KR102591031B1 - Liquid supply apparatus and liquid supply method - Google Patents

Abstract

[Project] Provide a liquid supply device with a simple structure and excellent maintainability.
[Configuration] The liquid supply device 10 includes a first pump chamber 23 communicating with the first suction passage 25 and the first discharge passage 26, the second suction passage 27, and the second discharge passage 28. ) has an integrated pump block 13 formed with a second pump chamber 24 communicating with the 2 Suction and discharge operations of the pump chamber (24) are performed. The flow path opening/closing electromagnetic valve 33 installed on the outside of the pump block 13 connects the first discharge path 26 and the second discharge path 26 when the second pump 19 operates in a suction operation and the first pump 18 operates in a discharge operation. The suction passage (27) is communicated to guide the liquid to the second discharge passage (28).

Description

Liquid supply device and liquid supply method {LIQUID SUPPLY APPARATUS AND LIQUID SUPPLY METHOD}

The present invention relates to a liquid supply device and a liquid supply method for supplying liquid such as liquid resin.

To supply liquid, the liquid supply device has a pump having a pump chamber that contracts to perform a discharge operation and expands to perform a suction operation. Patent Document 1 describes a liquid supply device for supplying a liquid such as a photoresist liquid, including a primary pump and a secondary pump connected in series to the primary pump. Patent Document 2 describes a pump for liquid chromatography including a first pump and a second pump connected in series to the pump.

In the liquid supply device described in Patent Document 1, a communication passage is connected between the discharge port of the primary pump and the inlet of the secondary pump, and a check valve is installed in the communication passage. The check valve allows the flow of liquid from the primary pump to the secondary pump during the discharge operation of the primary pump, and prevents the reverse flow of liquid to the primary pump during the suction operation of the primary pump.

The pump described in Patent Document 2 has a pump body in which two cylinders are formed, and a plunger constituting each pump is installed in each cylinder so as to be capable of reciprocating movement. A check valve is installed in the passage between the first pump and the second pump, and this check valve has the same function as the check valve in Patent Document 1.

[Patent Document 1] Japanese Patent Publication No. 2014-001663 [Patent Document 2] Japanese Patent Publication No. 2004-150402

In a form in which the primary pump and the secondary pump are separated, such as the liquid supply device described in Patent Document 1, the two pumps are connected through a pipe in a communication passage, and a check valve is installed in the pipe. For this reason, the structure of the liquid supply device becomes complicated, and assembly work takes time.

On the other hand, as in Patent Document 2, if two pumps and a check valve are assembled to the pump body, the pump cannot be assembled unless the pump body is divided into a split type in order to assemble the check valve. Therefore, the pump body must be formed by the block material on which the first pump is assembled and the block material on which the second pump is assembled, and a concave portion that accommodates the check valve must be formed in the block material. For this reason, the structure of the pump becomes complicated and assembly work takes time. Moreover, if the check valve is assembled inside the block material, the pump body must be disassembled for maintenance such as inspection and cleaning of the pump and replacement of the check valve, which makes maintainability poor.

As described above, unlike the case of applying a photoresist liquid, in the case of manufacturing a resin product by supplying liquid resin to a mold, for example, when supplying about 1 cc of resin material to the mold, There is a need to increase the discharge precision. In this way, in the case of supplying a relatively small amount of liquid, if a check valve is installed between the primary pump and the secondary pump, the liquid discharge precision cannot be improved. This is because, in the check valve, a slight backflow of liquid occurs toward the primary pump when the secondary pump starts discharging.

The purpose of the present invention is to provide a liquid supply device and liquid supply method with a simple structure and excellent maintainability.

Another object of the present invention is to provide a liquid supply device and a liquid supply method that can improve discharge precision.

The liquid supply device of the present invention includes a first pump chamber communicating with the first suction passage and the first discharge passage, a second pump chamber communicating with the second suction passage and the second discharge passage, the first discharge passage and the second discharge passage. An integrated pump block formed with a valve mounting surface through which a suction passage opens, a suction operation for sucking liquid from the first suction passage into the first pump chamber, and a discharge for discharging liquid from the first pump chamber to the first discharge passage. a first pump performing an operation, a suction operation for sucking liquid from the second suction passage into the second pump chamber, and a discharge operation for discharging liquid from the second pump chamber to the second discharge passage; It is installed on the outside of the pump block and has a closed state to block communication between the first discharge passage and the second suction passage and an open state to communicate with the first discharge passage and the second suction passage, and has a closed state to block communication between the first discharge passage and the second suction passage. It has a valve driving part that switches between an open state and a closed state according to a control signal, and has a flow path opening/closing valve mounted on the valve mounting surface, wherein the first pump performs a suction operation, and the second pump It is in the closed state when it is in a discharge operation, the second pump is in a suction operation, and it is in the open state when the first pump is in a discharge operation to guide the liquid into the second discharge passage.

