KR102821766B1 - Ti 및/또는 Si와 미세합금된 바나듐 알루미늄 니트라이드(VAlN) - Google Patents

Ti 및/또는 Si와 미세합금된 바나듐 알루미늄 니트라이드(VAlN) Download PDF

Info

Publication number
KR102821766B1
KR102821766B1 KR1020217014826A KR20217014826A KR102821766B1 KR 102821766 B1 KR102821766 B1 KR 102821766B1 KR 1020217014826 A KR1020217014826 A KR 1020217014826A KR 20217014826 A KR20217014826 A KR 20217014826A KR 102821766 B1 KR102821766 B1 KR 102821766B1
Authority
KR
South Korea
Prior art keywords
coating structure
vapor deposition
deposition method
article
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020217014826A
Other languages
English (en)
Korean (ko)
Other versions
KR20210080444A (ko
Inventor
시바 파니 쿠마르 얄라만칠리
Original Assignee
외를리콘 서피스 솔루션즈 아게, 페피콘
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 외를리콘 서피스 솔루션즈 아게, 페피콘 filed Critical 외를리콘 서피스 솔루션즈 아게, 페피콘
Publication of KR20210080444A publication Critical patent/KR20210080444A/ko
Application granted granted Critical
Publication of KR102821766B1 publication Critical patent/KR102821766B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C23C14/345—Applying energy to the substrate during sputtering using substrate bias
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
KR1020217014826A 2018-10-26 2019-10-28 Ti 및/또는 Si와 미세합금된 바나듐 알루미늄 니트라이드(VAlN) Active KR102821766B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862751022P 2018-10-26 2018-10-26
US62/751,022 2018-10-26
PCT/EP2019/079411 WO2020084167A1 (en) 2018-10-26 2019-10-28 Vanadium aluminium nitride (vain) micro alloyed with ti and/or si

Publications (2)

Publication Number Publication Date
KR20210080444A KR20210080444A (ko) 2021-06-30
KR102821766B1 true KR102821766B1 (ko) 2025-06-16

Family

ID=68387333

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217014826A Active KR102821766B1 (ko) 2018-10-26 2019-10-28 Ti 및/또는 Si와 미세합금된 바나듐 알루미늄 니트라이드(VAlN)

Country Status (6)

Country Link
US (1) US11821073B2 (https=)
EP (1) EP3870733A1 (https=)
JP (1) JP7790969B2 (https=)
KR (1) KR102821766B1 (https=)
CN (1) CN112930417A (https=)
WO (1) WO2020084167A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020084166A1 (en) * 2018-10-26 2020-04-30 Oerlikon Surface Solutions Ag, Pfäffikon Pvd coatings with a hea ceramic matrix with controlled precipitate structure
JP7409554B1 (ja) * 2022-09-22 2024-01-09 住友電気工業株式会社 切削工具
US12090557B1 (en) 2023-05-17 2024-09-17 Sumitomo Electric Industries, Ltd. Cutting tool
EP4703071A1 (en) 2023-11-29 2026-03-04 Sumitomo Electric Industries, Ltd. Cutting tool

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040110039A1 (en) * 2002-09-03 2004-06-10 Seco Tools Ab Precipitation hardened wear resistant coating
JP2009197268A (ja) 2008-02-20 2009-09-03 Tungaloy Corp 被覆部材
JP2012166320A (ja) 2011-02-16 2012-09-06 Sumitomo Electric Hardmetal Corp 表面被覆切削工具

