JP2020002881A - Liquid supply device and liquid supply method - Google Patents

Abstract

To provide a liquid supply device of which the structure is simplified and the maintainability is improved.SOLUTION: A liquid supply device 10 comprises an integrated pump block 13 in which a first pump chamber 23 connected to a first suction duct 25 and a first discharge duct 26 and a second pump chamber 24 connected to a second suction duct 27 and a second discharge duct 28 are formed. A first pump 18 performs a suction operation and a discharge operation of the first pump chamber 23, and a second pump 19 performs a suction operation and a discharge operation of the second pump chamber 24. A duct opening/closing solenoid valve 33 which is provided outside of the pump block 13, guides a liquid to the second discharge duct 28 by connecting the first discharge duct 26 and the second suction duct 27 when the second pump 19 performs the suction operation and the first pump 18 performs the discharge operation.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a liquid supply device and a liquid supply method for supplying a liquid such as a liquid resin.

  In order to supply liquid, the liquid supply device includes a pump having a pump chamber that contracts to perform a discharging operation and expands to perform a suction operation. Patent Literature 1 describes a liquid supply device that includes a primary-side pump and a secondary-side pump connected in series to the primary-side pump, and supplies a liquid such as a photoresist liquid. Patent Literature 2 discloses a liquid chromatograph pump including a first pump and a second pump connected in series to the pump.

  In the liquid supply device described in Patent Literature 1, a communication channel is connected between a discharge port of a primary pump and an inflow port of a secondary pump, and a check valve is provided in the communication channel. The check valve permits the flow of liquid from the primary pump to the secondary pump during the discharge operation of the primary pump, and prevents the liquid from flowing back to the primary pump during the suction operation of the primary pump.

  The pump described in Patent Literature 2 has a pump body in which two cylinders are formed, and plungers forming the respective pumps are provided in respective cylinders so as to be able to reciprocate. A check valve is provided in a flow path between the first pump and the second pump, and the check valve has the same function as the check valve in Patent Document 1.

JP 2014-1663 A JP 2004-150402 A

  In a configuration in which the primary pump and the secondary pump are separated, as in the liquid supply device described in Patent Literature 1, the two pumps are connected by a pipe of a communication flow path, and a check valve is provided in the pipe. . For this reason, the structure of the liquid supply device becomes complicated, and the assembling operation takes time.

  On the other hand, if two pumps and a check valve are incorporated in a pump body as in Patent Document 2, the pump cannot be assembled unless the pump body is of a split type to incorporate the check valve. Therefore, it is necessary to form a pump body by the block material in which the first pump is incorporated and the block material in which the second pump is incorporated, and to form a concave portion for accommodating the check valve in the block material. For this reason, the structure of the pump becomes complicated, and the assembling work takes time. In addition, when the check valve is incorporated in the block material, the pump body must be disassembled at the time of maintenance such as inspection, cleaning, and replacement of the check valve.

  As described above, unlike the case where a photoresist solution is applied, a case where a resin product is manufactured by supplying a liquid resin to a mold, and a case where a resin material of, for example, about 1 cc is supplied to the mold. For this purpose, it is necessary to improve the discharge accuracy from the pump. As described above, when a relatively small amount of liquid is supplied, if a check valve is provided between the primary pump and the secondary pump, the discharge accuracy of the liquid cannot be increased. This is because in the check valve, the liquid flows backward slightly toward the primary pump when the secondary pump starts discharging.

  An object of the present invention is to provide a liquid supply device and a liquid supply method which are simple in structure and excellent in maintainability.

Another object of the present invention is to provide a liquid supply device and liquid supply how that can improve discharge accuracy.

  The liquid supply device according to the present invention includes a first pump chamber communicating with the first suction flow path and the first discharge flow path, and a second pump chamber communicating with the second suction flow path and the second discharge flow path. An integrated pump block formed with a pump chamber, a valve mounting surface on which the first discharge flow path and the second discharge flow path are opened, and the first suction flow in the first pump chamber. A first pump that performs a suction operation of sucking a liquid from a passage and a discharge operation of discharging a liquid from the first pump chamber to the first discharge channel; and a second pump that performs a second operation of the second pump chamber. A second pump that performs a suction operation of sucking a liquid from a suction channel and a discharge operation of discharging a liquid from the second pump chamber to the second discharge channel, and is provided outside the pump block; A closed state in which communication between the first discharge channel and the second suction channel is interrupted; The valve mounting surface has an open state for communicating the first discharge flow path with the second suction flow path, and has a valve drive unit for switching between an open state and a closed state based on an external control signal. A flow opening / closing valve attached to the second pump, wherein the flow opening / closing valve is closed when the first pump performs a suction operation and the second pump performs a discharging operation, and the second pump is closed. Is in the open state when the first pump performs a discharging operation and the first pump performs a discharging operation, and guides the liquid to the second discharging flow path.

