KR102741494B1 - 각도를 결정하도록 구조화된 광 조명을 갖는 공초점 광학 프로트랙터를 위한 방법 - Google Patents

각도를 결정하도록 구조화된 광 조명을 갖는 공초점 광학 프로트랙터를 위한 방법 Download PDF

Info

Publication number
KR102741494B1
KR102741494B1 KR1020217014453A KR20217014453A KR102741494B1 KR 102741494 B1 KR102741494 B1 KR 102741494B1 KR 1020217014453 A KR1020217014453 A KR 1020217014453A KR 20217014453 A KR20217014453 A KR 20217014453A KR 102741494 B1 KR102741494 B1 KR 102741494B1
Authority
KR
South Korea
Prior art keywords
camera
optical
center point
laser beam
intensity pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020217014453A
Other languages
English (en)
Korean (ko)
Other versions
KR20210080431A (ko
Inventor
아이사 에스. 루말라
Original Assignee
노스롭 그루먼 시스템즈 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 노스롭 그루먼 시스템즈 코포레이션 filed Critical 노스롭 그루먼 시스템즈 코포레이션
Publication of KR20210080431A publication Critical patent/KR20210080431A/ko
Application granted granted Critical
Publication of KR102741494B1 publication Critical patent/KR102741494B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C1/00—Measuring angles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/004—Systems comprising a plurality of reflections between two or more surfaces, e.g. cells, resonators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/04—Prisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08018—Mode suppression
    • H01S3/0804—Transverse or lateral modes
    • H01S3/08045—Single-mode emission

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
KR1020217014453A 2018-10-26 2019-10-24 각도를 결정하도록 구조화된 광 조명을 갖는 공초점 광학 프로트랙터를 위한 방법 Active KR102741494B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US16/171,883 US10670391B2 (en) 2018-10-26 2018-10-26 Confocal optical protractor
US16/171,883 2018-10-26
US16/411,921 US10809057B2 (en) 2018-10-26 2019-05-14 Methods for confocal optical protractor with structured light illumination to determine angles
US16/411,921 2019-05-14
PCT/US2019/057846 WO2020086837A1 (en) 2018-10-26 2019-10-24 Methods for confocal optical protractor with structured light illumination to determine angles

Publications (2)

Publication Number Publication Date
KR20210080431A KR20210080431A (ko) 2021-06-30
KR102741494B1 true KR102741494B1 (ko) 2024-12-11

Family

ID=68582385

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020217014453A Active KR102741494B1 (ko) 2018-10-26 2019-10-24 각도를 결정하도록 구조화된 광 조명을 갖는 공초점 광학 프로트랙터를 위한 방법
KR1020217014384A Active KR102741489B1 (ko) 2018-10-26 2019-10-24 공초점 광학 프로트랙터

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020217014384A Active KR102741489B1 (ko) 2018-10-26 2019-10-24 공초점 광학 프로트랙터

Country Status (6)

Country Link
US (2) US10670391B2 (enExample)
EP (3) EP4177565B1 (enExample)
JP (4) JP7372968B2 (enExample)
KR (2) KR102741494B1 (enExample)
BR (3) BR112021007644B1 (enExample)
WO (2) WO2020086828A2 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7235153B2 (ja) * 2017-12-29 2023-03-08 株式会社三洋物産 遊技機
JP7235154B2 (ja) * 2018-02-15 2023-03-08 株式会社三洋物産 遊技機
JP7231076B2 (ja) * 2018-03-08 2023-03-01 株式会社三洋物産 遊技機
US10670391B2 (en) * 2018-10-26 2020-06-02 Northrop Grumman Systems Corporation Confocal optical protractor
JP2020103418A (ja) * 2018-12-26 2020-07-09 株式会社三洋物産 遊技機
JP2021186294A (ja) * 2020-05-29 2021-12-13 株式会社三洋物産 遊技機
CN115077390B (zh) * 2021-03-11 2023-03-24 山东大学 一种基于双波长涡旋光自共轭干涉的大量程皮米级位移测量系统及方法
JP2022166647A (ja) * 2021-04-21 2022-11-02 パナソニックＩｐマネジメント株式会社 光学測定装置、実装基板の組立装置、および、実装基板の組立方法
KR102608513B1 (ko) 2021-11-24 2023-12-04 한국과학기술원 유니버셜 메타표면을 포함하는 자유경로 동적 광집속 분포 생성기
KR102736223B1 (ko) * 2021-11-25 2024-12-03 한국기초과학지원연구원 광학 시스템
JP2023053387A (ja) * 2022-02-04 2023-04-12 株式会社三洋物産 遊技機
CN115406379B (zh) * 2022-08-15 2024-09-20 重庆邮电大学 一种基于光斑形变的大量程自准直测角方法
TWI836633B (zh) * 2022-09-28 2024-03-21 致茂電子股份有限公司 多自由度誤差校正方法及設備
CN116773850B (zh) * 2023-05-16 2024-07-23 苏州大学 一种基于单光子探测器测量转速和转角的装置及方法
CN116298373B (zh) * 2023-05-24 2023-10-20 之江实验室 一种基于旋转多普勒效应测量物体角速度的装置和方法
CN116772741B (zh) * 2023-08-25 2023-11-07 北京建筑大学 一种变形检测系统及变形检测方法
CN118500294B (zh) * 2024-05-15 2025-04-22 邯郸学院 一种基于共轭涡旋光干涉的微小角位移测量系统
CN120890413B (zh) * 2025-09-28 2025-12-30 中国科学院长春光学精密机械与物理研究所 一种高速转台转动角度的测量装置及其测量方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010539491A (ja) 2007-09-13 2010-12-16 デユーク・ユニバーシテイ 低コヒーレンス干渉法（ｌｃｉ）のための装置、システムおよび方法
JP2014066728A (ja) 2008-11-17 2014-04-17 Faro Technologies Inc 六自由度計測装置及び方法

