JPH11271033A - Imaging apparatus for three-dimensional shape object - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an imaging apparatus whose imaging operation can be simplified and in which the number of components can be reduced by installing an optical-path changing means by which the optical path of projecting light onto, or reflected light from, a three-dimensional shape object by an illuminating means for every direction is changed and by which the light is incident on a CCD camera. SOLUTION: A corner part of a three-dimensional object 2 is fixed by a fixing means 3. After that, while an LED illumination part 6 is being turned on, projecting light onto the X-Y plane part of the three-dimensional shape object 2 is made incident on a CCD camera 10, and its projected image is projected onto a monitor for a projected image. Then, the three-dimensional shape object 2 is imaged, and the projected image onto the X-Y plane part is stored in an image memory. Then, an X-direction measurement stage 91 is moved, and the CCD camera 10 is arranged on the opposite side of a 90 deg.-reflecting prism 11 for the X-direction. After that, projected light onto the Y-Z plane part of the three-dimensional shape object 2 by an LED illumination part 4 is made incident on the CCD camera 10 via the 90 deg.-reflecting prismn 11 for the X-direction, and a projected image is projected onto the monitor for the projected image. Then, the three-dimensional shape object 2 is imaged, and the projected image onto the Y-Z plane part is stored in the image memory.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a three-dimensional object imaging apparatus used for measurement and the like of a three-dimensional object by image analysis, and more particularly to a three-dimensional object capable of simplifying an imaging operation and reducing the number of parts. The present invention relates to an improvement of a shape object imaging device.

[0002]

2. Description of the Related Art As this type of three-dimensionally shaped object imaging apparatus, for example, an apparatus as shown in FIG. 19 is known. That is, the three-dimensionally shaped object imaging apparatus includes an XY movement stage b on which a three-dimensionally shaped object a is placed and moves in the X-axis and Y-axis directions, and is disposed above the XY movement stage b and has a fixed focus. Alternatively, a CCD camera d on which a zoom lens c is mounted, transmitted light e provided below the XY moving stage b to illuminate the three-dimensional object a from below, and provided above the XY moving stage b. The main part of the three-dimensional object a is illuminated from above with a coaxial epi-illumination illumination f and a reflection illumination g, and the CCD camera d moves in the Z-axis direction.
And a distance measuring element i is attached to the light incident side of the CCD camera d.

The measurement of the three-dimensionally shaped object a by the three-dimensionally shaped object imaging apparatus is performed as follows. First, the measurement of the XY plane portion of the three-dimensional object a placed on the XY moving stage b is performed by the CCD camera d.
Is performed by analyzing the image of the three-dimensional object a captured by the computer. On the other hand, the measurement of the height of the three-dimensional object a in the Z-axis direction is performed by judging the sharpness of the image of the three-dimensional object a captured while appropriately moving the Z movement stage h of the CCD camera d. The focus position is obtained by the adjustment, and the amount of movement in the Z-axis direction in the Z movement stage h is measured from the obtained data of the focus position and the data of the preset reference plane. The Z-movement stage h is moved in the Z-axis direction based on a signal from the distance measuring element i set so that the distance between the CCD camera d and the Z-direction is constant. The amount of movement was measured.

[0004]

In the conventional three-dimensional object imaging apparatus shown in FIG. 19, a single CCD camera d arranged above the XY movement stage b is used as the imaging means. Since it is merely provided, when an image of a measurement target such as a hole j existing in the XZ plane portion or the YZ plane portion of the three-dimensional object a is to be taken, the measurement site is XY of the three-dimensional object a. The three-dimensional object a on the XY moving stage b so as to be a flat part
Has to be changed, and there is a problem that the imaging operation becomes complicated accordingly.

An image pickup apparatus has been proposed in which a dedicated CCD camera is arranged in each of the X, Y, and Z axes around a three-dimensional object a placed on the XY moving stage b. In this three-dimensional object imaging apparatus, at least three CCD cameras are required, and
There has been a problem that the number of parts increases and the manufacturing cost of the imaging device becomes higher.

The present invention has been made in view of such problems, and an object thereof is to provide a three-dimensional object imaging apparatus capable of simplifying an imaging operation and reducing the number of parts. is there.

[0007]

That is, the invention according to claim 1 is based on a three-dimensional object imaging apparatus for imaging a three-dimensional object occupying a space indicated by X, Y, and Z axes orthogonal to each other. Fixing means for fixing the three-dimensional object, and XY of the fixed three-dimensional object
X-, Y-, and Z-direction illuminating means for sequentially irradiating light with a time offset from the Z-axis direction, and an illuminating means for the direction in which the optical axis direction is set to any one of the XYZ axes and corresponding thereto At least one CCD camera on which projection light or reflection light of the three-dimensional object is incident, and each projection light or reflection of the three-dimensional object by the illumination means for each direction which is disposed on the remaining two directions and corresponds to each direction. An optical path changing means for changing an optical path of light and causing the projected light or reflected light to be incident on the CCD camera is provided.

