KR20030068772A - Cleaning equipment for LCD panel - Google Patents
Cleaning equipment for LCD panel Download PDFInfo
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- KR20030068772A KR20030068772A KR1020020008384A KR20020008384A KR20030068772A KR 20030068772 A KR20030068772 A KR 20030068772A KR 1020020008384 A KR1020020008384 A KR 1020020008384A KR 20020008384 A KR20020008384 A KR 20020008384A KR 20030068772 A KR20030068772 A KR 20030068772A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1313—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/06—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with a blast of gas or vapour
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
본 발명은 엘씨디 패널의 건식 세정 장치에 관한 것으로, 더욱 상세하게는 엘씨디 패널의 글라스 표면에 잔존하는 불순물 입자, 특히, 유기물의 용해 또는 제거 효과가 향상되도록 함과 동시에 정전기에 의한 글라스 표면의 재오염을 방지하도록 하는 엘씨디 패널의 건식 세정 장치에 관한 것이다.The present invention relates to a dry cleaning apparatus for an LCD panel, and more particularly, to improve the dissolution or removal effect of impurity particles remaining on the glass surface of the LCD panel, in particular, an organic substance, and at the same time recontamination of the glass surface by static electricity. It relates to a dry cleaning device of the LCD panel to prevent the.
일반적으로 엘씨디 패널의 건조 장치라 함은 엘씨디 패널의 제조 과정에서 엘씨디 패널 표면 또는 회로 소자에 부착되는 불순물 입자를 제거하는 세척 과정을 거친 후 잔류하는 세척액이나 불순물 입자를 공기압으로 제거하는 장치를 일컫는 것이다.In general, the drying device of an LCD panel refers to a device that removes residual cleaning solution or impurities by air pressure after a cleaning process of removing impurities from the surface of the LCD panel or the circuit elements. .
종래의 엘씨디 패널 건조 장치는 이송 롤러로 이송되는 엘씨디 패널이 건조 장치의 건조실 내로 이송되면 외부의 공기 호스로부터 유입되는 공기를 분사 노즐을 통해 분사하는 건조기가 상, 하 각각 1, 2차 한쌍으로 구비되어 공기압으로 엘씨디 패널의 표면에 잔류하는 세척액이나 불순물 입자를 제거하도록 된 것이었다.Conventional LCD panel drying apparatus is provided with a pair of upper and lower dryers for injecting air flowing from an external air hose through an injection nozzle when the LCD panel conveyed by a transfer roller is transferred into a drying chamber of the drying apparatus. The air pressure was used to remove the cleaning liquid and impurity particles remaining on the surface of the LCD panel.
그러나, 상기와 같은 엘씨디 패널의 건조 장치는 공기압에 의해 세척액의 물방울 및 불순물 입자가 건조실 내부에 와류하면서 무분별하게 날리게 되고 이때, 건조 조건이 밀폐된 건조실이라는 점을 감안하면 건조기의 위치를 벗어났다 하더라도 건조실 내에 위치하는 한은 엘씨디 패널 표면에 떨어지게 되어 세척액이 증발하면서 얼룩지게 되고 불순물 입자 또한 세척액이 증발하면서 엘씨디 표면 또는 회로 소자에 그대로 부착되어 엘씨디 패널의 특성에 영향을 미쳐 불량이 증가하므로 수율이 저하되는 문제점이 있는 것이었다.However, the drying apparatus of the LCD panel as described above is blown indiscriminately while the water droplets and impurity particles of the washing liquid vortex inside the drying chamber by air pressure. As long as it is located in the drying chamber, it falls on the surface of the LCD panel, and as the cleaning solution evaporates, it becomes stained. Impurity particles also adhere to the surface of the LCD or circuit elements as the cleaning solution evaporates, affecting the properties of the LCD panel, which increases defects, and thus yields decrease. There was a problem.
