JP2006153636A - 3-dimensional measurement method and program making computer perform 3-dimensional measurement method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a 3-dimensional measurement method and a program making a computer execute the 3-dimensional measurement method which drastically reduces the load of users by simplifying the setting of parameters. <P>SOLUTION: Based on parameters set for each of magnification of observation system, the maximum measurement range of a measurement object, measurement precision and a degree of measurement velocity, the grating pitch of a liquid crystal grating 604 is obtained. By using the pattern of the liquid crystal grating 604 produced with the grating pitch, a deforming grid pattern image from the specimen 3 is photographed with a TV camera 13. The liquid crystal grating 604 is shifted for some steps to acquire the photographed image at every position. A phase is obtained from the acquired photographed image at every position. The difference from the basic phase corresponding to the phase, the prepared magnification, the maximum measurement range, measurement precision and the degree of measurement velocity is used to obtain a height. This result is indicated on a display 174. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a three-dimensional measurement method employing a lattice pattern projection method and a program for causing a computer to execute the three-dimensional measurement method.

  Conventionally, a lattice pattern projection method using a phase shift is known as means for measuring the surface shape of a measurement object having a three-dimensional shape in a non-contact manner.

  In this lattice pattern projection method, a projection system is arranged obliquely upward with respect to the surface of the measurement object, and an image of the lattice pattern from the projection system is projected at a predetermined angle onto the measurement object surface, and the measurement object The scattered light from the surface is taken as a deformed grating pattern image by an imaging system arranged directly above the surface of the measurement object. In this case, the lattice pattern is shifted laterally to acquire a plurality of images having different phases, and the phase of the lattice at each point is obtained for each pixel from these acquired images and measured from the phase information. A three-dimensional surface shape including the height of the object is obtained by calculation.

  Conventionally, a method based on the principle of triangulation is often used as a method for obtaining the height of a measurement object from phase information.

  FIG. 5 shows an example of a method using conventional triangulation. In this example, the projection system (not shown) that receives the incident light beam 101 and the imaging system (not shown) that guides the reflected light beam 102 are telecentric optical systems. Further, it is assumed that a reference plane 104 is provided for the measurement object 103 and all calculated heights are relative to the reference plane 104. Then, the height of the measurement object 103, for example, the height High of the point A is obtained using the position of the lattice projected on the point A and the position of the lattice projected on the point B on the reference plane 104. That is, using the following formula (1) using the phase Φa at the point A and the phase Φb at the point B (Φb is referred to as a reference phase).

High = (Pitch × (Φa−Φb)) / (sin α × 2π) (1)
Here, Pitch is the pitch of the grating pattern, and α is the incident angle.

Since the phase of each point obtained by using the phase shift is convolved in the range of 0 to 2π, the obtained height is also convolved in the range of Pitch / sin α. Furthermore, if a technique such as phase connection is used, a measurement result having a larger height can be reproduced. Here, for the phase connection, for example, a method disclosed in Patent Document 1 is used.
JP 2000-9444 A

  By the way, recently, such a three-dimensional measurement system has been considered to be combined with a microscope. In such a combination of microscopes, in the conventional three-dimensional measurement system, the pitch of the lattice pattern and the magnification of the observation system are fixed, but the magnification of the observation system is frequently changed every time the measurement object changes. May be changed.

  Here, regarding the relationship between the pitch of the lattice pattern and the magnification of the observation system, the resolution increases as the lattice pattern pitch is reduced and the magnification is increased, and the measurement accuracy of the measurement object is improved. However, on the other hand, if a measurement target object having a large height is measured using a small grating pattern pitch, the phase connection processing time becomes long and the entire measurement time becomes long.

  For this reason, when changing the measurement target object, it is necessary to set the lattice pattern pitch in consideration of the balance between the measurement accuracy and the measurement speed (measurement time) according to the state of the measurement target object. Further, when the magnification of the observation system is increased, the depth of focus becomes shallow, and an area that cannot be measured may be generated. For this reason, when changing the magnification of the observation system, it is necessary to clarify the measurable range.

