CN112654994A - 针对在衬底处理系统的气体输送系统中的硬件部件的软件仿真器 - Google Patents

针对在衬底处理系统的气体输送系统中的硬件部件的软件仿真器 Download PDF

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Publication number
CN112654994A
CN112654994A CN201980057883.0A CN201980057883A CN112654994A CN 112654994 A CN112654994 A CN 112654994A CN 201980057883 A CN201980057883 A CN 201980057883A CN 112654994 A CN112654994 A CN 112654994A
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CN
China
Prior art keywords
software
simulation
gas
bus
hardware components
Prior art date
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Pending
Application number
CN201980057883.0A
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English (en)
Chinese (zh)
Inventor
波斯简·普斯特
汤姆·特林
黄中和
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Lam Research Corp
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Lam Research Corp
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Publication of CN112654994A publication Critical patent/CN112654994A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for program control, e.g. control units
    • G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/44—Arrangements for executing specific programs
    • G06F9/455—Emulation; Interpretation; Software simulation, e.g. virtualisation or emulation of application or operating system execution engines
    • G06F9/45504—Abstract machines for programme code execution, e.g. Java virtual machine [JVM], interpreters, emulators
    • G06F9/45508—Runtime interpretation or emulation, e g. emulator loops, bytecode interpretation
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for program control, e.g. control units
    • G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/44—Arrangements for executing specific programs
    • G06F9/455—Emulation; Interpretation; Software simulation, e.g. virtualisation or emulation of application or operating system execution engines
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/30—Monitoring
    • G06F11/34—Recording or statistical evaluation of computer activity, e.g. of down time, of input/output operation ; Recording or statistical evaluation of user activity, e.g. usability assessment
    • G06F11/3466—Performance evaluation by tracing or monitoring
    • G06F11/3476—Data logging
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/22—Detection or location of defective computer hardware by testing during standby operation or during idle time, e.g. start-up testing
    • G06F11/26—Functional testing
    • G06F11/261—Functional testing by simulating additional hardware, e.g. fault simulation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612—Production flow monitoring, e.g. for increasing throughput
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/04—Program control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Program control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G05B19/0428—Safety, monitoring

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Software Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Quality & Reliability (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Drying Of Semiconductors (AREA)
  • Debugging And Monitoring (AREA)
  • Flow Control (AREA)
  • Automation & Control Theory (AREA)
CN201980057883.0A 2018-09-04 2019-08-30 针对在衬底处理系统的气体输送系统中的硬件部件的软件仿真器 Pending CN112654994A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/120,846 US11429409B2 (en) 2018-09-04 2018-09-04 Software emulator for hardware components in a gas delivery system of substrate processing system
US16/120,846 2018-09-04
PCT/US2019/049055 WO2020051084A1 (en) 2018-09-04 2019-08-30 Software emulator for hardware components in a gas delivery system of substrate processing system

Publications (1)

Publication Number Publication Date
CN112654994A true CN112654994A (zh) 2021-04-13

Family

ID=69639902

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980057883.0A Pending CN112654994A (zh) 2018-09-04 2019-08-30 针对在衬底处理系统的气体输送系统中的硬件部件的软件仿真器

Country Status (6)

Country Link
US (1) US11429409B2 (https=)
JP (1) JP7419378B2 (https=)
KR (1) KR102929521B1 (https=)
CN (1) CN112654994A (https=)
TW (1) TWI816872B (https=)
WO (1) WO2020051084A1 (https=)

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* Cited by examiner, † Cited by third party
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CN120752745A (zh) * 2023-09-21 2025-10-03 株式会社国际电气 基板处理装置、基板处理方法、半导体装置的制造方法、气体供给系统以及气体供给程序
CN117329448A (zh) * 2023-10-17 2024-01-02 江苏超微半导体科技有限公司 一种半导体制造用超纯气体输送系统集成方法

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JP2004014927A (ja) * 2002-06-10 2004-01-15 Tokyo Electron Ltd 半導体製造装置のシミュレーション装置、及び該シミュレーション装置を備える半導体製造装置
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US20090326903A1 (en) * 2007-12-04 2009-12-31 Ludwig Lester F Software controlled lab-on-a-chip emulation
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CN106103796A (zh) * 2014-03-13 2016-11-09 Mks 仪器公司 用于快速脉冲气体输送的系统和方法
KR101853361B1 (ko) * 2016-11-29 2018-04-30 세메스 주식회사 기판 처리 설비 시뮬레이션 시스템 및 방법
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JP2001216003A (ja) * 1999-10-04 2001-08-10 Fisher Rosemount Syst Inc プロセス制御システムにおける統合されたアドバンスド制御ブロック
US6772017B1 (en) * 2000-01-20 2004-08-03 Fisher-Rosemount Systems, Inc. Tool for configuring and managing a process control network including the use of spatial information
CN1714277A (zh) * 2001-04-27 2005-12-28 米克罗利斯公司 对质量流控制器和质量流量计的输出滤波的系统和方法
JP2004014927A (ja) * 2002-06-10 2004-01-15 Tokyo Electron Ltd 半導体製造装置のシミュレーション装置、及び該シミュレーション装置を備える半導体製造装置
CN1918575A (zh) * 2004-02-12 2007-02-21 恩特格里公司 用于流动监测和控制的系统及方法
CN101583916A (zh) * 2006-10-03 2009-11-18 株式会社堀场Stec 质量流量控制器
US20090326903A1 (en) * 2007-12-04 2009-12-31 Ludwig Lester F Software controlled lab-on-a-chip emulation
CN102096420A (zh) * 2009-12-15 2011-06-15 株式会社堀场Stec 质量流量控制器
US20120323350A1 (en) * 2010-06-16 2012-12-20 Minoru Yamamoto Support system for setting equipment parameters
CN102467132A (zh) * 2010-11-08 2012-05-23 株式会社堀场Stec 质量流量控制器和流量控制方法
US20140236556A1 (en) * 2013-02-15 2014-08-21 Tokyo Electron Limited Substrate processing apparatus, simulation apparatus, storage medium and simulation method
CN104155879A (zh) * 2013-05-14 2014-11-19 洛克威尔自动控制技术股份有限公司 用于自动控制系统的仿真的系统和方法
CN106103796A (zh) * 2014-03-13 2016-11-09 Mks 仪器公司 用于快速脉冲气体输送的系统和方法
US20180121590A1 (en) * 2016-10-27 2018-05-03 The Regents Of The University Of California Microfluidics planar placement and routing algorithm
KR101853361B1 (ko) * 2016-11-29 2018-04-30 세메스 주식회사 기판 처리 설비 시뮬레이션 시스템 및 방법

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Publication number Publication date
TW202026918A (zh) 2020-07-16
KR20210042413A (ko) 2021-04-19
KR102929521B1 (ko) 2026-02-20
WO2020051084A1 (en) 2020-03-12
US20200073685A1 (en) 2020-03-05
US11429409B2 (en) 2022-08-30
TWI816872B (zh) 2023-10-01
JP2021535626A (ja) 2021-12-16
JP7419378B2 (ja) 2024-01-22

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