According to the three-dimensionally shaped object imaging apparatus according to the first aspect of the present invention, the optical axis direction is set to any one of the XYZ axes and the three-dimensional illumination means for the direction is used. At least one CCD camera on which the projection light or reflection light of the shape object is incident, and the projection light or reflection light of the three-dimensional shape object by the corresponding illuminating means for each direction, which are respectively arranged in the remaining two directions. Since it has an optical path changing means for changing the optical path and projecting the reflected light or the reflected light to the CCD camera, the number of CCDs can be reduced without changing the direction of the three-dimensional object fixed by the fixing means. With the camera, it is possible to image the measurement target on the XY plane, the XZ plane, and the YZ plane of the three-dimensional object.

In the three-dimensional object imaging apparatus, the illumination means for the X, Y, and Z directions includes transmission illumination, coaxial incident illumination,
These can be constituted by reflection lighting or the like. However, the coaxial epi-illumination is limited to illumination means for the same direction as the optical axis direction of the CCD camera. Further, when the illumination means for each direction in a direction different from the optical axis direction of the CCD camera is constituted by reflected illumination, it is necessary to arrange the illumination means on the rear side of the optical path changing means and at a position which does not block the optical path to be changed. . In the three-dimensional object imaging apparatus, it is not necessary to provide all of the transmitted illumination, the coaxial incident illumination, and the reflected illumination, and it is sufficient to provide at least one of these illumination means.

In the three-dimensional object imaging apparatus according to the first aspect of the present invention, for example, the optical axis direction of the CCD camera is set to the Z-axis direction.
When a projected image or a reflected image of a three-dimensionally shaped object is to be captured by the D camera, it is natural that the X-direction and Y-direction illumination means are simultaneously illuminated in addition to the Z-direction illumination means. Alternatively, a reflected image cannot be captured. For this reason, in the three-dimensional object imaging apparatus according to the first aspect of the present invention, when the optical axis direction of the CCD camera is set to the Z-axis direction, for example,
When the D camera captures a projection image or a reflection image of the XY plane portion of the three-dimensional object, only the illumination means for the Z direction is illuminated and the remaining illumination means for the X and Y directions are not illuminated synchronously. The following CCD
A configuration is employed in which a projected image or a reflected image of an XZ plane portion or a YZ plane portion of a three-dimensional object is sequentially shifted by a camera by a camera. That is, in the X direction,
As for the illumination means for the Y direction and the Z direction, a switching means which functions in synchronization with the imaging of the corresponding YZ plane, XZ plane, and XY plane of the three-dimensional object is required. The invention according to claim 2 relates to a three-dimensionally shaped object imaging apparatus that does not require such illumination switching means.

That is, the invention according to claim 2 is based on a three-dimensional object imaging apparatus for imaging a three-dimensional object occupying a space indicated by X, Y, and Z axes orthogonal to each other.
Fixing means for fixing the three-dimensionally shaped object; X, Y, and Z-direction illuminating means for irradiating light having different wavelengths from the XYZ-axis directions around the fixed three-dimensionally shaped object; At least one CCD camera whose axial direction is set to any one of the XYZ axes and onto which projection light or reflected light of a three-dimensional object by the corresponding direction illumination means is incident, and on the remaining two directions. Light path changing means for changing the optical path of each projected light or reflected light of the three-dimensional object by the illuminating means for each direction arranged and corresponding thereto, and causing the projected light or reflected light to enter the CCD camera; Further, between the three-dimensionally shaped object and each of the optical path changing means, there is provided an optical filter that transmits only light in the wavelength range emitted from the corresponding two-way illumination means. Each of them is provided, and acts only between the three-dimensional object and the CCD camera when projection light or reflected light of the three-dimensional object by the illumination means for the same direction as the optical axis direction is incident. Further, an optical filter for transmitting only light in a wavelength range irradiated from the direction lighting means is provided.

According to the three-dimensional object imaging apparatus according to the second aspect of the present invention, lights having different wavelengths are radiated from the illuminating means for the X, Y, and Z directions toward the three-dimensional object. And only corresponding light from each direction is incident on the CCD camera via separate optical filters provided between the three-dimensional object and each optical path changing means and between the three-dimensional object and the CCD camera. Will be.

