KR102663097B1 - 가스 분석 장치 및 제어 방법 - Google Patents
가스 분석 장치 및 제어 방법 Download PDFInfo
- Publication number
- KR102663097B1 KR102663097B1 KR1020237028645A KR20237028645A KR102663097B1 KR 102663097 B1 KR102663097 B1 KR 102663097B1 KR 1020237028645 A KR1020237028645 A KR 1020237028645A KR 20237028645 A KR20237028645 A KR 20237028645A KR 102663097 B1 KR102663097 B1 KR 102663097B1
- Authority
- KR
- South Korea
- Prior art keywords
- ion flow
- ion
- detection data
- analyzer
- path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000004868 gas analysis Methods 0.000 title claims abstract description 63
- 238000000034 method Methods 0.000 title claims description 44
- 230000000903 blocking effect Effects 0.000 claims abstract description 55
- 238000004458 analytical method Methods 0.000 claims abstract description 44
- 230000005684 electric field Effects 0.000 claims abstract description 22
- 150000002500 ions Chemical class 0.000 claims description 179
- 238000001514 detection method Methods 0.000 claims description 86
- 230000008569 process Effects 0.000 claims description 32
- 230000003595 spectral effect Effects 0.000 claims description 2
- 238000004590 computer program Methods 0.000 claims 3
- 238000005259 measurement Methods 0.000 abstract description 19
- 239000007789 gas Substances 0.000 description 33
- 238000001819 mass spectrum Methods 0.000 description 20
- 230000006870 function Effects 0.000 description 18
- 238000001228 spectrum Methods 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000001636 atomic emission spectroscopy Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000004886 process control Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- 101710112672 Probable tape measure protein Proteins 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 101710204224 Tape measure protein Proteins 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005040 ion trap Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
- G01N27/622—Ion mobility spectrometry
- G01N27/623—Ion mobility spectrometry combined with mass spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
- G01N27/68—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas
- G01N27/70—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas and measuring current or voltage
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0027—Methods for using particle spectrometers
- H01J49/0031—Step by step routines describing the use of the apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0027—Methods for using particle spectrometers
- H01J49/0036—Step by step routines describing the handling of the data generated during a measurement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
- H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/426—Methods for controlling ions
- H01J49/427—Ejection and selection methods
- H01J49/429—Scanning an electric parameter, e.g. voltage amplitude or frequency
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Molecular Biology (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021013409 | 2021-01-29 | ||
| JPJP-P-2021-013409 | 2021-01-29 | ||
| PCT/JP2022/002616 WO2022163635A1 (ja) | 2021-01-29 | 2022-01-25 | ガス分析装置および制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20230130142A KR20230130142A (ko) | 2023-09-11 |
| KR102663097B1 true KR102663097B1 (ko) | 2024-05-03 |
Family
ID=82654594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020237028645A Active KR102663097B1 (ko) | 2021-01-29 | 2022-01-25 | 가스 분석 장치 및 제어 방법 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US12078611B2 (https=) |
| EP (1) | EP4276457A4 (https=) |
| JP (2) | JP7343944B2 (https=) |
| KR (1) | KR102663097B1 (https=) |
| CN (1) | CN116783481B (https=) |
| TW (1) | TW202232096A (https=) |
| WO (1) | WO2022163635A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115039516B (zh) * | 2020-03-31 | 2024-01-02 | Atonarp株式会社 | 等离子体生成装置 |
| WO2025199334A1 (en) * | 2024-03-21 | 2025-09-25 | Agilent Technologies, Inc. | Radiofrequency-free electromagnetostatic cell to improve electron-based fragmentation of biological molecules |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013130584A (ja) | 2013-02-15 | 2013-07-04 | Shimadzu Corp | 質量分析データ処理方法及び質量分析装置 |
| JP6544491B2 (ja) * | 2016-09-21 | 2019-07-17 | 株式会社島津製作所 | 質量分析装置 |
| KR102206552B1 (ko) | 2013-03-15 | 2021-01-22 | 스미스 디텍션-워트포드 리미티드 | 이온 개질 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0746594B2 (ja) * | 1983-12-21 | 1995-05-17 | 株式会社島津製作所 | 誘導結合プラズマをイオン源とする質量分析装置 |
| JP2619731B2 (ja) * | 1990-06-15 | 1997-06-11 | 電子科学株式会社 | 脱離ガスの検出装置および方法 |