The liquid supply method of the present invention includes an integrated pump block having a first pump chamber communicating with the first suction passage and the first discharge passage, and a second pump chamber communicating with the second suction passage and the second discharge passage, and the first pump chamber a first pump performing a suction operation of sucking liquid from the first suction passage and a discharge operation of discharging liquid from the first pump chamber to the first discharge passage, and a first pump performing a suction operation of discharging liquid from the first suction passage to the second suction passage. a second pump that performs a suction operation to suck in liquid and a discharge operation to discharge liquid from the second pump chamber to the second discharge passage, and is installed outside the pump block, the first discharge passage and the second A flow path having a closed state that blocks communication with the suction flow path, an open state that communicates the first discharge flow path and the second suction flow path, and a valve driver that switches between the open state and the closed state according to a control signal from the outside. A liquid supply device having an on-off valve, comprising: a first discharge stage in which the first pump performs a suction operation and the second pump performs a discharge operation with the flow path on-off valve in a closed state; 2. A first rest stage in which the pump is stopped and the flow path opening/closing valve is switched from the closed state to the open state, the flow path opening/closing valve is opened, the first pump performs a discharge operation, and the second pump It has a second discharge stage in which a suction operation is performed, and a second rest stage in which the first pump and the second pump are stopped and the flow path opening/closing valve is switched from the open state to the closed state.

Since the channel opening/closing valve is not assembled inside the pump block but is installed on the outside of the pump block, the channel opening/closing valve can be easily separated from the pump block, thereby improving the maintainability of the liquid supply device. The first and second pump chambers are formed as an integrated pump block, and the pump block has a simple structure that does not require assembling a plurality of members, so the liquid supply device can be easily assembled. Since the communication between the first discharge passage and the second suction passage is switched between a blocked state and a communicating state using an electromagnetic valve, the liquid can be discharged from the second discharge passage with high precision.

1 is a partially cut-away front view showing a liquid supply device of one embodiment.
Figure 2 is an enlarged cross-sectional view showing the main part of Figure 1.
Figure 3 is a cross-sectional view taken along line AA of Figure 2.
Figure 4 is a cross-sectional view showing the main portion of the flow path opening/closing solenoid valve shown in Figure 1. Figure 4a shows the flow path opening/closing solenoid valve in a closed state, and Figure 4b shows the flow path opening/closing solenoid valve in an open state. Indicates the status.
Figure 5 is a cross-sectional view showing main parts of a liquid supply device according to another embodiment.
Figure 6 is a time chart showing the liquid supply operation of the liquid supply device.
Fig. 7 is a cross-sectional view showing main parts of a liquid supply device according to another embodiment.
Fig. 8 is a cross-sectional view showing main parts of a liquid supply device according to another embodiment.
FIG. 9 is a block diagram showing the control circuit of the liquid supply device shown in FIG. 8.
Fig. 10 is a cross-sectional view showing main parts of a liquid supply device according to another embodiment.

Hereinafter, embodiments of the present invention will be described in detail based on the drawings. The liquid supply device 10 is used to supply the liquid L in the liquid container 11 to the applicator 12, such as an applicator nozzle. The liquid supply device 10 has a pump block 13 in the shape of a rectangular parallelepiped. The pump block 13 has six faces, and in Figure 1, the left face is the front face 14a, the opposite side is the back face 14b, and the lower face is the bottom face 14c. , and the upper surface is referred to as the upper surface (14d). In Figure 3, the left and right sides are referred to as side surfaces 14e and 14f. The front surface 14a and the rear surface 14b are parallel, and the lower surface 14c and the upper surface 14d are parallel and are perpendicular to the front surface 14a and the rear surface 14b.

The first cylinder hole (15) with a bottom is opened to the rear surface (14b) and installed in the pump block (13), and the second cylinder hole (16) with a bottom is opened to the rear surface (14b) and installed in the pump block (13). It is installed in The cylinder holes 15 and 16 on both sides are parallel to each other. In this way, the pump block 13 is an integrated type in which two cylinder holes 15 and 16 are installed in a single block member. The front surface 14a and the upper and lower cross sections 14c and 14d are external surfaces exposed to the outside.

The back 14b of the pump block 13 is a drive mechanism mounting surface, and the pump drive mechanism 17 is mounted on the back 14b. The pump driving mechanism (17) includes a first pump (18) and a second pump (19). The pump 18 has a plunger 21 as a pump member, and the pump 19 has a plunger 22 as a pump member.

The plunger 21 is mounted on the cylinder hole 15 to enable reciprocating motion. The first pump chamber 23 is formed by the cylinder hole 15 and the plunger 21, and the pump chamber 23 expands and contracts by the reciprocating motion of the plunger 21. The contraction limit position of the plunger 21 is set by the position at which the plunger 21 is closest to the bottom surface of the first cylinder hole 15. The plunger 22 is attached to the cylinder hole 16 to enable reciprocating motion. The second pump chamber 24 is formed by the cylinder hole 16 and the plunger 22, and the pump chamber 24 expands and contracts by the reciprocating motion of the plunger 22. The contraction limit position of the plunger 22 is set by the position at which the plunger 22 is closest to the bottom of the cylinder hole 16. 1 and 2 show the state in which the plunger 22 is closest to the bottom of the cylinder hole 16.

A slight gap is formed between the plunger 21 and the cylinder hole 15, and leakage of liquid from the pump chamber 23 is prevented by the sealing member 20. Likewise, leakage of liquid from the pump chamber 24 is prevented by the sealing member 20.

