KR20000057194A - 회전 속도 센서 - Google Patents

회전 속도 센서 Download PDF

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Publication number
KR20000057194A
KR20000057194A KR1019990704513A KR19997004513A KR20000057194A KR 20000057194 A KR20000057194 A KR 20000057194A KR 1019990704513 A KR1019990704513 A KR 1019990704513A KR 19997004513 A KR19997004513 A KR 19997004513A KR 20000057194 A KR20000057194 A KR 20000057194A
Authority
KR
South Korea
Prior art keywords
ring
brace
rotational speed
speed sensor
substrate
Prior art date
Application number
KR1019990704513A
Other languages
English (en)
Korean (ko)
Inventor
헤르겐 카펠스
크리스토퍼 히롤트
막스 슈테거
토마스 샤이터
라인홀트 뇌
울리히 네어
Original Assignee
칼 하인쯔 호르닝어
지멘스 악티엔게젤샤프트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 칼 하인쯔 호르닝어, 지멘스 악티엔게젤샤프트 filed Critical 칼 하인쯔 호르닝어
Publication of KR20000057194A publication Critical patent/KR20000057194A/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
KR1019990704513A 1996-11-22 1997-11-14 회전 속도 센서 KR20000057194A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19648425A DE19648425C1 (de) 1996-11-22 1996-11-22 Drehratensensor
DE19648425.1 1996-11-22

Publications (1)

Publication Number Publication Date
KR20000057194A true KR20000057194A (ko) 2000-09-15

Family

ID=7812488

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019990704513A KR20000057194A (ko) 1996-11-22 1997-11-14 회전 속도 센서

Country Status (7)

Country Link
US (1) US6094985A (zh)
EP (1) EP0939883A1 (zh)
JP (1) JP2001504587A (zh)
KR (1) KR20000057194A (zh)
CN (1) CN1286751A (zh)
DE (1) DE19648425C1 (zh)
WO (1) WO1998023917A1 (zh)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4348759B2 (ja) * 1998-12-15 2009-10-21 ミツミ電機株式会社 回転振動型ジャイロ
DE19937747C2 (de) * 1999-08-10 2001-10-31 Siemens Ag Mechanischer Resonator für Rotationssensor
DE19940581C2 (de) * 1999-08-26 2001-07-26 Infineon Technologies Ag Verfahren zur Herstellung integrierter Sensoren
DE19949611B4 (de) * 1999-10-14 2007-05-31 Infineon Technologies Ag Drehratensensor
DE19950061A1 (de) * 1999-10-16 2001-04-19 Bosch Gmbh Robert Sensorelement, insbesondere Drehratensensor
US7581443B2 (en) * 2005-07-20 2009-09-01 The Boeing Company Disc resonator gyroscopes
US7994877B1 (en) 2008-11-10 2011-08-09 Hrl Laboratories, Llc MEMS-based quartz hybrid filters and a method of making the same
US8766745B1 (en) 2007-07-25 2014-07-01 Hrl Laboratories, Llc Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same
FR2856789B1 (fr) * 2003-06-27 2005-08-26 Thales Sa Gyrometre a masse vibrante
US7287428B2 (en) * 2004-04-14 2007-10-30 Analog Devices, Inc. Inertial sensor with a linear array of sensor elements
US7832271B2 (en) * 2005-05-24 2010-11-16 Japan Aerospace Exploration Agency Gyroscope
US8272616B2 (en) * 2006-08-04 2012-09-25 Tjm Design Corporation Rotation mechanism for laser emitter
US7555824B2 (en) 2006-08-09 2009-07-07 Hrl Laboratories, Llc Method for large scale integration of quartz-based devices
DE102007030120B4 (de) 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor
US10266398B1 (en) 2007-07-25 2019-04-23 Hrl Laboratories, Llc ALD metal coatings for high Q MEMS structures
DE102007035806B4 (de) * 2007-07-31 2011-03-17 Sensordynamics Ag Mikromechanischer Drehratensensor
US8151640B1 (en) 2008-02-05 2012-04-10 Hrl Laboratories, Llc MEMS on-chip inertial navigation system with error correction
US7802356B1 (en) 2008-02-21 2010-09-28 Hrl Laboratories, Llc Method of fabricating an ultra thin quartz resonator component
US8176607B1 (en) 2009-10-08 2012-05-15 Hrl Laboratories, Llc Method of fabricating quartz resonators
US8912711B1 (en) 2010-06-22 2014-12-16 Hrl Laboratories, Llc Thermal stress resistant resonator, and a method for fabricating same
EP2865990A4 (en) * 2012-06-22 2016-03-16 Nat Inst Of Advanced Ind Scien DEVICE FOR MEASURING ROTATION ANGLE ACCELERATION
US9250074B1 (en) 2013-04-12 2016-02-02 Hrl Laboratories, Llc Resonator assembly comprising a silicon resonator and a quartz resonator
US9599470B1 (en) 2013-09-11 2017-03-21 Hrl Laboratories, Llc Dielectric high Q MEMS shell gyroscope structure
US9977097B1 (en) 2014-02-21 2018-05-22 Hrl Laboratories, Llc Micro-scale piezoelectric resonating magnetometer
US9991863B1 (en) 2014-04-08 2018-06-05 Hrl Laboratories, Llc Rounded and curved integrated tethers for quartz resonators
US10308505B1 (en) 2014-08-11 2019-06-04 Hrl Laboratories, Llc Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
US10031191B1 (en) 2015-01-16 2018-07-24 Hrl Laboratories, Llc Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
US10110198B1 (en) 2015-12-17 2018-10-23 Hrl Laboratories, Llc Integrated quartz MEMS tuning fork resonator/oscillator
US10175307B1 (en) 2016-01-15 2019-01-08 Hrl Laboratories, Llc FM demodulation system for quartz MEMS magnetometer
US11237000B1 (en) 2018-05-09 2022-02-01 Hrl Laboratories, Llc Disk resonator gyroscope with out-of-plane electrodes
CN109059998B (zh) * 2018-08-16 2020-11-06 湖南袁禾农业科技有限公司 一种测定辐射波源闪烁频率的装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2056580T3 (es) * 1990-05-18 1994-10-01 British Aerospace Sensores inerciales.
US5377544A (en) * 1991-12-19 1995-01-03 Motorola, Inc. Rotational vibration gyroscope
US5313835A (en) * 1991-12-19 1994-05-24 Motorola, Inc. Integrated monolithic gyroscopes/accelerometers with logic circuits
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
DE19523895A1 (de) * 1995-06-30 1997-01-02 Bosch Gmbh Robert Beschleunigungssensor

Also Published As

Publication number Publication date
EP0939883A1 (de) 1999-09-08
CN1286751A (zh) 2001-03-07
WO1998023917A1 (de) 1998-06-04
DE19648425C1 (de) 1998-01-02
US6094985A (en) 2000-08-01
JP2001504587A (ja) 2001-04-03

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