KR20010035506A - Device for dry of LCD panel - Google Patents

Device for dry of LCD panel Download PDF

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Publication number
KR20010035506A
KR20010035506A KR1020010009008A KR20010009008A KR20010035506A KR 20010035506 A KR20010035506 A KR 20010035506A KR 1020010009008 A KR1020010009008 A KR 1020010009008A KR 20010009008 A KR20010009008 A KR 20010009008A KR 20010035506 A KR20010035506 A KR 20010035506A
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South Korea
Prior art keywords
dryer
lcd panel
perforated
drying
hole
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KR1020010009008A
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Korean (ko)
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신원호
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신원호
태화일렉트론 주식회사
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Priority to KR1020010009008A priority Critical patent/KR20010035506A/en
Publication of KR20010035506A publication Critical patent/KR20010035506A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Solid Materials (AREA)
  • Liquid Crystal (AREA)

Abstract

PURPOSE: An apparatus for drying a liquid crystal display(LCD) panel is provided to prevent particles such as cleaning liquid or dust from being adhered to the surface of the LCD panel transferred to a nest process after a dry process, by installing an interception plate in an upper portion of a slanted surface of an air spraying hole. CONSTITUTION: A transfer roller(11) transfers a liquid crystal display(LCD) panel(P). A drying room(13) has a closed space where a perforated drain(12) is in a lower portion, containing a part of the transfer roller inside. An induction hole(15A) connected to an air hose induced from the exterior is perforated in a connection part which is installed in an upper portion of the inside of the drying room and has a predetermined slant by intervening the transfer roller. The first upper dryer(15-1), the first lower dryer(15-3), the second upper dryer(15-2) and the second lower dryer(15-4) which have respective spraying nozzles, are installed in a lower portion of the inside of the drying room. A bolt hole is formed in a predetermined position on an upper surface of the first upper dryer and the second upper dryer, and a long hole is formed on both sides of a perforated interception plate.

Description

엘씨디 패널의 건조 장치 {Device for dry of LCD panel}Drying device of LCD panel {Device for dry of LCD panel}

본 발명은 LCD 패널의 건조 장치에 관한 것으로, 더욱 상세하게는 공기 분사 방식으로 건조시키는 LCD 패널의 건조 장치에 있어서, 건조기의 경사면 상부에 차단판을 설치하여 건조 장치내에서 발생되는 와류에 의해 세척액, 또는 먼지 등의 입자(PARTICLE)가 날려 건조 후 다음 공정으로 이송되는 LCD 패널의 표면 또는 회로 소자에 재 부착되는 것을 방지하여 불순물에 의한 LCD 패널의 수율 저하를 미연에 방지하도록 한 것이다.The present invention relates to a drying apparatus of an LCD panel, and more particularly, in a drying apparatus of an LCD panel which is dried by an air blowing method, a washing liquid is formed by vortices generated in the drying apparatus by installing a blocking plate on an inclined surface of the dryer. PARTICLE such as dust or dust is blown to prevent reattachment to the surface or circuit elements of the LCD panel to be transported to the next process after drying, thereby preventing the lowering of the yield of the LCD panel due to impurities.

일반적으로 LCD 패널의 건조 장치라 함은 LCD 패널의 제조 과정에서 LCD 패널 표면 또는 회로 소자에 부착되는 파티클 등 불순물을 제거하는 세척 과정을 거친 후 잔류하는 세척액이나 불순물을 공기압으로 제거하는 장치를 일컫는 것이다.In general, an LCD panel drying device refers to a device that removes residual cleaning solution or impurities by air pressure after a cleaning process of removing impurities such as particles adhering to the LCD panel surface or circuit elements in the manufacturing process of the LCD panel. .