A first suction passage 25 is formed in the pump block 13, and the suction passage 25 opens at the lower end surface 14c, which is an opening surface, and communicates with the pump chamber 23. A first discharge passage 26 is formed in the pump block 13, and the discharge passage 26 opens at the front face 14a, which is the valve mounting surface, and communicates with the pump chamber 23. As shown in FIG. 2, the discharge passage 26 includes a communication portion 26a, which is a first communication portion, and a discharge portion 26b. The communicating portion 26a communicates with the pump chamber, is coaxial with the suction passage 25, and is perpendicular to the cylinder hole 15. The discharge portion 26b is parallel to the cylinder hole 15 and opens at the front face 14a.

A second suction passage 27 is formed in the pump block 13, and the suction passage 27 opens at the front face 14a, which is the mounting surface, and communicates with the pump chamber 24. A second discharge passage 28 is formed in the pump block 13, and the discharge passage 28 opens at the upper end surface 14d, which is an opening surface, and communicates with the pump chamber 24. As shown in FIG. 2, the suction passage 27 includes a communication portion 27a and a suction portion 27b, which are second communication portions. The communicating portion 27a communicates with the pump chamber 24, is coaxial with the discharge passage 28, and is perpendicular to the cylinder hole 16. The suction portion 27b is parallel to the cylinder hole 16 and opens at the front surface 14a parallel to the discharge portion 26b.

The pump driving mechanism 17 is provided with a first motor 31 for reciprocating the plunger 21 as a pump member and a second motor 32 for reciprocating the plunger 22 as a pump member. . A nut screwed to the plunger 21 is assembled inside the pump driving mechanism 17, and the rotational movement of the main shaft of the motor 31 is converted into a linear reciprocating motion of the plunger 21 through the nut. Likewise, the rotational movement of the main shaft of the motor 32 is converted into a linear reciprocating movement of the plunger 22.

When the plunger 21 is driven in the direction of expanding the pump chamber 23 and the pump 18 performs a suction operation, liquid is sucked into the pump chamber 23 from the suction passage 25. On the other hand, when the plunger 22 is driven in the direction of contracting the pump chamber 24 and the pump 19 performs a discharge operation, liquid is discharged from the pump chamber 24 into the discharge passage 28.

A flow path opening/closing solenoid valve (33) as a flow path opening/closing valve is attached to the front surface (14a) as a valve mounting surface. The flow path opening/closing solenoid valve 33 blocks communication between the discharge flow path 26 and the suction flow path 27 when the pump 18 performs a suction operation and the pump 19 performs a discharge operation. Additionally, the flow path opening/closing solenoid valve 33 communicates the discharge flow path 26 and the suction flow path 27 when the pump 19 performs the suction operation and the pump 18 performs the discharge operation. In this way, the flow path opening/closing electromagnetic valve 33 is installed on the outside of the pump block 13 and operates in an open state to communicate with the discharge flow path 26 and the suction flow path 27 and a closed state to block communication. .

When the pump 18 performs a discharge operation and the pump 19 performs a suction operation, liquid is supplied from the pump chamber 23 to the pump chamber 24 through the passage solenoid valve 33. If the rotation direction of the motors 31 and 32 when each pump 18 and 19 performs the discharge operation is the forward rotation direction, the motors 31 and 32 are driven in the reverse direction when the pumps 18 and 19 perform the suction operation.

As shown in Figure 2, in the pump block 13, the diameter D1 of the cylinder hole 15 and the diameter D2 of the cylinder hole 16 are the same diameter (D1 = D2), and both cylinder holes ( The cross-sectional areas of 15 and 16) are the same. In addition, the reciprocating stroke (S1) of the plunger (21) is twice the reciprocating stroke (S2) of the plunger (22) (S1 = 2S2), and the speed during the reciprocating motion of the plunger (21) is equal to that of the plunger (22). It is set to twice the speed during reciprocating motion. Therefore, the discharge flow rate of the pump 18 is twice that of the pump 19. Also, as described above, when the flow path solenoid valve 33 is in the open state, the pump 19 is in the suction operation and the pump 18 is in the discharge operation. On the other hand, when the flow path solenoid valve 33 is in a closed state, the pump 18 is in a suction operation and the pump 19 is in a discharge operation. In other words, the discharge flow rate of the pump 18 in discharge operation when the pump 19 is in the suction operation is twice the discharge flow rate of the pump 19 in the discharge operation when the pump 18 is in the suction operation.

Accordingly, when the plunger 22 performs the suction operation and the plunger 21 performs the discharge operation, the liquid in the pump chamber 23 is supplied to the pump chamber 24 due to the discharge operation of the plunger 21. It is discharged to the discharge passage (28) through (24). Since the liquid flowing into the discharge passage 28 flows within the passage from the lower end of the pump block 13 toward the upper end, even if the liquid contains bubbles, the bubbles do not remain in the passage and the bubbles are discharged to the outside. can do.

FIG. 4 is a cross-sectional view showing the main part of the flow path opening/closing solenoid valve 33 shown in FIG. 1.