Therefore, a CCD camera arranged in any one of the X, Y, and Z axes can use, for example, X
When a projected image or a reflected image of the Y plane portion is captured, even when the illumination means for the X direction and the illumination means for the Y direction simultaneously illuminate a three-dimensional object simultaneously, not only the illumination means for the Z direction,
Since the light from the illumination means for the X and Y directions is not incident on the CD camera due to the action of each optical filter and only the light from the illumination means for the Z direction is incident, the switching means is provided. In addition, it is possible to capture a projection image or a reflection image of each flat portion of the three-dimensional object.

The illuminating means for the X, Y, and Z directions for irradiating light having different wavelengths from the XYZ axis directions are respectively 570 nm (yellow green light source), 690 nm (sunset orange light source), and 644 nm ( Red light source)
Each light source which irradiates this light is exemplified.

In the three-dimensional object imaging apparatus according to the present invention, a projected image or a reflected image of the three-dimensional object directly incident on the CCD camera from the three-dimensional object, or via each optical path changing means. In order to focus an image on a projected image or a reflected image of the three-dimensional object incident on the CCD camera, at least one of the CCD camera or the fixing means for fixing the three-dimensional object is X, Y, or Z. In some cases, a moving means for moving in the axial direction is required. XY of a three-dimensional object,
A projection image or a reflection image of a three-dimensional object incident on a CCD camera in which an optical path is changed by each optical path changing means so that a projection image or a reflection image of an arbitrary position in an XZ or YZ plane portion can be captured. In some cases, moving means for moving at least one of the CCD camera and the above-described fixing means in the X, Y, and Z-axis directions may be necessary in order to be able to image the image. The inventions according to claims 3 and 4 relate to the invention incorporating the moving means for such technical reasons.

That is, a third aspect of the present invention is based on the three-dimensional object imaging apparatus according to the first aspect of the present invention, wherein the fixing means, the illuminating means for the X, Y, and Z directions, and each of the optical path changing means. The means is fixed to the same stage, and a moving means is provided for moving at least one of the stage and the camera stage to which the CCD camera is fixed in the X, Y, and Z axis directions. The invention according to claim 4 is based on the three-dimensional object imaging apparatus according to claim 2, wherein the fixing means, the illuminating means for X, Y, and Z directions, each optical path changing means,
And each optical filter is fixed to the same stage, and at least one of this stage and the camera stage to which the CCD camera is fixed is X, Y,
A moving means for moving in the Z-axis direction is provided.

According to the third and fourth aspects of the present invention, only the camera stage to which the CCD camera is fixed is moved in the X, Y, and Z axes by the moving means, or only the other stage is moved in the X, Y, and Z directions. The stage may be moved in the Y and Z axis directions, or both stages may be moved in the X and Z directions, respectively.
It may move independently in the Y and Z axis directions. In some cases, the camera stage on which the CCD camera is fixed may move in one of the X, Y, and Z axes, and the other stage may move in the remaining two directions. is there.

In the three-dimensional object imaging apparatus according to the present invention, a CCD camera fixed or set so as to move only in the optical axis direction has a telecentric lens (the size of the object to be imaged is in the optical axis direction). Of the three-dimensional object whose optical path has been changed by each of the optical path changing means mounted on the device, the projected image or the reflected image of the three-dimensional object is placed in the field of view of the telecentric lens. In the case where the resolution included in all is sufficient, the stage to which the fixing means, the illuminating means for the X, Y, and Z directions, each optical path changing means, and the like are fixed is denoted by X,
It is also possible to omit the incorporation of the moving means for moving in any of the Y and Z axes.

In the three-dimensional object imaging apparatus according to the present invention, at least one CCD camera whose optical axis direction is set to one of the XYZ axes is provided. In order to obtain a projection image or reflection image of each flat portion of an object at different magnifications, a zoom lens with a continuously variable magnification can be applied, or a single CCD camera must have a lens exchange function. An example is a configuration in which a plurality of CCD cameras, each of which is attached with a lens of different magnification and whose optical axis direction is set to the same direction, are interchangeably prepared.

Next, in the three-dimensional object imaging apparatus according to the present invention, the optical path changing means for changing the optical path of the projection light or the reflected light of the three-dimensional object to be incident on the CCD camera includes a reflecting mirror, a 90-degree reflecting light. Examples include a prism and a pentaprism. The invention according to claim 5 relates to the invention in which the optical path changing means is specified.

That is, a fifth aspect of the present invention is based on the three-dimensional object imaging apparatus according to the first, second, third, or fourth aspect of the present invention.
It is a 90-degree reflecting prism or a pentaprism.

[0022]

Embodiments of the present invention will be described below in detail with reference to the drawings.

