KR19990007666A - Optical dimension / shape / surface roughness measuring device - Google Patents

Abstract

The present invention relates to an optical dimension / shape / surface roughness measuring device which is integrally provided with a two-dimensional dimensional measurement and a three-dimensional shape / surface roughness measuring function for an object to be measured, and an optical system that is a component of the measuring unit 30. The second optical system includes a first optical system 50 for measuring two-dimensional dimensions of the measurement target object P and a PZT actuator 52a for fine displacement in the Z-axis direction for three-dimensional shape / surface roughness measurement. 52b) is integrally formed on the rotatable turret 48, and the measurement / control unit 10 corresponds to the selection of the two-dimensional or three-dimensional dimensional measurement method for the measurement object and the selected measurement method. The two-dimensional measurement of the object measurement operation unit 120 for performing the measurement result calculation, the data memory 122 for storing the screen data and the measurement result for setting the process of the measurement method, and the measurement object (P) Dimensions for which programs are stored The dimension measurement program storage unit 124 and the measurement program registration unit 126 for the measurement of the three-dimensional shape / surface roughness of the measurement target object P are integrally configured, and the measurement target object P Two-dimensional or three-dimensional shape / surface roughness measurement can be performed selectively or interchangeably.

Description

Optical dimension / shape / surface roughness measuring device

The present invention relates to an optical dimension / shape / surface roughness measuring apparatus, and more particularly, to integrate a two-dimensional dimension and a three-dimensional shape / surface roughness measuring function of an object to be measured, thereby providing two-dimensional and three-dimensional dimensions of an object to be measured. An optical dimension / shape / surface roughness measuring apparatus capable of selectively or alternately measuring dimensional shape / surface roughness.

As is well known, as the field of electronic engineering or mechanical engineering has developed remarkably, the miniaturization and precision of electronic parts and mechanical parts have been accelerated, and such small electronic parts and / or machines In order to confirm the result of the processing or manufacture of the part, the measurement of the high precision of the dimensions, the shape and the surface roughness must be performed. For example, the dimensions, shapes, and / or surface roughness of semiconductor wafers as electronic components and / or micropatterns of integrated circuits processed on the semiconductor wafers cannot be measured by application of well-known contact object measuring devices. In the case of the contact surface roughness measuring instrument of a small precision mechanical part using the stylus, which is used in industrial field in recent years, the tip of the stylus not only causes minute scratches on the surface of the object, It is impossible to get information about the area.

In view of such a point, as a measure for measuring the dimensions of an object to be measured, such as an electronic part or a mechanical part, a light beam emitted from a light source is projected onto the object to be measured to obtain the size of the object to be measured in a non-contact manner. An optical two-dimensional dimensional measuring apparatus has been proposed and has been applied to practical use.

In addition, the pattern of light beams emitted from the light source is projected onto the object to be measured and the shape (and surface roughness) of the object to be measured is extracted by comparing the light beams modified according to the shape of the object to be compared with the reference pattern. An optical three-dimensional shape measuring device has also been proposed and applied to practical use.

However, the two-dimensional measuring device for measuring the dimensions by applying the light beam to the measuring object and the three-dimensional measuring device for measuring the shape (and surface roughness) of the measuring object are currently independently designed, for example, In order to perform two-dimensional and three-dimensional shapes of an object in a series of measurement processes, two-dimensional dimension measuring devices and three-dimensional shape / surface roughness measuring devices must be used interchangeably. Not only is the task of measuring dimensional dimensions and three-dimensional shape / surface roughness cumbersome, but the measurement takes a long time and is inefficient.

Moreover, such two-dimensional and three-dimensional shape / surface roughness measuring instruments are shipped separately designed, thereby increasing the economic burden as individual purchases are required.

Therefore, there is a need for a measurement system in a form capable of performing two-dimensional dimensional measurement and three-dimensional shape / surface roughness measurement on an object to be measured integrally in a short time.

The present invention has been made in view of the above-described prior art, and the functions for measuring two-dimensional dimensions and three-dimensional shape / surface roughness are integrally integrated to measure two-dimensional dimensions and three-dimensional measurements on an object to be measured. It is an object of the present invention to provide an optical dimension / shape / surface roughness measuring apparatus in which shape / surface roughness measuring operations can be performed selectively or interchangeably.

In order to achieve the above object, according to a preferred embodiment of the present invention, a two-dimensional dimensional measurement and three-dimensional shape / surface roughness measurement of the object to be measured CCD integrated with the optical system to perform the measurement object A measurement unit for selectively performing two-dimensional dimensional measurement and three-dimensional shape / surface roughness measurement on the measurement object based on an image from a camera, a selection of a measurement method for the measurement object, and selection from the CCD camera A measurement / control unit which calculates an image as a measurement result and executes output by a monitor and / or a printer; The measurement / control unit includes an object measurement calculation unit which selects a two-dimensional dimensional measurement method / 3 dimensional shape / surface roughness measurement method for the measurement object and calculates a measurement result corresponding to the selected measurement method; Data memory for storing the screen data and the measurement result for setting the process, and two-dimensional stored program for measuring the two-dimensional dimensions of the measurement target object executed according to the measurement method selection input externally applied to the object measurement operation unit. And a three-dimensional shape / surface roughness measurement program register for measuring a three-dimensional shape / surface roughness of the measurement target object to be executed according to the externally applied measurement method selection input. An optical dimension / shape / surface roughness measuring device is provided.