종래의 LCD 패널 건조 장치는 첨부 도면 도 1에서 보는 바와 같이, 이송 롤러(a)로 이송되는 LCD 패널(b)이 건조 장치(c)의 건조실(d) 내로 이송되면 외부의 공기 호스(f)로부터 유입되는 공기를 분사 노즐(h)을 통해 분사하는 건조기(g)가 상, 하 각각 1, 2차 한쌍으로 구비되어 공기압으로 LCD 패널의 표면에 잔류하는 세척액이나 불순물을 제거하게 된다.Conventional LCD panel drying apparatus is an external air hose (f) when the LCD panel (b) to be transferred to the conveying roller (a) is transferred into the drying chamber (d) of the drying apparatus (c), as shown in Figure 1 Dryers (g) for spraying air introduced from the spray nozzle (h) are provided in a pair of upper and lower, respectively, to remove washing liquid or impurities remaining on the surface of the LCD panel by air pressure.

그러나, 상기와 같은 LCD 패널의 건조 장치는 공기압에 의해 세척액의 물방울 및 불순물 입자가 건조실 내부에 와류하면서 무분별하게 날리게 되고 이때, 건조 조건이 밀폐된 건조실이라는 점을 감안하면 건조기의 위치를 벗어났다 하더라도 건조실 내에 위치하는 한은 LCD 패널 표면에 떨어지게 되어 세척액이 증발하면서 얼룩지게 되고 불순물의 입자 또한 세척액이 증발하면서 LCD 표면 또는 회로 소자에 그대로 부착되어 LCD 패널의 특성에 영향을 미쳐 불량이 증가하므로 수율이 저하되는 문제점이 있는 것이다.However, the drying apparatus of the LCD panel as described above is indiscriminately blown away by the water droplets and impurity particles of the washing liquid by the air pressure inside the drying chamber, and at this time, even if the drying conditions are out of the dryer considering that the drying chamber is sealed. As long as it is located in the drying room, it falls on the surface of the LCD panel, and the cleaning solution is stained as it evaporates. The particles of impurities also adhere to the LCD surface or circuit elements as the cleaning solution evaporates, affecting the characteristics of the LCD panel and increasing the defects. There is a problem.

본 발명은 상기와 같은 문제점을 해소하기 위한 것으로, 공기 분사 방식으로 건조시키는 LCD 패널의 건조 장치에 있어서, 건조기의 경사면 상부에 차단판을 설치하여 장치내에서 발생되는 와류에 의해 세척액, 또는 먼지 등의 입자가 날려 건조 후 다음 공정으로 이송되는 LCD 패널의 표면 또는 회로 소자에 재 부착되어 LCD 패널의 특성에 영향을 주어 불량이 증가하는 것을 방지하여 수율을 향상시키도록 하는 것을 기술적 과제로 삼는다.The present invention is to solve the above problems, in the drying apparatus of the LCD panel to dry by the air blowing method, by installing a blocking plate on the inclined surface of the dryer by the vortex generated in the cleaning liquid, dust or the like It is a technical task to improve the yield by preventing the increase of defects by blowing the particles of the re-attach to the surface or circuit elements of the LCD panel to be transferred to the next process after drying.

이를 위한 본 발명은 LCD 패널을 이송하는 이송 롤러와, 하부에 배수구가 천공된 건조실과, 건조실 내측에 소정의 기울기를 갖고 외부로부터 유입되는 공기 호스가 연결되는 유입공이 천공된 연결부가 상부에 구비되고 하부에 분사 노즐이 천공된 건조기가 이송 롤러의 상, 하부에 각각 1차, 2차 한쌍으로 구성되되, 상부 1차, 2차 건조기에 볼트 결합되도록 장공이 양측에 천공된 차단판이 구비된 것을 특징으로 한다.The present invention for this purpose is provided with a transport roller for transporting the LCD panel, a drying chamber in which a drainage hole is drilled in the lower part, and a connection part in which the inlet hole is connected to the air hose introduced from the outside with a predetermined slope inside the drying chamber. Dryer with a spray nozzle perforated at the bottom is composed of a pair of primary and secondary, respectively, on the upper and lower portions of the transfer roller, characterized in that the barrier plate perforated on both sides to be bolted to the upper primary, secondary dryer It is done.

