KR20010019685A - Multi-chip package - Google Patents

Multi-chip package Download PDF

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Publication number
KR20010019685A
KR20010019685A KR1019990036234A KR19990036234A KR20010019685A KR 20010019685 A KR20010019685 A KR 20010019685A KR 1019990036234 A KR1019990036234 A KR 1019990036234A KR 19990036234 A KR19990036234 A KR 19990036234A KR 20010019685 A KR20010019685 A KR 20010019685A
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KR
South Korea
Prior art keywords
semiconductor chip
chip
lead
lead frame
package
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KR1019990036234A
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Korean (ko)
Inventor
김재홍
권용안
성시찬
Original Assignee
윤종용
삼성전자 주식회사
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Priority to KR1019990036234A priority Critical patent/KR20010019685A/en
Publication of KR20010019685A publication Critical patent/KR20010019685A/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49503Lead-frames or other flat leads characterised by the die pad
    • H01L23/4951Chip-on-leads or leads-on-chip techniques, i.e. inner lead fingers being used as die pad
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49503Lead-frames or other flat leads characterised by the die pad
    • H01L23/49513Lead-frames or other flat leads characterised by the die pad having bonding material between chip and die pad
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49517Additional leads
    • H01L23/49524Additional leads the additional leads being a tape carrier or flat leads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/4826Connecting between the body and an opposite side of the item with respect to the body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors

Abstract

PURPOSE: A multi-chip package is provided to prevent a metal wire from being changed in the multi-chip package, by using a TAB lead instead of the metal wire regarding at least one of stacked semiconductor chips. CONSTITUTION: The first semiconductor chip has the first active surface(122) and the first rear surface(123). The semiconductor chip has the second active surface(132) and the second rear surface(133), located on the first semiconductor chip. At least the second semiconductor chip is adhered to a lead frame(117) which electrically connects the first and second semiconductor chips with an external apparatus. A TAB lead(142) is adhered to the first active surface of the first semiconductor chip, electrically connecting the first semiconductor and the lead frame. A unit for connection electrically connects the second semiconductor chip with the lead frame.

Description

멀티 칩 패키지{Multi-chip package}Multi-chip package

본 발명은 멀티 칩 패키지에 관한 것으로서, 보다 구체적으로는 멀티 칩 패키징 공정에 따른 불량을 감소시키기 위해서 TAB(Tape Automated Bonding, 이하 'TAB'라 한다)를 이용한 멀티 칩 패키지에 관한 것이다.The present invention relates to a multi-chip package, and more particularly, to a multi-chip package using Tape Automated Bonding (TAB) to reduce defects caused by a multi-chip packaging process.

최근에 전자 산업의 발전 그리고 사용자의 요구에 따라 전자 부품은 더욱 더 소형화 및 경량화가 요구되고 있다. 이에 주로 적용되는 기술중의 하나가 복수 개의 반도체 칩을 하나의 패키지로 구성한 멀티 칩 패키징(Multi-chip Packaging) 기술이다. 멀티 칩 패키지는 특히 소형화와 경량화가 요구되는 휴대용 전화기 등에서 실장 면적의 축소와 경량화를 위해 많이 사용되고 있다.Recently, in accordance with the development of the electronic industry and the needs of users, electronic components are required to be more compact and lighter. One of the technologies mainly applied to this is a multi-chip packaging technology in which a plurality of semiconductor chips are configured in one package. Multi-chip packages have been widely used for reducing and reducing the mounting area, especially in portable telephones that require miniaturization and light weight.