  For this reason, conventionally, in order to perform measurement with a balance between measurement accuracy and measurement speed, it is necessary to set the parameters for determining the measurement accuracy and measurement speed to the optimum values. Setting is not only complicated, but also requires experience, causing a heavy burden on the user.

  The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a three-dimensional measurement method and a program for causing a computer to execute the three-dimensional measurement method that can easily set parameters and can greatly reduce the burden on the user. And

  According to the first aspect of the present invention, the magnification of the observation system and the parameters of the maximum measurement range of the object to be measured are set, the lattice pitch of the lattice pattern is obtained based on the set parameters, and the lattice generated at the lattice pitch While capturing a deformed lattice pattern image from a specimen using a pattern, acquiring a captured image at each position while shifting the lattice pattern generated at the lattice pitch by several steps, and acquiring the captured image at each position And calculating the phase using the difference between the phase, the magnification of the parameter prepared in advance, and the basic phase corresponding to the maximum measurement range, and displaying the result on the display unit. Yes.

  The invention according to claim 2 is characterized in that, in the invention according to claim 1, the degree of measurement accuracy and the measurement speed are set as the parameters.

  According to a third aspect of the present invention, in the second aspect of the present invention, a difference between the reference phase with respect to a measurement parameter obtained by adding the measurement accuracy and a measurement speed degree to the magnification and maximum measurement range of the parameter is further obtained. It is characterized by using it to obtain the height.

  The invention according to claim 4 is the invention according to any one of claims 1 to 3, wherein when the maximum measurement range of the measurement object is larger than the depth of focus corresponding to the magnification, the parameter of the maximum measurement range or the magnification It is characterized by instructing resetting.

  A fifth aspect of the invention is characterized in that, in the invention according to any one of the first to third aspects, the magnification parameter of the observation system is automatically set by information from the outside.

  According to a sixth aspect of the present invention, in the first aspect of the present invention, the basic phase sets parameters of the magnification, the maximum measurement range, and the measurement accuracy, and a lattice pattern lattice based on the set parameters. Obtain a pitch, capture a deformed lattice pattern image from a reference sample using the lattice pattern generated at the lattice pitch, acquire captured images at each position while shifting the lattice pattern by several steps, and acquire The phase obtained from the captured image at each position is stored as reference phase data.

  According to a seventh aspect of the invention, in the sixth aspect of the invention, the measurement accuracy and the measurement speed are added to the magnification and the maximum measurement range of the parameter.

  According to an eighth aspect of the present invention, in a program for causing a computer to execute a three-dimensional measurement method, a magnification of an observation system and parameters of a maximum measurement range of an object to be measured are set, and a lattice pattern lattice is set based on the set parameters. The pitch is obtained, and a deformed lattice pattern image from the specimen is captured using the lattice pattern generated at the lattice pitch, and the captured image is acquired at each position while shifting the lattice pattern by several steps. The phase is obtained from the captured image at each position, the height is obtained by using the difference between the phase, the magnification of the parameter prepared in advance, and the basic phase with respect to the maximum measurement range, and the result is displayed on the display unit. It is characterized by that.

  The invention described in claim 9 is characterized in that, in the invention described in claim 8, the degree of measurement accuracy and measurement speed are set as the parameters.

  A tenth aspect of the present invention is the method according to the ninth aspect, wherein the difference between the reference phase with respect to the measurement parameter obtained by adding the measurement accuracy and the degree of measurement speed to the magnification and the maximum measurement range of the parameter. It is characterized by using it to obtain the height.

  According to the present invention, it is possible to provide a program that allows a computer to execute a three-dimensional measurement method and a three-dimensional measurement method that can simplify parameter settings and can greatly reduce the burden on the user.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 shows a schematic configuration of a microscope three-dimensional measurement system to which a parameter setting method according to an embodiment of the present invention is applied.

  In FIG. 1, reference numeral 1 denotes a base, and a stage 2 is provided on the base 1. A specimen 3 is placed on the stage 2.