이와 같은 문제점을 고려하여 본 원인은 "엘씨디 패널의 건조 장치(대한민국 실용신안등록출원 제 20-2001-0009008호)"을 선출원한 바 있으며, 이는 첨부 도면 도 1에서 보는 바와 같이, 이송 롤러(11)로 이송되는 엘씨디 패널(P)이 건조 장치 본체(10)의 건조실(13) 내로 이송되면 외부의 공기 호스(14)로부터 유입되는 공기를 분사 노즐(15C)을 통해 분사하는 상부 1차 건조기(15-1), 상부 2차 건조기(15-2), 하부 1차 건조기(15-3) 및 하부 2차 건조기(15-4)가 공기압으로 엘씨디 패널의 표면에 잔류하는 세척액이나 불순물을 제거하게 되며, 이때, 상부 1,2차 건조기(15-1)(15-2)에 각각 구비된 차단판(16)이 공기압에 의하여 와류되는 세척액 물방울과 불순물 입자를 차단하여 계속해서 전 단계에 위치하도록 하여 건조부를 지난 엘씨디 패널의 표면 또는 회로 소자에 재 부착되는 것을 방지하도록 되어 있으나, 와류 현상이 강할 경우에는 불순물 입자 및 세척액이 재 부착되는 문제점이 있으며, 특히, 유기물의 제거가 완벽하게 이루어지지 않는 문제점이 있는 것이다.In consideration of such a problem, the cause has been filed with a "drying apparatus for an LCD panel (Korean Utility Model Registration Application No. 20-2001-0009008)", which is shown in FIG. When the LCD panel P is transferred to the drying chamber 13 of the drying apparatus main body 10, the upper primary dryer (SP) spraying air introduced from the external air hose 14 through the spray nozzle 15C. 15-1), the upper secondary dryer 15-2, the lower primary dryer 15-3 and the lower secondary dryer 15-4 to remove the cleaning liquid or impurities remaining on the surface of the LCD panel by air pressure. At this time, the blocking plate 16 provided in each of the upper first and second dryers 15-1 and 15-2 blocks the washing liquid droplets and the impurity particles vortexed by air pressure so as to be continuously positioned in the previous step. Dry portion is reattached to the surface of the past LCD panel or circuit elements Although it is intended to prevent, if the vortex is strong, there is a problem that the impurity particles and the washing liquid is reattached, in particular, there is a problem that the removal of organic matter is not made completely.
본 발명은 상기와 같은 문제점을 해소하기 위한 것으로, 본 발명은 엘씨디 패널의 글라스 표면에 잔존하는 불순물 입자, 특히, 유기물의 용해 또는 제거 효과가 향상되도록 함과 동시에 정전기에 의한 글라스 표면의 재오염을 방지하도록 하는 엘씨디 패널의 건식 세정 장치를 제공함을 기술적 과제로 삼는다.The present invention is to solve the above problems, the present invention is to improve the dissolution or removal effect of the impurity particles, in particular, the organic matter remaining on the glass surface of the LCD panel and at the same time to re-contamination of the glass surface by static electricity It is a technical problem to provide a dry cleaning device of an LCD panel which prevents it.
이를 위한 본 발명은 엘씨디 패널의 글라스 표면에 잔존하는 불순물 입자를 제거하도록 하는 엘씨디 패널의 건식 세정 장치에 있어서, 공급되는 CO2가스를 열교환기를 통해 냉각시켜 액화시키고, 액체상태의 CO2가스를분사 노즐을 통해 드라이 아이스로 분사시키도록 하는 CO2가스 분사장치와, 분사되는 CO2가스에 의해 엘씨디 패널의 글라스 표면에 발생되는 정전기를 감쇄시키도록 하는 이온화 장치와, CO2가스에 의해 엘씨디 패널의 글라스 표면으로부터 용해되거나 부상하는 불순물 입자, 특히, 유기물을 진공 흡입하는 백큠장치로 구성됨을 특징으로 한다.The present invention for this purpose in the dry cleaning device of the LCD panel to remove the impurities particles remaining on the glass surface of the LCD panel, the supplied CO 2 gas is cooled by the heat exchanger to liquefy, and spray the liquid CO 2 gas A CO 2 gas injector to spray dry ice through the nozzle, an ionizer to attenuate the static electricity generated on the glass surface of the LCD panel by the injected CO 2 gas, and a CO 2 gas to Characterized in that it comprises a vacuum device for vacuum suction of impurity particles, in particular, organic matter dissolved or floated from the glass surface.
도 1은 종래의 건조 장치의 구성 단면도1 is a cross-sectional view of a conventional drying apparatus
도 2는 본 발명의 구성 및 동작 상태를 보인 단면도2 is a cross-sectional view showing the configuration and operation of the present invention
도 3은 본 발명의 CO2가스 분사장치로부터 드라이 아이스가 분사되는 상태를 보인 부분 확대 단면도Figure 3 is a partially enlarged cross-sectional view showing a state in which dry ice is injected from the CO 2 gas injector of the present invention
도 4는 드라이 아이스의 분사 충격 및 용해에 의해 불순물 입자가 글라스로부터 이탈하는 상태를 보인 부분 확대 단면도4 is a partially enlarged cross-sectional view showing a state in which impurity particles are separated from the glass by spraying impact and melting of dry ice.