First, as shown in FIGS. 1 to 4, a three-dimensional object imaging apparatus 1 according to this embodiment
And a fixing means 3 attached to a fixed stage (not shown) for fixing the three-dimensional object 2, and X, Y, Z arranged around the three-dimensional object 2 in the XYZ axis directions. LED illuminations 4, 5, as direction illumination means
6, a coaxial epi-illumination 7 as shown in FIG. 5 is provided, and a telecentric lens 8 is mounted on the light incident side thereof, and the optical axis is moved in the XYZ directions as shown in FIG. CCD camera 10 fixed to possible moving camera stage 9 and fixed three-dimensional object 2
The LED light 4 and the LED light 5 and 6 serving as illumination means for the Z direction are arranged in a portion that does not obstruct the LED light 4 and the light path of the projection light of the three-dimensional object 2 by the LED light 4. 90-degree reflecting prism 1 for the X direction as an optical path changing means for causing the light to enter the CCD camera 10
1 and the LED around the three-dimensional object 2
LED as illumination means for X and Z directions on the side opposite to illumination 5
LED lighting 5 which is arranged in a part which does not block lights 4 and 6
A 90-degree reflecting prism 12 for the Y direction as an optical path changing means for changing the optical path of the projection light of the three-dimensionally shaped object 2 to be incident on the CCD camera 10, and the apparatus body 10
And a captured image monitor 13 for displaying a projected image or a reflected image of the three-dimensional object 2 imaged by the CCD camera 10 and a main part of a control system which is also provided on the apparatus main body 100. A main part of the control computer monitor (computer monitor) 14, a keyboard 15 and a pointing device 16 connected to the control computer are provided. 90 degree reflecting prism 11 for X direction and 90 degree reflecting prism 1 for Y direction
2 and the like are attached to the fixed stage together with the fixing means 3.

The coaxial epi-illumination 7 provided on the CCD camera 10 guides the light from the light source 70 and the light from the light source 70 to the half mirror 71 provided on the CCD camera 10 as shown in FIG. The optical fiber 72 is reflected by a mirror surface and emitted from the telecentric lens 8 side. The movable camera stage 9 movable in the XYZ directions is composed of an X-directional movable stage 91, a Y-directional movable stage 92, and a Z-directional movable stage 93 which are assembled so as to be orthogonal to each other as shown in FIG. And the CCD camera 10 is fixedly attached to the attachment portion 90 of the Z-direction moving stage 93,
Thereby, the CCD camera 10 can be arbitrarily moved in the XYZ directions. As the LED illumination 6 as the illumination means for the Z direction and the coaxial incident illumination 7 attached to the CCD camera 10, any illumination suitable for imaging the three-dimensional object 2 to be measured is appropriately selected. And each L as an illuminating means for X, Y, Z directions
The lighting timing of each of the ED illuminations 4, 5, and 6 is switched by a switching unit (not shown) so that the ED illuminations 4, 5, and 6 are sequentially turned on in synchronization with the imaging of the corresponding YZ plane, XZ plane, and XY plane in the three-dimensional object 2. Controlled (ie,
Each of the LED lights 4, 5, 6 is controlled so as not to be turned on at the same time).

In order to omit the switching means, the LED lights 4, 5, and 6 have different emission wavelengths L.
An ED light source is applied, and a rectangular optical filter 17 that transmits only the emission wavelength of the LED illumination 6 is interposed between the three-dimensional object 2 and the CCD camera 10 as shown by a dashed line in FIGS. 1 and 2. At the same time, an optical filter (not shown) for transmitting only the emission wavelength of the LED illumination 4 is applied to the X-direction 90-degree reflecting prism 11 as an optical path changing unit, and a Y-direction 90-degree reflecting prism 11 as an optical path changing unit.
An optical filter (not shown) that transmits only the emission wavelength of the LED lighting 5 may be applied to the reflection prism 12.

