KR19980076583A - Interlayer insulating film of semiconductor device and manufacturing method thereof - Google Patents
Interlayer insulating film of semiconductor device and manufacturing method thereof Download PDFInfo
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- KR19980076583A KR19980076583A KR1019970013353A KR19970013353A KR19980076583A KR 19980076583 A KR19980076583 A KR 19980076583A KR 1019970013353 A KR1019970013353 A KR 1019970013353A KR 19970013353 A KR19970013353 A KR 19970013353A KR 19980076583 A KR19980076583 A KR 19980076583A
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
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- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
- H01L21/02129—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material being boron or phosphorus doped silicon oxides, e.g. BPSG, BSG or PSG
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- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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Abstract
본 발명의 반도체 소자의 층간절연막은, 실리사이드막 위에 저온산화막, 고온산화막 및 BPSG막을 순차적층시킨 것으로 상기 실리사이드막과 고온산화막 사이에 저온산화막을 삽입함으로써 상기 실리사이드막에 열에 의한 영향을 주지 않고 리플로우 온도가 낮아 디자인 룰에 적합한 BPSG막과, 상기 BPSG막으로부터 나오는 보론이온과 인 이온의 소자로의 침투를 방지할 수 있는 고온산화막을 안전하게 사용할 수 있으며, 이에따라 실리사이드의 크랙 및 리프팅 발생을 크게 감소시켜 신뢰성을 향상시킬 수 있는 효과가 있다.In the interlayer insulating film of the semiconductor device of the present invention, a low-temperature oxide film, a high-temperature oxide film, and a BPSG film are sequentially formed on a silicide film, and a low-temperature oxide film is inserted between the silicide film and the high-temperature oxide film without reflowing the silicide film without affecting heat. The low temperature makes it possible to safely use a BPSG film suitable for design rules and a high temperature oxide film that can prevent the penetration of boron ions and phosphorus ions from the BPSG film into the device, thereby greatly reducing cracking and lifting of silicide. There is an effect that can improve the reliability.
Description
본 발명은 반도체 소자에 관한 것으로서, 특히 실리사이드를 구비하는 게이트전극층 또는 금속배선층의 층간절연막 및 그의 제조방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to semiconductor devices, and more particularly, to an interlayer insulating film of a gate electrode layer or a metal wiring layer having silicide and a method of manufacturing the same.
실리사이드막은 Co이나 W과 같은 고융점 금속을 폴리실리콘 위에 열처리하여 형성되는 막으로, 상기 실리사이드 막을 사용하면 게이트 전극과 금속배선층의 콘택(contact)저항과 면저항을 낮추어 고속동작이 가능하다.The silicide film is formed by heat-treating a high melting point metal such as Co or W on polysilicon. When the silicide film is used, the contact resistance and the sheet resistance of the gate electrode and the metal wiring layer are reduced to enable high speed operation.
주로 사용되는 실리사이드막은 순도가 높고 스텝 커버리지가 좋은 WSix인데, 도 1을 참조하여 종래의 실리사이드막을 구비하는 게이트 전극과, 상기 게이트 전극을 상부구조물들과 절연하기 위한 층간절연막의 구조 및 제조방법을 개략적으로 설명하면 다음과 같다.The silicide film mainly used is WSi x having high purity and good step coverage. Referring to FIG. 1, a structure and a manufacturing method of a gate electrode including a conventional silicide film and an interlayer insulating film for insulating the gate electrode from upper structures are described. If outlined as follows.
실리사이드막은 반도체기판(10) 위에 게이트 산화막(11)과, 폴리실리콘층(12)을 형성한 후 POCl3공정을 거쳐 상기 폴리실리콘층(12)에 불순물을 확산시키며, 이어서 상기 폴리실리콘층(12) 위에 불균일하게 분포하는 자연산화막을 제거한후 형성된다.The silicide layer forms a gate oxide layer 11 and a polysilicon layer 12 on the semiconductor substrate 10, and then diffuses impurities into the polysilicon layer 12 through a POCl 3 process, followed by the polysilicon layer 12. It is formed after removing the non-uniformly distributed natural oxide layer on
상기 자연산화막은, 고유 스트레스(intrinsic stress)와, 실리사이드막 내의 오염등과 함께 상기 실리사이드막이 리프팅(lifting)되게 하는 원인으로써 HF용액에 담그는 방법을 사용하여 제거한다.The natural oxide film is removed using a method of immersion in HF solution as a cause of causing the silicide film to be lifted together with intrinsic stress and contamination in the silicide film.