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3790284A (en) 1972-05-08 1974-02-05 Hewlett Packard Co Interferometer system for measuring straightness and roll
US3975102A (en) 1974-07-29 1976-08-17 Zygo Corporation Scanning photoelectric autocollimator
US3977789A (en) 1975-04-07 1976-08-31 Zygo Corporation Scanning differential photoelectric autocollimator
US4257164A (en) * 1978-11-09 1981-03-24 The United States Of America As Represented By The Secretary Of The Air Force Optical protractor
US4443103A (en) * 1980-12-18 1984-04-17 The Boeing Company Retro-reflective electro-optical angle measuring system
US4746216A (en) 1986-03-28 1988-05-24 Zygo Corporation Angle measuring interferometer
US5028137A (en) 1989-02-13 1991-07-02 Zygo Corporation Angular displacement measuring interferometer
US5283796A (en) * 1992-04-21 1994-02-01 Hughes Aircraft Company Phase plate or spiral phase wheel driven linear frequency chirped laser
IL117503A0 (en) * 1996-03-14 1996-07-23 Yeda Res & Dev Optical resonator
IL120754A0 (en) * 1997-05-01 1998-01-04 Yeda Res & Dev Optical resonators with discontinuous phase elements
US6188078B1 (en) 1999-05-04 2001-02-13 Lockheed Martin Missiles & Space Company Optical metrology device for precision angular measurement of a pointing mirror
US6870628B2 (en) 2001-05-11 2005-03-22 Fibersense Technology Corporation Alignment of optical fiber to optical port of integrated optical circuit
US20040216315A1 (en) 2003-05-01 2004-11-04 Ellis Merle R. Angle measuring device
EP1503175A1 (de) 2003-07-28 2005-02-02 Leica Geosystems AG Vorrichtung und Verfahren zum Kalibrieren der Ausrichtung eines Prüflings
JP2008014935A (ja) * 2006-06-05 2008-01-24 Hitachi High-Technologies Corp 表面検査装置及びその方法
WO2007149534A2 (en) * 2006-06-21 2007-12-27 University Of Dayton Methods of polarization engineering and their applications
JP2010066090A (ja) * 2008-09-10 2010-03-25 Mitsutoyo Corp 光学測定装置
JP5322099B2 (ja) * 2008-10-21 2013-10-23 国立大学法人東北大学 角度センサ
US8099876B1 (en) 2008-11-21 2012-01-24 The Boeing Company Azimuth determination system and method therefor
EP2619526B8 (de) 2010-09-20 2016-12-14 Trioptics GmbH Autokollimationsfernrohr mit kamera
JP6103597B2 (ja) * 2011-06-07 2017-03-29 国立大学法人 千葉大学 光渦レーザー発振方法及び光渦レーザー発振装置
EP2831625B1 (en) * 2012-03-29 2021-02-17 NPL Management Limited Measurement device, system and method
EP2705812A1 (de) * 2012-09-05 2014-03-12 Universität zu Lübeck Vorrichtung zum Laserschneiden innerhalb transparenter Materialien
WO2014110299A1 (en) 2013-01-10 2014-07-17 Xiaotian Steve Yao Non-interferometric optical gyroscope based on polarization sensing
US9395174B2 (en) * 2014-06-27 2016-07-19 Faro Technologies, Inc. Determining retroreflector orientation by optimizing spatial fit
JP6544907B2 (ja) 2014-10-16 2019-07-17 株式会社トプコン 変位測定方法及び変位測定装置
EP3037800B1 (de) 2014-12-24 2018-04-04 Trioptics GmbH Messung der Positionen von Krümmungsmittelpunkten optischer Flächen eines ein-oder mehrlinsigen optischen Systems
US9423360B1 (en) * 2015-02-09 2016-08-23 Microsoft Technology Licensing, Llc Optical components
US9753241B2 (en) 2015-09-08 2017-09-05 Lockheed Martin Corporation Laser autocollimator using optical parasitic interference
US10107650B2 (en) 2016-06-15 2018-10-23 The Boeing Company Systems and methods for measuring angular position of a laser beam emitter
JP6253830B2 (ja) * 2017-05-17 2017-12-27 オリンパス株式会社 超解像顕微鏡
US10323934B1 (en) * 2018-04-02 2019-06-18 Northrop Grumman Systems Corporation Optical protractor to measure roll angle on a static surface and rotating surface
US10218145B1 (en) * 2018-07-02 2019-02-26 National Sun Yat-Sen University Vortex laser generation device in degenerate cavity with spiral phase element and vortex laser generation method
US10670391B2 (en) * 2018-10-26 2020-06-02 Northrop Grumman Systems Corporation Confocal optical protractor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010539491A (ja) 2007-09-13 2010-12-16 デユーク・ユニバーシテイ 低コヒーレンス干渉法（ｌｃｉ）のための装置、システムおよび方法
JP2014066728A (ja) 2008-11-17 2014-04-17 Faro Technologies Inc 六自由度計測装置及び方法