도 1은 종래의 건조 장치의 구성 단면도1 is a cross-sectional view of a conventional drying apparatus

도 2는 본 발명의 구성을 보인 사시도2 is a perspective view showing the configuration of the present invention

도 3은 본 발명의 구성을 보인 단면도3 is a cross-sectional view showing the configuration of the present invention

도 4는 본 발명의 건조기의 확대 단면도Figure 4 is an enlarged cross-sectional view of the dryer of the present invention

〈도면의 주요부분에 대한 부호 설명〉<Explanation of symbols on main parts of the drawing>

10 : 건조 장치 본체 11 : 이송 롤러10: drying device body 11: feed roller

12 : 배수구 13 : 건조실12: drain 13: drying chamber

14 : 공기 호스 15-1 : 상부 1차 건조기14: air hose 15-1: upper primary dryer

15-2 : 상부 2차 건조기 15-3 : 하부 1차 건조기15-2: upper secondary dryer 15-3: lower primary dryer

15-4 : 하부 2차 건조기 15A : 유입공15-4: Lower secondary dryer 15A: Inlet hole

15B : 연결부 15C : 분사 노즐15B: Connection 15C: Injection Nozzle

15D : 볼트공 16 : 차단판15D: Bolt hole 16: Block plate

16A : 장공16A: Longevity

첨부 도면 도 1은 종래의 건조 장치의 구성 단면도이고, 도 2는 본 발명의 구성을 보인 사시도이고, 도 3은 본 발명의 구성을 보인 단면도이며, 도 4는 본 발명의 건조기 단면도이다.1 is a cross-sectional view showing a configuration of a conventional drying apparatus, FIG. 2 is a perspective view showing a configuration of the present invention, FIG. 3 is a cross-sectional view showing a configuration of the present invention, and FIG.

첨부 도면 중 도 2와 도 3에서 보는 바와 같이, 본 발명은 LCD 패널(P)을 이송하는 이송 롤러(11)와, 상기 이송 롤러(11)의 일부를 내부에 수용하도록 하면서 하부에 배수구(12)가 천공된 밀폐 공간을 갖는 건조실(13)과, 건조실(13) 내측에 이송 롤러(11)를 사이에 두고 소정의 기울기를 갖으며 외부로부터 유입되는 공기 호스(14)가 연결되는 유입공(15A)이 천공된 연결부(15B)가 상부에 구비되고 하부에 분사 노즐(15C)이 각각 천공된 상부 1차 건조기(15-1), 하부 1차 건조기(15-3), 상부 2차 건조기(15-2), 하부 2차 건조기(15-4)를 구비하되, 상부 1차 건조기(15-1), 상부 2차 건조기(15-2)의 상부면 소정 위치에 볼트공(15D)을 형성하여 볼트공(15D)에 볼트 결합되도록 장공(16A)이 양측에 천공된 차단판(16)으로 구성되어 있다.As shown in FIGS. 2 and 3 of the accompanying drawings, the present invention provides a feed roller 11 for transferring the LCD panel P and a drain hole 12 at the bottom while accommodating a portion of the feed roller 11 therein. Inflow hole to which the drying chamber 13 having a sealed space perforated and the air hose 14 introduced from the outside with a predetermined inclination with the transfer roller 11 inside the drying chamber 13 are connected ( The upper part 15B, the upper part primary dryer 15-1, the lower part primary dryer 15-3, and the upper secondary dryer (15B) having the connection part 15B punched in the upper part and the injection nozzle 15C in the lower part, respectively, are provided in the upper part. 15-2), the lower secondary dryer (15-4) is provided, the bolt hole (15D) is formed in a predetermined position on the upper surface of the upper primary dryer (15-1), upper secondary dryer (15-2) The long hole 16A is formed of a blocking plate 16 bored on both sides to be bolted to the bolt hole 15D.