여기서 상기 실리사이드막 내의 오염을 방지하려면 장비의 기본 진공(base vacuum)을 낮게 관리해야하며, 상기 고유 스트레스를 감소시키려면 이 고유 스트레스가 실리사이드 막내의 기포나 디스로케이션(disloction)과 같은 고유 결함때문에 발생하는 것이므로 어닐링(annealing)을 실시하여 상기 폴리실리콘층 위에 도핑된 도펀트들이 상기 실리사이드막으로 침투하도록 한다.Here, to prevent contamination in the silicide film, the base vacuum of the equipment should be managed low. To reduce the intrinsic stress, this intrinsic stress is caused by inherent defects such as bubbles or disloction in the silicide film. Since annealing is performed, the dopants doped on the polysilicon layer may penetrate into the silicide layer.
그러나 이러한 어닐링 방법은 상기 고유결함으로 인해 생긴 스트레스를 완화시키고 폴리실리콘층 인접면에서의 결합특성을 향상시키는 반면, 어닐링이 지나지면 실리사이드막 내에 석출되는 산화막 성장으로 인한 부피팽창 때문에 크랙(crack)이 발생하거나 방지하고자 하였던 리프팅을 초래할 수 있다.However, this annealing method relieves the stress caused by the intrinsic defects and improves the bonding properties at the adjacent surface of the polysilicon layer, whereas cracks are caused by volume expansion due to oxide growth that precipitates in the silicide film after annealing. This may result in lifting that has occurred or was intended to be prevented.
이어서 상기 폴리실리콘층(12)과 실리사이드막(13)을 동일 마스크를 적용하여 패터닝함으로써 게이트 전극을 형성한 후, 상기 게이트 전극의 측벽에 산화막으로 측벽 스페이서(14)를 형성한다. 그리고 상기 측벽 스페이서(14)가 형성된 후에는 결과물의 표면에 층간절연막으로써 HTO막(15)과 BPSG막(16)을 적층시킨다.Subsequently, the polysilicon layer 12 and the silicide layer 13 are patterned by applying the same mask to form a gate electrode, and then sidewall spacers 14 are formed on the sidewalls of the gate electrode with an oxide film. After the sidewall spacers 14 are formed, the HTO film 15 and the BPSG film 16 are laminated on the resulting surface as an interlayer insulating film.
이때 상기 BPSG막은 리플로우(reflow) 온도가 낮기 때문에 타이트(tight) 해지는 디자인 룰에 적합하며, 상기 HTO막은 막질이 우수하여 상기 BPSG막의 보론과 인 이온이 소자내로 확산되는 것을 방지할 수 있다.At this time, the BPSG film is suitable for the design rule that is tight because the reflow temperature is low, and the HTO film is excellent in film quality to prevent diffusion of boron and phosphorus ions of the BPSG film into the device.
그러나 이러한 종래의 층간절연막은, 상기 HTO막이 830℃ 정도의 온도에서 형성되므로 상기 실리사이드막의 고유 스트레스를 감소시키기 위한 어닐링 후에 추가 어닐링을 실시하는 것과 같기 때문에 상기 실리사이드막 위에 충분한 산화막이 없으면 리프팅이 발생하고, 이를 방지하기 위해 상기 HTO막 대신 저온산화막을 사용하게 되면 상기 보론과 인 이온이 소자 내로 확산되는 것을 방지할 수 없는 문제점이 있었다.However, since the HTO film is formed at a temperature of about 830 ° C., the conventional interlayer insulating film is the same as performing an additional annealing after annealing to reduce the intrinsic stress of the silicide film. Thus, if there is not enough oxide film on the silicide film, lifting occurs. To prevent this, when the low temperature oxide film is used instead of the HTO film, there is a problem that the boron and phosphorus ions cannot be prevented from being diffused into the device.
따라서 본 발명의 목적은, 상기와 같은 문제점을 해결하기 위하여 상기 실리사이드막과 HTO 막 사이에 저온산화막을 삽입함으로써 상기 실리사이드막에 열에 의한 영향을 주지 않고 안전하게 HTO막 및 BPSG막을 사용할 수 있는 반도체 소자의 층간절연막을 제공하는 것이다.Accordingly, an object of the present invention is to insert a low temperature oxide film between the silicide film and the HTO film to solve the above problems, thereby providing a semiconductor device capable of safely using the HTO film and the BPSG film without affecting the silicide film by heat. It is to provide an interlayer insulating film.