  A support 4 is provided upright on the base 1. The support column 4 is provided with a focusing device 5. The focusing device 5 is provided with a stereomicroscope main body 7 constituting a stereomicroscope via a liquid crystal lattice projection device 6 as a lattice pattern projection means.

  The focusing device 5 includes a device main body 501 and a moving member 502, and the column 4 is inserted through the device main body 501. The apparatus main body 501 is provided with a fixed handle 503. The fixed handle 503 can be fixed to the column 4 by rotating in the tightening direction. The moving member 502 is supported by a guide unit (not shown) so as to be movable with respect to the apparatus main body 501. In addition, a lifting mechanism (not shown) including a pinion and a rack is provided between the apparatus main body 501 and the moving member 502. A focusing handle 504 is connected to the elevating mechanism, and the moving member 502 can be moved up and down in the direction along the column 4 by operating the focusing handle 504.

  The moving member 502 is detachably provided with the liquid crystal lattice projection device 6 via a mounting member (not shown) such as an ant.

  In the liquid crystal lattice projection apparatus 6, a light guide insertion portion 602 is provided in the apparatus main body 601. The light guide insertion portion 602 is provided with an emission end 8a of an optical fiber 8 serving as a light guide at the tip. Inside the light guide insertion portion 602, an illumination optical system 603 is disposed on the optical path of light emitted from the emission end 8a of the optical fiber 8. The illumination optical system 603 makes light from the emission end 8a of the optical fiber 8 substantially parallel.

  Inside the apparatus main body 601, a liquid crystal grating 604 is disposed on the optical path of light from the illumination optical system 603. The liquid crystal lattice 604 generates a lattice pattern that displays the brightness changing to a sine wave shape at a constant pitch according to an instruction from a liquid crystal lattice control unit 171 of the PC 17 described later, and this lattice pattern is displayed in several steps in the pitch direction. Shift is possible.

  A projection optical system 605 is disposed in the optical path that has passed through the liquid crystal grating 604. The projection optical system 605 projects a grid pattern image having brightness and darkness formed by the liquid crystal grating 604 at a predetermined angle with respect to the specimen 3 via the projection optical path 9, that is, at a predetermined incident angle α. Yes.

  In this case, the projection optical system 605 is a bilateral telecentric optical system on the object side (liquid crystal grating 604) and the image side (specimen 3). Here, the reason why both sides are telecentric is that the size (magnification) of the lattice pattern image does not change before and after the focus surface and can be kept constant. As a result, the occurrence of measurement errors due to changes in the size of the lattice pattern image is prevented.

  The liquid crystal lattice projector 6 is detachably provided with a stereomicroscope body 7 via a mounting member (not shown) such as an ant. The stereomicroscope main body 7 is provided with a zoom lens barrel 701. The zoom lens barrel 701 is provided with a zoom handle 702. The zoom handle 702 can change the magnification of the zoom lens barrel 701 by operating the handle.

  The objective lens 10 is attached to the lower end of the zoom lens barrel 701. In this case, the objective lens 10 is of a screw type that is attached to the zoom lens barrel 701 by screwing. The objective lens 10 is disposed directly above the sample 3 and can be focused on the sample 3 by changing the relative distance from the sample 3 by the vertical movement of the zoom lens barrel 701 by the operation of the focusing device 5. It is like that.

  A lens barrel 11 is attached to the upper end of the zoom lens barrel 701. The lens barrel 11 is composed of a trinocular tube, and is provided with an eyepiece 12 as observation means and a TV camera 13 as imaging means. An optical path switching unit 14 is provided inside the lens barrel 11. The optical path switching unit 14 is disposed on the imaging optical path 15 through which scattered light from the specimen 3 is guided through the objective lens 10, and the deformed lattice pattern image by the scattered light from the specimen 3 is transferred to the eyepiece 12 by switching one of the optical paths. Visual observation is possible by forming an image, and a deformed grating pattern image is formed on the imaging surface 13a of the TV camera 13 by switching the other optical path.