메모리 기능을 수행하는 플래시 메모리와 에스램(SRAM;Synchronous RAM) 칩을 하나의 TSOP(Thin Small Outline Package)로 구성하면 각각의 반도체 칩을 내재하는 단위 반도체 칩 패키지 두 개를 이용하는 것보다 크기나 무게 및 실장 면적에서 소형화와 경량화에 유리하다. 일반적으로 복수 개의 반도체 칩을 하나의 패키지 내에 구성하는 방법에는 반도체 칩을 상하로 적층하는 방법과 수평하게 병렬로 배열하는 방법이 있다.When a flash memory and a synchronous RAM (SRAM) chip, which performs memory functions, are configured into one thin small outline package (TSOP), the size and weight of each semiconductor chip package is higher than that of using two unit semiconductor chip packages. And compactness and weight reduction in the mounting area. In general, a method of configuring a plurality of semiconductor chips in one package includes a method of stacking semiconductor chips vertically and horizontally and parallelly arranging them.

전자의 경우 반도체 칩을 상하로 적층하는 구조이므로 공정이 복잡하고 한정된 두께에서 안정된 공정을 확보하기 어려운 단점이 있고, 후자의 경우 동일 평면상에 여러 개의 반도체 칩을 배열하는 구조이므로 실장 면적 감소에 의한 소형화의 장점을 얻기가 어렵다. 따라서, 소형화와 경량화가 필요한 패키지에 적용되는 형태로는 반도체 칩을 상하로 적층하는 형태가 많이 사용된다.In the former case, since the semiconductor chips are stacked up and down, the process is complicated and it is difficult to secure a stable process at a limited thickness. In the latter case, since the semiconductor chips are arranged on the same plane, the mounting area is reduced. It is difficult to obtain the advantages of miniaturization. Therefore, as a form applied to a package requiring miniaturization and light weight, many forms of stacking semiconductor chips up and down are used.

도 1은 종래 기술에 따른 멀티 칩 패키지를 나타내는 단면도이다.1 is a cross-sectional view showing a multi-chip package according to the prior art.

도 1을 참조하면, 멀티 칩 패키지(10)는 다이 패드(12), 내부 리드(14) 및 외부 리드(16)로 구성되는 리드프레임을 포함하며, 각각의 활성면(22, 32)이 서로 반대 방향으로 향하도록 그림에서와 같이 제 1 및 제 2 반도체 칩(20, 30)이 비전도성 접착제(28, 38)에 의해서 다이 패드(12)의 상부면과 하부면에 접착된다. 활성면(22, 32)은 본딩 패드(24, 34)를 포함한 회로 소자(도시되지 않음)가 형성된 반도체 칩(20, 30)의 표면이다.Referring to FIG. 1, the multi-chip package 10 includes a lead frame composed of a die pad 12, an inner lead 14, and an outer lead 16, and each of the active surfaces 22 and 32 are in contact with each other. The first and second semiconductor chips 20, 30 are bonded to the top and bottom surfaces of the die pad 12 by non-conductive adhesives 28, 38, as shown in the figure, facing in the opposite direction. The active surfaces 22 and 32 are surfaces of the semiconductor chips 20 and 30 on which circuit elements (not shown) including the bonding pads 24 and 34 are formed.

제 1 및 제 2 반도체 칩(20, 30)의 본딩 패드(24, 34)는 금속선(Metal Wire; 26, 36)에 의해서 대응하는 내부 리드(14)와 전기적으로 연결된다. 반도체 칩(20, 30)을 포함한 전기적 연결 부분을 외부로부터 보호하기 위해서 몰딩 수지(Molding Resin)로 패키지 몸체(18)를 형성한다. 이와 같은 종래의 멀티 칩 패키지(10)는 반도체 칩(20, 30)의 활성면(22, 32)이 다이 패드(12)를 중심으로 서로 반대 방향으로 실장된다.The bonding pads 24 and 34 of the first and second semiconductor chips 20 and 30 are electrically connected to the corresponding internal leads 14 by metal wires 26 and 36. The package body 18 is formed of a molding resin to protect the electrical connection portions including the semiconductor chips 20 and 30 from the outside. In the conventional multichip package 10, the active surfaces 22 and 32 of the semiconductor chips 20 and 30 are mounted in opposite directions with respect to the die pad 12.