  According to the liquid supply method of the present invention, the first pump chamber communicating with the first suction flow path and the first discharge flow path, and the second pump chamber communicating with the second suction flow path and the second discharge flow path are provided. An integrated pump block in which a pump chamber is formed; a suction operation for sucking liquid from the first suction channel into the first pump chamber; and a first discharge flow from the first pump chamber. A first pump for performing a discharge operation for discharging a liquid to a passage, a suction operation for sucking a liquid from the second suction passage into the second pump chamber, and a second pump for performing the second operation from the second pump chamber. A second pump that performs a discharge operation for discharging liquid to a discharge channel, and a closed state that is provided outside the pump block and blocks communication between the first discharge channel and the second suction channel. And an open state for communicating the first discharge flow path with the second suction flow path. A flow path opening / closing valve having a valve drive unit that switches between an open state and a closed state based on an external control signal, wherein the flow path opening / closing valve is closed, and the first pump sucks. A first discharge step in which the second pump is operated to perform a discharge operation, and a first discharge step in which the first pump and the second pump are stopped and the flow path on-off valve is switched from the closed state to the open state. A resting step, a second discharging step in which the first pump performs a discharging operation while the flow path on-off valve is opened, and a suction operation of the second pump, the first pump and the second pump Is stopped and the flow path on-off valve is switched from the open state to the closed state.

  Since the flow path opening / closing valve is provided outside the pump block without being incorporated inside the pump block, the flow path opening / closing valve can be easily removed from the pump block, thereby improving the maintainability of the liquid supply device. be able to. The first and second pump chambers are formed as an integral pump block, and the pump block has a simple structure without assembling a plurality of members, so that the liquid supply device can be easily assembled. Since the solenoid valve switches between a state in which communication between the first discharge flow path and the second suction flow path is cut off and a state in which communication is established, the liquid is discharged from the second discharge flow path with high precision. be able to.

1 is a partially cutaway front view showing a liquid supply device according to one embodiment. It is an expanded sectional view which shows the principal part of FIG. FIG. 3 is a sectional view taken along line AA in FIG. 2. 2A and 2B are cross-sectional views illustrating a main part of the passage opening / closing solenoid valve illustrated in FIG. 1, wherein FIG. 1A illustrates a state where the passage opening / closing solenoid valve is closed, and FIG. Is shown. It is sectional drawing which shows the principal part of the liquid supply apparatus which is other embodiment. 6 is a time chart illustrating a liquid supply operation in the liquid supply device. It is sectional drawing which shows the principal part of the liquid supply apparatus which is other embodiment. It is sectional drawing which shows the principal part of the liquid supply apparatus which is another embodiment. FIG. 9 is a block diagram illustrating a control circuit of the liquid supply device illustrated in FIG. 8. It is sectional drawing which shows the principal part of the liquid supply apparatus which is another embodiment.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The liquid supply device 10 is used to supply the liquid L in the liquid container 11 to an application tool 12 such as an application nozzle. The liquid supply device 10 has a rectangular parallelepiped pump block 13. The pump block 13 has six surfaces. In FIG. 1, the left surface is the front surface 14a, the opposite surface is the rear surface 14b, the lower surface is the lower surface 14c, and the upper surface is the upper surface 14d. . In FIG. 3, the left and right surfaces are side surfaces 14e and 14f. The front surface 14a and the back surface 14b are parallel, the lower end surface 14c and the upper end surface 14d are parallel, and are perpendicular to the front surface 14a and the back surface 14b.

  A bottomed first cylinder hole 15 is provided in the pump block 13 with an opening in the back surface 14b, and a bottomed second cylinder hole 16 is provided in the pump block 13 with an opening in the back surface 14b. Both cylinder holes 15, 16 are parallel to each other. As described above, the pump block 13 is an integral type in which the two cylinder holes 15 and 16 are provided in a single block member. The front surface 14a and the upper and lower end surfaces 14c and 14d are external surfaces exposed to the outside.

  The back surface 14b of the pump block 13 is a drive mechanism mounting surface, and the pump drive mechanism 17 is mounted on the back surface 14b. The pump drive mechanism 17 has a first pump 18 and a second pump 19. The pump 18 has a plunger 21 as a pump member, and the pump 19 has a plunger 22 as a pump member.

  The plunger 21 is reciprocally mounted in the cylinder hole 15. The first pump chamber 23 is formed by the cylinder hole 15 and the plunger 21, and the pump chamber 23 is expanded and contracted by the reciprocating motion of the plunger 21. The contraction limit position of the plunger 21 is set by a position where the plunger 21 comes closest to the bottom surface of the first cylinder hole 15. The plunger 22 is reciprocally mounted in the cylinder hole 16. The second pump chamber 24 is formed by the cylinder hole 16 and the plunger 22, and the pump chamber 24 is expanded and contracted by the reciprocating motion of the plunger 22. The contraction limit position of the plunger 22 is set by a position where the plunger 22 comes closest to the bottom surface of the cylinder hole 16. FIGS. 1 and 2 show a state in which the plunger 22 is closest to the bottom surface of the cylinder hole 16.

