JP7343944B2 - ガス分析装置および制御方法 - Google Patents

ガス分析装置および制御方法 Download PDF

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Publication number
JP7343944B2
JP7343944B2 JP2022578402A JP2022578402A JP7343944B2 JP 7343944 B2 JP7343944 B2 JP 7343944B2 JP 2022578402 A JP2022578402 A JP 2022578402A JP 2022578402 A JP2022578402 A JP 2022578402A JP 7343944 B2 JP7343944 B2 JP 7343944B2
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Japan
Prior art keywords
ion
analyzer
detection data
ion flow
path
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JP2022578402A
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English (en)
Japanese (ja)
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JPWO2022163635A1 (https=
JPWO2022163635A5 (https=
Inventor
直樹 高橋
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Atonarp Inc
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Atonarp Inc
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Publication of JPWO2022163635A1 publication Critical patent/JPWO2022163635A1/ja
Publication of JPWO2022163635A5 publication Critical patent/JPWO2022163635A5/ja
Priority to JP2023137059A priority Critical patent/JP2023158016A/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/622—Ion mobility spectrometry
    • G01N27/623—Ion mobility spectrometry combined with mass spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/68—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas
    • G01N27/70—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas and measuring current or voltage
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0027—Methods for using particle spectrometers
    • H01J49/0031—Step by step routines describing the use of the apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0027—Methods for using particle spectrometers
    • H01J49/0036—Step by step routines describing the handling of the data generated during a measurement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/426—Methods for controlling ions
    • H01J49/427—Ejection and selection methods
    • H01J49/429—Scanning an electric parameter, e.g. voltage amplitude or frequency

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP2022578402A 2021-01-29 2022-01-25 ガス分析装置および制御方法 Active JP7343944B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023137059A JP2023158016A (ja) 2021-01-29 2023-08-25 ガス分析装置および制御方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021013409 2021-01-29
JP2021013409 2021-01-29
PCT/JP2022/002616 WO2022163635A1 (ja) 2021-01-29 2022-01-25 ガス分析装置および制御方法

Related Child Applications (1)

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JP2023137059A Division JP2023158016A (ja) 2021-01-29 2023-08-25 ガス分析装置および制御方法

Publications (3)

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JPWO2022163635A1 JPWO2022163635A1 (https=) 2022-08-04
JPWO2022163635A5 JPWO2022163635A5 (https=) 2023-05-16
JP7343944B2 true JP7343944B2 (ja) 2023-09-13

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JP2022578402A Active JP7343944B2 (ja) 2021-01-29 2022-01-25 ガス分析装置および制御方法
JP2023137059A Pending JP2023158016A (ja) 2021-01-29 2023-08-25 ガス分析装置および制御方法

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Country Status (7)

Country Link
US (2) US12078611B2 (https=)
EP (1) EP4276457A4 (https=)
JP (2) JP7343944B2 (https=)
KR (1) KR102663097B1 (https=)
CN (1) CN116783481B (https=)
TW (1) TW202232096A (https=)
WO (1) WO2022163635A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115039516B (zh) * 2020-03-31 2024-01-02 Atonarp株式会社 等离子体生成装置
WO2025199334A1 (en) * 2024-03-21 2025-09-25 Agilent Technologies, Inc. Radiofrequency-free electromagnetostatic cell to improve electron-based fragmentation of biological molecules

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005512274A (ja) 2001-08-08 2005-04-28 シオネックス・コーポレーション 容量放電プラズマ・イオン源
JP2013130584A (ja) 2013-02-15 2013-07-04 Shimadzu Corp 質量分析データ処理方法及び質量分析装置
WO2019016851A1 (ja) 2017-07-18 2019-01-24 株式会社島津製作所 質量分析装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0746594B2 (ja) * 1983-12-21 1995-05-17 株式会社島津製作所 誘導結合プラズマをイオン源とする質量分析装置
JP2619731B2 (ja) * 1990-06-15 1997-06-11 電子科学株式会社 脱離ガスの検出装置および方法
GB9204524D0 (en) * 1992-03-03 1992-04-15 Fisons Plc Mass spectrometer
JP3367719B2 (ja) * 1993-09-20 2003-01-20 株式会社日立製作所 質量分析計および静電レンズ
JP2817625B2 (ja) 1994-06-16 1998-10-30 株式会社島津製作所 プラズマ質量分析装置
JP3240857B2 (ja) * 1994-10-11 2001-12-25 株式会社日立製作所 プラズマイオン質量分析装置及びプラズマイオン質量分析方法
FR2788854B1 (fr) * 1999-01-22 2001-05-04 Cit Alcatel Systeme et procede d'identification d'effluents gazeux, equipement pourvu d'un tel systeme
AUPR465101A0 (en) * 2001-04-27 2001-05-24 Varian Australia Pty Ltd "Mass spectrometer"
CN101317246A (zh) * 2005-04-25 2008-12-03 格里芬分析技术有限责任公司 分析仪器、装置和方法
JP4865532B2 (ja) * 2006-12-22 2012-02-01 株式会社アルバック 質量分析ユニット、及び質量分析ユニットの使用方法
US8507850B2 (en) * 2007-05-31 2013-08-13 Perkinelmer Health Sciences, Inc. Multipole ion guide interface for reduced background noise in mass spectrometry
EP2363877A1 (en) * 2010-03-02 2011-09-07 Tofwerk AG Method for chemical analysis
CA2828967C (en) * 2011-03-04 2018-07-10 Perkinelmer Health Sciences, Inc. Electrostatic lenses and systems including the same
DE102013201499A1 (de) * 2013-01-30 2014-07-31 Carl Zeiss Microscopy Gmbh Verfahren zur massenspektrometrischen Untersuchung von Gasgemischen sowie Massenspektrometer hierzu
CN104008950B (zh) * 2013-02-25 2017-09-08 株式会社岛津制作所 离子产生装置以及离子产生方法
GB2517670B (en) * 2013-03-15 2020-04-29 Smiths Detection Watford Ltd Ion modification
KR101421446B1 (ko) * 2013-04-17 2014-07-23 주식회사 지앤비에스엔지니어링 플라즈마 검사 장치
GB201509244D0 (en) * 2015-05-29 2015-07-15 Micromass Ltd A method of mass analysis using ion filtering
GB2549248B (en) * 2016-01-12 2020-07-22 Thermo Fisher Scient Bremen Gmbh IRMS sample introduction system and method
CN109716484B (zh) * 2016-09-21 2021-02-09 株式会社岛津制作所 质谱分析装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005512274A (ja) 2001-08-08 2005-04-28 シオネックス・コーポレーション 容量放電プラズマ・イオン源
JP2013130584A (ja) 2013-02-15 2013-07-04 Shimadzu Corp 質量分析データ処理方法及び質量分析装置
WO2019016851A1 (ja) 2017-07-18 2019-01-24 株式会社島津製作所 質量分析装置

Also Published As

Publication number Publication date
KR20230130142A (ko) 2023-09-11
JP2023158016A (ja) 2023-10-26
JPWO2022163635A1 (https=) 2022-08-04
TW202232096A (zh) 2022-08-16
US20250020613A1 (en) 2025-01-16
EP4276457A1 (en) 2023-11-15
CN116783481A (zh) 2023-09-19
WO2022163635A1 (ja) 2022-08-04
KR102663097B1 (ko) 2024-05-03
EP4276457A4 (en) 2024-12-04
US20240068989A1 (en) 2024-02-29
US12078611B2 (en) 2024-09-03
CN116783481B (zh) 2024-11-19

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