WO2020084167A1 - Vanadium aluminium nitride (vain) micro alloyed with ti and/or si - Google Patents

Vanadium aluminium nitride (vain) micro alloyed with ti and/or si Download PDF

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Publication number
WO2020084167A1
WO2020084167A1 PCT/EP2019/079411 EP2019079411W WO2020084167A1 WO 2020084167 A1 WO2020084167 A1 WO 2020084167A1 EP 2019079411 W EP2019079411 W EP 2019079411W WO 2020084167 A1 WO2020084167 A1 WO 2020084167A1
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Prior art keywords
coating structure
coating
gas phase
deposition process
phase deposition
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Ceased
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PCT/EP2019/079411
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English (en)
French (fr)
Inventor
Siva Phani Kumar YALAMANCHILI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
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Oerlikon Surface Solutions AG Pfaeffikon
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Application filed by Oerlikon Surface Solutions AG Pfaeffikon filed Critical Oerlikon Surface Solutions AG Pfaeffikon
Priority to JP2021522464A priority Critical patent/JP7790969B2/ja
Priority to EP19795199.9A priority patent/EP3870733A1/en
Priority to CN201980069882.8A priority patent/CN112930417A/zh
Priority to KR1020217014826A priority patent/KR102821766B1/ko
Priority to US17/288,277 priority patent/US11821073B2/en
Publication of WO2020084167A1 publication Critical patent/WO2020084167A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C23C14/345—Applying energy to the substrate during sputtering using substrate bias
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