As shown in FIG. 4, the flow path opening/closing solenoid valve 33 has a valve housing case 35 in which a solenoid case 34 is installed, and a port plate 36 is attached to the valve housing case 35. The flow path opening/closing solenoid valve 33 has a valve driving unit 40 that opens and closes the valve member 45 in response to a control signal from the outside to switch between the open and closed states. A movable iron core (37) as the valve driving unit (40) is mounted within the solenoid case (34) to enable reciprocating movement in the axial direction, and a port plate (36) is attached to the movable iron core (37) by a coil spring (38). A spring force in the direction protruding toward is applied. A coil (not shown) is assembled in the solenoid case 34, and when a drive current as a control signal is applied to the coil, the movable iron core 37 is driven in a retreating direction against the spring force. As shown in FIG. 2, the port plate 36 is detachably attached to the front face 14a of the pump block 13 by a screw member 39. A screw attachment hole (39a) into which the screw member (39) is attached is formed in the port plate (36).

As shown in FIG. 4, the oscillating arm 41 is disposed within the valve housing case 35, and the oscillating arm 41 moves forward of the movable iron core 37 in a direction crossing the movable iron core 37. is being extended to The base end of the swing arm (41) is swingably supported on the valve housing case (35) by the support shaft (42). The valve driving lever 43 is disposed between the swinging arm 41 and the port plate 36, and the valve driving lever 43 extends along the swinging arm 41. The longitudinal central portion of the valve driving lever (43) is swingably supported within the valve housing case (35) by the support shaft (44), and the valve driving lever (43) swings around the support shaft (44).

A valve member 45 made of rubber is installed on the valve driving lever 43, and a liquid passage 46 is formed by the valve member 45 and the port plate 36. The inlet hole 47 and the outlet hole 48 are communicated with the liquid flow path 46. The inlet hole 47 communicates with the first discharge passage 26, and the outlet hole 48 communicates with the second suction passage 27. The opening and closing part 49 is installed on the valve member 45 corresponding to the outlet hole 48, and the opening and closing part 49 opens and closes the outflow hole 48. The coil spring 51 is disposed between the proximal end of the valve driving lever 43 and one end of the valve driving lever 43, and the coil spring 51 is a spring in the direction in which the opening and closing part 49 opens the outlet hole 48. Apply force to the valve driving lever (43).

The operating portion 52 is installed at the front end of the swing arm 41, and the operating portion 52 is in contact with the other end of the valve driving lever 43. A force point portion 53 is installed in the longitudinal center of the swing arm 41, the force point portion 53 protrudes toward the movable iron core 37, and the front end surface of the movable iron core 37 is the force point portion. It is in contact with (53). Since the movable iron core 37 is in contact with the longitudinal central portion of the swing arm 41, the swing stroke of the operating portion 52 is larger than the axial stroke of the movable iron core 37, and the enlarged operating portion 52 ), the opening and closing portion 49 is operated to open and close. Therefore, while securing the communication opening degree between the liquid passage 46 and the outflow hole 48 by using the small flow path opening/closing solenoid valve 33, the opening/closing portion 49 opens and closes the outflow hole 48 at high speed. can do.

Figure 4a shows a state in which the opening and closing portion 49 blocks the outlet hole 48 by the spring force of the coil spring 38, thereby blocking communication between the inlet hole 47 and the outlet hole 48, that is, in a closed state. . Figure 4b shows that a driving current is applied to the coil and the movable iron core 37 is driven backward, so that the opening and closing part 49 is separated from the outlet hole 48 by the spring force of the coil spring 51, and the inlet hole 47 and the outlet hole ( 48) is shown in a connected state, that is, an open state.

Since the flow path opening/closing solenoid valve 33 is not assembled inside the pump block 13 but is installed on the outside, the flow path opening/closing solenoid valve 33 can be easily removed from the pump block 13 by loosening the screw member 39. ), it is possible to improve maintainability such as inspection or replacement of the flow path opening/closing solenoid valve 33.

A suction control valve 54 is installed on the lower end surface 14c as the first opening surface. The suction control valve 54 shown in FIG. 1 is a check valve 54a on the suction side. As shown in FIG. 2, the check valve 54a has a valve case 55 attached to the lower end surface 14c, and the valve chamber 56 communicating with the first suction flow path 25 is a valve case ( 55). A suction port (57) is installed in the valve case (55), and a suction pipe (58) connected to the liquid container (11) is connected to the suction port (57). A valve body 59 composed of a ball is installed in the valve chamber 56. The check valve (54a) guides the liquid (L) contained in the liquid container (11) to the pump chamber (23) during the suction operation of the plunger (21), and the valve body (59) guides the liquid (L) contained in the liquid container (11) to the pump chamber (23) during the discharge operation of the plunger (21). The valve chamber (56) is closed to prevent backflow of liquid into the liquid container (11).