본 발명의 다른 목적은 상기 반도체 소자의 층간절연막을 효과적으로 제조할 수 있는 제조방법을 제공하는 것이다.Another object of the present invention is to provide a manufacturing method which can effectively manufacture the interlayer insulating film of the semiconductor device.
상기 목적을 달성하기 위한 본 발명의 반도체 소자의 층간절연막은, 실리사이드막을 포함하는 반도체 소자의 전극구조에 있어서, 상기 실리사이드막 위에 저온산화막과 고온산화막 및 BPSG막이 순차적층되어 이루어진 것을 특징으로 한다.In the interlayer insulating film of the semiconductor device of the present invention for achieving the above object, in the electrode structure of the semiconductor device including a silicide film, a low-temperature oxide film, a high temperature oxide film and a BPSG film are sequentially formed on the silicide film.
상기 다른 목적을 달성하기 위한 본 발명의 반도체 소자의 층간절연막 제조방법은, 실리사이드막을 포함하는 반도체 소자의 전극구조에 있어서, 상기 실리사이드막을 덮는 저온산화막을 형성하는 공정과, 상기 저온산화막 위에 고온산화막을 형성하는 공정과, 상기 고온산화막 위에 BPSG막을 형성하는 공정을 포함하여 이루어지는 것을 특징으로 한다.According to another aspect of the present invention, there is provided a method for manufacturing an interlayer insulating film of a semiconductor device, the method including forming a low temperature oxide film covering the silicide film in an electrode structure of a semiconductor device including a silicide film, and forming a high temperature oxide film on the low temperature oxide film. And forming a BPSG film on the high temperature oxide film.
도 1 은 종래의 기술에 의한 반도체소자의 층간절연막 구조를 도시한 단면도.1 is a cross-sectional view showing an interlayer insulating film structure of a semiconductor device according to the prior art.
도 2 는 본 발명에 의한 반도체 소자의 층간절연막 구조를 도시한 단면도.2 is a cross-sectional view showing an interlayer insulating film structure of a semiconductor device according to the present invention;
도 3 은 본 발명에 의한 반도체 소자의 층간절연막 제조방법을 도시한 단면도.3 is a cross-sectional view showing a method for manufacturing an interlayer insulating film of a semiconductor device according to the present invention.
*도면의 주요 부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *
30 : 반도체 기판31 : 게이트 산화막30 semiconductor substrate 31 gate oxide film
32 : 폴리실리콘층33 : 실리사이드막32 polysilicon layer 33 silicide film
34 : 스페이서35 : 저온 산화막34 spacer 35 low temperature oxide film
36 : 고온 산화막37 : BPSG막36 high temperature oxide film 37 BPSG film
이하, 첨부도면을 참조하여 본 발명을 보다 상세히 설명하고자 한다.Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.
본 발명의 반도체 소자의 층간절연막에서는, 도 2 에 도시한 바와 같이 실리사이드막(33)과 HTO와 같은 고온산화막(36) 사이에 저온산화막(35)을 삽입하여 상기한 바와 같이 리플로우 온도가 낮아 디자인 룰에 적합한 BPSG막(37)과, 상기 BPSG막(37)으로부터 보론과 인 이온이 소자내로 침투하는 것을 방지할 수 있는 고온산화막(36)을 하부 실리사이드막(33)의 손상없이 사용할 수 있도록 한다.In the interlayer insulating film of the semiconductor device of the present invention, as shown in FIG. 2, a low temperature oxide film 35 is inserted between the silicide film 33 and the high temperature oxide film 36 such as HTO, and the reflow temperature is low as described above. The BPSG film 37 suitable for the design rule and the high temperature oxide film 36 which can prevent boron and phosphorus ions from penetrating into the device from the BPSG film 37 can be used without damaging the lower silicide film 33. do.