따라서, 반도체 칩(20, 30)을 다이 패드(12)에 접착하는 다이 본딩(Die Bonding) 공정과 금속선(26, 36)을 연결하는 와이어 본딩(Wire Bonding) 공정이 각 반도체 칩(20, 30)에 대해서 별도로 실시되어야 한다. 그러므로, 제 1 반도체 칩(20)을 다이 패드(12) 상부면에 접착하고 금속선(26)을 연결한 후 리드프레임을 뒤집어서 다이 패드(12) 하부면에 부착된 제 2 반도체 칩(30)에 대해 와이어 본딩을 할 때에, 제 1 반도체 칩(20)의 금속선(26)이 변형되어 불량이 발생할 수 있다..Therefore, a die bonding process of adhering the semiconductor chips 20 and 30 to the die pad 12 and a wire bonding process of connecting the metal wires 26 and 36 are performed for each semiconductor chip 20 and 30. Should be carried out separately. Therefore, the first semiconductor chip 20 is adhered to the upper surface of the die pad 12, the metal wires 26 are connected to each other, and the lead frame is turned over to the second semiconductor chip 30 attached to the lower surface of the die pad 12. When wire bonding is performed, the metal wire 26 of the first semiconductor chip 20 may be deformed to cause defects.

이와 같이, 리드프레임의 다이 패드(12) 상부면과 하부면에 반도체 칩(20, 30)을 각각 부착시킨 형태의 구조를 갖는 멀티 칩 패키지(10)는 리드프레임을 기준으로 위와 아래에서 금속선(26, 36)으로 전기적인 연결이 이루어져야 하기 때문에 공정이 복잡해지고 불량률이 높게 나타난다.As described above, the multi-chip package 10 having the structure in which the semiconductor chips 20 and 30 are attached to the upper and lower surfaces of the die pad 12 of the lead frame, respectively, has a metal line from above and below the lead frame. 26, 36), the electrical connection must be made, the process is complicated and the failure rate is high.

따라서, 본 발명의 목적은 와이어 본딩 공정에서 발생하는 금속선의 변형을 방지하는 데 있다.Therefore, an object of the present invention is to prevent the deformation of the metal wire generated in the wire bonding process.

본 발명의 다른 목적은 반도체 칩을 적층하는 공정을 단순화하여 멀티 칩 패키지 제조 시간 및 제조 비용을 줄이는 데 있다.Another object of the present invention is to simplify the process of stacking semiconductor chips, thereby reducing the manufacturing time and manufacturing cost of the multi-chip package.

도 1은 종래 기술에 따른 멀티 칩 패키지를 나타내는 단면도,1 is a cross-sectional view showing a multi-chip package according to the prior art,

도 2는 본 발명의 제 1 실시예에 따른 멀티 칩 패키지를 나타내는 단면도,2 is a cross-sectional view showing a multi-chip package according to a first embodiment of the present invention;

도 3은 본 발명의 제 2 실시예에 따른 멀티 칩 패키지를 나타내는 단면도,3 is a cross-sectional view showing a multi-chip package according to a second embodiment of the present invention;

도 4는 본 발명의 제 3 실시예에 따른 멀티 칩 패키지를 나타내는 단면도,4 is a cross-sectional view showing a multi-chip package according to a third embodiment of the present invention;

도 5는 본 발명의 제 4 실시예에 따른 멀티 칩 패키지를 나타내는 단면도이다.5 is a cross-sectional view illustrating a multichip package according to a fourth exemplary embodiment of the present invention.