Definitions

  • VAIN Vanadium Aluminium Nitride
  • the present invention is about wear resistant coating alloys at least comprising transition-metal-AI-N coated by PVD and/or related processes, intended for high temperature application above 800°C.
  • PVD coatings consisting of metastable c-TM-AI-N are well known for their wear resistant applications (Note:“c-“ means cubic,“TM” means transition metal,“Al” means Aluminum and“N” means nitrogen).
  • the key challenge is at annealing temperatures above 900°C, where the metastable alloy decomposes to their respective ground states by the following reaction resulting hardness loss as also shown in Fig .1 .
  • TM could for example be Ti, Cr, Nb, V.
  • the resultant w-AIN has a lower elastic modulus of 300 GPa, and lower hardness of 25 GPa.
  • the above-mentioned lower hardness caused by phase transformation limits the application temperature of these coatings to a maximum temperature of 800°C for longer exposure times up to 100 hours, and 900°C for short exposure times up to 1 hour.
  • a high-temperature stable ceramic coating structure including a microalloy comprising the elements Al, V and N is disclosed, which is producible by a gas phase deposition process.
  • high-temperature stable coating structure in the context of the invention is understood in particular as a structure which is stable over a long period of time up to a temperature of at least 800°C, i.e. which can be used at a temperature above 800°C for up to 100 h without showing any significant loss of hardness.
  • the coating structure is formed in the form of a metastable coating structure, which is in multiphase form at least above a temperature of 900°C, in particular in cubic phase and wurtzite phase form.
  • the coating structure having a hardness increase and/or an increased fracture toughness above 900 °C, the hardness increase and/or the fracture toughness preferably being associated with the phase transformation of the coating structure, in particular being based on the phase transformation of the coating structure.
  • the coating structure is stable above a temperature of 900°C for longer exposure times of more than 50 hours, preferably of more than 75 hours, in particular of more than 100 hours. Stable in this context particularly means not phase-stable, but material-stable.
  • the coating structure has a layer thickness of less than 10 pm, preferably of less than 1 pm, in particular of less than 500 nm.
  • the coating structure being in the form of a thin film or in bulk form.
  • the coating structure is formed as a multilayer structure.
  • the microalloy comprises solely Al and V in addition to N, preferably in a ratio of Al to V of AI65V35.
  • the microalloy comprises further elements in addition to Al, V and N, preferably Ti and/or Si, in particular in an amount of in each case less than 5 at.-%.
  • the coating structure according to the invention may also include other elements, preferably transition metals, in particular Zr and/or Nb and/or Ta.
  • said microalloy comprises Al, V and N, Ti and Si, wherein said microalloy preferably being formed in the form of Al64V33Ti2SiiN.
  • the coating structure also comprises oxides and/or carbides in addition to nitrides.
  • the coating structure may also include silicides and/or borides.
  • a gas phase deposition process for producing a high temperature stable ceramic coating structure mentioned before comprising the steps:
  • the substrate can be formed at least partially in the form of a metal compound.
  • different target materials are used, wherein the different target materials are preferably vaporized simultaneously.
  • one of the target materials comprises Al and V, preferably in a ratio of AI65V35.
  • one of the target materials comprises Ti and Si, preferably in a ratio of Ti sS s.
  • a Co-containing substrate is used, wherein said substrate being formed in particular in the form of WC-Co.
  • the substrate temperature being between 200 °C and 500 °C, preferably between 300 °C and 450 °C, in particular 400 °C.
  • a reactive coating gas is used, wherein preferably nitrogen is used as reactive coating gas.
  • nitrogen is used as reactive coating gas.
  • other gases such as argon or methane can be used as reactive coating gases in addition to nitrogen.
  • a negative bias voltage is applied to the substrate during the coating process, wherein the bias voltage is less than 120 V, preferably less than 90 V, more preferably less than 75 V.
  • the coating process is formed in the form of a PVD coating process, preferably in the form of a sputtering process, in particular in the form of a HiPIMS or ARC PVD process.
  • a plurality of layers of the coating structure mentioned before are deposited on top of each other to form a multilayer layer structure.
  • a use of the coating structure mentioned before for the production of cutting and forming tools is disclosed, in particular for use in the automotive and/or aerospace industries.
  • Fig. 1 shows Hardness evolution as a function of annealing temperatures for
  • Fig. 2 shows the combinatorial deposition chamber used to synthesize the inventive coating (a), the composition of the inventive coating (b), and the metallic sub-lattice composition of the inventive coating (c),
  • Fig. 3 shows Hardness evolution as a function of annealing temperatures for the inventive c-AIVTiSiN (a), and an X-ray diffractogram of c-AIVTiSiN as a function of annealing temperatures (b).
  • Fig. 1 shows Hardness evolution as a function of annealing temperatures for TiN, and different TM-AI-N.
  • TM-AI-N such as Ti-AI-N, and Cr-AI- N
  • Nb-AI-N display a hardness drop above the annealing temperature above 900°C as shown in Fig 1 .
  • the inventive micro-alloyed AIVN shows a hardness enhancement as a function of annealing temperature above 900°C as will be shown in Fig. (3) later. This hardness behaviour was re-producible.
  • the proposed alloy might have also an enhanced fracture toughness, caused by a higher H/E ratio especially at annealing temperatures above 900°C and the inventive composition could as well be interesting for high temperature structural applications.
  • Fig. 2 shows the combinatorial deposition chamber used to synthesize the inventive coating (a), the composition of the inventive coating (b), and the metallic sub-lattice composition of the inventive coating (c).
  • the inventive alloy is synthesized in a combinatorial approach with targets of different chemistry consisting of AI65V35, and TizsShs as shown in the figure (2) on WC-Co substrate. Deposition details are presented below.
  • the coating from Pos.2 in Fig.2 has shown the claimed anomalous hardness behavior.
  • the composition of the coating is shown in Fig. 2b and Fig. 2c.
  • inventive coatings from Pos.2 as well as standard C-AI66T134N and c-TizsShsN coatings are subjected to vacuum annealing experiments which are performed in an electrically heated oven with a back ground pressure of 10 5 Pa at temperatures of 800°C, 900°C, 1000°C, and 1 100°C with a soaking time of 60 minutes.
  • the hardness of the films was measured using nanoindentation, and the structural evolution was mapped using XRD as a function of different annealing temperatures.
  • Fig. 3 (a) shows hardness evolution as a function of annealing temperatures for the inventive c-Ale4V33Ti2SiiN alloy as well as for C-AI66T134N and for c-TizsShsN.
  • Fig. 3 (b) shows the structural evolution of the inventive c-Al64V33Ti2SiiN coating according to the present embodiment as a function of vacuum annealing.
  • XRD shows evolution of wurtzite AIN phase above the annealing temperature of 900°C. Indicating that the alloy undergoes the following reaction c-Al64V 33 Ti2SiiN --> c- TiVSiN + w-AIN (2)
  • Coatings were grown in an industrial scale on an Oerlikon Innova machine using cathodic arc in a nitrogen atmosphere with a pressure of 5 Pa, a substrate temperature of 400°C, and a bias voltage of 70 V. During the arc discharge a magnetic field of Mag 14 and an arc current of 200 A resulting a burning voltage of 27 V.
  • inventive coating was shown to grow by combinatorial arc depositions, the coating with same compositions could be grown by using the targets with the inventive composition in Arc, Sputtering and other related processes as thin film and bulk form.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
PCT/EP2019/079411 2018-10-26 2019-10-28 Vanadium aluminium nitride (vain) micro alloyed with ti and/or si Ceased WO2020084167A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2021522464A JP7790969B2 (ja) 2018-10-26 2019-10-28 Ｔｉおよび／またはＳｉでマイクロ合金されたバナジウム窒化アルミニウム（ＶＡＩＮ）
EP19795199.9A EP3870733A1 (en) 2018-10-26 2019-10-28 Vanadium aluminium nitride (vain) micro alloyed with ti and/or si
CN201980069882.8A CN112930417A (zh) 2018-10-26 2019-10-28 用钛和/或硅微合金化的钒铝氮化物(VAlN)
KR1020217014826A KR102821766B1 (ko) 2018-10-26 2019-10-28 Ti 및/또는 Si와 미세합금된 바나듐 알루미늄 니트라이드(VAlN)
US17/288,277 US11821073B2 (en) 2018-10-26 2019-10-28 Vanadium aluminium nitride (VAlN) micro alloyed with Ti and/or Si

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862751022P 2018-10-26 2018-10-26
US62/751,022 2018-10-26

Publications (1)

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WO2020084167A1 true WO2020084167A1 (en) 2020-04-30