상기 저온산화막(35)과 고온산화막(36) 및 BPSG막(37)으로 이루어진 층간절연막을 구비하는 반도체 소자의 제조방법을 살펴보면, 먼저 도 3 a 에 도시한 바와 같이 반도체 기판(30) 위에 게이트 산화막(31)을 열성장시키고, 그 위에 폴리실리콘층(32)을 증착시킨 후 POCl3액체 소스를 이용하여 상기 폴리실리콘층(32) 내에 불순물을 확산시킨다. 이어서 상기 불순물이 확산된 폴리실리콘층(32) 위에 W를 이용하여 실리사이드(WSix)막(33)을 형성한다.Referring to a method of fabricating a semiconductor device having an interlayer insulating film including the low temperature oxide film 35, the high temperature oxide film 36, and the BPSG film 37, first, as shown in FIG. 3A, a gate oxide film is formed on the semiconductor substrate 30. (31) is thermally grown, and a polysilicon layer 32 is deposited thereon, and then impurities are diffused into the polysilicon layer 32 using a POCl 3 liquid source. Subsequently, a silicide (WSi x ) film 33 is formed using W on the polysilicon layer 32 having the impurity diffused therein.
도 3 b 에서는 상기 실리사이드막(33) 위에 포토레지스트 패턴을 형성한 후 이를 마스크로 적용하여 상기 실리사이드막(33)과 폴리실리콘층(32)을 순차식각하여 게이트 전극을 형성하고 상기 포토레지스트 패턴을 제거하며, 이어서 게이트 전극이 형성된 결과물 표면에 산화막을 열성장시킨 후 에치백 하여 상기 게이트 전극 측벽에 스페이서(34)를 형성하고, n+ 또는 p+ 이온을 상기 게이트 전극에 선택적으로 이온주입한다.In FIG. 3B, a photoresist pattern is formed on the silicide layer 33 and then applied as a mask to sequentially etch the silicide layer 33 and the polysilicon layer 32 to form a gate electrode, thereby forming the photoresist pattern. Subsequently, an oxide film is thermally grown on the surface of the resultant substrate on which the gate electrode is formed, and then etched back to form a spacer 34 on the sidewall of the gate electrode, and n + or p + ions are selectively implanted into the gate electrode.
도 3 c 에서는 상기 결과물의 표면에 저온 산화막(35)을 형성한다. 상기 저온산화막(35)은 예를들면 350℃ 정도의 온도에서 300Å-500Å 정도의 두께를 갖도록 플라즈마 CVD(Chemical Vapor Deposition)법으로 형성한다. 이어서, 상기 저온산화막(35) 위에 800℃ 정도의 온도에서 상기 저온산화막(35)과의 두께합이 1300Å을 넘도록 형성한 후 상기 고온산화막(36) 위에 다시 리플로우 온도가 낮은 BPSG막(37)을 형성한다.In FIG. 3C, a low temperature oxide film 35 is formed on the surface of the resultant product. The low temperature oxide film 35 is formed by, for example, plasma CVD (Chemical Vapor Deposition) method to have a thickness of about 300 kPa-500 kPa at a temperature of about 350 ° C. Subsequently, the BPSG film 37 having a low reflow temperature on the high temperature oxide film 36 is formed on the low temperature oxide film 35 at a temperature of about 800 ° C. so that the sum of thicknesses with the low temperature oxide film 35 exceeds 1300 μs. To form.
이상에서와 같이 본 발명에 의하면, 상기 실리사이드막과 고온산화막 사이에 저온산화막을 삽입함으로써 상기 실리사이드막에 열에 의한 영향을 주지 않고 리플로우 온도가 낮아 디자인 룰에 적합한 BPSG막과, 상기 BPSG막으로부터 나오는 보론이온과 인 이온의 소자로의 침투를 방지할 수 있는 고온산화막을 안전하게 사용할 수 있으며, 이에따라 실리사이드의 크랙 및 리프팅 발생을 크게 감소시켜 신뢰성을 향상시킬 수 있는 효과가 있다.As described above, according to the present invention, by inserting a low temperature oxide film between the silicide film and the high temperature oxide film, the BPSG film suitable for the design rule with low reflow temperature without affecting the silicide film and exiting from the BPSG film It is possible to safely use a high-temperature oxide film that can prevent the penetration of boron ions and phosphorus ions into the device, thereby significantly reducing the cracks and lifting of silicide, thereby improving reliability.
Claims (8)
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| KR1019970013353A KR100452311B1 (en) | 1997-04-11 | 1997-04-11 | Interlayer dielectric of semiconductor device and fabricating method thereof to stably use hto layer and bpsg layer without preventing silicide layer from being influenced by heat |
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