도 5는 본 발명의 백큠장치가 이탈된 불순물 입자를 흡입하여 배출하는 상태를 보인 부분 확대 단면도5 is a partially enlarged cross-sectional view showing a state in which the vacuum device of the present invention sucks out and discharges the separated impurity particles;
도 6은 본 발명의 다른 실시예를 보인 구성 단면도Figure 6 is a cross-sectional view showing another embodiment of the present invention
<도면의 주요부분에 대한 부호 설명><Description of Signs of Major Parts of Drawings>
100 : 건식 세정 장치 10 : CO2가스 분사장치100: dry cleaning device 10: CO 2 gas injection device
11 : 공급부 12 : 열교환기11: supply part 12: heat exchanger
13 : 분사노즐 20 : 이온화 장치13 injection nozzle 20 ionizer
30 : 백큠장치 31 : 진공 펌프30: bag apparatus 31: vacuum pump
32 : 흡입구 1 : 엘씨디 패널32: inlet port 1: LCD panel
P : 불순물 입자 R : 이송롤러P: Impurity Particles R: Feed Roller
첨부 도면 도 2는 본 발명의 구성 및 동작 상태를 보인 단면도이고, 도 3은 본 발명의 CO2가스 분사장치로부터 드라이 아이스가 분사되는 상태를 보인 부분 확대 단면도이고, 도4는 드라이 아이스의 분사 충격 및 용해에 의해 불순물 입자가 글라스로부터 이탈하는 상태를 보인 부분 확대 단면도이고, 도 5는 본 발명의 백큠장치가 이탈된 불순물 입자를 흡입하여 배출하는 상태를 보인 부분 확대 단면도이며, 도 6은 본 발명의 다른 실시예를 보인 구성 단면도로서 이 중 도면부호 100은 본 발명인 건식 세정 장치이다.Figure 2 is a cross-sectional view showing the configuration and operation of the present invention, Figure 3 is a partial enlarged cross-sectional view showing a state in which dry ice is injected from the CO 2 gas injector of the present invention, Figure 4 is a blow impact of dry ice And a partially enlarged cross-sectional view showing a state in which impurity particles are separated from the glass by melting, and FIG. 5 is a partially enlarged cross-sectional view showing a state in which the backwashing device of the present invention sucks out and discharges the impurity particles which have been separated, and FIG. A cross-sectional view showing another embodiment of the numeral 100 is a dry cleaning device of the present invention.
본 발명인 건식 세정 장치(100)는 첨부 도면 도 2에서 보는 바와 같이, 엘씨디 패널(1)의 글라스 표면에 잔존하는 불순물 입자(P)를 제거하도록 하는 엘씨디 패널의 건식 세정 장치에 있어서, 공급되는 CO2가스를 냉각하여 액화시키고, 액체상태의 CO2가스를분사 노즐(13)을 통해 드라이 아이스로 분사시키도록 하는 CO2가스 분사장치(10)와, 분사되는 CO2가스에 의해 엘씨디 패널(1)의 글라스 표면에 발생되는 정전기를 감쇄시키도록 하는 이온화 장치(20)와, CO2가스에 의해 엘씨디 패널(1)의 글라스 표면으로부터 용해되거나 부상하는 불순물 입자(P), 특히, 유기물을 진공 흡입하는 백큠장치(30)로 구성된 것이다.The dry cleaning device 100 of the present invention is a dry cleaning device of an LCD panel for removing impurity particles P remaining on the glass surface of the LCD panel 1 as shown in FIG. 2. and liquefaction by cooling the second gas, CO that to the CO 2 gas in the liquid state through the injection nozzle 13 is sprayed into a dry ice second gas injection device 10, a LCD panel (1 by spraying CO 2 gas Vacuum ionization of the ionizer 20 to attenuate the static electricity generated on the glass surface of the c) and the impurity particles P, particularly organic matters dissolved or floated from the glass surface of the LCD panel 1 by CO 2 gas. It is composed of a back device 30.
