KR20010045940A - 고개구율 및 고투과율 액정표시장치의 제조방법 - Google Patents
고개구율 및 고투과율 액정표시장치의 제조방법 Download PDFInfo
- Publication number
- KR20010045940A KR20010045940A KR1019990049471A KR19990049471A KR20010045940A KR 20010045940 A KR20010045940 A KR 20010045940A KR 1019990049471 A KR1019990049471 A KR 1019990049471A KR 19990049471 A KR19990049471 A KR 19990049471A KR 20010045940 A KR20010045940 A KR 20010045940A
- Authority
- KR
- South Korea
- Prior art keywords
- photoresist
- photoresist pattern
- counter electrode
- film
- common signal
- Prior art date
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134318—Electrodes characterised by their geometrical arrangement having a patterned common electrode
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/121—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode common or background
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/122—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode having a particular pattern
Abstract
Description
Claims (3)
- 투명성 절연기판 상에 투명 금속막과 불투명 금속막을 차례로 증착하는 단계;상기 불투명 금속막 상에 감광막을 도포하고, 상기 감광막을 노광 및 현상하여 게이트 라인 및 공통신호 라인이 형성될 부분을 덮는 제1감광막 패턴과 카운터 전극이 형성될 부분을 덮는 제2감광막 패턴을 형성하되, 상기 제2감광막 패턴의 두께는 상기 제1감광막 패턴의 두께 보다 상대적으로 얇게 되도록 형성하는 단계;게이트 라인이 형성되도록, 상기 제1 및 제2감광막 패턴을 마스크로하여 노출된 불투명 금속막 부분을 1차로 건식 식각하는 단계;사각판 형태의 카운터 전극이 형성되도록, 상기 제1 및 제2감광막 패턴을 마스크로하여 노출된 투명 금속막 부분을 습식 식각하는 단계;상기 카운터 전극의 가장자리 부분과 오버랩되는 차광막을 포함한 공통신호 라인이 형성되도록, 상기 결과물을 상기 제1 및 제2감광막 패턴을 마스크로해서 2차로 건식 식각하는 단계; 및 잔류된 제1감광막 패턴을 제거하는 단계를 포함하여 이루어지며,상기 1차 건식식각시에는 상기 제1 및 제2감광막 패턴의 일부 두께가 제거되고, 상기 2차 건식식각시에는 상기 제2감광막 패턴이 전부 제거되는 것에 의해 상기 카운터 전극 상의 불투명 금속막이 식각되어 상기 차광막을 포함한 공통신호 라인이 형성되는 것을 특징으로 하는 고개구율 및 고투과율 액정표시장치의 제조방법.
- 제 1 항에 있어서, 상기 감광막의 노광 공정은,게이트 라인 및 차광막을 포함한 공통신호 라인과 동일 형상으로 이루어져, 광이 투과되는 것을 방지하는 차광부와 광이 투과되는 투광부를 포함하며, 카운터 전극이 형성될 부분 상에 도포된 감광막 부분을 노광시키기 위한 미세 직경을 갖는 수 개의 홀들이 구비된 노광 마스크를 사용하여 수행하는 것을 특징으로 하는 고개구율 및 고투과율 액정표시장치의 제조방법.
- 제 2 항에 있어서, 상기 홀의 직경은 0.9 내지 1.1㎛ 정도이고, 상기 홀들간의 간격은 0.9 내지 1.1㎛ 정도인 것을 특징으로 하는 고개구율 및 고투과율 액정표시장치의 제조방법.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019990049471A KR100701655B1 (ko) | 1999-11-09 | 1999-11-09 | 고개구율 및 고투과율 액정표시장치의 제조방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1019990049471A KR100701655B1 (ko) | 1999-11-09 | 1999-11-09 | 고개구율 및 고투과율 액정표시장치의 제조방법 |
Publications (2)
Publication Number | Publication Date |
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KR20010045940A true KR20010045940A (ko) | 2001-06-05 |
KR100701655B1 KR100701655B1 (ko) | 2007-03-29 |
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KR1019990049471A KR100701655B1 (ko) | 1999-11-09 | 1999-11-09 | 고개구율 및 고투과율 액정표시장치의 제조방법 |
Country Status (1)
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KR (1) | KR100701655B1 (ko) |
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1999
- 1999-11-09 KR KR1019990049471A patent/KR100701655B1/ko active IP Right Grant
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KR100701655B1 (ko) | 2007-03-29 |
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