The control system 200 of the three-dimensional object imaging apparatus includes a hard disk on which an imaging / measurement condition file (operation procedure for automating imaging and measurement of the three-dimensional object) created in advance is recorded. A control computer (not shown) having a recording element such as a floppy disk and having the keyboard 15 and the pointing device 16 connected thereto; an image input side incorporated in the control computer and having an image input side connected to the CCD camera 10; The main part of the image analysis board (not shown) connected to the captured image monitor 13 is provided on the output side.
YZ plane portion in the three-dimensional object 2 imaged at
It has an image memory (not shown) that can record each image data of the Z plane part and the XY plane part in a file. That is, the control system 200 of the entire apparatus is composed of a computer system as shown in FIG.
0, signals from the pointing device 16 such as a mouse, the keyboard 15 and the like are input to the control unit 202 via the input interface 201 as data. The control unit 202 includes a CPU that performs overall processing of the entire system.
203, a RAM 204 for transmitting and receiving data in processing between the CPU 203, and a ROM 205 for storing a program for giving a processing procedure to the CPU 203. The ROM 205 stores measurement data using a recorded image file. A plurality of measurement algorithms for instructing the measurement operator on an appropriate operation procedure for performing image analysis of the target (menu: 1: operation procedure for measuring the width of the parallel portion, 2: operation procedure for measuring the distance between intersections, 3 : Operation procedure for measuring the width of a position separated by a specified interval, 4: Operation procedure for measuring the maximum height of the projection and depression, 5: Operation procedure for measuring the position of the projection and depression, 6: Maximum operation for the tip projection and depression Operation procedure to measure,
7: an operation procedure for measuring the distance from the center line, 8: an operation procedure for measuring the minimum gap, etc.), and the like are stored in advance, and the CPU 203 is provided through the input interface 201. The above-mentioned program is executed based on the received data, and the output interface 206
, An X-direction moving stage 91, a Y-direction moving stage 92, a Z-direction moving stage 93, and an X-direction illumination means (L
ED lighting) 4, Y-direction lighting means (LED lighting) 5, Z
A control signal is transmitted to the direction lighting means (LED lighting) 6, the computer monitor 14, the captured image monitor 13, and the like, and these are controlled.

Hereinafter, a method of imaging and measuring the three-dimensionally shaped object (metal workpiece) 2 shown in FIG. 8 using the three-dimensionally shaped object imaging apparatus according to this embodiment will be described.

The three-dimensional object (metal part)
As shown in FIG. 8 and FIGS. 9A to 9C, a rectangular parallelepiped component body 210 and circular through-holes 21 provided in the XY plane portion, the XZ plane portion, and the YZ plane portion, respectively.
1, 212, and 213.

First, after fixing the corners of the three-dimensionally shaped object (metal processing part) 2 with fixing means (fixing jig) 3 as shown in FIGS. The projection light on the XY plane portion of the three-dimensional object (metal workpiece) 2 is made incident on the CCD camera 10 and the projected image is projected on the captured image monitor 13. Then, the user moves the Z-direction moving stage 93 by manual operation while focusing on the monitor image, focuses the object, picks up an image of the three-dimensional object (metal processing part) 2, and projects the projected image of the XY plane portion into the above image. Record in the image memory of the analysis board.

Next, the LED illumination 6 is turned off, the LED illumination 4 is turned on, and the X-direction moving stage 91 is moved manually to move the CCD camera 10 to the X-direction 90 as shown in FIG. After being disposed on the opposite side of the reflection prism 11, the projection light of the three-dimensional object (metal processing part) 2 on the YZ plane by the LED lighting 4 is reflected by the 90-degree reflection prism 1 for the X direction as shown in FIG.
The light is made incident on the CCD camera 10 through 1 and a projected image thereof is projected on a captured image monitor 13. Then, after focusing on the Z-direction moving stage 93 by moving the Z-direction moving stage 93 by manual operation while watching the monitor image, the three-dimensional object (metal processing part) 2 is imaged, and the projected image of the YZ plane portion is converted into the above image. Record in the image memory of the analysis board.

When the optical filter 17 is incorporated in this three-dimensionally shaped object imaging apparatus (to omit the switching means), as shown in FIG.
Is disposed on the opposite side of the 90-degree reflecting prism 11 for the X direction, the optical filter 1 is disposed on the opposite side of the CCD camera 10.
7, the optical filter 17 is not
It is possible to operate only when imaging the Y plane portion.

Finally, the LED illumination 4 is turned off, the LED illumination 5 is turned on, and the Y-direction moving stage 92 is moved by manual operation so that the CCD camera 10 faces the 90-degree reflecting prism 12 for Y-direction. After that, the projection light of the XZ plane portion of the three-dimensional object (metal processing part) 2 by the LED illumination 5 is made incident on the CCD camera 10 via the 90-degree reflecting prism 12 for the Y direction to capture the projected image. The image is displayed on the image monitor 13. Then, the user moves the Z-direction movement stage 93 by manual operation while watching the monitor image to perform focusing, and then takes an image of the three-dimensionally shaped object (metal processing part) 2 to obtain X.
The projection image of the Z plane portion is recorded in the image memory of the image analysis board, and the imaging of the three-dimensionally shaped object (metal workpiece) 2 from the three directions of the XYZ axes is completed.

In the three-dimensional object imaging apparatus according to this embodiment, a 90-degree reflecting prism is applied as an optical path changing means, and the projected image of the three-dimensional object (metal processing part) 2 is shown in FIG. Since the light is incident on the CCD camera 10 in the relationship as shown, image patterns as shown in FIGS. 14A to 14C are obtained. Further, when a pentaprism is applied as the optical path changing means, the projected image of the three-dimensional object (metal processing part) 2 is incident on the CCD camera 10 in an upside-down relationship as shown in FIG. As shown in FIGS. 15 (A) to 15 (C), an image pattern like a drawing by the third trigonometric method is obtained.

