KR20010045443A - 수직형 증착 장치 - Google Patents
수직형 증착 장치 Download PDFInfo
- Publication number
- KR20010045443A KR20010045443A KR1019990048736A KR19990048736A KR20010045443A KR 20010045443 A KR20010045443 A KR 20010045443A KR 1019990048736 A KR1019990048736 A KR 1019990048736A KR 19990048736 A KR19990048736 A KR 19990048736A KR 20010045443 A KR20010045443 A KR 20010045443A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- platen
- clamp
- susceptor
- deposition apparatus
- Prior art date
Links
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Nonlinear Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (3)
- 기판을 플래튼의 커버인 서셉터 위에 로딩하고, 상기 기판이 떨어지지 않게끔 가이딩한 다음 상기 플래튼을 수직으로 세워 증착 작업을 수행하는 수직형 증착 장치에 있어서,상기 기판을 가이딩하기 위해 상기 플래튼의 상부에 마련됨과 아울러 상기 기판에 접하는 부분에 단턱홈이 형성된 상부 클램프와,상기 상부 클램프와 함께 상기 기판을 가이딩 하기 위해 상기 플래튼의 하부에 마련됨과 아울러 상기 플래튼이 수직으로 세워질 때 상기 기판과 상기 서셉터에 각각 형합되는 계단형 단턱부가 형성된 하부 클램프를 구비하는 것을 특징으로 하는 수직형 증착 장치.
- 제 1 항에 있어서,상기 하부 클램프에 비해 소정 간격 아래에 마련되어 상기 하부 클램프와 함께 상기 기판을 지지하는 스토퍼 핀을 추가로 구비하는 것을 특징으로 하는 수직형 증착 장치.
- 제 1 항에 있어서,상기 기판 상부의 파손 유무를 감지하기 위해 상기 기판의 상부에 대면되게끔 상기 서셉터 내에 마련되는 상부 센서와,상기 기판의 다른 부분의 파손 유무를 감지하기 위해 상기 플래튼의 하단부에 마련되는 하부 센서와,상기 상부 및 하부 센서의 감지 신호에 대응하여 프로세스의 진행 및 플래튼의 구동 여부를 제어하는 제어부를 추가로 구비하는 것을 특징으로 하는 수직형 증착 장치.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019990048736A KR100621859B1 (ko) | 1999-11-05 | 1999-11-05 | 수직형 증착 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019990048736A KR100621859B1 (ko) | 1999-11-05 | 1999-11-05 | 수직형 증착 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010045443A true KR20010045443A (ko) | 2001-06-05 |
KR100621859B1 KR100621859B1 (ko) | 2006-09-13 |
Family
ID=19618632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019990048736A KR100621859B1 (ko) | 1999-11-05 | 1999-11-05 | 수직형 증착 장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100621859B1 (ko) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5805408A (en) * | 1995-12-22 | 1998-09-08 | Lam Research Corporation | Electrostatic clamp with lip seal for clamping substrates |
KR100328837B1 (ko) * | 1999-10-08 | 2002-03-15 | 박종섭 | 반도체 확산장치 |
-
1999
- 1999-11-05 KR KR1019990048736A patent/KR100621859B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR100621859B1 (ko) | 2006-09-13 |
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