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EP (1) EP3870733A1 (https=)
JP (1) JP7790969B2 (https=)
KR (1) KR102821766B1 (https=)
CN (1) CN112930417A (https=)
WO (1) WO2020084167A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12440899B2 (en) 2023-11-29 2025-10-14 Sumitomo Electric Industries, Ltd. Cutting tool

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020084166A1 (en) * 2018-10-26 2020-04-30 Oerlikon Surface Solutions Ag, Pfäffikon Pvd coatings with a hea ceramic matrix with controlled precipitate structure
JP7409554B1 (ja) * 2022-09-22 2024-01-09 住友電気工業株式会社 切削工具
US12090557B1 (en) 2023-05-17 2024-09-17 Sumitomo Electric Industries, Ltd. Cutting tool

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009197268A (ja) * 2008-02-20 2009-09-03 Tungaloy Corp 被覆部材
JP2012166320A (ja) * 2011-02-16 2012-09-06 Sumitomo Electric Hardmetal Corp 表面被覆切削工具
DE112016004255T5 (de) * 2015-09-18 2018-06-14 Korloy Inc. Harte Beschichtung für ein Schneidwerkzeug

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2100985A (en) * 1935-10-19 1937-11-30 Kenneth B Cope Molding apparatus
US4842710A (en) * 1987-03-23 1989-06-27 Siemens Aktiengesellschaft Method of making mixed nitride films with at least two metals
US5700551A (en) * 1994-09-16 1997-12-23 Sumitomo Electric Industries, Ltd. Layered film made of ultrafine particles and a hard composite material for tools possessing the film
DE69730576T2 (de) * 1996-12-04 2005-02-03 Sumitomo Electric Industries, Ltd. Beschichtetes Werkzeug und Verfahren zu seiner Herstellung
US6296928B1 (en) * 1998-10-27 2001-10-02 Mmc Kobelco Tool Co., Ltd. Hard coating coated member having excellent wear resistance
DE10233222B4 (de) 2001-07-23 2007-03-01 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.), Kobe Harte verschleissfeste Schicht, Verfahren zum Bilden derselben und Verwendung
JP4062583B2 (ja) * 2001-07-23 2008-03-19 株式会社神戸製鋼所 切削工具用硬質皮膜およびその製造方法並びに硬質皮膜形成用ターゲット
SE526338C2 (sv) * 2002-09-04 2005-08-23 Seco Tools Ab Skär med utskiljningshärdad slitstark refraktär beläggning
JP4939032B2 (ja) * 2005-02-08 2012-05-23 株式会社神戸製鋼所 硬質皮膜、および硬質皮膜の製造方法
JP4440980B2 (ja) * 2008-01-31 2010-03-24 ユニオンツール株式会社 切削工具用硬質皮膜
DE102009010442A1 (de) * 2009-02-26 2010-09-02 C.D. Wälzholz GmbH Mikrolegierter Kohlenstoffstahl als texturgewalzter Bandstahl, insbesondere für Federelemente
US8496992B2 (en) * 2010-12-10 2013-07-30 Southwest Research Institute Methods of forming nanocomposites containing nanodiamond particles by vapor deposition
WO2013045454A2 (en) * 2011-09-30 2013-04-04 Cemecon Ag Coating of substrates using hipims
DE112013003182B4 (de) 2012-06-29 2022-05-25 Sumitomo Electric Hardmetal Corp. Oberflächenbeschichtetes Schneidwerkzeug
JP6120250B2 (ja) * 2013-06-05 2017-04-26 三菱マテリアル株式会社 サーミスタ用金属窒化物材料及びその製造方法並びにフィルム型サーミスタセンサ
WO2017078138A1 (ja) * 2015-11-05 2017-05-11 フジタ技研株式会社 被覆部材、表面被覆金型、及び成膜方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009197268A (ja) * 2008-02-20 2009-09-03 Tungaloy Corp 被覆部材
JP2012166320A (ja) * 2011-02-16 2012-09-06 Sumitomo Electric Hardmetal Corp 表面被覆切削工具
DE112016004255T5 (de) * 2015-09-18 2018-06-14 Korloy Inc. Harte Beschichtung für ein Schneidwerkzeug

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
See also references of EP3870733A1 *
TSAI MING-HUNG ET AL: "Thermally stable amorphous (AlMoNbSiTaTiVZr)50N50 nitride film as diffusion barrier in copper metallization", APPLIED PHYSICS LETTERS, A I P PUBLISHING LLC, US, vol. 92, no. 5, 8 February 2008 (2008-02-08), pages 52109 - 52109, XP012108077, ISSN: 0003-6951, DOI: 10.1063/1.2841810 *
YALAMANCHILI K ET AL: "Exploring the high entropy alloy concept in (AlTiVNbCr)N", THIN SOLID FILMS, vol. 636, 15 June 2017 (2017-06-15), pages 346 - 352, XP085150875, ISSN: 0040-6090, DOI: 10.1016/J.TSF.2017.06.029 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12440899B2 (en) 2023-11-29 2025-10-14 Sumitomo Electric Industries, Ltd. Cutting tool

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