Next, a method of performing image analysis (measurement of the hole diameter of the through hole) using each projected image of the three-dimensionally shaped object (metal workpiece) 2 recorded in the image memory of the image analysis board will be described. I do.

First, the image data of the required projected image is designated from the image memory and read out to the captured image monitor 13, and the above-described measurement algorithm suitable for the measurement site is selected from the menu screen and selected. According to the operation procedure of the measurement algorithm, for example, the coordinates of the start point and the end point of the edge detection line are designated, and the image analysis using the projection image is performed. Here, the setting of the edge detection line is performed using a pointing device while viewing the image on the captured image monitor 13. That is, the image output signal from the CCD camera 10 is connected to an image analysis board equipped with, for example, a 512 × 512 image memory incorporated in the control computer as described above.
At each coordinate (image address) designated by the X axis and the Y axis of the image memory shown in (A), the imaging density of each corresponding pixel in the CCD camera (that is, D11, D21, D31, etc. as shown in FIG. 16B) Image density data) is recorded, and the position of the pointing device on the captured image monitor corresponds to the image address on the image memory.

As shown in FIG. 16C, (D11-
D21 = D'1121), (D21-D31 = D'2131), (D31
−D41 = D′ 3141) The first derivative of the image density change is obtained by sequentially calculating the difference between the image density data at each of the adjacent coordinate positions such as (D′ 1121), as shown in FIG.
−D′2131 = D ″ 11212131), (D′ 2131−D′3141 =
D "21313141) By sequentially calculating the difference between the adjacent primary differential values, the secondary differential value of the image density change can be obtained.

Therefore, as shown in FIG. 17, the starting point α1 and the ending point α of the edge detection line α are determined by using a pointing device while viewing the image read on the captured image monitor.
Specifying 2 sets the edge detection line. Further, the edge in the edge detection is defined as FIG.
As shown in FIG. 18, the change in image density from the start point α1 of the edge detection line α in FIG. 17 to the point across the end of the through hole 211 is plotted in FIG. (Accuracy of the density). That is, this density change center position corresponds to the coordinate position of the point α3 at which the edge detection line α crosses the circumferential end of the through hole 211 in FIG. Then, two edges of the circumferential portion of the through hole 211 were detected, and the maximum distance (diameter) between the edges was obtained by image analysis.

In this embodiment, the edge detection calculates the second derivative of the image density change from the vicinity of the center of the through hole 211 to the vicinity of the circumference thereof.
Is determined as an edge position.

In this embodiment, as a method of measuring the three-dimensionally shaped object (metal workpiece), image data captured by the three-dimensionally shaped object imaging device is temporarily recorded in an image memory of an image analysis board. In addition, a method of reading the recorded image data again and performing a measurement by performing an image analysis based on the read image data is illustrated. However, as shown in the following embodiments, a three-dimensional object (metal A method of directly performing measurement based on image analysis at the same time as imaging of the processed part) may be adopted.

[0040]

Embodiments of the present invention will be specifically described below.

The three-dimensional object 2 to be imaged is a 30 mm square, 10 mm high metal workpiece shown in FIG. Further, as the three-dimensional object imaging apparatus 1, the three-dimensional object imaging apparatus according to the embodiment shown in FIGS. 1 to 4 is applied. However, the maximum moving distance of the movable camera stage 9 movable in the XYZ directions in each direction is 100 mm. The telecentric lens 8 mounted on the light incident side of the CCD camera 10 has a magnification of 0.
A lens having a magnification of 32 and a working distance of 120 mm is applied. The CCD camera 10 has a 1/2 inch size C
CD camera [number of effective pixels 768 (horizontal direction) x 494
(Vertical direction)] so that the field of view is 2
0 mm (horizontal direction) x 15 mm (vertical direction). LED lighting 4 as lighting means for X, Y, Z directions;
Red LEDs are applied to 5 and 6 to capture projected images (transmission images) of the XY plane portion, the YZ plane portion, and the XZ plane portion of the three-dimensional object 2. Note that these LED lights 4, 5, and 6 are configured to be turned on only when a projected image in each corresponding direction is captured.

First, a metal workpiece to be imaged was fixed to a fixing jig. Next, the movable camera stage 9 is actuated to make the through-hole 21 provided in the XY plane portion of the metal workpiece.
The CCD camera was moved to the upper part of 1, and the Z-direction movement stage 93 was moved to perform focusing, and the imaging of the through-hole 211 and the measurement of the diameter of the through-hole 211 were performed. The hole diameter of the through-hole 211 is determined by detecting edges (circumference) on both sides in the X-axis direction from the vicinity of the hole center to determine the maximum distance (diameter) between edges, and similarly calculating the maximum distance (diameter) between edges in the Y-axis direction. The larger one was determined as the pore diameter.