Preferably, in accordance with the present invention, the optical system is a first optical system for measuring two-dimensional dimensions of the measurement target object to be suitably selected for two-dimensional measurement and three-dimensional shape / surface roughness measurement of the selected measurement object. And a second optical system including a piezoelectric actuator for three-dimensional shape / surface roughness measurement, is rotatably mounted on a single rotating turret provided in the measuring unit.

According to the optical dimension / shape / surface roughness measuring apparatus of the present invention having the above-described configuration, a first optical system for measuring two-dimensional dimensions of an object to be measured, a three-dimensional PSI measuring method and a three-dimensional WSI for the object to be measured A second optical system for the measuring method is installed on the turret so as to be selectable and furthermore the two-dimensional dimensions of the object to be measured by selection of icons or menus displayed on the measurement menu initial screen displayed on the monitor under the control of the measurement / control unit. Measurement and / or measurement of three-dimensional shape / surface roughness can be performed selectively or alternately.

1 is a view showing the configuration of an optical dimension / shape / surface roughness measuring apparatus according to a preferred embodiment of the present invention,

Figure 2a is a schematic diagram showing the configuration of the optical system for measuring the two-dimensional dimensions of the optical system shown in FIG.

Figure 2b is a schematic diagram showing the configuration of the optical system for measuring the three-dimensional shape / surface roughness of the optical system shown in FIG.

3 is a block diagram of a measurement / control unit and a measurement unit of an optical dimension / shape / surface roughness measuring apparatus according to the present invention;

4A is a schematic diagram for explaining an object measurement initial screen displayed on a monitor of an optical dimension / shape / surface roughness measuring apparatus according to the present invention;

Figure 4b is a view for explaining the illumination setting window displayed on the monitor of the optical dimension / shape / surface roughness measuring apparatus according to the present invention,

4C is a view for explaining a lens magnification setting window displayed on a monitor of an optical dimension / shape / surface roughness measuring apparatus according to the present invention;

4D is a view for explaining an image density value adjusting window displayed on a monitor of an optical dimension / shape / surface roughness measuring apparatus according to the present invention;

5A is a view for explaining a measurement result displayed in a measurement result characteristic window of a monitor when two-dimensional dimension measurement is performed by an optical dimension / shape / surface roughness measuring apparatus according to the present invention;

5B is a view for explaining a state in which the measurement result characteristic obtained by the measurement result displayed in the measurement result characteristic window described in FIG. 4 is displayed in the measurement result characteristic window;

FIG. 6A is a view for explaining a window displayed on a monitor when measuring a three-dimensional shape / surface roughness by PSI (Phase Shifting Interferometry) method in the optical dimension / shape / surface roughness measuring apparatus according to the present invention; FIG.

6B is a view illustrating a window for driving a piezoelectric (PZT) actuator in an optical dimension / shape / surface roughness measuring apparatus according to the present invention;

7A and 7B are diagrams for explaining three-dimensional shape / surface roughness measurement results of an object to be measured performed by the optical dimension / shape / surface roughness measuring apparatus according to the present invention.

* Description of the symbols for the main parts of the drawings *

10: measurement / control unit, 12: control / operating unit,

30: measuring unit, 50: first optical system,

52a: piezoelectric actuator (PZT), 52b: second optical system,

76: CCD camera, 120: object measurement calculation unit,

122: data memory, P: object to be measured,

124: two-dimensional dimension measurement program storage,

126: 3D shape / surface roughness measurement program register.

Hereinafter, with reference to the accompanying drawings, the present invention will be described in detail.

1 is a schematic perspective view showing the overall configuration of an optical dimension / shape / surface roughness measuring apparatus according to the present invention. In the figure, reference numeral 10 denotes the measurement of geometric two-dimensional and three-dimensional dimensions (steps, points, lines, circles, angles, ---) and / or three-dimensional shape and surface roughness of the object to be measured (P). Indicates a measurement / control unit for executing processing related to screen output / print output of measurement results. Preferably, the measurement / control unit 10 is a process for measuring the optical two-dimensional and three-dimensional dimensions of the measurement target object P and the three-dimensional shape / surface roughness, and the two-dimensional for deriving the measurement results. Software of Windows 95 environment with at least 64Mb RAM to control the calculation of dimensions and three-dimensional shape / surface roughness and the output of two-dimensional and three-dimensional shape / surface roughness results obtained by the operation. It will include a control / operator 12 consisting of computers operating at least 166 MHz of Pentium.