이와 같은 구성의 본 발명은 이송 롤러(11)로 이송되는 LCD 패널(P)이 건조 장치 본체(10)의 건조실(13) 내로 이송되면 외부의 공기 호스(14)로부터 유입되는 공기를 분사 노즐(15C)을 통해 분사하는 상부 1차 건조기(15-1), 상부 2차 건조기(15-2), 하부 1차 건조기(15-3) 및 하부 2차 건조기(15-4)가 공기압으로 LCD 패널의 표면에 잔류하는 세척액이나 불순물을 제거하게 된다.According to the present invention having the above configuration, when the LCD panel P transferred to the transfer roller 11 is transferred into the drying chamber 13 of the drying apparatus main body 10, the air flowing from the external air hose 14 is injected into the spray nozzle ( The upper primary dryer 15-1, the upper secondary dryer 15-2, the lower primary dryer 15-3 and the lower secondary dryer 15-4 spraying through the 15C) form an LCD panel with air pressure. It will remove the washing liquid or impurities remaining on the surface.

이때, 상부 1,2차 건조기(15-1)(15-2)에 각각 구비된 차단판(16)이 공기압에 의하여 와류되는 세척액 물방울과 불순물 입자를 차단하여 계속해서 전 단계에 위치하도록 하여 건조부를 지난 LCD 패널의 표면 또는 회로 소자에 부착되는 것을 방지하게 된다.At this time, the blocking plate 16 provided in each of the upper first and second dryers 15-1 and 15-2 blocks the washing liquid droplets and the impurity particles vortexed by air pressure, and continues to position them at the previous stage. This prevents it from adhering to the surface of the LCD panel or the circuit elements that have passed.

하부 1,2차 건조기(15-3)(15-4)에는 차단판(16)이 굳이 필요치 않는데 이는 세척액 물방울 또는 불순물 입자가 와류 되더라도 하중에 의하여 아래로 떨어지기 때문이다.The lower and primary dryers 15-3 and 15-4 do not need the blocking plate 16 because they fall down due to the load even if the washing liquid droplets or impurity particles vortex.

이와 같이 공기압에 의하여 LCD 패널(P)로부터 떨어진 세척액 및 불순물 입자는 건조 장치 본체(10)의 하부에 구비된 배수구(12)를 통해 외부로 배출되게 된다.As such, the washing liquid and the impurity particles separated from the LCD panel P by the air pressure are discharged to the outside through the drain hole 12 provided in the lower part of the drying apparatus main body 10.

이때, 상,하부의 1차 건조기(15-1)(15-3)은 차가운 공기를 분사하도록 되어 있고 2차 건조기(15-2)(15-4)는 뜨거운 공기를 분사하도록 되어 있다.At this time, the upper and lower primary dryers 15-1 and 15-3 are configured to inject cold air, and the secondary dryers 15-2 and 15-4 are configured to inject hot air.

이와 같이 되는 본 발명은 건조실 내에서 LCD 패널의 건조를 위한 공기 분사 압력에 의하여 와류되는 세척액 물방울과 불순물 입자를 차단하여 계속해서 1차 및 2차 건조기 각각의 전 단계에서 와류되거나 하중에 의하여 아래 방향으로 떨어지도록 하여 건조 후 다음 단계로 이송되는 LCD 패널의 표면 또는 회로 소자에 부착되는 것을 방지하도록 하여 LCD 표면에 세척액이 증발하면서 발생하는 얼룩짐 또는 회로 소자 특히 마이크로 집적 회로의 각 단자 사이에 끼어서 쇼트를 일으키는 등 특성상의 불량을 일으키는 원인을 제거하므로 써 LCD 패널의 수율을 높여 투입 물량 대비 완제품 생산량이 향상되는 효과를 갖는다.Thus, the present invention blocks the washing liquid droplets and impurity particles vortexed by the air injection pressure for drying the LCD panel in the drying chamber, and continues to vortex at the first stage of each of the first and second dryers or downward by load. To prevent it from adhering to the surface of LCD panels or circuit elements that are transported to the next stage after drying, so as to prevent stains caused by evaporation of the cleaning liquid on the surface of LCDs or short circuits between circuit terminals, especially between micro terminals By eliminating the cause of the defects in characteristics such as the cause of the increase, the yield of the LCD panel is increased to increase the output of the finished product compared to the input quantity.