Here, in the edge detection, a second derivative of the image density change from the vicinity of the center to the vicinity of the circumference is obtained, and a point where the second derivative value intersects with 0 is defined as an edge position.

Next, the CCD camera 10 is moved to a position above the 90-degree reflecting prism 12 for the Y-direction on which the through-hole 212 provided in the XZ plane portion of the metal processing component is projected, and a Z-direction moving stage is provided. Focusing was performed by moving 93 and imaging of the through hole 212 and measurement of the diameter of the through hole 212 were performed according to the same procedure.

Finally, the CCD camera 10 is moved to the upper part of the X-direction 90-degree reflecting prism 11 on which the through-hole 213 provided in the YZ plane portion of the metal work part is projected, and the Z-direction moving stage is moved. Focusing was performed by moving 93, and the imaging of the through hole 213 and the measurement of the diameter of the through hole 213 were performed according to the same procedure.

An image analysis of the diameter of a through hole in a metal processing part by applying the three-dimensional object imaging apparatus according to the embodiment (embodiment) and the conventional measuring apparatus (comparative example) shown in FIG. And the time required for image analysis (image analysis time), the replacement time for changing the direction of the metal workpiece, and the stage movement time were compared. The results shown in Table 1 below were obtained.

Table 1 Image analysis time Replacement time Stage movement time Example Approximately 01 seconds 0 seconds Approximately 06 seconds Comparative example Approximately 01 seconds Approximately 10 seconds Approximately 06 seconds Then, the three-dimensional object imaging apparatus according to the example and the measuring apparatus according to the comparative example are described. Although there was not much difference in the image analysis time, in the measuring device according to the comparative example, the replacement time for changing the direction of the metal processing component is necessary,
The work time was long and the workability was poor, and a remarkable difference was confirmed.

[0048]

According to the three-dimensional object imaging apparatus according to the first, third, and fifth aspects of the present invention, the direction of the optical axis is set to any one of the XYZ axes, and the corresponding illumination means for that direction is set. At least one CCD camera on which projection light or reflected light of a three-dimensional object according to
The optical path of each projected light or reflected light of the three-dimensional object by the corresponding illuminating means for each direction is changed by changing the optical path of the projected light or reflected light to the C direction.
Since the optical path changing means for inputting the light to the CD camera is provided, the XY plane portion of the three-dimensional object, the XZ, and the XZ part are not changed without changing the direction of the three-dimensional object fixed by the fixing means. This has the effect of being able to image the measurement objects in the plane portion and the YZ plane portion, respectively.

According to the three-dimensional object imaging apparatus according to the second, fourth, and fifth aspects of the present invention, lights having different wavelengths from the X-direction, Y-direction, and Z-direction illuminating means are output from the three-dimensional object. And only corresponding light from each direction passes through a separate optical filter provided between the three-dimensional object and each optical path changing means and between the three-dimensional object and the CCD camera. Will be incident.

Therefore, for example, X-rays of a three-dimensional object can be obtained by a CCD camera arranged in any of the XYZ axes.
When a projected image or a reflected image of the Y plane portion is captured, even when the illumination means for the X direction and the illumination means for the Y direction simultaneously illuminate a three-dimensional object simultaneously, not only the illumination means for the Z direction,
Since the light from the illumination means for the X and Y directions is not incident on the CD camera due to the action of each optical filter and only the light from the illumination means for the Z direction is incident, the switching means is provided. In addition, there is an effect that a projection image or a reflection image of each plane portion of the three-dimensional object can be captured.

[Brief description of the drawings]

FIG. 1 is a schematic front view of a three-dimensionally shaped object imaging apparatus according to an embodiment.

FIG. 2 is a schematic plan view of the three-dimensional object imaging apparatus according to the embodiment;

FIG. 3 is a partially enlarged view of FIG. 1;

FIG. 4 is a partially enlarged view of FIG. 2;

FIG. 5 is an explanatory diagram showing the configuration of coaxial epi-illumination as illumination means in the three-dimensionally shaped object imaging device according to the embodiment.

FIG. 6 is a configuration explanatory view of a moving camera stage in the three-dimensional object imaging apparatus according to the embodiment;

FIG. 7 is a block diagram showing a control system of the entire apparatus in the three-dimensionally shaped object imaging apparatus according to the embodiment.

FIG. 8 is a schematic perspective view of a metal processing component to be imaged.

FIG. 9A is a plan view of the metal-worked component, and FIG.
(B) is a front view of the metal processing part, and FIG. 9 (C) is a side view of the metal processing part.