  A slight gap is provided between the plunger 21 and the cylinder hole 15, and leakage of the liquid from the pump chamber 23 is prevented by the seal member 20. Similarly, leakage of liquid from the pump chamber 24 is prevented by the seal member 20.

  A first suction channel 25 is formed in the pump block 13, and the suction channel 25 opens at the lower end surface 14 c, which is an opening surface, and communicates with the pump chamber 23. A first discharge channel 26 is formed in the pump block 13, and the discharge channel 26 opens to the front surface 14 a serving as a valve mounting surface, and communicates with the pump chamber 23. As shown in FIG. 2, the discharge flow path 26 includes a communication part 26a as a first communication part and a discharge part 26b. The communication portion 26 a communicates with the pump chamber, is coaxial with the suction passage 25, and is perpendicular to the cylinder hole 15. The discharge portion 26b is parallel to the cylinder hole 15 and opens at the front surface 14a.

  A second suction passage 27 is formed in the pump block 13, and the suction passage 27 opens to the front surface 14 a serving as a mounting surface, and communicates with the pump chamber 24. A second discharge flow path 28 is formed in the pump block 13, and the discharge flow path 28 opens at an upper end surface 14 d which is an opening surface, and communicates with the pump chamber 24. As shown in FIG. 2, the suction passage 27 includes a communication portion 27a as a second communication portion and a suction portion 27b. The communication portion 27 a communicates with the pump chamber 24, is coaxial with the discharge passage 28, and is perpendicular to the cylinder hole 16. The suction portion 27b is parallel to the cylinder hole 16, and is open to the front surface 14a in parallel with the discharge portion 26b.

  The pump drive mechanism 17 includes a first motor 31 for reciprocating the plunger 21 as a pump member and a second motor 32 for reciprocating the plunger 22 as a pump member. A nut screw-coupled to the plunger 21 is incorporated in the pump drive mechanism 17, and the rotational movement of the main shaft of the motor 31 is converted into a linear reciprocating movement of the plunger 21 via the nut. Similarly, the rotational movement of the main shaft of the motor 32 is converted into a linear reciprocating movement of the plunger 22.

  When the plunger 21 is driven in a direction to expand the pump chamber 23 and the pump 18 performs a suction operation, the liquid is sucked from the suction channel 25 into the pump chamber 23. On the other hand, when the plunger 22 is driven in the direction of contracting the pump chamber 24 and the pump 19 performs the discharging operation, the liquid is discharged from the pump chamber 24 to the discharge channel 28.

  A flow passage opening / closing solenoid valve 33 as a flow passage opening / closing valve is mounted on the front surface 14a as a valve mounting surface. The passage opening / closing solenoid valve 33 shuts off the communication between the discharge passage 26 and the suction passage 27 when the pump 18 performs the suction operation and the pump 19 performs the discharge operation. Further, the passage opening / closing solenoid valve 33 connects the discharge passage 26 and the suction passage 27 when the pump 19 performs the suction operation and the pump 18 performs the discharge operation. As described above, the flow path opening / closing solenoid valve 33 is provided outside the pump block 13 and operates in an open state in which the discharge flow path 26 and the suction flow path 27 communicate with each other and a closed state in which the communication is cut off.

  When the pump 18 performs the discharge operation and the pump 19 performs the suction operation, the liquid is supplied from the pump chamber 23 to the pump chamber 24 via the passage opening / closing solenoid valve 33. Assuming that the rotation directions of the motors 31 and 32 when the respective pumps 18 and 19 perform the discharge operation are the forward rotation directions, the motors 31 and 32 are driven in the reverse rotation direction when performing the suction operation.

  As shown in FIG. 2, in the pump block 13, the diameter D1 of the cylinder hole 15 and the diameter D2 of the cylinder hole 16 are the same (D1 = D2), and the cross-sectional area of both the cylinder holes 15, 16 is the same. It is. The reciprocating stroke S1 of the plunger 21 is twice (S1 = 2S2) the reciprocating stroke S2 of the plunger 22, and the speed of the reciprocating motion of the plunger 21 is twice the speed of the reciprocating motion of the plunger 22. Is set to Therefore, the discharge flow rate of the pump 18 is twice the discharge flow rate of the pump 19.

  Accordingly, when the plunger 22 performs the suction operation and the plunger 21 performs the discharge operation, the liquid in the pump chamber 23 is supplied to the pump chamber 24 and discharged through the pump chamber 24 by the discharge operation of the plunger 21. 28. Since the liquid flowing through the discharge flow path 28 flows through the flow path from the lower end face to the upper end face of the pump block 13, even if the liquid contains bubbles, the bubbles do not stay in the flow path and Can be discharged outside.

  FIG. 4 is a cross-sectional view showing a main part of the flow passage opening / closing solenoid valve 33 shown in FIG.