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2100985A (en) * 1935-10-19 1937-11-30 Kenneth B Cope Molding apparatus
US4842710A (en) * 1987-03-23 1989-06-27 Siemens Aktiengesellschaft Method of making mixed nitride films with at least two metals
US5700551A (en) * 1994-09-16 1997-12-23 Sumitomo Electric Industries, Ltd. Layered film made of ultrafine particles and a hard composite material for tools possessing the film
DE69730576T2 (de) * 1996-12-04 2005-02-03 Sumitomo Electric Industries, Ltd. Beschichtetes Werkzeug und Verfahren zu seiner Herstellung
US6296928B1 (en) * 1998-10-27 2001-10-02 Mmc Kobelco Tool Co., Ltd. Hard coating coated member having excellent wear resistance
DE10233222B4 (de) 2001-07-23 2007-03-01 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.), Kobe Harte verschleissfeste Schicht, Verfahren zum Bilden derselben und Verwendung
JP4062583B2 (ja) * 2001-07-23 2008-03-19 株式会社神戸製鋼所 切削工具用硬質皮膜およびその製造方法並びに硬質皮膜形成用ターゲット
JP4939032B2 (ja) * 2005-02-08 2012-05-23 株式会社神戸製鋼所 硬質皮膜、および硬質皮膜の製造方法
JP4440980B2 (ja) * 2008-01-31 2010-03-24 ユニオンツール株式会社 切削工具用硬質皮膜
DE102009010442A1 (de) * 2009-02-26 2010-09-02 C.D. Wälzholz GmbH Mikrolegierter Kohlenstoffstahl als texturgewalzter Bandstahl, insbesondere für Federelemente
US8496992B2 (en) * 2010-12-10 2013-07-30 Southwest Research Institute Methods of forming nanocomposites containing nanodiamond particles by vapor deposition
WO2013045454A2 (en) * 2011-09-30 2013-04-04 Cemecon Ag Coating of substrates using hipims
DE112013003182B4 (de) 2012-06-29 2022-05-25 Sumitomo Electric Hardmetal Corp. Oberflächenbeschichtetes Schneidwerkzeug
JP6120250B2 (ja) * 2013-06-05 2017-04-26 三菱マテリアル株式会社 サーミスタ用金属窒化物材料及びその製造方法並びにフィルム型サーミスタセンサ
KR101753104B1 (ko) 2015-09-18 2017-07-05 한국야금 주식회사 절삭공구용 경질피막
WO2017078138A1 (ja) * 2015-11-05 2017-05-11 フジタ技研株式会社 被覆部材、表面被覆金型、及び成膜方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040110039A1 (en) * 2002-09-03 2004-06-10 Seco Tools Ab Precipitation hardened wear resistant coating
JP2009197268A (ja) 2008-02-20 2009-09-03 Tungaloy Corp 被覆部材
JP2012166320A (ja) 2011-02-16 2012-09-06 Sumitomo Electric Hardmetal Corp 表面被覆切削工具

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
K.Yalamanchili 외 8, Exploring the high entropy alloy concept in (AlTiVNbCr) N, Thin Solid Films, 2017년 06월 15일, Vol.636, 346~352

Also Published As

Publication number Publication date
JP7790969B2 (ja) 2025-12-23
WO2020084167A1 (en) 2020-04-30
US11821073B2 (en) 2023-11-21
EP3870733A1 (en) 2021-09-01
JP2022512808A (ja) 2022-02-07
KR20210080444A (ko) 2021-06-30
CN112930417A (zh) 2021-06-08
US20210388482A1 (en) 2021-12-16

Similar Documents

Publication Publication Date Title
KR102821766B1 (ko) Ti 및/또는 Si와 미세합금된 바나듐 알루미늄 니트라이드(VAlN)
CN113966408B (zh) 包含多阴离子高熵合金氮氧化物的pvd涂层
JP7223446B2 (ja) 三元ｔｍ二ホウ化物コーティングフィルム
US11649541B2 (en) PVD coatings with a HEA ceramic matrix with controlled precipitate structure
CN111194359B (zh) 超级合金溅射靶
JP6842233B2 (ja) コーティングされた切削工具、及びコーティングされた切削工具の製造方法
CN111757948A (zh) 具有增强热稳定性的Al-Cr基陶瓷涂层
JP2022512808A5 (https=)
US12006564B2 (en) Cubic Al-rich AlTiN coatings deposited from ceramic targets
KR102802089B1 (ko) 붕화물-함유 확산 장벽 층을 포함하는 코팅을 구비하는 코팅 공구
US12312672B2 (en) Al-rich AlCrN coating layers produced by PVD from metallic targets
Reshetnyak et al. Synthesis, structure and protective properties of PVD MAX phase coatings. A review. Part I. MAX phase coatings deposition
CN115516126B (zh) 用于钛铝材料的防环境影响的保护层
Banerjee Hardness of sputter deposited nanocrystalline Ni3Al thin films
Vinogradov et al. Technology for producing new wear-resistant coatings in the plasma of a vacuum-arc discharge
US10774416B2 (en) Coating material comprising a ternary phase of Hf—B—C
Laska et al. MAX phase based PVD coatings as protection for lightweight materials in high temperature environments

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20210517

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20221019

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20240820

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20250526

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20250612

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20250612

End annual number: 3

Start annual number: 1

PG1601 Publication of registration