<도면의 주요 부호에 대한 설명><Description of Major Symbols in Drawing>

10, 100, 200, 300, 400; 멀티 칩 패키지10, 100, 200, 300, 400; Multi-chip package

12, 312; 다이 패드 14, 114, 314; 내부 리드12, 312; Die pads 14, 114, 314; Inside lead

16, 116, 316; 외부 리드 18, 118, 318; 패키지 몸체16, 116, 316; Outer leads 18, 118, 318; Package body

20, 30, 120, 130, 320, 330; 반도체 칩20, 30, 120, 130, 320, 330; Semiconductor chip

22, 32, 122, 132, 322, 332; 활성면22, 32, 122, 132, 322, 332; Active cotton

24, 34, 124, 324; 본딩 패드 26, 36, 126, 326; 금속선24, 34, 124, 324; Bonding pads 26, 36, 126, 326; Metal wire

28, 38, 128, 328, 338; 접착제 117, 317; 리드프레임28, 38, 128, 328, 338; Adhesive 117, 317; Leadframe

123, 133, 323, 333; 후면 140, 340; 범프123, 133, 323, 333; Rear 140, 340; Bump

142, 342; TAB 리드142, 342; TAB lead

이러한 목적을 달성하기 위해서 본 발명은 (1) 제 1 활성면과 제 1 후면을 갖는 제 1 반도체 칩, (2) 제 1 반도체 칩 상부에 위치하며, 제 2 활성면과 제 2 후면을 갖는 제 2 반도체 칩, (3) 최소한 제 2 반도체 칩이 접착되고, 제 1 반도체 칩과 제 2 반도체 칩을 외부 장치와 전기적으로 연결하는 리드프레임, (4) 제 1 반도체 칩의 제 1 활성면에 접착되어, 제 1 반도체 칩과 리드프레임을 전기적으로 연결하는 TAB 리드 및 (5) 제 2 반도체 칩과 리드프레임을 전기적으로 연결하는 접속 수단을 포함하는 것을 특징으로 하는 멀티 칩 패키지를 제공한다.In order to achieve the above object, the present invention provides a semiconductor device comprising: (1) a first semiconductor chip having a first active surface and a first back surface, and (2) a first semiconductor chip positioned on the first semiconductor chip and having a second active surface and a second back surface. 2 semiconductor chips, (3) at least a second semiconductor chip, and a lead frame for electrically connecting the first semiconductor chip and the second semiconductor chip to an external device, and (4) bonding to the first active surface of the first semiconductor chip. And a TAB lead for electrically connecting the first semiconductor chip and the lead frame, and (5) connecting means for electrically connecting the second semiconductor chip and the lead frame.

본 발명에서는 와이어 본딩을 할 때에 금속선이 변형되는 것을 방지하기 위해서, 적층되는 반도체 칩 중에서 적어도 하나에 대해서는 TAB 기술을 적용하여 금속선을 제거한다. TAB 테이프는 절연 테이프 위에 얇은 금속 박막으로 TAB 리드(Lead)가 형성되어 있어서, TAB 리드의 한쪽 끝부분에 반도체 칩이 접착되어 전기적으로 연결된다. 일반적으로 반도체 칩의 활성면에 형성된 본딩 패드에는 범프(Bump)가 형성되어 TAB 리드와 용이하게 접착된다.In the present invention, in order to prevent the metal wire from being deformed at the time of wire bonding, the metal wire is removed by applying the TAB technique to at least one of the stacked semiconductor chips. The TAB tape is formed of a thin metal thin film on the insulating tape, whereby a TAB lead is formed, and a semiconductor chip is attached to one end of the TAB lead and electrically connected thereto. In general, bumps are formed on the bonding pads formed on the active surface of the semiconductor chip to easily bond with the TAB leads.

이하, 첨부 도면을 참조하여 본 발명의 실시예에 따른 멀티 칩 패키지를 보다 상세하게 설명하고자 한다. 도면 전반에 걸쳐서 동일한 도면 부호는 동일한 구성 요소를 나타낸다.Hereinafter, a multi-chip package according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. Like numbers refer to like elements throughout.

도 2는 본 발명의 제 1 실시예에 따른 멀티 칩 패키지를 나타내는 단면도이다.2 is a cross-sectional view illustrating a multichip package according to a first embodiment of the present invention.

