KR102929521B1 - 기판 프로세싱 시스템의 가스 전달 시스템의 하드웨어 컴포넌트들을 위한 소프트웨어 에뮬레이터 - Google Patents

기판 프로세싱 시스템의 가스 전달 시스템의 하드웨어 컴포넌트들을 위한 소프트웨어 에뮬레이터

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Publication number
KR102929521B1
KR102929521B1 KR1020217009957A KR20217009957A KR102929521B1 KR 102929521 B1 KR102929521 B1 KR 102929521B1 KR 1020217009957 A KR1020217009957 A KR 1020217009957A KR 20217009957 A KR20217009957 A KR 20217009957A KR 102929521 B1 KR102929521 B1 KR 102929521B1
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South Korea
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function
software
gas delivery
emulator
delivery system
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KR1020217009957A
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English (en)
Korean (ko)
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KR20210042413A (ko
Inventor
보스티안 푸스트
탐 트린
충-호 후앙
Original Assignee
램 리써치 코포레이션
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for program control, e.g. control units
    • G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/44—Arrangements for executing specific programs
    • G06F9/455—Emulation; Interpretation; Software simulation, e.g. virtualisation or emulation of application or operating system execution engines
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/30—Monitoring
    • G06F11/34—Recording or statistical evaluation of computer activity, e.g. of down time, of input/output operation ; Recording or statistical evaluation of user activity, e.g. usability assessment
    • G06F11/3466—Performance evaluation by tracing or monitoring
    • G06F11/3476—Data logging
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for program control, e.g. control units
    • G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/44—Arrangements for executing specific programs
    • G06F9/455—Emulation; Interpretation; Software simulation, e.g. virtualisation or emulation of application or operating system execution engines
    • G06F9/45504—Abstract machines for programme code execution, e.g. Java virtual machine [JVM], interpreters, emulators
    • G06F9/45508—Runtime interpretation or emulation, e g. emulator loops, bytecode interpretation
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/22—Detection or location of defective computer hardware by testing during standby operation or during idle time, e.g. start-up testing
    • G06F11/26—Functional testing
    • G06F11/261—Functional testing by simulating additional hardware, e.g. fault simulation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612—Production flow monitoring, e.g. for increasing throughput
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/04—Program control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Program control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G05B19/0428—Safety, monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Software Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Quality & Reliability (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Drying Of Semiconductors (AREA)
  • Debugging And Monitoring (AREA)
  • Flow Control (AREA)
  • Automation & Control Theory (AREA)
KR1020217009957A 2018-09-04 2019-08-30 기판 프로세싱 시스템의 가스 전달 시스템의 하드웨어 컴포넌트들을 위한 소프트웨어 에뮬레이터 Active KR102929521B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/120,846 US11429409B2 (en) 2018-09-04 2018-09-04 Software emulator for hardware components in a gas delivery system of substrate processing system
US16/120,846 2018-09-04
PCT/US2019/049055 WO2020051084A1 (en) 2018-09-04 2019-08-30 Software emulator for hardware components in a gas delivery system of substrate processing system

Publications (2)

Publication Number Publication Date
KR20210042413A KR20210042413A (ko) 2021-04-19
KR102929521B1 true KR102929521B1 (ko) 2026-02-20

Family

ID=69639902

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217009957A Active KR102929521B1 (ko) 2018-09-04 2019-08-30 기판 프로세싱 시스템의 가스 전달 시스템의 하드웨어 컴포넌트들을 위한 소프트웨어 에뮬레이터

Country Status (6)

Country Link
US (1) US11429409B2 (https=)
JP (1) JP7419378B2 (https=)
KR (1) KR102929521B1 (https=)
CN (1) CN112654994A (https=)
TW (1) TWI816872B (https=)
WO (1) WO2020051084A1 (https=)

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* Cited by examiner, † Cited by third party
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CN120752745A (zh) * 2023-09-21 2025-10-03 株式会社国际电气 基板处理装置、基板处理方法、半导体装置的制造方法、气体供给系统以及气体供给程序
CN117329448A (zh) * 2023-10-17 2024-01-02 江苏超微半导体科技有限公司 一种半导体制造用超纯气体输送系统集成方法

Citations (1)

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KR101853361B1 (ko) 2016-11-29 2018-04-30 세메스 주식회사 기판 처리 설비 시뮬레이션 시스템 및 방법

Also Published As

Publication number Publication date
TW202026918A (zh) 2020-07-16
KR20210042413A (ko) 2021-04-19
WO2020051084A1 (en) 2020-03-12
US20200073685A1 (en) 2020-03-05
US11429409B2 (en) 2022-08-30
TWI816872B (zh) 2023-10-01
JP2021535626A (ja) 2021-12-16
JP7419378B2 (ja) 2024-01-22
CN112654994A (zh) 2021-04-13

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