A discharge control valve 61 is installed on the upper end surface 14d of the opening surface. The discharge control valve 61 shown in FIG. 1 is a check valve like the check valve 54a on the suction side. The check valve 61a on the discharge side has a valve case 62 attached to the upper end surface 14d, and a valve chamber 63 communicating with the discharge passage 28 is provided in the valve case 62. A discharge port 64 is installed in the valve case 62, and a discharge pipe 65 connected to the applicator 12 for discharging liquid is connected to the discharge port 64. A valve body 66 composed of a ball is installed in the valve chamber 63. The check valve 61a prevents liquid dripping from the applicator 12 by causing the valve body 66 to close the valve chamber 63 when the liquid supply device 10 is stopped.

As described above, the flow path solenoid valve 33 is not assembled inside the pump block 13, but is attached to the outer surface of the pump block 13, and the suction control valve 54 and the discharge control valve 61 Also, it is installed on the outer surface of the pump block (13). Moreover, the two cylinder holes 15 and 16, the suction passage 25, the discharge passage 26, the suction passage 27, and the discharge passage 28 are installed in the pump block 13, which is a single block member. Therefore, the pump block (13) is integrated. Therefore, the pump block 13 has a simple, integrated structure, and the pump block 13 can be easily manufactured without assembling a plurality of members by machining the cylinder hole and flow path from the material of the block member. In addition, the suction passage 25 and the discharge passage 28 shown in FIG. 1 are installed coaxially, but the communication portion 26a and the suction passage 25 are coaxial, and the communication portion 27a and the discharge passage are coaxial. If (28) is coaxial, the suction passage (25) and discharge passage (28) do not need to be coaxial.

In addition, the flow path opening/closing electromagnetic valve 33 is controlled to open and close by a drive signal applied from the outside in a state that communicates the discharge path 26 and the suction path 27 and a state that blocks communication, so that the pump chamber 23 and The timing at which the pump chamber 24 communicates and the timing at which communication is blocked can be set by a drive signal.

When the liquid supply device 10 is installed with the front 14a of the pump block 13 facing up and down, the valve body 59 of the suction control valve 54 and the valve body of the discharge control valve 61 ( 66) opens and closes in the up and down directions by its own weight and the movement of the liquid (L). For this reason, if the flow path solenoid valve 33 is used as a check valve, a slight backflow of liquid occurs at the start of the discharge operation of the second pump 19, resulting in a decrease in discharge precision. In contrast, since the flow opening/closing solenoid valve 33 is opened and closed by a signal from the outside, the second suction flow path 27 can be closed from the start of the discharge operation of the pump 19, thereby preventing backflow. You can. As a result, the liquid can be discharged from the applicator 12 with high precision.

In particular, when, for example, about 1 cc of liquid resin material is supplied to the mold from the applicator 12, even a slight backflow has a large effect on the discharge precision. If the flow path opening/closing solenoid valve 33 is installed between the first discharge flow path 26 and the second suction flow path 27, a small amount of liquid can be supplied to the mold with high precision.

Figure 5 is a cross-sectional view showing the main part of the liquid supply device 10, which is a modified example.

As shown in FIG. 5, in the pump block 13, the cross-sectional area of the cylinder hole 15 is set to be twice the cross-sectional area of the cylinder hole 16. Therefore, by making the reciprocating stroke S1 of the plunger 21 and the reciprocating stroke S2 of the plunger 22 the same, the discharge flow rate of the pump chamber 23 by the plunger 21 is as shown in FIG. 1. Like the liquid supply device 10, it is set to twice the discharge flow rate of the pump chamber 24 by the plunger 22. That is, the discharge flow rate of the pump 18 that performs the discharge operation when the pump 19 is in the suction operation is twice the discharge flow rate of the pump 19 that performs the discharge operation when the pump 18 is in the suction operation.

FIG. 6 is a time chart showing the operation of supplying liquid L to the applicator 12 in the liquid supply device 10, that is, the liquid supply method.

In the first discharge step, the pump 19 supplies liquid L to the applicator 12 through a discharge operation. Meanwhile, the pump 18 sucks the liquid L in the liquid container 11 into the pump chamber 23 through a suction operation. As shown in FIG. 4A, the flow path solenoid valve 33 is turned OFF, that is, closed and is in a closed state. At this time, the suction control valve 54 and the discharge control valve 61 are in an open state (ON).

The suction amount of liquid sucked into the pump chamber 23 by the suction operation of the pump 18 is twice the amount of liquid discharged by the discharge operation of the pump 19. That is, the suction flow rate of the pump 18 in suction operation when the pump 19 is in the discharge operation is twice the discharge flow rate of the pump 19 in the discharge operation when the pump 18 is in the suction operation.
In the liquid supply device 10 shown in FIG. 1, the speed of the plunger 21 is twice that of the plunger 22, and in the liquid supply device 10 shown in FIG. 5, the speeds of the plunger 21 and plunger 22 are the same. do. After the first discharge step is performed for a predetermined time (T1), the first pause step is performed for the pause time (T0). In the first rest stage, the driving of the pump 18 and pump 19 is stopped.

After the stop time (T0) has elapsed, the flow path solenoid valve (33) is turned ON, that is, opened and switched to the open state.

After the first resting step is performed, the second discharging step proceeds. In the second discharge step, the pump 18 supplies the liquid L from the pump chamber 23 to the applicator 12 through the pump chamber 24 through a discharge operation. The pump 19 performs a suction operation to suck a part of the liquid L supplied from the pump chamber 23 into the pump chamber 24. The flow path opening/closing solenoid valve 33 is turned ON, that is, in an open state, as shown in FIG. 4A.