  As shown in FIG. 4, the passage opening / closing solenoid valve 33 has a valve housing case 35 provided with a solenoid case 34, and a port plate 36 is attached to the valve housing case 35. The flow path opening / closing solenoid valve 33 has a valve drive unit 40 that opens and closes a valve member 45 based on a control signal from the outside to switch between an open state and a closed state. A movable iron core 37 serving as a valve drive unit 40 is mounted in the solenoid case 34 so as to be reciprocally movable in the axial direction. ing. A coil (not shown) is incorporated in the solenoid case 34, and when a drive current as a control signal is applied to the coil, the movable iron core 37 is driven in a backward direction against the spring force. As shown in FIG. 2, the port plate 36 is detachably attached to the front surface 14a of the pump block 13 by a screw member 39. A screw mounting hole 39 a to which the screw member 39 is mounted is formed in the port plate 36.

  As shown in FIG. 4, a swing arm 41 is disposed in the valve housing case 35, and the swing arm 41 extends in front of the movable core 37 in a direction crossing the movable core 37. The base end of the swing arm 41 is swingably supported by the valve housing case 35 by the support shaft 42. A valve drive lever 43 is disposed between the swing arm 41 and the port plate 36, and the valve drive lever 43 extends along the swing arm 41. A central portion in the longitudinal direction of the valve drive lever 43 is swingably supported in the valve housing case 35 by a support shaft 44, and the valve drive lever 43 swings about the support shaft 44.

  A valve member 45 made of rubber is provided on the valve drive lever 43, and a liquid flow path 46 is formed by the valve member 45 and the port plate 36. An inflow hole 47 and an outflow hole 48 are formed in the port plate 36, and the inflow hole 47 and the outflow hole 48 are communicated by the liquid flow path 46. The inflow hole 47 communicates with the first discharge channel 26, and the outflow hole 48 communicates with the second suction channel 27. An opening / closing portion 49 is provided in the valve member 45 corresponding to the outflow hole 48, and the opening / closing portion 49 opens and closes the outflow hole 48. A coil spring 51 is disposed between the base end of the valve drive lever 43 and one end of the valve drive lever 43, and the coil spring 51 applies a spring force in a direction in which the opening / closing section 49 opens the outflow hole 48 to the valve drive lever 43. Add.

  An operating section 52 is provided at the tip of the swing arm 41, and the operating section 52 is in contact with the other end of the valve drive lever 43. A force point portion 53 is provided at a central portion in the longitudinal direction of the swing arm 41, and the force point portion 53 protrudes toward the movable iron core 37, and a distal end surface of the movable iron core 37 is in contact with the force point portion 53. Since the movable core 37 is in contact with the central portion in the longitudinal direction of the swing arm 41, the swing stroke of the operating part 52 is larger than the axial stroke of the movable core 37, and the expanded swing of the operating part 52 is increased. The opening / closing section 49 is opened / closed by the stroke. Therefore, the opening / closing section 49 can open and close the outflow hole 48 at high speed while ensuring the communication opening degree between the liquid flow channel 46 and the outflow hole 48 by the small-sized channel opening / closing electromagnetic valve 33.

  FIG. 4A shows a state in which the opening / closing portion 49 closes the outflow hole 48 and cuts off the communication between the inflow hole 47 and the outflow hole 48 by the spring force of the coil spring 38, that is, a closed state. In FIG. 4B, a drive current is applied to the coil, the movable iron core 37 is driven backward, the opening / closing portion 49 is separated from the outlet hole 48 by the spring force of the coil spring 51, and the inlet hole 47 and the outlet hole 48 communicate with each other. In the open state.

  Since the flow passage opening / closing solenoid valve 33 is provided outside the pump block 13 without being incorporated therein, it is possible to easily remove the flow passage opening / closing solenoid valve 33 from the pump block 13 by loosening the screw member 39. It is possible to improve the maintainability such as inspection and replacement of the passage opening / closing solenoid valve 33.

  The suction control valve 54 is provided on the lower end surface 14c as a first opening surface. The suction control valve 54 shown in FIG. 1 is a check valve 54a on the suction side. As shown in FIG. 2, the check valve 54a has a valve case 55 attached to the lower end surface 14c, and a valve chamber 56 communicating with the first suction flow passage 25 is provided in the valve case 55. A suction port 57 is provided in the valve case 55, and a suction pipe 58 connected to the liquid container 11 is connected to the suction port 57. A valve body 59 made of a ball is provided in the valve chamber 56. The check valve 54a guides the liquid L contained in the liquid container 11 to the pump chamber 23 during the suction operation of the plunger 21, and the valve body 59 closes the valve chamber 56 to discharge the liquid L to the liquid container 11 during the discharge operation of the plunger 21. Prevents liquid backflow.

  The discharge control valve 61 is provided on the upper end surface 14d as an opening surface. The discharge control valve 61 shown in FIG. 1 is a check valve like the check valve 54a on the suction side. The discharge-side check valve 61a has a valve case 62 attached to the upper end surface 14d, and a valve chamber 63 communicating with the discharge passage 28 is provided in the valve case 62. A discharge port 64 is provided in the valve case 62, and a discharge pipe 65 connected to the applicator 12 for discharging a liquid is connected to the discharge port 64. A valve body 66 made of a ball is provided in the valve chamber 63. When the liquid supply device 10 is stopped, the check valve 61 a closes the valve chamber 63 by the valve body 66 and prevents liquid dripping from the applicator 12.