상기, CO2가스 분사장치(10)는 CO2가스를 공급하는 공급부(11)와, 공급된 CO2가스를 냉각시키는 열교환기(12)와, 열교환기(12)를 거치면서 냉각되어 액화된 CO2가스가 단열 팽창하면서 드라이 아이스로 분사되도록 하는 분사 노즐(13)로 구성된 것이다.Above, CO 2 gas injection device 10 is cooled while passing through the heat exchanger 12, a heat exchanger 12 which cools the supply part 11 for supplying a CO 2 gas, the supplied CO 2 gas liquefied It is composed of a spray nozzle 13 to inject CO 2 gas into dry ice while adiabatic expansion.
이온화 장치(20)는 공급되는 이온 가스를 분사하여, CO2가스 분사장치(10)로부터 분사되는 드라이 아이스에 의해 엘씨디 패널(1)의 글라스 표면에 발생되는 정전기를 감쇄시키도록 구성된 것이다.The ionizer 20 is configured to inject the supplied ionic gas to attenuate the static electricity generated on the glass surface of the LCD panel 1 by the dry ice injected from the CO 2 gas injector 10.
백큠 장치(30)는 모터의 회전에 의해 공기를 흡입하도록 하는 진공 펌프(31)와, 진공 펌프(31) 흡입단에 연결되어 일정 범위내의 공기가 원활히 흡입되도록 하는 흡입구(32)로 구성되어 CO2가스 분사장치(10)로부터 분사되는 드라이 아이스가 불순물 입자에 충격을 주어 엘씨디 패널(1)의 글라스 표면으로부터 이탈되거나, 드라이 아이스가 승화하면서 엘씨디 패널(1)의 글라스 표면으로부터 부상하는 불순물 입자 및 유기물을 진공 흡입하여 외부로 배출토록 된 것이다.The vacuum device 30 is composed of a vacuum pump 31 for sucking air by the rotation of the motor, and a suction port 32 connected to the suction end of the vacuum pump 31 to smoothly suck air within a predetermined range. 2 impurity particles that are blown from the gas injector 10 and are impregnated with impurities, are separated from the glass surface of the LCD panel 1, or impregnated with the dry ice sublimated from the glass surface of the LCD panel 1; The organics were sucked in vacuum and discharged to the outside.
이와 같이 구성된 본 발명은 이송 롤러(R)로 이송되는 엘씨디 패널(1)이 건조실(D) 내로 이송되어 건식 세정 장치(100) 하부를 지나게 되면 첨부 도면 도 3에서 보는 바와 같이, CO2가스 분사장치(10)의 공급부(11)로부터 공급되는 CO2가스가 열교환기(12)를 거치면서 냉각되어 액화되고, 액화된 CO2가스가 분사 노즐(13)을 거치면서 단열 팽창하여 드라이 아이스로 분사되면 엘씨디 패널(1)의 글라스 표면에 잔존하는 불순물 입자(P)에 분사력에 의한 충격이 가해져 불순물 입자(P)가 첨부 도면 도 4에서 보는 바와 같이, 이탈되는데, 엘씨디 패널(1)의 글라스 표면에 증착되었던 드라이 아이스가 상온과 반응하여 승화 시 장력이 발생하여 엘씨디 패널(1)의 글라스 표면에 증착된 불순물 입자(P) 및 유기물을 쓸어모아 주는 현상과, 저온인 드라이 아이스와 상온인 엘씨디 패널(1)의 글라스의 온도차에 의해 글라스 표면으로부터 불순물 입자(P) 및 유기물이 이탈하여 부상하는 현상에 의해, 첨부 도면 도 5에서 보는 바와 같이 백큠장치(30)로의 흡입이 더욱 수월하게 된다.In the present invention configured as described above, when the LCD panel 1 transferred to the transfer roller R is transferred into the drying chamber D and passes under the dry cleaning apparatus 100, as shown in FIG. 3, CO 2 gas is injected. The CO 2 gas supplied from the supply portion 11 of the apparatus 10 is cooled and liquefied while passing through the heat exchanger 12, and the liquefied CO 2 gas is thermally expanded while passing through the injection nozzle 13 and sprayed with dry ice. When the impurity particles P are applied to the impurity particles P remaining on the glass surface of the LCD panel 1 by the injection force, the impurity particles P are separated as shown in FIG. 4, but the glass surface of the LCD panel 1 is removed. When the dry ice deposited on the reaction reacts with room temperature, tension is generated during sublimation to sweep up the impurity particles (P) and organic matter deposited on the glass surface of the LCD panel (1), and the low temperature dry ice and the room temperature Due to the phenomenon that the impurity particles P and the organic matter are separated from the surface of the glass by the temperature difference of the glass of the panel 1 and float, the suction into the back-up device 30 becomes easier as shown in FIG. 5. .