After the second discharge step is performed for a predetermined time (T1), the second pause step is performed for the pause time (T0). In the second rest stage, the pump 18 and pump 19 stop driving. The flow path solenoid valve 33 is turned OFF, that is, closed, and switched to the closed state after the stopping time T0 has elapsed. After the second resting step is performed, the first discharging step is performed again.

In this way, if the rest time T0 is provided, the liquid is supplied intermittently to the applicator 12 in an intermittent discharge form. In the case of the intermittent discharge type, the rest time (T0) can be shorter than the discharge time (T1). For this reason, the liquid supply device 10 having the flow path opening/closing solenoid valve 33 can perform intermittent discharge with high tact and increase discharge precision.

In the first pause stage and the second pause stage, the driving of the pump 18 and the pump 19 may be stopped, and the opening/closing electromagnetic valve 33 is switched before the pause time T0 elapses, After the pause time (T0) has elapsed, the operation of the pump 18 and pump 19 may be resumed.

Figure 7 is a cross-sectional view showing the main portion of the liquid supply device 10 according to another embodiment.

As shown in FIG. 7, a spring member 60 is installed in the valve chamber 56 of the check valve 54a of the liquid supply device 10. The spring member 60 applies a spring force to the valve body 59 in the direction of closing the suction port 57. Accordingly, when the suction operation of the plunger 21 is stopped, the suction port 57 is closed by spring force.

In the liquid supply device 10 of FIG. 7, the above-described discharge control valve 61 is not installed. When the plunger 22 performs the suction operation, the liquid is discharged into the discharge passage 28 by the discharge operation of the plunger 21, so there is no need to install the discharge control valve 61. However, as described above, if the discharge control valve 61 is installed, the flow path between the pump chamber 24 and the applicator 12 can be blocked when the liquid supply device 10 is stopped, so the applicator ( 12) Liquid dripping can be prevented.

In addition, the suction control valve 54 and the discharge control valve 61 in the liquid supply device 10 shown in FIGS. 1 and 5 are spring members 60 similar to the suction control valve 54 shown in FIG. 7. ) may be used as a check valve, or the discharge control valve 61 may not be installed.

Fig. 8 is a cross-sectional view showing main parts of a liquid supply device according to another embodiment.

As shown in FIG. 8, the port block 71 on the suction side is attached to the bottom surface 14c, which is the opening surface of the pump block 13, and the port block 72 on the discharge side is attached to the opening surface of the pump block 13. It is attached to the spherical upper surface (14d).

The port block 71 has a communication passage 73 on the discharge side that communicates with the suction passage 25 and a communication passage 74 on the suction side that communicates with the suction port 57, and the liquid supply device shown in FIG. 1 ( Similarly to 10), the suction pipe 58 is connected to the suction port 57. A solenoid valve (54b) on the suction side as the suction control valve (54) is attached to the port block (71). The solenoid valve 54b has the same structure as the flow opening/closing solenoid valve 33, the communication passage 74 communicates with the inlet hole of the solenoid valve 54b, and the communication passage 73 communicates with the outlet hole. The solenoid valve 54b communicates the communication passage 74 on the suction side with the communication passage 73 on the discharge side, and has an open state in which the first suction passage 25 and the suction port 57 communicate, and blocks communication. It is in a closed state and operates by a driving signal applied from the outside.

The port block 72 on the discharge side has a communication passage 75 on the suction side that communicates with the discharge passage 28, and a communication passage 76 on the discharge side that communicates with the discharge port 64, as shown in FIG. Like the liquid supply device 10, the discharge pipe 65 is connected to the discharge port 64. The solenoid valve 61b on the discharge side as the discharge control valve 61 is attached to the port block 72. The solenoid valve (61b) has the same structure as the flow opening/closing solenoid valve (33) and the solenoid valve (54b), and communicates the communication passage (75) on the suction side with the communication passage (76) on the discharge side, thereby forming the second discharge passage (28). ) and the discharge port 64 in an open state and a closed state that blocks communication, and operates by a driving signal applied from the outside.

As shown in FIG. 8, when the flow path opening/closing control valve 33, the solenoid valve 54b on the suction side, and the solenoid valve 61b on the discharge side are disposed on the front side 14a of the pump block 13, each Maintenance, such as replacement of the solenoid valve, can be easily performed.

In the liquid supply device 10 shown in FIG. 8, the suction control valve 54 and the discharge control valve 61 are solenoid valves, and in the liquid supply device 10 shown in FIG. 1, the suction control valve 54 and The discharge control valve 61 is a check valve. In this regard, in each liquid supply device 10, one of the suction control valve 54 and the discharge control valve 61 may be a solenoid valve, and the other may be a check valve.

FIG. 9 is a block diagram showing the control circuit of the liquid supply device 10 shown in FIG. 8.

