KR102610994B1 - 진공펌프 - Google Patents

진공펌프 Download PDF

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Publication number
KR102610994B1
KR102610994B1 KR1020217032452A KR20217032452A KR102610994B1 KR 102610994 B1 KR102610994 B1 KR 102610994B1 KR 1020217032452 A KR1020217032452 A KR 1020217032452A KR 20217032452 A KR20217032452 A KR 20217032452A KR 102610994 B1 KR102610994 B1 KR 102610994B1
Authority
KR
South Korea
Prior art keywords
plate
heater
end surface
pump
plates
Prior art date
Application number
KR1020217032452A
Other languages
English (en)
Korean (ko)
Other versions
KR20210134772A (ko
Inventor
고키 이와시타
고타로 모테키
Original Assignee
가시야마고교가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가시야마고교가부시끼가이샤 filed Critical 가시야마고교가부시끼가이샤
Publication of KR20210134772A publication Critical patent/KR20210134772A/ko
Application granted granted Critical
Publication of KR102610994B1 publication Critical patent/KR102610994B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/34—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater flexible, e.g. heating nets or webs
    • H05B3/342—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater flexible, e.g. heating nets or webs heaters used in textiles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
KR1020217032452A 2019-06-19 2019-06-19 진공펌프 KR102610994B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/024325 WO2020255300A1 (ja) 2019-06-19 2019-06-19 真空ポンプ

Publications (2)

Publication Number Publication Date
KR20210134772A KR20210134772A (ko) 2021-11-10
KR102610994B1 true KR102610994B1 (ko) 2023-12-06

Family

ID=74040327

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217032452A KR102610994B1 (ko) 2019-06-19 2019-06-19 진공펌프

Country Status (4)

Country Link
JP (1) JP7152073B2 (zh)
KR (1) KR102610994B1 (zh)
CN (1) CN114096753B (zh)
WO (1) WO2020255300A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023070219A (ja) * 2021-11-09 2023-05-19 株式会社荏原製作所 真空ポンプ装置
KR20230092765A (ko) * 2021-12-16 2023-06-26 가부시키가이샤 에바라 세이사꾸쇼 진공 펌프 장치 및 그 운전 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007262906A (ja) * 2006-03-27 2007-10-11 Nabtesco Corp ２段式真空ポンプ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2228539A3 (en) * 2003-08-08 2017-05-03 Edwards Japan Limited Vacuum pump
KR101173168B1 (ko) * 2010-11-17 2012-08-16 데이비드 김 다단형 건식 진공펌프
JP5677202B2 (ja) * 2011-06-02 2015-02-25 株式会社荏原製作所 真空ポンプ
CN106968949B (zh) * 2012-05-21 2021-02-05 纳博特斯克汽车零部件有限公司 真空泵
KR101524231B1 (ko) 2013-01-24 2015-05-29 이화목 천연 농약 조성물
JP6453070B2 (ja) 2014-12-18 2019-01-16 株式会社荏原製作所 ドライ真空ポンプ、およびドライ真空ポンプの製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007262906A (ja) * 2006-03-27 2007-10-11 Nabtesco Corp ２段式真空ポンプ

Also Published As

Publication number Publication date
JP7152073B2 (ja) 2022-10-12
WO2020255300A1 (ja) 2020-12-24
CN114096753A (zh) 2022-02-25
CN114096753B (zh) 2023-06-09
KR20210134772A (ko) 2021-11-10
JPWO2020255300A1 (zh) 2020-12-24

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