Claims (1)

LCD 패널(P)을 이송하는 이송 롤러(11)와, 상기 이송 롤러(11)의 일부를 내부에 수용하도록 하면서 하부에 배수구(12)가 천공된 밀폐 공간을 갖는 건조실(13)과, 건조실(13) 내측에 이송 롤러(11)를 사이에 두고 소정의 기울기를 갖으며 외부로부터 유입되는 공기 호스(14)가 연결되는 유입공(15A)이 천공된 연결부(15B)가 상부에 구비되고 하부에 분사 노즐(15C)이 각각 천공된 상부 1차 건조기(15-1), 하부 1차 건조기(15-3), 상부 2차 건조기(15-2), 하부 2차 건조기(15-4)를 구비하되, 상부 1차 건조기(15-1), 상부 2차 건조기(15-2)의 상부면 소정 위치에 볼트공(15D)을 형성하여 볼트공(15D)에 볼트 결합되도록 장공(16A)이 양측에 천공된 차단판(16)으로 구성된 것을 특징으로 하는 LCD 패널의 건조 장치.A drying chamber 13 having a conveying roller 11 for conveying the LCD panel P, a sealed space in which a drain hole 12 is perforated at a lower portion thereof to accommodate a portion of the conveying roller 11 therein, and a drying chamber ( 13) A connection portion 15B having a predetermined inclination with a transfer roller 11 interposed therebetween and a perforated inlet hole 15A to which an air hose 14 introduced from the outside is connected is provided at an upper portion and at a lower portion thereof. The upper primary dryer 15-1, the lower primary dryer 15-3, the upper secondary dryer 15-2, and the lower secondary dryer 15-4 each having the injection nozzles 15C drilled therein are provided. However, the long holes 16A are formed on both sides of the upper hole dryer 15-1 and the upper secondary dryer 15-2 so that the bolt holes 15D are formed at predetermined positions on the upper surfaces of the upper dryers 15-1 and 15-2. Drying device of the LCD panel, characterized in that consisting of a barrier plate 16 perforated.
KR1020010009008A 2001-02-22 2001-02-22 Device for dry of LCD panel KR20010035506A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030066210A (en) * 2002-02-05 2003-08-09 엘지전자 주식회사 Squeeze device of wet processing equipment
KR100739479B1 (en) * 2006-06-13 2007-07-13 (주)리드 Method and apparatus for drying substrates used in manufacturing flat panal display
KR100904278B1 (en) * 2001-11-12 2009-06-25 도쿄엘렉트론가부시키가이샤 Substrate processing apparatus
KR20140011643A (en) * 2012-07-18 2014-01-29 주식회사 포스코 Apparatus for preventing defects on the strip surface caused by air knife

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0714819A (en) * 1993-06-23 1995-01-17 Nec Corp Substrate
JPH08236498A (en) * 1995-02-28 1996-09-13 Nec Corp Method of air knife drying
JPH1197407A (en) * 1997-09-16 1999-04-09 Dainippon Screen Mfg Co Ltd Wafer drying equipment
JPH11204489A (en) * 1998-01-12 1999-07-30 Dainippon Screen Mfg Co Ltd Substrate drying device and drying of substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0714819A (en) * 1993-06-23 1995-01-17 Nec Corp Substrate
JPH08236498A (en) * 1995-02-28 1996-09-13 Nec Corp Method of air knife drying
JPH1197407A (en) * 1997-09-16 1999-04-09 Dainippon Screen Mfg Co Ltd Wafer drying equipment
JPH11204489A (en) * 1998-01-12 1999-07-30 Dainippon Screen Mfg Co Ltd Substrate drying device and drying of substrate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100904278B1 (en) * 2001-11-12 2009-06-25 도쿄엘렉트론가부시키가이샤 Substrate processing apparatus
KR20030066210A (en) * 2002-02-05 2003-08-09 엘지전자 주식회사 Squeeze device of wet processing equipment
KR100739479B1 (en) * 2006-06-13 2007-07-13 (주)리드 Method and apparatus for drying substrates used in manufacturing flat panal display
KR20140011643A (en) * 2012-07-18 2014-01-29 주식회사 포스코 Apparatus for preventing defects on the strip surface caused by air knife

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