As shown in FIG. 9, the flow path opening/closing solenoid valve 33, the solenoid valve 54b on the suction side, and the solenoid valve 61b on the discharge side are each controlled to open and close by a control signal from the controller 77. Additionally, the rotation of the motor 31 and the motor 32 is controlled by a control signal from the controller 77. The control board 78 is connected to the controller 77, and the start of operation of the liquid supply device 10, etc. is inputted through an operation unit installed on the control board 78. The controller 77 is equipped with a memory that stores control programs, etc., and a microprocessor that calculates control signals for each solenoid valve. As shown in the time chart of FIG. 6, the driving of the first pump 18, the second pump 19, etc. is controlled by the control signal from the controller 77.

The liquid supply device 10 shown in FIG. 1 is driven and controlled by the same control circuit as in FIG. 9 except for the solenoid valve 54b on the suction side and the solenoid valve 61b on the discharge side.

Fig. 10 is a cross-sectional view showing main parts of a liquid supply device according to another embodiment.

As shown in FIG. 10, the suction port 57 and the discharge port 64 are opened and installed on the front face 14a of the pump block 13. A communication passage 74 on the suction side is installed in the pump block 13, and the communication passage 74 is connected to the liquid container 11 through a suction pipe 58 connected to the suction port 57. A communication passage 76 on the discharge side is installed in the pump block 13, and the communication passage 76 is connected to the applicator 12 through a discharge pipe 65 connected to the discharge port 64.

A solenoid valve (54b) on the suction side as the suction control valve (54) is attached to the lower end surface (14c) of the pump block (13). The solenoid valve 54b has the same structure as the flow opening/closing solenoid valve 33, and has an open state to communicate with the suction passage 25 and the suction port 57 and a closed state to block communication, and a drive signal applied from the outside. It works by

An electromagnetic valve (61b) on the discharge side as the discharge control valve (61) is attached to the upper end surface (14d) of the pump block (13). The solenoid valve 61b has the same structure as the flow opening/closing solenoid valve 33, has an open state for communicating with the discharge passage 28 and the discharge port 64, and a closed state for blocking communication, and is driven by an external force. It operates by signal.

As shown in FIG. 10, the suction port 57, the discharge port 64, and the communication passages 74 and 76 are installed in the pump block 13, and the suction passage 25 and the discharge passage 28 are , It is different from the liquid supply device 10 described above, and is installed from the bottom side to the opening side of each cylinder hole 15 and 16. As a result, even if the suction port 57, etc. are installed in the pump block 13, it is possible to avoid enlarging the dimensions of the pump block 13 in the left and right directions in the drawing. The communication portions (26a, 27a) are coaxial with the suction passage (25) and the discharge passage (28).

While the solenoid valves (54b, 61b) shown in FIG. 8 are attached to the pump block (13) through the port blocks (71, 72), the solenoid valves (54b, 61b) shown in FIG. 10 are attached to the pump block (13). ) is directly attached to the Therefore, in the liquid supply device 10 shown in FIG. 10, the number of parts can be reduced compared to the liquid supply device 10 shown in FIG. 8. Additionally, the liquid supply device 10 is controlled by the control circuit shown in FIG. 9.

As shown in FIGS. 8 and 10, if the suction control valve 54 and the discharge control valve 61 are used as solenoid valves 54b and 61b, respectively, all solenoid valves are opened, so that the liquid supply device 10 ) can be removed from the flow path. Additionally, when cleaning the inside of the flow path with a cleaning liquid, the cleaning liquid can be allowed to flow back. In this way, the type of liquid discharged by the liquid supply device 10 can be easily exchanged.

The attachment form of the solenoid valves as the suction control valve 54 and the discharge control valve 61 may be installed on the pump block 13 through the port blocks 71 and 72, as shown in Figure 8. As shown in Figure 10, it may be mounted directly on the pump block 13.

The present invention is not limited to the above embodiments, and various changes are possible without departing from the gist. For example, at least one of the suction control valve 54 and the discharge control valve 61 may be a check valve or a solenoid valve. Additionally, in the liquid supply device 10 shown in FIGS. 1, 8, and 10, the discharge control valve 61 may not be provided, as in the liquid supply device 10 shown in FIG. 7. Additionally, the control signal is not limited to the driving current, and a fluid such as compressed air may be used. In this case, the valve actuator 40 can be an air-operated valve using a piston driven by fluid pressure. Furthermore, the liquid may be discharged continuously from the applicator 12 rather than in the form of intermittent discharge with a rest time T0.

10: Liquid supply device
13: Pump block
16: Cylinder ball
19: pump
22. Plunger
24: Pump room
25: Suction passage
26: Discharge flow path
27: Suction passage
28: Discharge flow path
33: Euro opening/closing solenoid valve
37: Movable iron core
41: Yodong arm (搖moving arm)
42: support axis
43: Valve driving lever
44: support shaft
47: Inlet hole
48: outflow hole
49: opening and closing part
52: operating unit
53: Yeokjeombu (力點部)
54: Suction control valve
54a: check valve
54b: solenoid valve
55: valve case
56: Valve room
57: Suction port
59: valve body
61: Discharge control valve
61a: check valve
61b: solenoid valve
62: valve case
64: discharge port
66: valve body
71,72: Port block
73~76: Flue passage

Claims (15)