  As described above, the passage opening / closing solenoid valve 33 is attached to the outer surface of the pump block 13 without being incorporated inside the pump block 13, and the suction control valve 54 and the discharge control valve 61 are also mounted on the outer surface of the pump block 13. Attached to. Further, the two cylinder holes 15 and 16, the suction channel 25, the discharge channel 26, the suction channel 27 and the discharge channel 28 are provided in a single block member, the pump block 13. Is an integral type. Therefore, the pump block 13 has an integrated simple structure, and the cylinder block and the flow path are machined in the material of the block member, so that the pump block 13 can be easily manufactured without assembling a plurality of members. Can be. Although the suction flow channel 25 and the discharge flow channel 28 shown in FIG. 1 are provided coaxially, the communication portion 26a and the suction flow channel 25 are coaxial, and the communication portion 27a and the discharge flow channel 28 If they are coaxial, the suction channel 25 and the discharge channel 28 need not be coaxial.

  Further, the flow path opening / closing solenoid valve 33 is controlled to be opened and closed by a drive signal applied from the outside to a state in which the discharge flow path 26 and the suction flow path 27 are communicated and a state in which the communication is cut off. The timing at which the pump 23 communicates with the pump chamber 24 and the timing at which the communication is interrupted can be set by the drive signal.

  When the liquid supply device 10 is installed with the front surface 14a of the pump block 13 facing up and down, the valve body 59 of the suction control valve 54 and the valve body 66 of the discharge control valve 61 move up and down due to their own weight and the movement of the liquid L. It opens and closes in the direction. For this reason, if the passage opening / closing solenoid valve 33 is a check valve, a slight backflow of the liquid occurs at the start of the discharge operation of the second pump 19, and the discharge accuracy is reduced. On the other hand, since the flow passage opening / closing solenoid valve 33 opens and closes in response to an external signal, the second suction flow passage 27 can be closed from the start of the discharge operation of the pump 19, so that backflow can be prevented. As a result, the liquid can be ejected from the applicator 12 with high accuracy.

  In particular, when a liquid resin material is supplied from the applicator 12 to a mold, for example, about 1 cc, even a minute backflow greatly affects the ejection accuracy. If the passage opening / closing solenoid valve 33 is provided between the first discharge passage 26 and the second suction passage 27, a small amount of liquid can be supplied to the mold with high accuracy.

  FIG. 5 is a cross-sectional view illustrating a main part of a liquid supply device 10 according to a modification.

  As shown in FIG. 5, in the pump block 13, the cross-sectional area of the cylinder hole 15 is set to be twice the cross-sectional area of the cylinder hole 16. Therefore, by setting the reciprocating stroke S1 of the plunger 21 and the reciprocating stroke S2 of the plunger 22 to be the same, the discharge flow rate of the pump chamber 23 by the plunger 21 can be reduced in the same manner as the liquid supply device 10 shown in FIG. Is set to twice the discharge flow rate of the pump chamber 24 due to the above.

  FIG. 6 is a time chart showing a supply operation of the liquid L to the applicator 12 in the liquid supply device 10, that is, a liquid supply method.

  In the first discharging step, the pump 19 supplies the liquid L to the applicator 12 by a discharging operation. On the other hand, the pump 18 sucks the liquid L in the liquid container 11 into the pump chamber 23 by a suction operation. As shown in FIG. 4A, the flow path opening / closing solenoid valve 33 is turned off, that is, closed, and becomes a closed state. At this time, the suction control valve 54 and the discharge control valve 61 are open (ON).

  The amount of liquid sucked into the pump chamber 23 by the suction operation of the pump 18 is twice the amount of liquid discharged by the discharge operation of the pump 19. In the liquid supply device 10 shown in FIG. 1, the speed of the plunger 21 is twice that of the plunger 22, and in the liquid supply device 10 shown in FIG. 5, the speeds of the plunger 21 and the plunger 22 are the same. After the first ejection step has been performed for the predetermined time T1, the first pause step is performed for the pause time T0. In the first pause step, the driving of the pump 18 and the pump 19 is stopped.

  The passage opening / closing solenoid valve 33 is turned ON, that is, opened and switched to the open state after the elapse of the pause time T0.

  After the first pause step is performed, the second ejection step is performed. In the second discharge step, the pump 18 supplies the liquid L from the pump chamber 23 to the applicator 12 through the pump chamber 24 by a discharge operation. The pump 19 performs a suction operation and sucks a part of the liquid L supplied from the pump chamber 23 into the pump chamber 24. The flow path opening / closing solenoid valve 33 is turned on, that is, opened, as shown in FIG.

  After the second ejection step has been performed for the predetermined time T1, the second pause step is performed for the pause time T0. In the second pause step, the pumps 18 and 19 stop driving. The passage opening / closing solenoid valve 33 is turned off, that is, closed and switched to the closed state after the elapse of the suspension time T0. After the second pause step is performed, the first ejection step is performed again.