In addition, the control / operation unit 12 measures the measurement method of the measurement object P (that is, two-dimensional dimensional measurement or three-dimensional phase shifting interferometry (PSI) measurement / three-dimensional white-light scanning interferometry (WSI) measurement). A menu for setting a process related to the measurement of the measurement target object P as well as a keyboard 14 and a mouse 16 as input means for setting the measurement work environment and the setting of the measurement work environment related thereto. The monitor 18 which visually outputs the result of the measurement by the measurement method set through the screen and its menu screen, and the printer 20 for hard copying the measurement result of the measurement object P are connected.

In FIG. 1, reference numeral 30 denotes two-dimensional and three-dimensional dimensions (steps, points, lines, circles) of the measurement target object P under the control of the control / operating unit 12 constituting the measurement / control unit 10. Angle, area, polygonal measurement) and / or measurement unit for carrying out the measurement of three-dimensional shape and surface roughness.

The measuring unit 30 includes PZT control execution means for controlling the driving of a piezoelectric (PZT) actuator for micro position displacement that provides a working environment for measuring the dimensions, shape and surface roughness of the object to be measured. Pneumatic control execution means for the X / Y / Z axis movement of the measurement object (P) and the electric motor control execution means includes a controller body (30a) is housed, the front of the controller body (30a) a power switch 32 and the motor power lamp 34 are provided.

In addition, the measuring unit 30 is mounted on the controller main body 30a and on the vibration damping table 36 for absorbing the vibrations that can be transmitted during measurement of the measuring object P, and on the vibration damping table 36. Electric motors provided on the installed stone platform 38 and housed in the controller main body 30a in response to manual control by the X-axis / Y-axis table moving knobs 40a and 40b or control of the control / operation unit 12. XY table 40 for displacement of the measurement target object P in the X-axis / Y-axis direction by an electric motor driving method operated by the control execution means, which is located on the XY table 40 and the measurement target object (P) is placed on the upper side and the tilt table 42 for performing a tilting action for adjusting the horizontal position of the object (P) to be measured, and the micro-movement / coarse knob 44a provided at a predetermined position Probes provided to be movable in the vertical direction above the front surface of the support 44 fixed to one side of the 38 ( 46) is installed in the turret 52 provided at the lower end of the probe 46 and fine by the first optical system 50 and the piezoelectric actuator 52a for the two-dimensional measurement of the measurement object (P) And a second optical system 52b for three-dimensional shape / surface roughness measurement of the measurement target object P, and a filter 54 that is interchangeable for the measurement process on the measurement target object P. do.

2A and 2B illustrate a three-dimensional shape of the first optical system 50 and the measurement object P, which are applied to the two-dimensional dimension measurement of the measurement object P in conjunction with the rotation of the turret 48. It is a schematic diagram which shows the structure of the 2nd optical system 52b applied to surface roughness measurement.

The first optical system 50 applied to the two-dimensional dimensional measurement of the measurement target object P shown in FIG. 2A includes a light source 60 that emits white light beams, and a light beam from the light source 60 as parallel light. A first lens 62 for converting, a second lens 64 for condensing the parallel light, a third lens 66 for converting the condensed light beam into parallel light, and a total reflection mirror for converting the optical path of the parallel light ( 68) a beam splitter 70 having a split face 70a for dividing the light beam reflected by the total reflection mirror 68, and a light beam split into the split face 70a and incident on the measurement object; And converts the reflected light beam from the measurement target object into parallel light by the objective lens 72 and converted into parallel light by passing through the split surface 70a of the beam splitter 70. An imaging lens 74 for focusing the reflected light beam and the imaging lens 74 It is equipped with a CCD (Charge Coupled Device) camera 76 which captures the reflected light beam from the formed measurement object and provides a pixel signal to the control / operation unit 12 to obtain an image of two-dimensional dimension measurement of the measurement object. It is composed.

In addition, the second optical system 52b applied to the three-dimensional shape / surface roughness measurement of the measurement target object P shown in FIG. 2B includes a light source 60 that emits white light and a light source 60 from the light source 60. A first lens 62 for converting the light beam to parallel light, a second lens 64 for condensing the parallel light, a third lens 66 for converting the focused light beam to parallel light, and converting the optical path of the parallel light A beam splitter 70 having a total reflection mirror 68, a split surface 70a for dividing the light beam reflected by the total reflection mirror 68, and a light beam split and incident on the split surface 70a An objective lens 72 for irradiating a target object and parallelizing the reflected light beam from the measurement target object, and being parallelized by the objective lens 72 to pass through the split surface 70a of the beam splitter 70 An imaging lens 74 that focuses an incident reflected light beam and an imaging lens 74 A CCD (Charge Coupled Device) camera 76 which acquires an image of a three-dimensional shape / surface roughness of an object to be measured by imaging a reflected light beam from the image-measured object and providing a pixel signal to the control / operator 12. Measurement of the shape / surface roughness of the measurement target object P with respect to the reference plane 78 forming a reference beam for the light beam focused by the objective lens 72 and the reference beam by the reference plane 78 is performed. And a PZT actuator 52a for fine adjustment.