  On the other hand, the light source device 16 is connected to the optical fiber 8 on the incident end 8b side. In the light source device 16, a halogen lamp, a xenon lamp, or the like is used as a light source. Further, the light source device 16 is provided with a dimming volume 16a for adjusting the amount of light emitted from the light source.

  Connected to the TV camera 13 is a personal computer (hereinafter referred to as a PC) 17 as image processing means. The PC 17 instructs the liquid crystal lattice 604 to generate a lattice pattern whose brightness changes to a sine wave shape, and stores a liquid crystal lattice control unit 171 that controls the shift of the lattice pattern, a captured image of the TV camera 13, and the like. And a data processing unit 173 that calculates the three-dimensional surface shape of the sample 3 by processing the captured image. The PC 17 is provided with a display unit 174.

  FIG. 2 shows an example of the display screen of the display unit 174. In this case, on the left side of the display screen, as a parameter input means for inputting parameters, a magnification input unit 175 for inputting the magnification of the observation system, the maximum measurement range of the specimen 3 as the measurement target object (the approximate maximum height of the specimen 3) A maximum measurement range input unit 176 for inputting a degree) and a degree input unit 177 for inputting the degree of measurement accuracy and measurement speed are arranged. Here, the magnification input unit 175 has a numerical value input unit 175a that inputs the magnification of the observation system as a numerical value, and a magnification input unit 175b that inputs the pointer according to the numerical value of the desired magnification. The maximum measurement range input unit 176 inputs the maximum measurement range for the sample 3 to be actually measured as a numerical value. Further, the degree input unit 177 inputs the measurement accuracy and the degree of measurement speed by moving the pointer 177a between 0 and 1. For example, if the pointer 177a is set to 0.5, the degree of measurement accuracy and measurement speed is 1: 1. If priority is given to measurement accuracy, the measurement speed is prioritized between 0 and 0.5. If you want to, set the pointer between 0.5 and 1.

  A set switch 178, a save switch 179, and a start switch 180 are arranged as various operation switches below the magnification input unit 175, the maximum measurement range input unit 176, and the degree input unit 177.

  Further, a main display screen 181 for displaying a three-dimensional surface shape obtained by the calculation processing of the captured image in the data processing unit 173 is arranged at the center of the display screen of the display unit 174.

  Next, description will be given from parameter setting to measurement result display by the microscope three-dimensional measurement system configured as described above.

  In this case, the flowchart shown in FIG. 3 is executed. First, in step 301, the magnification of the observation system is set. In this case, the magnification of the objective lens 10 inserted in the imaging optical path 15 is input from the magnification input unit 175 on the display unit 174 shown in FIG. In this case, the numerical value input unit 175a or the magnification input unit 175b is used to input the magnification.

  When an electric revolver is used for switching the magnification of the objective lens 10, the magnification may be automatically input from switching information from the revolver.

  Next, in step 302, the maximum measurement range is set. In this case, the maximum measurement range determined by the sample 3 to be actually measured is input from the maximum measurement range input unit 176 on the display unit 174 shown in FIG.

  Next, the process proceeds to step 303, and it is determined whether or not the set maximum measurement range is larger than the depth of focus corresponding to the magnification. In this case, if it is determined that the depth is greater than the depth of focus, the process proceeds to step 304, and an instruction to reset the magnification or the maximum measurement range is output. In this case, the process returns to step 301, and the setting of the magnification or the setting of the maximum measurement range is performed again.

  On the other hand, if it is determined in step 303 that the maximum measurement range is not larger than the depth of focus corresponding to the magnification, the process proceeds to step 305. In step 305, the degree of measurement accuracy and measurement speed are set. In this case, the degree of measurement accuracy and the measurement speed are set by moving the pointer 177a between 0 and 1 in the degree input unit 177 on the display unit 174 shown in FIG. Here, the degree of measurement accuracy and measurement speed β∈ (0, 1) increases as β increases, but the measurement speed decreases.