도 2를 참조하면, 적층되는 반도체 칩(120, 130) 중에서 상부에 위치하는 반도체 칩(120)은 LOC(Lead-on-Chip, 이하 'LOC'라 한다) 형식으로 리드프레임(117)과 접착되고, 하부에 위치하는 반도체 칩(130)은 TAB 기술에 의해서 TAB 테이프(도시되지 않음)의 TAB 리드(142)에 접착되어 멀티 칩 패키지(100)가 형성된다. 상부의 반도체 칩(120)은 활성면(122) 위로 리드프레임(117)의 내부 리드(114)가 연장되어 활성면(122)과 접착된다.Referring to FIG. 2, the semiconductor chip 120 positioned above the stacked semiconductor chips 120 and 130 is bonded to the lead frame 117 in the form of a lead-on-chip (LOC). The semiconductor chip 130 positioned below is bonded to the TAB lead 142 of the TAB tape (not shown) by the TAB technology to form the multi chip package 100. The upper semiconductor chip 120 extends the inner lead 114 of the lead frame 117 over the active surface 122 to be bonded to the active surface 122.

상부 반도체 칩(120)과 하부 반도체 칩(130)은 활성면(122, 132)의 반대쪽 면인 후면(123, 133)끼리 비전도성 접착제(128)에 의해서 접착되므로, 하부의 반도체 칩(130)은 활성면(132)이 아래쪽을 향하게 된다. 상부의 반도체 칩(120)은 금속선(126)에 의해서 본딩 패드(124)와 내부 리드(114)가 전기적으로 연결되고, 하부의 반도체 칩(130)은 TAB 리드(142)에 의해서 대응하는 내부 리드(114)와 연결된다.Since the upper semiconductor chip 120 and the lower semiconductor chip 130 are bonded to the back surfaces 123 and 133, which are opposite surfaces of the active surfaces 122 and 132, by the non-conductive adhesive 128, the lower semiconductor chip 130 may be The active surface 132 is directed downwards. The upper semiconductor chip 120 is electrically connected to the bonding pad 124 and the inner lead 114 by the metal wire 126, and the lower semiconductor chip 130 is the corresponding inner lead by the TAB lead 142. Connected with 114.

하부의 반도체 칩(130)과 TAB 리드(142)는 범프(140)에 의해서 접착되는 것이 바람직하다. 반도체 칩(120, 130)과 내부 리드(114)간에 전기적 접속이 완료되면 몰딩 수지로 패키지 몸체(118)를 형성하여 반도체 칩(120, 130)과 전기적 연결 부분을 외부로부터 보호한다. 외부 리드(116)는 패키지 몸체(118) 밖으로 돌출되어 멀티 칩 패키지(100)를 외부 장치(도시되지 않음)에 접속될 수 있게 한다.The lower semiconductor chip 130 and the TAB lead 142 are preferably bonded by the bumps 140. When the electrical connection is completed between the semiconductor chips 120 and 130 and the internal lead 114, the package body 118 is formed of a molding resin to protect the semiconductor chips 120 and 130 and the electrical connection portion from the outside. The outer lead 116 protrudes out of the package body 118 to allow the multi chip package 100 to be connected to an external device (not shown).

도 3은 본 발명의 제 2 실시예에 따른 멀티 칩 패키지를 나타내는 단면도이다.3 is a cross-sectional view illustrating a multichip package according to a second exemplary embodiment of the present invention.

도 3을 참조하면, 멀티 칩 패키지(200)는 하부의 반도체 칩(130)을 제외하고는 도 2의 멀티 칩 패키지와 동일한다. 하부의 반도체 칩(130)은 상부의 반도체 칩(120)과 마찬가지로 활성면(132)이 위쪽을 향한다. 따라서, 상부 반도체 칩(120)의 후면(123)과 TAB 리드(142)가 비전도성 접착제(128)에 의해서 접착된다.Referring to FIG. 3, the multichip package 200 is the same as the multichip package of FIG. 2 except for the semiconductor chip 130 below. In the lower semiconductor chip 130, the active surface 132 faces upward, similar to the upper semiconductor chip 120. Accordingly, the back surface 123 of the upper semiconductor chip 120 and the TAB lead 142 are bonded by the nonconductive adhesive 128.