Here, the second optical system 52b is an optical interference phenomenon provided by the optical interferometer constituted by the PZT actuator 52a, the reference plane 72, and the optical splitter 80 (brightness when a plurality of light beams overlap). Incident light beam is divided into the reference light beam and the measurement light beam, and the divided reference light beam and the measurement light beam are respectively incident on the measurement plane and the reference plane, and the plurality of light beams are reflected back from the measurement plane and the reference plane. Become focused. Therefore, an interference fringe is generated by the optical path difference, and the interference fringe is captured by the CCD camera 76 and applied to the control / operator 12 so that the 3D shape can be reproduced by the image processing and analysis procedure. do.

Preferably, the first and second optical systems 50 and 52b employed in the optical dimensional / shape measuring device according to the present invention are mounted to a turret 48 having a forward / reverse rotational structure, FIGS. 2A and 2B. The common components of the first and second optical systems 50 and 52b shown in Fig. 3 are shared while allowing only a portion of the objective lens 72 shown in Fig. 2A to be rotated during two-dimensional dimension measurement. In the dimensional shape / surface roughness measurement, it is preferable that only the portions of the piezoelectric actuator 52a, the objective lens 72, the reference plane 78, and the optical splitter 80 constituting the optical interferometer shown in FIG. Done.

In addition, PSI (Phase Shifting Interferometry) measurement and WSI (White-light Scanning Interferometry) measurement are known as a three-dimensional shape measurement technique which can be measured by the optical interference phenomenon of the second optical system 52b. As is well known, the PSI measurement reproduces an ultra-precise three-dimensional surface shape by analyzing an interference fringe generated by a path difference between a light beam incident and reflected from the reference plane 78 and the measurement object P shown in FIG. 2B. The WSI measurement is performed by measuring the position where the value of the interference fringe is maximized while driving the piezoelectric actuator 52a of FIG. 2B using the limited coherence of white light to measure a three-dimensional shape having a high step height. It is an optical measuring technique.

FIG. 3 shows a block diagram of the measurement / control unit 10 and the measurement unit 30 of the optical dimension / shape / surface roughness measuring apparatus shown in FIG. 1. In the figure, reference numeral 120 denotes the controller main body 30 while the keyboard 14 and the mouse 16 as input means are connected to the input port and control the setting process of the measuring method for the measurement object P. Pulse signal from the encoder added to the stepping motor (indicated by reference numeral 132 in FIG. 3) and the first or second optical system 50 52b) receives a video signal from the CCD camera 76, which is a component of 52b), calculates two-dimensional dimensional measurement or three-dimensional shape or surface roughness of the measurement object P, and measures obtained by the calculation Displays the object measurement calculation unit that displays the result on the screen / printer.

In addition, 122 denotes a data memory in which menu screen data for a measurement operation of a corresponding optical dimension / shape / surface roughness measuring device is registered and a measurement result is stored. The data memory 122 stores and reproduces data. This possible disk type memory is preferably employed.

Reference numeral 124 denotes a two-dimensional dimensional measurement program storage unit in which an execution program applicable to two-dimensional dimensional measurement of the measurement target object P is registered, and 126 denotes a measurement of three-dimensional shape / surface roughness of the measurement target object P. Applicable execution programs (preferably programs for PSI measurement and WSI measurement) represent registered three-dimensional shape / surface roughness measurement program registers. Here, the two-dimensional dimensional measurement program storage unit 124 and the three-dimensional shape / surface roughness measurement program registration unit 126 may be secured by allocating some memory areas of the data memory 122.

In FIG. 3, reference numeral 128 designates the initial measurement state of the object measurement initial screen and the measurement object P and the measurement result on the monitor 18, and outputs a hard copy of the measurement result. A data output control unit for outputting the measurement result data to the printer 20.

In FIG. 3, reference numeral 130 denotes a stepping motor as an electric motor for focusing while extending the measurement area in the X- / Y-axis when performing the measurement according to the measurement method set for the measurement object P. 132 denotes a motor control unit as electric motor control execution means for controlling 132, and 134 denotes data for securing an optimum illumination intensity when measuring the object to be measured P and / or drive data of the PZT actuator 52a. The data conversion unit (Digital-Analog Converter (DAC)) shown in the analog conversion and provided to the lighting control unit 136 and the PZT actuator 138 as corresponding lighting control execution means is shown.

In FIG. 3, reference numeral 140 denotes an encoder counter that counts pulse signals (ie, rotation signals) from an encoder added to the stepping motor 132 and applies them to the object measurement calculator 120 as current position data. Reference numeral 142 denotes an image signal from the CCD camera 76 to the object measurement calculation unit 120 during two-dimensional dimensional measurement or three-dimensional shape / surface roughness measurement by the first or second optical system 50; 52b. Represents an image processing board to interface.