  Next, in step 306, the set switch 178 on the display unit 174 shown in FIG.

  In this state, first, the lattice pitch Pitch of the liquid crystal lattice 604 is calculated from the equation (2).

Pitch = (High / sin α) (1-β) (2)
High is the maximum measurement range, α is the incident angle of the incident light, and α is a design value.

  Next, data of the lattice pattern of the liquid crystal lattice 604 is generated based on the lattice pitch Pitch of the liquid crystal lattice 604 calculated from the equation (2), and this data is stored in the data storage unit 172, and further the liquid crystal lattice control unit 171. Forward to. Based on this data, the liquid crystal lattice control unit 171 instructs the liquid crystal lattice 604 to generate a lattice pattern whose brightness changes to a sine wave shape.

  On the other hand, a reference phase data file (not shown) is opened, and reference phase data prepared in advance corresponding to the above-described set magnification, maximum measurement range, measurement accuracy, and measurement speed are read and stored in the data storage unit 172. save. The reference phase data file here will be described later.

  Next, when the start switch 180 on the display unit 174 shown in FIG. 2 is pressed in step 307, the following operation is executed.

  In this case, in FIG. 1, when light is emitted from the light source device 16, the light is guided to the liquid crystal lattice projection device 6 through the optical fiber 8, and becomes almost parallel light through the illumination optical system 603 and is uniform on the liquid crystal lattice 604. Is irradiated. The light transmitted through the liquid crystal grating 604 is transmitted through the projection optical system 605 and projected onto the specimen 3 at a predetermined angle from the projection optical path 9 as a grating pattern image having brightness. The lattice pattern projected onto the specimen 3 is reflected from the surface of the specimen 3, and scattered light among them is guided to the imaging optical path 15 via the objective lens 10. In this case, if the other optical path switching is set in the optical path switching unit 14 on the imaging optical path 15, a deformed grating pattern image due to the scattered light from the sample 3 is imaged and imaged on the imaging surface 13 a of the TV camera 13. The

  Observation of such a deformed grating pattern image is repeatedly performed a plurality of times while shifting the grating pattern by the liquid crystal grating 604 from the liquid crystal grating controller 171 by several steps, and the captured images (phase-shifted images) from the TV camera 13 at each position. ) Is stored in the data storage unit 172.

  Next, the phase is calculated. In this case, the following equation (3) is used in the calculation of the phase distribution.

Here, Ii (x, y) is a luminance value at each shift point (x, y), δi = (i / N) 2π, (i = 0,..., N−1) is a phase shift amount, N Is the number of shifts.

  And the difference of the phase calculated | required in this way and the reference | standard phase preserve | saved in the data storage part 172 mentioned above is calculated | required, and height High is calculated | required using (1) Formula mentioned above.

  In this case, if a method such as phase connection is used, a measurement result having a larger height can be reproduced.

  The three-dimensional measurement result obtained by such a series of processes is displayed on the main display screen 181 of the display unit 174 as a three-dimensional surface shape in step 308.

  Next, the creation of the reference phase data file will be briefly described.

  In this case, the flowchart shown in FIG. 4 is executed.

  A reference sample is used to create the reference phase data file. First, in step 401, a reference sample is placed on the stage 2 instead of the specimen 3. A planar sample is used as the reference sample at this time.

  Next, in step 402, the magnification, maximum measurement range, measurement accuracy, and measurement speed parameters are set. These parameter setting methods are the same as those in the flowchart described in FIG.

  Next, in step 403, the save switch 179 on the display unit 174 shown in FIG.

  First, the lattice pitch Pitch of the liquid crystal lattice 604 is calculated from the above-described equation (2). Next, data of the lattice pattern of the liquid crystal lattice 604 is generated based on the lattice pitch Pitch of the liquid crystal lattice 604 calculated from the equation (2), and this data is transferred to the liquid crystal lattice control unit 171. Based on this data, the liquid crystal lattice control unit 171 instructs the liquid crystal lattice 604 to generate a lattice pattern whose brightness changes to a sine wave shape.

