1 (ja) * | 2005-04-22 | 2006-11-02 | Hoya Candeo Optronics Corporation | エキシマランプ |
US8022377B2 (en) * | 2008-04-22 | 2011-09-20 | Applied Materials, Inc. | Method and apparatus for excimer curing |
AU2011205920B2 (en) * | 2010-01-18 | 2015-03-26 | Qualcomm Incorporated | A method and an apparatus for providing channel quality information in a wireless communication system |
DE102012219064A1 (de) * | 2012-10-19 | 2014-04-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | UV-Lichtquelle mit kombinierter Ionisation und Bildung von Excimern |
DE212017000008U1 (de) * | 2017-09-30 | 2017-11-17 | Enpei Wang | Kaskadierbare wasserfeste Leuchtstofflampe |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3872349A (en) * | 1973-03-29 | 1975-03-18 | Fusion Systems Corp | Apparatus and method for generating radiation |
US3994073A (en) * | 1975-04-08 | 1976-11-30 | Ppg Industries, Inc. | Air cooling means for UV processor |
JP2693419B2 (ja) * | 1986-01-22 | 1997-12-24 | 株式会社東芝 | カラー受像装置 |
US4933602A (en) * | 1987-03-11 | 1990-06-12 | Hitachi, Ltd. | Apparatus for generating light by utilizing microwave |
US5051663A (en) * | 1990-03-26 | 1991-09-24 | Fusion Systems Corporation | Electrodeless lamp with improved bulb mounting arrangement |
DE59009300D1 (de) * | 1990-10-22 | 1995-07-27 | Heraeus Noblelight Gmbh | Hochleistungsstrahler. |
US5751327A (en) * | 1993-06-18 | 1998-05-12 | Xeikon N.V. | Printer including temperature controlled LED recording heads |
JP3025414B2 (ja) * | 1994-09-20 | 2000-03-27 | ウシオ電機株式会社 | 誘電体バリア放電ランプ装置 |
JPH08124540A (ja) * | 1994-10-25 | 1996-05-17 | Ushio Inc | キセノン照射装置とそれを用いた物体表面改質装置 |
JP3127750B2 (ja) * | 1994-10-25 | 2001-01-29 | ウシオ電機株式会社 | 誘電体バリア放電ランプ装置 |
JP3502498B2 (ja) * | 1996-01-22 | 2004-03-02 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP3526691B2 (ja) * | 1996-05-14 | 2004-05-17 | ウシオ電機株式会社 | 紫外線照射装置および紫外線処理装置 |
JP3324428B2 (ja) * | 1996-11-20 | 2002-09-17 | ウシオ電機株式会社 | フォトレジストの表面処理装置 |
JP3314656B2 (ja) * | 1997-04-11 | 2002-08-12 | ウシオ電機株式会社 | 光源装置 |
JPH1144799A (ja) * | 1997-05-27 | 1999-02-16 | Ushio Inc | 光路分割型紫外線照射装置 |
JP2000011960A (ja) * | 1998-06-18 | 2000-01-14 | Hooya Shot Kk | 誘電体バリア放電ランプを用いた表面処理装置及び方法 |
-
1999
- 1999-11-02 JP JP31215599A patent/JP3591393B2/ja not_active Expired - Lifetime
-
2000
- 2000-08-25 TW TW089117287A patent/TW457513B/zh not_active IP Right Cessation
- 2000-10-27 EP EP00123542.3A patent/EP1100113B1/en not_active Expired - Lifetime
- 2000-11-02 US US09/703,596 patent/US6657367B1/en not_active Expired - Lifetime
- 2000-11-02 KR KR10-2000-0064872A patent/KR100470934B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP3591393B2 (ja) | 2004-11-17 |
EP1100113A3 (en) | 2006-05-10 |
EP1100113A2 (en) | 2001-05-16 |
JP2001135279A (ja) | 2001-05-18 |
US6657367B1 (en) | 2003-12-02 |
TW457513B (en) | 2001-10-01 |
KR100470934B1 (ko) | 2005-02-21 |
EP1100113B1 (en) | 2014-09-10 |
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