Next, the two-dimensional dimensional measurement performed by the optical dimension / shape / surface roughness measuring device according to the present invention having the above-described configuration will be described.

First, when the power switch 32 shown in Fig. 1 is set to the power ON state, the motor power lamp 34 is turned on so that the corresponding optical dimension / shape / surface roughness measuring device is set to an operating state, and the measurement is performed. The control / operation unit 12 and the monitor 18 and the printer 20 of the control unit 10 are set to the power ON state.

Then, under the control of the object measurement operation unit 120 of the control / operation unit 12, the object measurement initial screen shown in FIG. 4A is displayed on the monitor 18 through the data output control unit 128.

According to the object measurement initial screen displayed on the monitor 18 shown in FIG. 4A, 'File', 'Measurement', 'Data Processing', 'Image', 'Hardware', and 'Window Opener' including a submenu A first menu item window 180a providing a function of ',' and 'help' and a second menu item window 180b in which a plurality of icons related to the measurement of the object to be measured are listed are included. Preferably, the second menu item window 180b includes an icon 182 for designating a two-dimensional dimensional measurement of an object to be measured, an icon 184 for designating a three-dimensional PSI measurement using optical phase interference, And an icon 186 for designating a three-dimensional WSI measurement using white light interference.

In addition, the object measurement initial screen includes a window 300 including a geometric element measurement and a setting menu for the edge detection direction and a dimension measurement result window 350 dedicated to the fluid diameter, and a machine position in the X / Y / Z axis direction. The machine position window 360 and the measurement result characteristic window 400 in which the measurement result characteristics are displayed are also included.

When the object measurement initial screen is displayed on the monitor 18, the 2D dimension measurement for the measurement object is selected by selecting the 2D dimension icon (or '2D dimension measurement' as a submenu of the 'Measurement' menu) → Mounting of the measuring object P → Lens magnification selection of the first optical system 50 → Lighting adjustment → Focus adjustment → Image adjustment → Edge detection → Coordinate value check → 2D relative measurement based on coordinate values → Storage → Geometric elements Enter View program Select → Load measurement results → View geometric elements → Output measurement results.

In the two-dimensional dimension measurement process, the two-dimensional dimension measurement for the measurement object P is selected by clicking the two-dimensional dimension icon 182 among a plurality of icons displayed on the object measurement initial screen on the monitor 18. Selection by (16) or by designating 'two-dimensional dimension measurement' as a submenu included in 'measurement' of the first measurement menu window 180a.

Further, after mounting the measurement target object P on the tilt table 42, the turret 52 is rotated to select the first optical system 50 for two-dimensional dimension measurement, and the measurement target object P To be located on the

In the two-dimensional dimension measurement process, for example, when the illumination setting operates the illumination setting icon of the second menu item window 180b defined on the object measurement initial screen, the illumination setting window of the type illustrated in FIG. 18) at a predetermined position. According to the illumination setting window, the illumination setting method is composed of coaxial illumination, emission illumination, and fallout illumination, so that the type of illumination can be optimally set according to the measurement target object P in the range of 0 to 255, respectively.

In addition, when the magnification selection of the first optical system 50 is selected in the two-dimensional dimension measurement process, when the magnification selection icon of the second menu item window 180b defined in the object measurement initial screen on the monitor 18 is selected, The magnification setting window illustrated in FIG. 4C is displayed at a predetermined position of the monitor 18 so that the selection of the corresponding lens and magnification is possible. Here, two-dimensional dimensional measurement should be performed by selecting a general objective (m.o), and interferometry objective (i.o) is applied to the three-dimensional shape / surface roughness measurement. Preferably, according to the present invention, when the mouse 16 designates the 'three-step surface auto focus' icon displayed on the object measurement initial screen on the monitor 18, a message for confirming the magnification of the objective lens is displayed. If it is displayed at a predetermined position on the monitor 18 and the 'confirmation' item is specified on the message, it is checked whether the lens selected in the lens magnification setting process is the same lens. The message 'Auto focus failed' is displayed. In addition, during execution of the three-step autofocusing function, the focusing progress state by the bar graph is displayed at a predetermined position of the monitor 18.

In the two-dimensional dimensional measurement process, the image control selects the 'image' on the first menu item window 180a displayed on the monitor 18 to select the 'image adjustment' item included in the submenu. If the window 18 for adjusting the image density is illustrated at a predetermined position of the monitor 18, the measurement result is set by setting the 'range' and 'offset' of 0 to 255 steps displayed on the screen. Objectivity can be secured.

When the condition setting for the two-dimensional dimension measurement is made by the above-described process, it is possible to actually perform the actual measurement operation on the measurement target object P, which is captured by the first optical system 50 The image of the measurement target object P is input to the object measurement calculator 120 through the image processing board 142 through the CCD camera 76, and the object measurement calculator 120 is a data output controller 128. ), The image of the measurement target object P imaged on the monitor 18 is displayed (see FIG. 4A).