  In this state, light is generated from the light source device 16 and the light transmitted through the liquid crystal lattice 604 is projected as a lattice pattern image on the reference sample at a predetermined angle, and scattered light is reflected from the light reflected from the reference sample. An image is captured by the TV camera 13 as a deformed grid pattern image. Observation of such a deformed grating pattern image is repeatedly performed a plurality of times while shifting the grating pattern by the liquid crystal grating 604 from the liquid crystal grating controller 171 by several steps, and the captured images (phase-shifted images) from the TV camera 13 at each position. ) Is stored in the data storage unit 172.

  Next, the phase is calculated using the above-described equation (3), phase connection is performed, and the result is stored in the reference phase data file as reference phase data.

  In the same manner, the above operations are repeated while arbitrarily changing the parameters of the zoom magnification, the maximum measurement range, the measurement accuracy and the measurement speed, and the set zoom magnification, the maximum measurement range, and the measurement accuracy are respectively set. The reference phase data corresponding to the parameter of the measurement speed degree is generated, and the reference phase data is stored in the reference phase data file (step 404).

  Therefore, in this way, the user can obtain the tertiary figure of the sample 3 only by setting the parameters of the magnification of the observation system, the maximum measurement range of the measurement object, the degree of measurement accuracy, and the degree of measurement speed. Therefore, parameter setting can be greatly simplified and the burden on the user can be greatly reduced.

  Further, when it is determined that the maximum measurement range of the sample 3 is larger than the depth of focus corresponding to the magnification when the user sets the parameter, an instruction is given to prompt the user to reset the parameter for the maximum measurement range or the magnification. By setting appropriate parameters, it is possible to prevent measurement from becoming impossible, and stable three-dimensional measurement can always be performed.

  In addition, by setting the degree of measurement accuracy and measurement speed, a lattice pattern with the optimal lattice pitch is set according to these, so balance control is given to give priority to measurement accuracy or measurement speed. It can be done easily.

  Further, the reference phase data obtained in advance using the reference sample is stored in the reference phase data file, and the corresponding reference phase data is read from the reference phase data file and used at the time of measurement. Therefore, it is not necessary to create reference phase data for each measurement, and efficient three-dimensional measurement can be performed. In addition, since the lattice pattern data related to the liquid crystal lattice 604 is stored in the data storage unit 172, it can be used together with the reference phase data stored in the reference phase data file to increase the speed when performing continuous measurement. .

  Furthermore, in creating the reference phase data, the influence of distortion on the apparatus side can be reduced by using a plane sample as the reference sample.

  In addition, this invention is not limited to the said embodiment, In the implementation stage, it can change variously in the range which does not change the summary. For example, in the parameter settings, the magnification of the observation system, the maximum measurement range of the object to be measured, and the parameters of the degree of measurement accuracy and measurement speed are set. The effects of the invention can be obtained. In this case, the parameter setting of the measurement accuracy and the measurement speed in step 305 in the flowchart shown in FIG. 3 and step 402 in the flowchart shown in FIG. 4 can be omitted.

  Furthermore, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements. For example, even if some constituent requirements are deleted from all the constituent requirements shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and is described in the column of the effect of the invention. If the above effect is obtained, a configuration from which this configuration requirement is deleted can be extracted as an invention.