FIG. 10 is a diagram illustrating the operation of an optical path changing unit of the three-dimensionally shaped object imaging apparatus according to the embodiment.

FIG. 11 is a schematic perspective view showing an operation of an optical path changing unit of the three-dimensional object imaging apparatus according to the embodiment.

FIG. 12 is a schematic perspective view showing the operation of a 90-degree reflecting prism as an optical path changing unit.

FIG. 13 is a schematic perspective view showing the operation of a pentaprism as an optical path changing unit.

FIGS. 14A to 14C are patterns of respective projected images on XY, XZ, and YZ plane portions of a metal processing component imaged by a three-dimensional object imaging apparatus to which the 90-degree reflecting prism is applied; FIG.

FIGS. 15A to 15C are pattern diagrams of respective projected images on the XY, XZ, and YZ plane portions of the metal processing component imaged by the three-dimensional object imaging apparatus to which the pentaprism is applied.

16A is an explanatory diagram showing an image memory of the image analysis board, FIG. 16B is an explanatory diagram of image density data recorded in the image memory, and FIG. FIG. 16D is a data explanatory diagram of the secondary differential value of the image density change.

FIG. 17 is a diagram showing a case where the start point and the end point of an edge detection line are designated by a pointing device with respect to a projection image of an XY plane portion of a metal workpiece displayed on a captured image monitor of the three-dimensional object imaging apparatus according to the embodiment FIG.

FIG. 18 is a graph showing an image density change on an edge detection line in a through-hole image of a metal processing component displayed on the captured image monitor, and showing an edge position of the image density change.

FIG. 19 is a configuration explanatory view of a conventional three-dimensionally shaped object imaging apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 3D-shaped object imaging device 2 3D-shaped object 3 Fixing means 4 LED illumination 5 LED illumination 6 LED illumination 9 Moving camera stage 10 CCD camera 11 90-degree reflecting prism for X direction 12 90-degree reflecting prism for Y direction

Claims (5)

[Claims] 1. A three-dimensional object imaging apparatus for imaging a three-dimensional object occupying a space indicated by X, Y, and Z axes orthogonal to each other, comprising: fixing means for fixing the three-dimensional object; X, Y, and Z direction illuminating means for sequentially irradiating light with a time shifted from the XYZ axis directions around the three-dimensional object and the optical axis direction is set to any one of the XYZ axes And at least one CCD camera on which projection light or reflected light of a three-dimensional object by the corresponding direction lighting means is incident, and tertiary light provided by the corresponding direction lighting means disposed on the remaining two directions respectively. Tertiary means comprising an optical path changing means for changing the optical path of each projected light or reflected light of the original shape object and causing the projected light or reflected light to enter the CCD camera. Original shape object imaging device. 2. A three-dimensional object imaging apparatus for imaging a three-dimensional object occupying a space indicated by X, Y, and Z axes orthogonal to each other, comprising: fixing means for fixing the three-dimensional object; X, Y, and Z direction illuminating means for irradiating light having different wavelengths from the XYZ axis directions around the three-dimensional object, and the optical axis direction is set to any one of the XYZ axes; At least one CCD camera on which projection light or reflected light of the three-dimensional object by the corresponding direction lighting means is incident, and three-dimensional by the corresponding direction lighting means which are respectively disposed on the remaining two directions. An optical path changing means for changing an optical path of each projected light or reflected light of the shaped object so that the projected light or reflected light is incident on the CCD camera; and An optical filter for transmitting only light in a wavelength range emitted from the corresponding two-way illumination means is provided between the object and each optical path changing means, and the three-dimensional object and the CCD camera are provided. In the meantime, it works only when the projection light or reflected light of the three-dimensional object by the illumination means for the same direction as the optical axis direction is incident, and only the light in the wavelength range irradiated from the illumination means for the direction is actuated. An apparatus for imaging a three-dimensionally shaped object, comprising an optical filter for transmitting light. 3. The camera stage in which the fixing means, the illuminating means for X, Y, and Z directions, and each optical path changing means are fixed to the same stage, and the stage and the CCD camera are fixed. At least one is X,
2. The three-dimensionally shaped object imaging apparatus according to claim 1, further comprising a moving unit for moving the object in the Y and Z axis directions. 4. The fixing means, the illuminating means for X, Y, and Z directions, each optical path changing means, and each optical filter are fixed to the same stage, and the stage and the CCD camera are fixed. 3. The three-dimensional object imaging apparatus according to claim 2, further comprising a moving means for moving at least one of the camera stages in the X, Y, and Z axis directions. 5. A three-dimensionally shaped object imaging apparatus according to claim 1, wherein said optical path changing means is one of a reflection mirror, a 90-degree reflection prism, and a pentaprism. .