상기, 엘씨디 패널(1)의 글라스 표면으로 분사되는 CO2가스에 의해 글라스 표면에는 정전기가 발생하는데, 이때, 이온화 장치(20)로부터 분사되는 이온화 가스에 의해 정전기가 감쇄되어 글라스 표면이 재 오염되는 것을 방지하게 된다.The static electricity is generated on the glass surface by the CO 2 gas injected onto the glass surface of the LCD panel 1. At this time, the static electricity is attenuated by the ionizing gas injected from the ionizer 20, and the glass surface is recontaminated. Will be prevented.
또한, 첨부 도면 도 6에서 보는 바와 같이, 백큠장치(30)를 CO2가스 분사장치(10)의 양측에 장착함으로써, CO2가스 분사장치(10)의 분사력에 의해 불순물 입자(P) 및 유기물이 여타 부분으로 확산되는 것을 방지하도록 하는 것도 본 발명의 바람직한 다른 실시예이다.Also, the accompanying drawings, as shown in Figure 6, by mounting the baekkyum apparatus 30 on either side of the CO 2 gas injector 10, CO 2 gas impurity by the blowing force of the injectors 10, the particles (P) and the organic It is another preferred embodiment of the present invention to prevent it from spreading to other parts.
본 발명에서는 엘씨디 패널(1)을 세정하는 것으로 실시예를 설정하였으나 각종 글라스류, 인쇄회로기판 및 반도체 웨이퍼 등에도 적용 가능한 것이다.In the present invention, the embodiment is set to clean the LCD panel 1, but can be applied to various glass, printed circuit board, semiconductor wafer, and the like.
이와 같이 되는 본 발명은 CO2가스 분사장치로부터 액화된 CO2가스가 드라이 아이스로 분사되면 이온화 장치가 엘씨디 패널의 글라스 표면에 발생되는 정전기를 감쇄시키는 한편, 엘씨디 패널의 글라스 표면으로부터 용해되거나 부상하는 등 이탈되는 불순물 입자, 특히, 유기물을 백큠장치가 진공 흡입함으로써, 엘씨디 패널의 글라스 표면에 잔존하는 불순물 입자, 특히, 유기물의 용해 또는 제거 효과가 향상되도록 함과 동시에, 정전기에 의한 글라스 표면의 재오염을 방지하도록 하는 효과를 갖는다.The present invention is as described immediately above CO 2 gas when the liquefied CO 2 gas from the injector the injection of dry ice ionization device for attenuating the static electricity generated in the glass surface of the LCD panel On the other hand, to dissolve or injury from the glass surface of the LCD panel Vacuum suction of impurity particles, in particular, organic matters, etc., which are dislodged, improves the effect of dissolving or removing impurity particles remaining on the glass surface of the LCD panel, in particular, organic matters, and at the same time regenerating the glass surface by static electricity. Has the effect of preventing contamination.
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| KR1020020008384A KR20030068772A (en) | 2002-02-18 | 2002-02-18 | Cleaning equipment for LCD panel |
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| KR1020020008384A KR20030068772A (en) | 2002-02-18 | 2002-02-18 | Cleaning equipment for LCD panel |
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| KR101528888B1 (en) * | 2014-04-14 | 2015-06-15 | (주)대흥정밀산업 | LCD panel surface cleaning apparatus using dryice |
| KR20160040374A (en) * | 2014-10-02 | 2016-04-14 | 삼성디스플레이 주식회사 | Apparatus for cleaning substrate |
| CN109107997A (en) * | 2018-09-30 | 2019-01-01 | 上海钥熠电子科技有限公司 | The OLED vapor deposition Dry ice cleaning device and its technique of baffle |
| KR20200017725A (en) * | 2018-08-09 | 2020-02-19 | 주식회사 에이아이코리아 | Dry cleaning device |
| KR20200017724A (en) * | 2018-08-09 | 2020-02-19 | 주식회사 에이아이코리아 | Dry cleaning device |
| KR20240000088A (en) | 2022-06-23 | 2024-01-02 | 태영에스티 주식회사 | Dry clean apparatus of circuration type |
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