In this state, for example, to measure the distance between the point 'P1' and the point 'P2' from the image P 'of the measurement object P displayed on the monitor 18, the cursor of the mouse 16 is moved. After designating the 'P1' position by shifting and selecting the measuring element 302 in the 'measurement element' window 300 on the monitor 18, the 'P2' position is designated. The coordinate values of the X / Y / Z axis at the 'P2' position are calculated by the object measurement computing unit 120 and displayed on the dimension measurement result display window 350 on the monitor 18 (see Fig. 5A).

When the coordinate values 350a and 350b are selected by the mouse 16 in the dimension measurement result display window 350 shown in FIG. 5A and then the coordinate values 350c are selected, the object measurement calculation unit 120 performs the selection. Based on the point-to-point distance measurement program stored in the two-dimensional dimension measurement program storage unit 124, the point-to-point distance between the point 'P1' and the point 'P2' is obtained, and the measurement result on the monitor 18 in the form shown in FIG. 5B. It is to be displayed in the characteristic window (400).

In addition, when the line 'A' and the line 'B' are designated in the image of the measurement object P displayed on the monitor 18, the distance between the lines can be measured.

In addition, according to the present invention, when the shape of the measurement target object P is circular in the two-dimensional dimensional measurement process, the diameter or the roundness can be measured, for example, the first optical system 50 to capture the image The measurement element 304 is selected on the geometric element measurement window 300 after selecting three edges on the circular measurement object P for the image of the circular measurement object P indicated on (18). If X is specified, the X / Y / Z coordinate value of the circular measurement object P is displayed on the 2D measurement result window 350, and the X / Y / Z coordinate value is selected by the mouse 16. In this case, the diameter and roundness of the circular measurement object P are displayed on the 2D measurement result characteristic window 400.

In addition, according to the present invention it is also possible to measure the length of the short axis and the long axis of the measurement object (P) of the elliptical shape by the measuring method of the diameter and roundness of the circular measurement object (P).

Further, according to the present invention, in the two-dimensional dimensional measurement process, for example, when the measurement object P has a constant angle, two of the measurement object P with the support of the 'measurement of geometric elements' displayed on the window 300. The angle can be measured for the two line data.

Further, according to the present invention, the automatic edge detection function at the time of dimension measurement is realized by setting the four-direction button of the 'edge detection direction' displayed on the window 300 on the monitor 18.

On the other hand, if the icon of the geometric element view (dimension management program) is selected on the object measurement initial screen displayed on the monitor 18, it is possible to compare the drawing dimension and the measured value through comparison with the actual design drawing. The function makes it possible to realize a two-dimensional shape in the picture by each coordinate value of the measuring point.

In addition, for the two-dimensional shape and the measurement result that have been measured and edited, the function of enlarging or reducing the image is provided on the geometric element view screen, and after entering the 'preview' screen and setting the content and format to be output, Print 'is executed.

Next, a three-dimensional shape and surface roughness measurement process by the optical dimension / shape / surface roughness measuring apparatus according to the present invention will be described.

First, in the case of measuring the three-dimensional shape and surface roughness of the measurement target object P by applying the PSI measurement method, mounting of the measurement target object → setting of measurement items → correction of magnification of the second optical system 52b → It is executed by selecting lighting → opening filter → finding interference pattern → unfolding interference pattern → mounting filter → lighting control → setting measurement area → setting up a decimal point → starting measurement → processing data → interpreting measurement results.

Here, the basic measurement principle of the PSI method for the measurement object (P) is that the light beam incident from the light source 60 provided in the second optical system 52b shown in Figure 2b is separated by the beam splitter 70 When incident on the reference plane and the measurement surface, respectively, two light beams overlap each other by the optical path difference, and an interference fringe is generated. PSI measurement uses the optical phase interference to obtain the shape of the measurement surface. At this time, while continuously moving the reference plane 78 by a constant phase three or more times by the PZT actuator 52a, the interference fringes are measured at least three times by the CCD camera 76 to measure the measurement luminous flux on the wavefront of the reference light beam. It is possible to measure the height of the surface with respect to the measurement object (P) by comparing the relative phase difference of the wavefront.

In the three-dimensional shape / surface roughness measurement process of the object to be measured by the PSI measuring method, the mounting of the object P is set to the origin of the XY table 40 and the size of the object P is measured. By adjusting the Z-axis accordingly, the object to be measured P is horizontally positioned on the tilt table 42.

In addition, in the three-dimensional shape / surface roughness measurement process, the measurement item may be set by selecting 'measurement' included in the first menu item window 180a of the object measurement initial screen displayed on the monitor 18. Is executed by selecting the '3D-PSI' menu included in the submenu of 'or' or by selecting the icon 184 displayed in the second menu item window 180b on the monitor 18, and selection of such a PSI measurement method is performed. If so, the PSI measurement window including 'measurement area', 'calculated decimal point', 'PSI detail setting', etc., to be set before measurement start is displayed at a predetermined position of the monitor 18.