  As described above, when the pause time T0 is provided, an intermittent ejection mode in which liquid is intermittently supplied to the applicator 12 is provided. In the case of the intermittent ejection mode, the pause time T0 can be shorter than the ejection time T1. Therefore, the liquid supply device 10 having the flow path opening / closing solenoid valve 33 can perform intermittent ejection with a high tact and increase ejection accuracy.

  In the first pause step and the second pause step, the drive of the pump 18 and the pump 19 only needs to be stopped, and the opening / closing solenoid valve 33 is switched before the pause time T0 elapses. The drive of the pump 18 and the pump 19 may be restarted.

  FIG. 7 is a cross-sectional view illustrating a main part of a liquid supply device 10 according to another embodiment.

  As shown in FIG. 7, a spring member 60 is provided in the valve chamber 56 of the check valve 54a of the liquid supply device 10. The spring member 60 applies a spring force to the valve body 59 in a direction to close the suction port 57. Therefore, when the suction operation of the plunger 21 is stopped, the suction port 57 is closed by the spring force.

  In the liquid supply device 10 of FIG. 7, the above-described discharge control valve 61 is not provided. When the plunger 22 performs the suction operation, the liquid is discharged to the discharge flow path 28 by the discharge operation of the plunger 21, so that the discharge control valve 61 may not be provided. However, as described above, when the discharge control valve 61 is provided, the flow path between the pump chamber 24 and the applicator 12 can be shut off when the liquid supply device 10 is stopped. 12 can be prevented from dripping.

  Note that the suction control valve 54 and the discharge control valve 61 in the liquid supply device 10 shown in FIGS. 1 and 5 may be check valves provided with a spring member 60 similarly to the suction control valve 54 shown in FIG. Alternatively, the discharge control valve 61 may not be provided.

  FIG. 8 is a cross-sectional view showing a main part of a liquid supply device according to still another embodiment.

  As shown in FIG. 8, the port block 71 on the suction side is attached to the lower end surface 14c, which is the opening surface of the pump block 13, and the port block 72 on the discharge side is attached to the upper end surface 14d, which is the opening surface of the pump block 13. .

  The port block 71 has a discharge-side communication channel 73 that communicates with the suction channel 25, and a suction-side communication channel 74 that communicates with the suction port 57. Similarly, the suction pipe 58 is connected to the suction port 57. A suction side solenoid valve 54 b as the suction control valve 54 is attached to the port block 71. The solenoid valve 54b has the same structure as the passage opening / closing solenoid valve 33. The communication passage 74 communicates with the inflow hole of the solenoid valve 54b, and the communication passage 73 communicates with the outflow hole. The electromagnetic valve 54b communicates the communication passage 74 on the suction side with the communication passage 73 on the discharge side, and shuts off the open state in which the first suction passage 25 communicates with the suction port 57. The closed state is activated by an externally applied drive signal.

  The discharge-side port block 72 has a suction-side communication flow path 75 that communicates with the discharge flow path 28 and a discharge-side communication flow path 76 that communicates with the discharge port 64. Similarly to the device 10, the discharge pipe 65 is connected to the discharge port 64. A discharge-side electromagnetic valve 61 b as the discharge control valve 61 is attached to the port block 72. The solenoid valve 61b has the same structure as the passage opening / closing solenoid valve 33 and the solenoid valve 54b, and connects the suction-side communication passage 75 with the discharge-side communication passage 76 to form the second discharge passage 28. It operates in response to an externally applied drive signal between an open state in which communication is established with the discharge port 64 and a closed state in which communication is interrupted.

  As shown in FIG. 8, when the flow path opening / closing control valve 33, the solenoid valve 54 b on the suction side and the solenoid valve 61 b on the discharge side are arranged on the front surface 14 a side of the pump block 13, replacement of the respective solenoid valves is performed. Maintenance can be easily performed.

  In the liquid supply device 10 shown in FIG. 8, the suction control valve 54 and the discharge control valve 61 are solenoid valves, and in the liquid supply device 10 shown in FIG. 1, the suction control valve 54 and the discharge control valve 61 are reversed. It is a stop valve. On the other hand, in each of the liquid supply devices 10, one of the suction control valve 54 and the discharge control valve 61 may be an electromagnetic valve, and the other may be a check valve.

  FIG. 9 is a block diagram showing a control circuit of the liquid supply device 10 shown in FIG.

  As shown in FIG. 9, the passage opening / closing solenoid valve 33, the suction-side solenoid valve 54 b, and the discharge-side solenoid valve 61 b are respectively controlled to open and close by a control signal from the controller 77. The rotation of the motor 31 and the motor 32 is also controlled by a control signal from the controller 77. The operation panel 78 is connected to the controller 77, and the start of driving of the liquid supply device 10 and the like are input by an operation unit provided on the operation panel 78. The controller 77 includes a memory for storing a control program and the like, a microprocessor for calculating control signals for the respective solenoid valves, and the like. The control signals from the controller 77 control the driving of the first pump 18 and the second pump 19, as shown in the time chart of FIG.