도 4는 본 발명의 제 3 실시예에 따른 멀티 칩 패키지를 나타내는 단면도이다.4 is a cross-sectional view illustrating a multichip package according to a third exemplary embodiment of the present invention.

도 4를 참조하면, 반도체 칩(320, 330)은 일반적인 리드프레임(317), 즉 다이 패드(312), 내부 리드(314), 외부 리드(316)로 이루어진 리드프레임(317)의 다이 패드(312)에 접착된다. 상부에 위치하는 반도체 칩(320)의 후면(323)은 다이 패드(312) 상부면에 접착되고, 하부의 반도체 칩(330)의 후면(333)은 다이 패드(312) 하부면에 접착된다. 따라서, 상부 반도체 칩(320)은 활성면(322)이 위쪽을 향하고, 하부 반도체 칩(330)은 활성면(332)이 아래쪽을 향한다.Referring to FIG. 4, the semiconductor chips 320 and 330 may include a general lead frame 317, that is, a die pad of a lead frame 317 including a die pad 312, an inner lead 314, and an outer lead 316. 312). The rear surface 323 of the semiconductor chip 320 positioned on the upper portion is bonded to the upper surface of the die pad 312, and the rear surface 333 of the lower semiconductor chip 330 is attached to the lower surface of the die pad 312. Accordingly, the active surface 322 of the upper semiconductor chip 320 faces upward, and the active surface 332 of the lower semiconductor chip 320 faces downward.

상부 반도체 칩(320)의 본딩 패드(324)는 금속선(326)에 의해서 내부 리드(314)와 전기적으로 연결되고, 하부 반도체 칩(330)은 TAB 리드(342)에 의해서 내부 리드(314)와 연결된다. 하부의 반도체 칩(330)과 TAB 리드(342)는 범프(340)에 의해서 접착되는 것이 바람직하다. 반도체 칩(320, 330)과 내부 리드(314)간에 전기적 접속이 완료되면 몰딩 수지로 패키지 몸체(318)를 형성하여 반도체 칩(320, 330)과 전기적 연결 부분을 외부로부터 보호한다.The bonding pad 324 of the upper semiconductor chip 320 is electrically connected to the inner lead 314 by the metal wire 326, and the lower semiconductor chip 330 is connected to the inner lead 314 by the TAB lead 342. Connected. The lower semiconductor chip 330 and the TAB lead 342 are preferably bonded by the bump 340. When the electrical connection is completed between the semiconductor chips 320 and 330 and the inner lead 314, the package body 318 is formed of a molding resin to protect the semiconductor chips 320 and 330 and the electrical connection portion from the outside.

외부 리드(316)는 패키지 몸체(318) 밖으로 돌출되어 멀티 칩 패키지(300)를 외부 장치(도시되지 않음)에 접속될 수 있게 한다. 반도체 칩(320, 330)을 다이 패드(312)에 접착시키는 접착제(328,338) 중에서 적어도 하나는 비전도성이어야 한다.The outer lead 316 protrudes out of the package body 318 to enable the multi chip package 300 to be connected to an external device (not shown). At least one of the adhesives 328, 338 that adheres the semiconductor chips 320, 330 to the die pad 312 should be nonconductive.

도 5는 본 발명의 제 4 실시예에 따른 멀티 칩 패키지를 나타내는 단면도이다.5 is a cross-sectional view illustrating a multichip package according to a fourth exemplary embodiment of the present invention.