The figure which shows schematic structure of the microscope three-dimensional measurement system to which the parameter setting method of one embodiment of this invention is applied. The figure which shows an example of the display screen of the display part used for one Embodiment. The flowchart for demonstrating from the parameter setting of one Embodiment to the display of a measurement result. The flowchart for demonstrating creation of the reference | standard phase data file of one embodiment. The figure explaining the method based on the principle of the triangulation for calculating | requiring the height of a measuring object from phase information.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Base, 2 ... Stage, 3 ... Sample 4 ... Support | pillar, 5 ... Focusing apparatus 501 ... Main body, 502 ... Moving member 503 ... Fixed handle, 504 ... Focusing handle 6 ... Liquid crystal lattice projection apparatus, 601 ... Apparatus Main body 602: Light guide insertion portion, 603 ... Illumination optical system 604 ... Liquid crystal grating, 605 ... Projection optical system 7 ... Stereo microscope main body, 701 ... Zoom lens barrel 702 ... Zoom handle, 8 ... Optical fiber 8a ... Emission end, 8b ... Incident end, 9 ... projection optical path 10 ... objective lens, 11 ... lens barrel, 12 ... eyepiece 13 ... TV camera, 13a ... imaging surface, 14 ... optical path switching unit 15 ... imaging optical path, 16 ... light source device, 16a ... dimming Volume 17 ... PC, 171 ... Liquid crystal lattice control unit 172 ... Data storage unit, 173 ... Data processing unit 174 ... Display unit, 175 ... Magnification input unit 175a ... Numerical value input unit, 175 b: Magnification input unit 176: Maximum measurement range input unit, 177 ... Degree input unit 177a ... Pointer, 178 ... Set switch 179 ... Save switch, 180 ... Start switch 181 ... Main display screen

Claims (10)

Set the magnification of the observation system and the parameters of the maximum measurement range of the object to be measured,
Based on these set parameters, obtain the lattice pitch of the lattice pattern,
While capturing a deformed lattice pattern image from a specimen using the lattice pattern generated at the lattice pitch, acquiring captured images at each position while shifting the lattice pattern generated at the lattice pitch by several steps,
Obtain the phase from the acquired captured image for each position, obtain the height using the difference between the phase and the magnification of the parameter prepared in advance and the basic phase corresponding to the maximum measurement range, and obtain the result. A three-dimensional measurement method characterized by displaying on a display unit. The three-dimensional measurement method according to claim 1, further comprising setting a measurement accuracy and a degree of measurement speed as the parameters. 3. The height is obtained using a difference between the reference phase with respect to a measurement parameter obtained by adding the measurement accuracy and a measurement speed degree to the magnification and maximum measurement range of the parameter. 3D measurement method. The reconfiguration of the parameter of the maximum measurement range or magnification is instructed when the maximum measurement range of the measurement target object is larger than the depth of focus corresponding to the magnification. 3D measurement method. 4. The three-dimensional measurement method according to claim 1, wherein the magnification parameter of the observation system is automatically set based on information from the outside. The basic phase is
Set each parameter of the magnification, maximum measurement range, measurement accuracy,
Based on these set parameters, obtain the lattice pitch of the lattice pattern,
The deformed lattice pattern image from the reference sample is imaged using the lattice pattern generated at the lattice pitch, and the captured image for each position is acquired while shifting the lattice pattern by several steps. The three-dimensional measurement method according to claim 1, wherein the phase obtained from the captured image is stored as reference phase data. The three-dimensional measurement method according to claim 6, further comprising adding the measurement accuracy and the measurement speed to the magnification and the maximum measurement range of the parameter. Set the magnification of the observation system and the parameters of the maximum measurement range of the object to be measured, obtain the lattice pitch of the lattice pattern based on the set parameters, and use the lattice pattern generated at the lattice pitch to deform from the specimen While capturing a lattice pattern image, acquiring a captured image at each position while shifting the lattice pattern by several stages, obtaining a phase from the acquired captured image at each position, and preparing the phase and the phase in advance A program for causing a computer to execute a three-dimensional measurement method characterized in that a height is obtained using a difference between the magnification of a parameter and a basic phase with respect to a maximum measurement range, and the result is displayed on a display unit. The program for causing a computer to execute the three-dimensional measurement method according to claim 8, further comprising setting a measurement accuracy and a measurement speed as the parameters. The height is obtained by using a difference between the reference phase with respect to a measurement parameter obtained by adding the measurement accuracy and a measurement speed degree to the magnification and maximum measurement range of the parameter. A program that causes a computer to execute a three-dimensional measurement method.

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