| GB9204524D0 (en) * | 1992-03-03 | 1992-04-15 | Fisons Plc | Mass spectrometer |
| JP3367719B2 (ja) * | 1993-09-20 | 2003-01-20 | 株式会社日立製作所 | 質量分析計および静電レンズ |
| JP2817625B2 (ja) | 1994-06-16 | 1998-10-30 | 株式会社島津製作所 | プラズマ質量分析装置 |
| JP3240857B2 (ja) * | 1994-10-11 | 2001-12-25 | 株式会社日立製作所 | プラズマイオン質量分析装置及びプラズマイオン質量分析方法 |
| FR2788854B1 (fr) * | 1999-01-22 | 2001-05-04 | Cit Alcatel | Systeme et procede d'identification d'effluents gazeux, equipement pourvu d'un tel systeme |
| AUPR465101A0 (en) * | 2001-04-27 | 2001-05-24 | Varian Australia Pty Ltd | "Mass spectrometer" |
| US7274015B2 (en) | 2001-08-08 | 2007-09-25 | Sionex Corporation | Capacitive discharge plasma ion source |
| CN101317246A (zh) * | 2005-04-25 | 2008-12-03 | 格里芬分析技术有限责任公司 | 分析仪器、装置和方法 |
| JP4865532B2 (ja) * | 2006-12-22 | 2012-02-01 | 株式会社アルバック | 質量分析ユニット、及び質量分析ユニットの使用方法 |
| US8507850B2 (en) * | 2007-05-31 | 2013-08-13 | Perkinelmer Health Sciences, Inc. | Multipole ion guide interface for reduced background noise in mass spectrometry |
| EP2363877A1 (en) * | 2010-03-02 | 2011-09-07 | Tofwerk AG | Method for chemical analysis |
| CA2828967C (en) * | 2011-03-04 | 2018-07-10 | Perkinelmer Health Sciences, Inc. | Electrostatic lenses and systems including the same |
| DE102013201499A1 (de) * | 2013-01-30 | 2014-07-31 | Carl Zeiss Microscopy Gmbh | Verfahren zur massenspektrometrischen Untersuchung von Gasgemischen sowie Massenspektrometer hierzu |
| CN104008950B (zh) * | 2013-02-25 | 2017-09-08 | 株式会社岛津制作所 | 离子产生装置以及离子产生方法 |
| KR101421446B1 (ko) * | 2013-04-17 | 2014-07-23 | 주식회사 지앤비에스엔지니어링 | 플라즈마 검사 장치 |
| GB201509244D0 (en) * | 2015-05-29 | 2015-07-15 | Micromass Ltd | A method of mass analysis using ion filtering |
| GB2549248B (en) * | 2016-01-12 | 2020-07-22 | Thermo Fisher Scient Bremen Gmbh | IRMS sample introduction system and method |
| WO2019016851A1 (ja) | 2017-07-18 | 2019-01-24 | 株式会社島津製作所 | 質量分析装置 |
-
2022
- 2022-01-25 JP JP2022578402A patent/JP7343944B2/ja active Active
- 2022-01-25 TW TW111103190A patent/TW202232096A/zh unknown
- 2022-01-25 EP EP22745855.1A patent/EP4276457A4/en active Pending
- 2022-01-25 WO PCT/JP2022/002616 patent/WO2022163635A1/ja not_active Ceased
- 2022-01-25 KR KR1020237028645A patent/KR102663097B1/ko active Active
- 2022-01-25 US US18/261,412 patent/US12078611B2/en active Active
- 2022-01-25 CN CN202280012218.1A patent/CN116783481B/zh active Active
-
2023
- 2023-08-25 JP JP2023137059A patent/JP2023158016A/ja active Pending
-
2024
- 2024-07-29 US US18/787,526 patent/US20250020613A1/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013130584A (ja) | 2013-02-15 | 2013-07-04 | Shimadzu Corp | 質量分析データ処理方法及び質量分析装置 |
| KR102206552B1 (ko) | 2013-03-15 | 2021-01-22 | 스미스 디텍션-워트포드 리미티드 | 이온 개질 |
| JP6544491B2 (ja) * | 2016-09-21 | 2019-07-17 | 株式会社島津製作所 | 質量分析装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20230130142A (ko) | 2023-09-11 |
| JP2023158016A (ja) | 2023-10-26 |
| JPWO2022163635A1 (https=) | 2022-08-04 |
| TW202232096A (zh) | 2022-08-16 |
| US20250020613A1 (en) | 2025-01-16 |
| JP7343944B2 (ja) | 2023-09-13 |
| EP4276457A1 (en) | 2023-11-15 |
| CN116783481A (zh) | 2023-09-19 |
| WO2022163635A1 (ja) | 2022-08-04 |
| EP4276457A4 (en) | 2024-12-04 |
| US20240068989A1 (en) | 2024-02-29 |
| US12078611B2 (en) | 2024-09-03 |
| CN116783481B (zh) | 2024-11-19 |
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Legal Events
| Date | Code | Title | Description |
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| PA0105 | International application |
Patent event date: 20230823 Patent event code: PA01051R01D Comment text: International Patent Application |
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| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20230824 Comment text: Request for Examination of Application |
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Patent event date: 20230824 Patent event code: PA03022R01D Comment text: Request for Accelerated Examination |
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Comment text: Notification of reason for refusal Patent event date: 20231008 Patent event code: PE09021S01D |
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| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20240213 |
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| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20240429 Patent event code: PR07011E01D |
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| PR1002 | Payment of registration fee |
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