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
Y.S.Rumala et al., "Multiple beam interference in spiral phase plates", Department of Physics, University of Michigan, Ann Arbor, MI 48109, USA
Y.S.Rumala, "Propagation of structured light beams after multiple reflections in a spiral phase plate", Optical Engineering 54(11), 111306
Y.S.Rumala, "Sensitivity in frequency dependent angular rotation of optical vortices", Applied Optics, Vol. 55, No. 8 / March 10 2016

Also Published As

Publication number Publication date
JP2022505956A (ja) 2022-01-14
US20200132444A1 (en) 2020-04-30
EP4177565B1 (en) 2024-01-31
WO2020086837A1 (en) 2020-04-30
EP3870933A2 (en) 2021-09-01
KR20210080426A (ko) 2021-06-30
JP2022505869A (ja) 2022-01-14
BR112021007652A2 (pt) 2021-07-27
JP7607077B2 (ja) 2024-12-26
JP7372968B2 (ja) 2023-11-01
WO2020086828A2 (en) 2020-04-30
EP3870934B1 (en) 2023-04-05
EP4177565A1 (en) 2023-05-10
KR20210080431A (ko) 2021-06-30
US10670391B2 (en) 2020-06-02
JP2023120198A (ja) 2023-08-29
EP3870933B1 (en) 2022-11-30
US10809057B2 (en) 2020-10-20
JP2024016064A (ja) 2024-02-06
JP7674436B2 (ja) 2025-05-09
BR112021007652B1 (pt) 2022-12-13
BR112021007644A2 (pt) 2021-07-27
EP3870934A1 (en) 2021-09-01
WO2020086828A3 (en) 2020-05-22
US20200132443A1 (en) 2020-04-30
BR112021007644B1 (pt) 2022-12-13
JP7286765B2 (ja) 2023-06-05
KR102741489B1 (ko) 2024-12-11
BR122022018325B1 (pt) 2023-05-09

Similar Documents

Publication Publication Date Title
KR102741494B1 (ko) 각도를 결정하도록 구조화된 광 조명을 갖는 공초점 광학 프로트랙터를 위한 방법
JP7216110B2 (ja) 静止面および回転面上において横揺れ角を測定するための光学分度器
CN110082071B (zh) 一种直角棱镜光学平行差的测量装置及方法
US20230236125A1 (en) Dynamic phase-shift interferometer utilizing a synchronous optical frequency-shift
Silin et al. The design and characteristics of a 630-mm phase-shifting interferometer
CN107063122A (zh) 光学非球面面形的检测方法及其装置
US20200240770A1 (en) Device and Method for Calibrating a Measuring Apparatus Using Projected Patterns and a Virtual Plane
US20200232789A1 (en) Devices and Methods for Calibrating a Measuring Apparatus Using Projected Patterns
US20250298194A1 (en) Configuration of central optical fibers in ferrule to support robust interference pattern finder
Shi et al. Three-degree-of-freedom measurement using a single probe beam
JPH0719842A (ja) 表面形状の光学的測定装置
Mamaghani et al. Lensless Tip and Tilt Measurement Using Defocused Speckle Imaging
Massie et al. Telescope alignment with the absolute distance interferometer
JPS6353481B2 (enExample)
Rochus et al. Optical test and measurement methods for mechanical structures used in space flight application and for space telescope applications
Wyant Developments in Optical Testing Technology During the Last Decade
Luan et al. Large-Optics shearing interferometer for the wavefront sensing of widely tunable laser

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601