In addition, in order to adjust the number of pixels calculated according to the lens magnification of the second optical system 52b which is selectable by the rotation of the turret 48 in the three-dimensional shape / surface roughness measurement process, an appropriate number of pixels of the CCD camera 76 is used. To set the magnification to match the magnification of the lens, select 'measurement' on the first measurement menu window 180a and select 'magnification' included in the submenu similarly to the above process. It is executed on the magnification setting window illustrated in FIG. 4C shown in FIG.

In addition, the 'data processing' item included in the first measurement menu window 180a is a set of functions for the user to obtain accurate data required, and the data processing items include 'data recovery' and 'low pass filter'. Includes features like 'median filter', 'FFT filter' and 'tilt rejection'. In this case, the data recovery is a function that infers a portion not measured by noise or an external environment in a program, and a low pass filter passes noise or edges caused by measuring only low frequencies when measuring 3D shapes. 3D shape is smoothly processed by removing high frequency components from the median filter. The median filter removes noise generated when measuring 3D shape by taking the median of adjacent measuring points. Similarly, the FFT filter (waveform component removal) removes low frequencies below the cut off length and passes high frequencies to see only roughness components.

In addition, the 'hardware' item included in the first measurement menu window 180a on the object measurement initial screen displayed on the monitor 18 is' PZT drive ',' PZT origin return ',' PZT characteristic setting ',' It includes functions such as 'lighting', 'XYZ axis drive', 'XYZ axis home position return', 'XYZ axis position window open', 'XYZ axis origin setting'.

Here, when the PZT actuator 52a is driven, the PZT drive window (refer to FIG. 6B) is displayed at a predetermined position of the monitor 18. In the PZT drive window, the mouse 14 It is a function to set the start position and end position of the PZT actuator by pulling down or up). In other words, the portion of the interference pattern is blurred by pulling up the control button on the PZT drive window by the mouse 14 is the measurement start position, while the portion of the interference pattern is blurred by dragging the adjustment button is the measurement end position, so when measuring The driving range of the PZT actuator 52a coincides with the range in which the interference fringe is generated.

In addition, the PZT home position return is an additional function applicable when the home position return is required for the performance test or measurement of the piezoelectric actuator.

In the three-dimensional shape measurement process, the light adjustment is performed as described in FIG. 4B to adjust brightness according to the sharpness of the measurement target object displayed on the screen. It is preferable to set the optimum condition for image acquisition by adjusting the.

In addition, the XYZ axis position window (ie, the machine position window) 360 is displayed at a predetermined position (lower left side) of the object measurement initial screen as shown in FIG. 4A, and is read through the encoder counter shown in FIG. 3. When the mouse 16 is clicked on the numerical values of 'rising' and 'falling', the Z axis is vertically displaced by the numerical value and the displacement of the Z axis is used to find the focus or interference pattern. In this case, it is designed to enable automatic transfer.

Subsequently, in the state where the initial environment is set by the above process, the PSI measurement for the actual measurement object is performed by selecting the 3D-PSI measurement in the first or second measurement menu windows 180a and 180b. 6) shows a 'PSI measurement' window of the type shown in FIG. 6A, in which the 'measurement area', 'number of pixels to be calculated', 'PSI detail setting', etc. to be set before the measurement starts. The item is included.

Here, the setting of the measuring area is performed by the setting method by the keyboard 14 and the setting method by the mouse 16. The setting of the measuring area by the keyboard 14 is illustrated in FIG. 6A. By moving the cursor directly to 'X initial value', 'Y initial value', 'X length', and 'Y length' of the measurement area included in the PSI measurement window, the area value can be inputted. The measurement area can be set by setting the area to be measured in the image of the measurement target object P displayed on the monitor 18 in a rectangular shape while pressing the left button of the mouse 16.

The number of pixels to be calculated in the PSI measurement window is a function for calculating the number of pixels to be stored and calculated for the measurement data obtained from the CCD camera 76. According to the present invention, 1 times, 1 / It is designed to set 4 times, 1/9 times and 1/16 times.

In addition, when measuring the measurement object P by the PSI method, the focus needs to be adjusted and the interference fringes must be found within the range where the focus is formed. The focus and interference fringes can be set automatically and manually. Done. That is, in the automatic focusing, the measurement object is monitored by designating the 'motor operation' of the 'hardware' item of the first measurement menu window 180a displayed on the monitor 18 or the icon on the second measurement menu window 180b. In the manual focusing, the Z-axis is adjusted up and down using the Z-axis adjusting knob so that the measurement target object P appears in the video display window on the monitor 18. At this time, when the measurement object appears on the image display window on the monitor 18 by lighting control, a rectangle is drawn on the display window using the mouse 16, and '2' on the second measurement menu window 180b is used. Step PSI Interference Pattern Auto Focusing 'icon is automatically adjusted. When the focus is adjusted by such a process, the image concentration value adjustment item is opened on the first or second object measurement initial screens 180a and 180b to maximize the shape of the graph in the Y-axis direction and the X-axis direction. By adjusting the Y-axis range and offset value to be in the center, the function of focusing by the automatic or manual method is completed.