  The drive of the liquid supply device 10 shown in FIG. 1 is controlled by a control circuit similar to that of FIG. 9 except for the solenoid valve 54b on the suction side and the solenoid valve 61b on the discharge side.

  FIG. 10 is a cross-sectional view showing a main part of a liquid supply device according to still another embodiment.

  As shown in FIG. 10, a suction port 57 and a discharge port 64 are provided in the front face 14a of the pump block 13 so as to open. A communication channel 74 on the suction side is provided in the pump block 13, and the communication channel 74 is connected to the liquid container 11 by a suction pipe 58 connected to the suction port 57. A communication channel 76 on the discharge side is provided in the pump block 13, and the communication channel 76 is connected to the applicator 12 by a discharge pipe 65 connected to the discharge port 64.

  A solenoid valve 54 b on the suction side as the suction control valve 54 is attached to the lower end surface 14 c of the pump block 13. The electromagnetic valve 54b has the same structure as the passage opening / closing electromagnetic valve 33, and is externally applied to an open state in which the suction passage 25 communicates with the suction port 57 and a closed state in which the communication is shut off. Operated by drive signal.

  A discharge-side solenoid valve 61 b as a discharge control valve 61 is attached to the upper end surface 14 d of the pump block 13. The electromagnetic valve 61b has the same structure as the flow path opening / closing electromagnetic valve 33, and is applied from the outside to an open state in which the discharge flow path 28 communicates with the discharge port 64 and a closed state in which the communication is shut off. Operated by drive signal.

  As shown in FIG. 10, a suction port 57, a discharge port 64, and communication channels 74 and 76 are provided in the pump block 13, and the suction channel 25 and the discharge channel 28 are connected to the liquid supply device 10 described above. In contrast to this, they are provided from the bottom side of the cylinder holes 15 and 16 to the opening side, respectively. Thus, even if the suction port 57 and the like are provided in the pump block 13, it is possible to avoid an increase in the size of the pump block 13 in the left-right direction in the drawing. The communication portions 26a and 27a are coaxial with the suction channel 25 and the discharge channel 28.

  The solenoid valves 54b, 61bd shown in FIG. 8 are attached to the pump block 13 via the port blocks 71, 72, whereas the solenoid valves 54b, 61bd shown in FIG. . Therefore, in the liquid supply device 10 shown in FIG. 10, the number of components can be reduced as compared with the liquid supply device 10 shown in FIG. The liquid supply device 10 is controlled by the control circuit shown in FIG.

  As shown in FIGS. 8 and 10, when the suction control valve 54 and the discharge control valve 61 are electromagnetic valves 54b and 61b, respectively, the flow of the liquid supply device 10 is controlled by opening all the electromagnetic valves. The liquid can be drained from the inside of the road. Further, when the inside of the flow path is cleaned with the cleaning liquid, the cleaning liquid can be made to flow backward. Thus, the type of liquid discharged by the liquid supply device 10 can be easily exchanged.

  The mounting mode of the solenoid valves as the suction control valve 54 and the discharge control valve 61 may be mounted on the pump block 13 via the port blocks 71 and 72 as shown in FIG. As described above, the pump block 13 may be directly attached.

  The present invention is not limited to the above embodiment, and can be variously modified without departing from the gist thereof. For example, at least one of the suction control valve 54 and the discharge control valve 61 may be a check valve or an electromagnetic valve. Further, the liquid supply device 10 shown in FIGS. 1, 8, and 10 may be configured such that the discharge control valve 61 is not provided, similarly to the liquid supply device 10 shown in FIG. Further, the control signal is not limited to the drive current, and a fluid such as compressed air may be used. In that case, the valve drive unit 40 can be an air-operated valve using a piston driven by fluid pressure. Further, the liquid may be continuously discharged to the applicator 12 without using the intermittent discharge mode in which the pause time T0 is provided.

Reference Signs List 10 Liquid supply device 13 Pump block 15, 16 Cylinder hole 18, 19 Pump 21, 22 Plunger 23, 24 Pump chamber 25 Suction passage 26 Discharge passage 27 Suction passage 28 Discharge passage 33 Flow passage opening / closing solenoid valve 37 Moving core 41 swing arm 42 support shaft 43 valve drive lever 44 support shaft 47 inlet hole 48 outlet hole 49 opening / closing part 52 operating part 53 force point part 54 suction point control valve 54a check valve 54b solenoid valve 55 valve case 56 valve chamber 57 suction port 59 Valve element 61 Discharge control valve 61a Check valve 61b Solenoid valve 62 Valve case 64 Discharge port 66 Valve element 71, 72 Port block 73-76 Communication channel

Claims (15)