도 5를 참조하면, 멀티 칩 패키지(400)는 하부의 반도체 칩(130)을 제외하고는 도 3의 멀티 칩 패키지와 동일한다. 하부의 반도체 칩(330)은 상부의 반도체 칩(320)과 마찬가지로 활성면(332)이 위쪽을 향한다. 따라서, 하부 반도체 칩(330)에 접착된 TAB 리드(342)가 다이 패드(312)의 하부면에 접착된다.Referring to FIG. 5, the multichip package 400 is the same as the multichip package of FIG. 3 except for the semiconductor chip 130 below. In the lower semiconductor chip 330, the active surface 332 faces upward, similar to the upper semiconductor chip 320. Therefore, the TAB lead 342 bonded to the lower semiconductor chip 330 is bonded to the lower surface of the die pad 312.

본 발명은 특정한 실시예에 한정되어 설명되었지만 위에서 설명한 실시예에 한정되지 않으며, 특히 반도체 칩의 개수에 있어서 둘 이상의 반도체 칩이 하나의 패키지 몸체 안에 포함될 수 있다. 또한, 상부 반도체 칩과 내부 리드는 금속선에 의하지 않고 하부의 반도체 칩과 마찬가지로 TAB 리드에 의해서 연결될 수도 있다.Although the present invention has been described with reference to specific embodiments, it is not limited to the above-described embodiments. In particular, two or more semiconductor chips may be included in one package body in terms of the number of semiconductor chips. In addition, the upper semiconductor chip and the inner lead may be connected by the TAB lead similarly to the lower semiconductor chip without using a metal wire.

따라서, 본 발명에 의하면 적층되는 반도체 칩의 적어도 하나에 대해서 금속선 대신 TAB 리드를 사용함으로써 멀티 칩 패키지에서 발생하는 금속선의 변형을 방지할 수 있다.Therefore, according to the present invention, the deformation of the metal wire generated in the multi-chip package can be prevented by using the TAB lead instead of the metal wire for at least one of the stacked semiconductor chips.

또한, 본 발명에 의하면 TAB 기술을 사용함으로써 멀티 칩 패키지 제조 공정을 단순하게 할 수 있다.In addition, according to the present invention, the multi-chip package manufacturing process can be simplified by using the TAB technology.

Claims (6)