In addition, as described above, after adjusting the image density value, an interference fringe must be found, and the interference fringe can be performed in a manual manner and an automatic manner similar to the above focusing. That is, in the case of the manual method, the Z-axis uses the stepping motor 132 or the fine / coarse knob 44a, whereas in the case of the automatic method, the two-step PSI interference pattern is automatically included in the second measurement menu window 180b. 'Focus' icon so that an interference fringe appears on the image display window of the monitor 18, and then use the micrometer knob provided on the tilt table 42, or the fine / coarse knob 44a of the Z axis or the stepping motor. This is done by causing the interference fringe to fully unfold on the measurement object P by the precision driving of 132.

After such a three-dimensional PSI measurement environment is set, the number of pixels for the measurement object P acquired by the CCD camera 76 is applied to the object measurement calculation unit 120 through the image processing board 142, and thus The object measuring operation unit 120 is connected to the measurement target object P captured by the CCD camera 76 based on the three-dimensional shape / surface roughness measurement program registered in the three-dimensional shape / surface roughness measurement program registration unit 126. The pixel data is calculated and outputted to the monitor 18 through the data output control unit 128 in the form shown in FIGS. 7A and 7B.

Here, the three-dimensional PSI measurement result (see FIG. 7A) of the measurement target object P displayed on the monitor 18 includes a measurement method, a measurement average, Ra (Roughness average) regarding surface roughness, Root mean square roughness (Rq), Rmax (Roughness Maximum), Rsk (Roughness skewness) and Rku (Roughness Kurtosis) And the number of pixels, data of the sampling area, and data of data processing are also included as additional information.

In addition, according to the present invention, if a predetermined section is set by the mouse 16 for a three-dimensional shape / surface roughness measurement result of the measurement object P obtained by the three-dimensional PSI measurement method. As illustrated in FIG. 7B, one-way cross-sectional shape can be observed, and line information on the X and Y axes can be obtained using the mouse 16.

Here, by performing data processing from the above-described three-dimensional shape / surface roughness measurement results, components of the characteristics (i.e., slope, etc.) of the measurement target object P are removed to obtain more accurate measurement results.

The measurement result for the measurement target object P obtained by the above process can be executed by selecting the 'output' on the monitor 18 and then inputting the required file name.

On the other hand, according to the optical dimension / shape / surface roughness measuring apparatus according to the present invention, the above-mentioned measurement is made by designating a 3D WSI measurement icon or 3D-WSI provided as a submenu of the measurement on the initial measurement screen displayed on the monitor. The 3D WSI measurement process can be performed in a similar manner to the 3D PSI measurement process of the object.

As described above, according to the optical dimension / shape / surface roughness measuring apparatus according to the present invention, since the two-dimensional dimension measuring function and the three-dimensional shape / surface roughness measuring function for the measuring object are integrated, 2D dimension measurement and 3D shape / surface roughness measurement can be performed selectively, so that not only improvement of measurement efficiency is expected but also economic advantage can be obtained.

Claims (2)

Two-dimensional dimensional measurement and three-dimensional shape / surface roughness measurement of the measurement target object P are integrated, and the measurement is performed based on an image from the CCD camera 76 that captures the measurement target object P through an optical system. A measurement unit 30 for selectively performing two-dimensional dimensional measurement and three-dimensional shape / surface roughness measurement on the object P, and an image from the CCD camera 76 of the measurement unit 30 is measured. A measurement / control unit 10 which calculates and executes the output by the monitor 18 and / or the printer 20; The measurement / control unit 10 includes: an object measurement calculation unit configured to select a two-dimensional dimensional measurement method / 3 dimensional shape / surface roughness measurement method for the measurement object P and calculate a measurement result corresponding to the selected measurement method; 120 and the data memory 122 for storing the screen data and the measurement result for setting the process of the measurement method, the measurement method being executed according to a measurement method selection input externally applied to the object measurement operation unit 120. A two-dimensional dimension measurement program storage unit 124 in which a program for measuring two-dimensional dimensions of the measurement object P is stored, and the measurement object P executed in accordance with the externally applied measurement method selection input. Optical dimension / shape / surface roughness measuring apparatus, characterized in that the three-dimensional shape / surface roughness measurement program registration unit 126 for the measurement of the three-dimensional shape / surface roughness for. The optical system of claim 1, wherein the optical system comprises a first optical system 50 for measuring two-dimensional dimensions of the object P and a piezoelectric actuator 52a for measuring three-dimensional shape / surface roughness. An optical dimension / shape / surface roughness measuring apparatus, comprising: a second optical system including a second optical system (52b) installed selectively on a single pivot turret (48) provided in the measuring unit (30).