KR102796445B1 - Mems 코리올리 가스 유량 제어기 - Google Patents

Mems 코리올리 가스 유량 제어기 Download PDF

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Publication number
KR102796445B1
KR102796445B1 KR1020207031652A KR20207031652A KR102796445B1 KR 102796445 B1 KR102796445 B1 KR 102796445B1 KR 1020207031652 A KR1020207031652 A KR 1020207031652A KR 20207031652 A KR20207031652 A KR 20207031652A KR 102796445 B1 KR102796445 B1 KR 102796445B1
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South Korea
Prior art keywords
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flow sensor
coriolis flow
mems coriolis
mass flow
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Korean (ko)
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KR20200130473A (ko
Inventor
이크발 에이. 샤리프
데니스 스미스
존 이. 도허티
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램 리써치 코포레이션
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/48—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by a capillary element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8427—Coriolis or gyroscopic mass flowmeters constructional details detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8431—Coriolis or gyroscopic mass flowmeters constructional details electronic circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
  • Micromachines (AREA)
KR1020207031652A 2018-04-03 2019-04-02 Mems 코리올리 가스 유량 제어기 Active KR102796445B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862652019P 2018-04-03 2018-04-03
US62/652,019 2018-04-03
US201862673382P 2018-05-18 2018-05-18
US62/673,382 2018-05-18
PCT/US2019/025389 WO2019195292A1 (en) 2018-04-03 2019-04-02 Mems coriolis gas flow controller

Publications (2)

Publication Number Publication Date
KR20200130473A KR20200130473A (ko) 2020-11-18
KR102796445B1 true KR102796445B1 (ko) 2025-04-15

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Application Number Title Priority Date Filing Date
KR1020207031652A Active KR102796445B1 (ko) 2018-04-03 2019-04-02 Mems 코리올리 가스 유량 제어기

Country Status (4)

Country Link
US (1) US11662237B2 (cg-RX-API-DMAC7.html)
JP (1) JP7524068B2 (cg-RX-API-DMAC7.html)
KR (1) KR102796445B1 (cg-RX-API-DMAC7.html)
WO (1) WO2019195292A1 (cg-RX-API-DMAC7.html)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7000393B2 (ja) * 2019-09-25 2022-01-19 株式会社Kokusai Electric 基板処理装置、ガスボックス及び半導体装置の製造方法
US12455220B2 (en) 2019-11-13 2025-10-28 Micro Motion, Inc. Detecting an orientation of a vibratory meter and compensating a measurement based on the detected orientation
JP7432400B2 (ja) * 2020-03-11 2024-02-16 東京エレクトロン株式会社 基板処理方法及び基板処理システム
CN114121585B (zh) * 2020-08-26 2023-10-31 中微半导体设备(上海)股份有限公司 一种等离子体处理装置及气体供应方法
US11772958B2 (en) 2020-09-17 2023-10-03 Applied Materials, Inc. Mass flow control based on micro-electromechanical devices
US12235144B2 (en) * 2020-09-17 2025-02-25 Applied Materials, Inc.—Robotics Micro-electromechanical device for use in a flow control apparatus
US12601621B2 (en) 2022-03-30 2026-04-14 Applied Materials, Inc. Methods of manufacturing plasma generating cells for a plasma source
US12493307B2 (en) 2023-08-21 2025-12-09 Applied Materials, Inc. Fast switching gas circuits and processing chambers, and related methods and apparatus, for gas stabilization
US12540400B2 (en) 2023-11-02 2026-02-03 Applied Materials, Inc. Multi-flow gas circuits, processing chambers, and related apparatus and methods for semiconductor manufacturing
DE102023136267A1 (de) 2023-12-21 2025-06-26 Truedyne Sensors AG Verfahren, Messanordnung und Computerprogrammprodukt zum Regeln eines Ventils

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004517396A (ja) * 2000-12-26 2004-06-10 エムケーエス インスツルメント，インコーポレーテッド 圧力型マスフローコントローラシステム
JP2014089205A (ja) * 2006-11-17 2014-05-15 Lam Research Corporation 実流量の妥当性確認の実施方法
WO2017123089A1 (en) * 2016-01-14 2017-07-20 Berkin B.V. Coriolis flowsensor

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1151953A (ja) * 1997-08-04 1999-02-26 Tokyo Gas Co Ltd 可撓性フローセンサおよび該フローセンサを用いたフロー測定方法
US6772781B2 (en) * 2000-02-04 2004-08-10 Air Liquide America, L.P. Apparatus and method for mixing gases
US6439253B1 (en) 2000-12-28 2002-08-27 International Business Machines Corporation System for and method of monitoring the flow of semiconductor process gases from a gas delivery system
US6704667B2 (en) 2002-05-13 2004-03-09 Taiwan Semiconductor Manufacturing Co., Ltd Real time mass flow control system with interlock
US20040112540A1 (en) * 2002-12-13 2004-06-17 Lam Research Corporation Uniform etch system
US7238999B2 (en) 2005-01-21 2007-07-03 Honeywell International Inc. High performance MEMS packaging architecture
US7540469B1 (en) * 2005-01-25 2009-06-02 Sandia Corporation Microelectromechanical flow control apparatus
US7228735B2 (en) 2005-02-03 2007-06-12 Integrated Sensing Systems, Inc. Fluid sensing device with integrated bypass and process therefor
US7568399B2 (en) 2006-01-05 2009-08-04 Integrated Sensing Systems, Inc. Microfluidic device
US7628082B2 (en) 2007-06-25 2009-12-08 Integrated Sensing Systems, Inc. Microfluidic device and microtube therefor
US8272274B2 (en) 2008-02-11 2012-09-25 Integrated Sensing Systems Inc. Microfluidic device and methods of operation and making
US8205629B2 (en) 2008-04-25 2012-06-26 Applied Materials, Inc. Real time lead-line characterization for MFC flow verification
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
WO2017011325A1 (en) * 2015-07-10 2017-01-19 Pivotal Systems Corporation Method and apparatus for gas flow control
JP6976043B2 (ja) 2015-07-15 2021-12-01 ラム リサーチ コーポレーションLam Research Corporation 原子層堆積中における化学物質の制御された分離および送出により低欠陥処理を可能にするシステムおよび方法
DE102015118346A1 (de) * 2015-10-27 2017-04-27 Endress+Hauser Flowtec Ag MEMS Sensor zu Messung mindestens einer Messgröße

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004517396A (ja) * 2000-12-26 2004-06-10 エムケーエス インスツルメント，インコーポレーテッド 圧力型マスフローコントローラシステム
JP2014089205A (ja) * 2006-11-17 2014-05-15 Lam Research Corporation 実流量の妥当性確認の実施方法
WO2017123089A1 (en) * 2016-01-14 2017-07-20 Berkin B.V. Coriolis flowsensor

Also Published As

Publication number Publication date
KR20200130473A (ko) 2020-11-18
US20210140807A1 (en) 2021-05-13
JP7524068B2 (ja) 2024-07-29
JP2021520544A (ja) 2021-08-19
WO2019195292A1 (en) 2019-10-10
US11662237B2 (en) 2023-05-30

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