A first pump chamber communicating with the first suction flow path and the first discharge flow path, a second pump chamber communicating with the second suction flow path and the second discharge flow path, An integrated pump block formed with a discharge passage and a valve mounting surface on which the second suction passage is opened;
A first pump that performs a suction operation of sucking liquid from the first suction channel into the first pump chamber and a discharge operation of discharging liquid from the first pump chamber to the first discharge channel. When,
A second pump that performs a suction operation of sucking liquid from the second suction passage into the second pump chamber and a discharge operation of discharging liquid from the second pump chamber to the second discharge passage. When,
A closed state which is provided outside the pump block and interrupts communication between the first discharge flow path and the second suction flow path, and wherein the first discharge flow path and the second suction flow path A valve drive unit that switches between an open state and a closed state based on an external control signal, and a flow path on-off valve attached to the valve attachment surface,
The flow path opening / closing valve is in the closed state when the first pump performs a suction operation and the second pump performs a discharge operation, and the second pump performs a suction operation and the first pump performs a discharge operation. A liquid supply device that is sometimes in the open state and guides the liquid to the second discharge channel. The liquid supply device according to claim 1,
The flow path on-off valve is a solenoid valve. Liquid supply device. The liquid supply device according to claim 1 or 2,
A suction control valve that guides the liquid contained in the liquid container to the first pump chamber during the suction operation of the first pump, and prevents the liquid from flowing back into the liquid container during the discharge operation of the first pump; A liquid supply device having: The liquid supply device according to claim 3,
A liquid supply device having a discharge control valve in the second discharge flow path.   The liquid supply device according to claim 4, wherein at least one of the suction control valve and the discharge control valve is a check valve.   The liquid supply device according to claim 4, wherein at least one of the suction control valve and the discharge control valve is a solenoid valve.   7. The liquid supply device according to claim 6, further comprising a communication-side flow path communicating with the first suction flow path, and a suction-side port block provided with a suction port connected to the liquid container, wherein The liquid supply device, wherein the suction control valve is attached to the port block on the suction side and opens and closes in a state in which the suction port communicates with the first suction flow path and a state in which the communication is cut off.   7. The liquid supply device according to claim 6, further comprising a communication channel communicating with the second discharge channel, and a discharge-side port block provided with a discharge port connected to an applicator, and comprising the electromagnetic valve. The liquid supply device, wherein the discharge control valve is attached to the discharge-side port block, and opens and closes in a state in which the discharge port communicates with the second discharge flow path and a state in which the communication is cut off.   7. The liquid supply device according to claim 6, wherein a suction port connected to the liquid container is provided in the pump block, the suction control valve including the electromagnetic valve is mounted on the pump block, and the suction port and the second port are connected to the pump block. A liquid supply device that opens and closes between a state in which communication with the first suction flow path is established and a state in which communication is interrupted.   7. The liquid supply device according to claim 6, wherein a discharge port connected to an applicator is provided in the pump block, the discharge control valve including the electromagnetic valve is mounted on the pump block, and the discharge port and the second port are connected to the pump block. A liquid supply device that opens and closes between a state in which communication with the discharge flow path is established and a state in which communication is interrupted.   The liquid supply device according to any one of claims 1 to 10, wherein the first discharge flow path communicates with the first pump chamber and is coaxial with the first suction flow path. A first communication portion and a discharge portion opened to the valve mounting surface, and the second suction flow path is a second communication communicating with the suction portion opened to the valve mounting surface and the second pump chamber. Liquid supply device having a part.   The liquid supply device according to any one of claims 1 to 11, wherein the pump block is perpendicular to the valve mounting surface, and has a first opening surface on which the first suction flow path opens, and the valve. A liquid supply device having a second opening surface perpendicular to the mounting surface, wherein the second discharge flow path is open and parallel to the first opening surface.   13. The liquid supply device according to claim 11, wherein the first suction flow path and the second discharge flow path are coaxial.   14. The liquid supply device according to claim 1, wherein a discharge flow rate of the first pump is twice as large as a discharge flow rate of the second pump. A first pump chamber communicating with the first suction flow path and the first discharge flow path and a second pump chamber communicating with the second suction flow path and the second discharge flow path are formed. A body-shaped pump block,
A first pump that performs a suction operation of sucking liquid from the first suction channel into the first pump chamber and a discharge operation of discharging liquid from the first pump chamber to the first discharge channel. When,
A second pump that performs a suction operation of sucking liquid from the second suction passage into the second pump chamber and a discharge operation of discharging liquid from the second pump chamber to the second discharge passage. When,
A closed state which is provided outside the pump block and interrupts communication between the first discharge flow path and the second suction flow path, and wherein the first discharge flow path and the second suction flow path A flow path opening and closing valve having a valve drive unit that switches between an open state and a closed state based on an external control signal.
A first discharge step in which the first pump performs a suction operation and the second pump performs a discharge operation while the flow path on-off valve is closed;
A first pause step of stopping the first pump and the second pump and switching the flow path on-off valve from the closed state to the open state;
A second discharge step in which the flow path on-off valve is opened, the first pump performs a discharge operation, and the second pump performs a suction operation,
A liquid supply method, comprising: stopping the first pump and the second pump, and switching the flow path on-off valve from an open state to the closed state.

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