멀티 칩 패키지에 있어서,In a multi-chip package, (1) 제 1 활성면과 제 1 후면을 갖는 제 1 반도체 칩과,(1) a first semiconductor chip having a first active surface and a first back surface, (2) 상기 제 1 반도체 칩 상부에 위치하며, 제 2 활성면과 제 2 후면을 갖는 제 2 반도체 칩과,(2) a second semiconductor chip located above the first semiconductor chip and having a second active surface and a second back surface; (3) 최소한 상기 제 2 반도체 칩이 접착되고, 상기 제 1 반도체 칩과 상기 제 2 반도체 칩을 외부 장치와 전기적으로 연결하는 리드프레임과,(3) a lead frame to which at least the second semiconductor chip is bonded, and electrically connecting the first semiconductor chip and the second semiconductor chip to an external device; (4) 상기 제 1 반도체 칩의 상기 제 1 활성면에 접착되어, 상기 제 1 반도체 칩과 상기 리드프레임을 전기적으로 연결하는 TAB 리드와,(4) a TAB lead attached to the first active surface of the first semiconductor chip to electrically connect the first semiconductor chip and the lead frame; (5) 상기 제 2 반도체 칩과 상기 리드프레임을 전기적으로 연결하는 접속 수단을 포함하는 것을 특징으로 하는 멀티 칩 패키지.And (5) connecting means for electrically connecting said second semiconductor chip and said leadframe. 제 1 항에 있어서, 상기 멀티 칩 패키지는 상기 리드프레임의 내부 리드가 상기 제 2 반도체 칩의 상기 제 2 활성면 위로 연장되어 접착되는 LOC 형식으로서, 상기 제 1 반도체 칩은 상기 제 1 활성면이 아래쪽을 향하고 상기 제 2 반도체 칩은 상기 제 2 활성면이 위쪽을 향하며, 상기 제 1 반도체 칩과 상기 제 2 반도체 칩 사이에 비전도성 접착제가 개재되어 상기 제 1 반도체 칩의 상기 제 1 후면과 상기 제 2 반도체 칩의 상기 제 2 후면이 상기 비전도성 접착제에 의해서 접착되는 것을 특징으로 하는 멀티 칩 패키지.The multi-chip package of claim 1, wherein the multi-chip package has a LOC type in which an inner lead of the lead frame extends and adheres to the second active surface of the second semiconductor chip, wherein the first semiconductor chip has the first active surface. The second semiconductor chip faces upward and the second active surface faces upward, and a non-conductive adhesive is interposed between the first semiconductor chip and the second semiconductor chip so that the first back surface of the first semiconductor chip And wherein said second backside of said second semiconductor chip is adhered by said nonconductive adhesive. 제 1 항에 있어서, 상기 멀티 칩 패키지는 상기 리드프레임의 내부 리드가 상기 제 2 반도체 칩의 상기 제 2 활성면 위로 연장되어 접착되는 LOC 형식인 것으로서, 상기 제 1 반도체 칩의 상기 제 1 활성면과 상기 제 2 반도체 칩의 상기 제 2 활성면이 위쪽을 향하고, 상기 제 1 반도체 칩과 상기 제 2 반도체 칩 사이에 비전도성 접착제가 개재되어 상기 제 1 반도체 칩에 접착된 상기 TAB 리드와 상기 제 2 반도체 칩의 상기 제 2 후면이 상기 비전도성 접착제에 의해서 접착되는 것을 특징으로 하는 멀티 칩 패키지.The first chip of claim 1, wherein the multi-chip package has a LOC type in which an inner lead of the lead frame extends and is bonded to the second active surface of the second semiconductor chip. And the TAB lead attached to the first semiconductor chip with the non-conductive adhesive interposed between the first semiconductor chip and the second semiconductor chip with the second active surface of the second semiconductor chip facing upward. And said second backside of said semiconductor chip is bonded by said nonconductive adhesive. 제 1 항에 있어서, 상기 제 2 반도체 칩과 상기 리드프레임을 전기적으로 연결하는 상기 접속 수단은 금속선인 것을 특징으로 하는 멀티 칩 패키지.The multi-chip package according to claim 1, wherein the connection means for electrically connecting the second semiconductor chip and the lead frame is a metal wire. 제 1 항에 있어서, 상기 리드프레임은 다이 패드를 포함하며, 상기 리드프레임의 상기 다이 패드 상부면에 상기 제 2 반도체 칩의 상기 제 2 후면이 접착되고, 상기 리드프레임의 상기 다이 패드 하부면에 상기 제 1 반도체 칩의 상기 제 1 후면이 접착되는 것을 특징으로 하는 멀티 칩 패키지.The lead frame of claim 1, wherein the lead frame includes a die pad, and the second back surface of the second semiconductor chip is adhered to an upper surface of the die pad of the lead frame, and the lower surface of the lead pad is attached to the die pad. And the first rear surface of the first semiconductor chip is bonded. 제 1 항에 있어서, 상기 리드프레임은 다이 패드를 포함하며, 상기 리드프레임의 상기 다이 패드 상부면에 상기 제 2 반도체 칩의 상기 제 2 후면이 접착되고, 상기 리드프레임의 상기 다이 패드 하부면에 상기 TAB 리드가 접착되는 것을 특징으로 하는 멀티 칩 패키지.The lead frame of claim 1, wherein the lead frame includes a die pad, and the second back surface of the second semiconductor chip is adhered to an upper surface of the die pad of the lead frame, and the lower surface of the lead pad is attached to the die pad. Multi-chip package characterized in that the TAB lead is bonded.
KR1019990036234A 1999-08-30 1999-08-30 Multi-chip package KR20010019685A (en)

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