A first pump chamber communicating with the first suction passage and the first discharge passage, a second pump chamber communicating with the second suction passage and the second discharge passage, and a valve mounting surface on which the first discharge passage and the second suction passage are opened. This formed integrated pump block,
a first pump performing a suction operation of sucking liquid from the first suction passage into the first pump chamber and a discharge operation of discharging liquid from the first pump chamber to the first discharge passage;
a second pump performing a suction operation of sucking liquid from the second suction passage into the second pump chamber and a discharge operation of discharging liquid from the second pump chamber to the second discharge passage;
It is installed on the outside of the pump block and has a closed state to block communication between the first discharge passage and the second suction passage and an open state to communicate with the first discharge passage and the second suction passage, and has a closed state to block communication between the first discharge passage and the second suction passage. It has a valve driving part that switches between open and closed states according to a control signal, and has a flow path opening and closing valve attached to the valve mounting surface,
The flow path opening/closing valve is in the closed state when the first pump is in a suction operation and the second pump is in a discharge operation, and is opened when the second pump is in a suction operation and the first pump is in a discharge operation. A liquid supply device that guides the liquid to the second discharge passage.
According to paragraph 1,
The flow path opening/closing valve is a liquid supply device that is an electromagnetic valve.
In paragraph 1,
Liquid supply having a suction control valve that guides the liquid contained in the liquid container to the first pump chamber during the suction operation of the first pump and prevents backflow of the liquid into the liquid container during the discharge operation of the first pump. Device.
According to paragraph 3,
A liquid supply device equipped with a discharge control valve in the second discharge passage.
According to paragraph 4,
A liquid supply device wherein at least one of the suction control valve and the discharge control valve is a check valve.
According to paragraph 4,
A liquid supply device wherein at least one of the suction control valve and the discharge control valve is an electromagnetic valve.
According to clause 6,
It has a port block on the suction side formed with a communication passage communicating with the first suction passage and a suction port connected to the liquid container, and the suction control valve consisting of the solenoid valve is attached to the port block on the suction side, A liquid supply device that opens and closes in a state that communicates the suction port and the first suction flow path and a state that blocks communication.
According to clause 6,
It has a port block on the discharge side equipped with a communication passage communicating with the second discharge passage and a discharge port connected to the applicator, and the discharge control valve consisting of the solenoid valve is attached to the port block on the discharge side, and is connected to the discharge port and A liquid supply device that opens and closes in a state that communicates the second discharge passage and a state that blocks communication.
According to clause 6,
A suction port connected to the liquid container is attached to the pump block, and the suction control valve consisting of the electromagnetic valve is attached to the pump block to communicate with the suction port and the first suction flow path, and to maintain communication. A liquid supply device that opens and closes in a blocking state.
According to clause 6,
A discharge port connected to the applicator is attached to the pump block, and the discharge control valve consisting of the electromagnetic valve is attached to the pump block to communicate with the discharge port and the second discharge passage and block the communication. A liquid supply device that operates in an open and closed state.
According to paragraph 1,
The first discharge passage has a first communication portion that communicates with the first pump chamber and is coaxial with the first suction passage, and a discharge portion that opens on the valve mounting surface, and the second suction passage has a first communication portion that is coaxial with the first suction passage. A liquid supply device having a suction part opening on the surface and a second communication part communicating with the second pump chamber.
According to paragraph 1,
The pump block has a first opening surface perpendicular to the valve mounting surface and through which the first suction flow path opens, and a second opening surface perpendicular to the valve mounting surface and parallel to the first opening surface through which the second discharge flow path opens. A liquid supply device with two openings.
According to clause 11,
A liquid supply device wherein the first suction flow path and the second discharge flow path are coaxial.
According to any one of claims 1 to 13,
When the second pump is in a suction operation, the discharge flow rate of the first pump in discharge operation is twice the discharge flow rate of the second pump in discharge operation when the first pump is in suction operation.
An integrated pump block having a first pump chamber communicating with the first suction passage and the first discharge passage, and a second pump chamber communicating with the second suction passage and the second discharge passage;
a first pump performing a suction operation of sucking liquid from the first suction passage into the first pump chamber and a discharge operation of discharging liquid from the first pump chamber to the first discharge passage;
a second pump performing a suction operation of sucking liquid from the second suction passage into the second pump chamber and a discharge operation of discharging liquid from the second pump chamber to the second discharge passage;
It is installed outside the pump block, has a closed state to block communication between the first discharge passage and the second suction passage, and an open state to communicate with the first discharge passage and the second suction passage, and has a closed state to block communication between the first discharge passage and the second suction passage, In the liquid supply device having a flow path opening and closing valve having a valve driving unit that switches between open and closed states according to a control signal,
A first discharge stage in which the flow path opening/closing valve is closed, the first pump operates in a suction operation, and the second pump operates in a discharge operation;
A first rest step of stopping the first pump and the second pump and switching the flow path opening/closing valve from the closed state to the open state;
A second discharge stage in which the first pump performs a discharge operation and the second pump performs a suction operation with the flow path opening/closing valve in an open state;
A liquid supply method having a second pause step of stopping the first pump and the second pump and switching the flow path opening/closing valve from the open state to the closed state.