JP5331547B2 - Liquid discharge pump unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pump unit for delivering liquid increasing accuracy of a delivery quantity of liquid without requiring to provide a shut-off valve at a downstream side of a pump chamber, and to accurately control timing for closing the unit. <P>SOLUTION: The pump unit for delivering liquid pressurizes an electrolyte in the pump chamber 11 by a drive member 13 driven in such a manner that volume of the pump chamber 11 is changed, and delivers the electrolyte from the delivery passage 62 communicating with the pump chamber 11 prescribed quantity by prescribed quantity. In the pump unit, the drive member 13 shuts off communication between the pump chamber 11 and the delivery passage 62 when the pressurization of the electrolyte by the drive member 13 is completed. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a pump unit that discharges liquid by a predetermined amount.

  Examples of this type of pump unit include the following.

  That is, there is one in which a chemical liquid in a pump chamber is pressurized and discharged by a diaphragm, and a timing at which a shut-off valve on the downstream side of the pump chamber is closed is controlled by a controller (see, for example, Patent Document 1).

  Further, the chemical liquid in the pump chamber is pressurized and discharged by extending the bellows disposed in the pump chamber, and the pressure of the chemical liquid in the pump chamber when the chemical liquid is discharged, and the timing for closing the shut-off valve on the downstream side of the pump chamber Is controlled by a controller (see, for example, Patent Document 2).

  Further, a bendable valve membrane body is connected to a piston provided so as to face the pump chamber, and the chemical solution in the pump chamber is pressurized by the valve membrane body as the piston moves, and the chemical solution is discharged via the check valve. There are some (see, for example, Patent Document 3).

JP 2006-77712 A JP 2007-51563 A JP 2004-143960 A

  By the way, the thing of patent documents 1-3 pressurizes and discharges the chemical | medical solution in a pump chamber by driving drive members, such as a valve membrane body connected with the diaphragm, bellows, and a piston. When the driving member stops driving in one discharge of the chemical solution, that is, when the pressurization of the chemical solution by the driving member is finished, the pressurized chemical solution in the pump chamber continuously flows out to the discharge passage. It has become.

  For this reason, in order to improve the precision of the discharge amount at the time of discharging a predetermined amount of chemical liquid, the devices described in Patent Documents 1 to 3 need to satisfy the following requirements. That is, in the thing of patent document 1, 2, it is necessary to control precisely the timing which closes the shut-off valve downstream from a pump chamber by a controller. Moreover, in the thing of patent document 3, since the discharge amount of a chemical | medical solution changes with the continuation degree of the state which the pressurized chemical | medical solution in a pump chamber flows out into a discharge channel, the chemical | medical solution discharged via a check valve of The amount becomes unstable. For this reason, in the thing of patent document 3, it is necessary to provide a shut-off valve downstream from the pump chamber and precisely control the closing timing.

  The present invention has been made in view of such circumstances, and it is necessary to provide a shutoff valve on the downstream side of the pump chamber and to precisely control the closing timing thereof without increasing the accuracy of the liquid discharge amount. The main object is to provide a liquid discharge pump unit that can be improved.

  In order to solve the above-mentioned problem, the first invention is to pressurize the liquid in the pump chamber by a driving member driven so as to change the volume of the pump chamber, and from the discharge passage communicating with the pump chamber, the liquid The liquid discharge pump unit discharges the liquid by a predetermined amount, and the drive member cuts off the communication between the pump chamber and the discharge passage when the pressurization of the liquid by the drive member is finished. And

  According to the above configuration, the drive member is driven so as to change the volume of the pump chamber, and the liquid in the pump chamber is pressurized by the drive member. The pressurized liquid is discharged by a predetermined amount from the discharge passage communicating with the pump chamber.

  Here, in a state where the pressurization of the liquid by the drive member is completed, the drive member blocks the communication between the pump chamber and the discharge passage. The outflow of liquid into the discharge passage stops. For this reason, the amount of liquid discharged from the pump chamber to the discharge passage can be stabilized at a constant amount. In other words, it is possible to prevent the liquid in the pump chamber from continuously flowing out to the discharge passage after the pressurization of the liquid by the driving member is completed. As a result, it is possible to improve the accuracy of the liquid discharge amount without requiring a shut-off valve downstream of the pump chamber and precisely controlling the closing timing.

  According to a second aspect of the present invention, there is provided a liquid discharge device that pressurizes the liquid in the pump chamber by a driving member that is driven so as to change the volume of the pump chamber, and discharges the liquid by a predetermined amount from a discharge passage that communicates with the pump chamber. The pump unit is characterized in that pressurization of the liquid by the drive member is terminated when the drive member blocks communication between the pump chamber and the discharge passage.

  According to the above configuration, since the driving member shuts off the communication between the pump chamber and the discharge passage, the pressurization of the liquid by the driving member is terminated. The interruption of communication is the end of pressurization of the liquid by the driving member. For this reason, according to the second aspect of the invention, the amount of liquid discharged from the pump chamber to the discharge passage can be stabilized at a constant amount.

  Specifically, as in the third invention, in the first or second invention, a valve seat is provided in the liquid flow path including the pump chamber and the discharge passage, and a valve body is provided in the drive member. It is possible to employ a configuration in which the driving member blocks communication between the pump chamber and the discharge passage when the valve body is in contact with the valve seat.

  According to the above configuration, the pump has a function as a shut-off valve by providing the valve seat portion in the liquid flow path and providing the valve body portion in the drive member with respect to the basic configuration of the liquid discharge pump. Thus, the accuracy of the liquid discharge amount can be improved.

  More specifically, as in the fourth invention, in the third invention, the valve seat portion is extended in a direction driven when the driving member pressurizes the liquid in the pump chamber in the flow path. It is possible to employ a configuration in which the valve body portion is provided on a portion of the drive member facing the valve seat portion.

  According to a fifth invention, in any one of the first to fourth inventions, an urging means is provided to urge the drive member so that the liquid in the pump chamber is pressurized by the drive member. The member is urged by the urging means to cut off communication between the pump chamber and the discharge passage, so that the pressure of the liquid in the pump chamber and the pump chamber are increased by urging the driving member by the urging means. The communication with the discharge passage is shut off. Here, when the driving member is urged by the urging means, the communication between the pump chamber and the discharge passage is the same every time as compared with the case where the driving member is driven based on the operating pressure or the driving of the motor. It becomes easy to operate the drive member until the is cut off. As a result, the amount of liquid discharged from the pump chamber to the discharge passage can be further stabilized at a constant amount.

  According to a sixth invention, in any one of the first to fifth inventions, the drive is performed so as to increase the volume of the pump chamber from a state where the drive member blocks the communication between the pump chamber and the discharge passage. Since the liquid is sucked into the pump chamber from the suction passage communicating with the pump chamber by driving the member, the suction of the liquid is started from the state where the liquid does not flow in and out between the pump chamber and the discharge passage. be able to. Therefore, it is easy to make the state in the pump chamber the same every time when the liquid suction is started, compared to the case where the liquid suction is started from the state where the communication between the pump chamber and the discharge passage is not blocked. It becomes. For this reason, the amount of liquid sucked into the pump chamber can be stabilized at a constant amount. As a result, the amount of liquid discharged from the pump chamber to the discharge passage can be stabilized at a constant amount.

  Specifically, as in the seventh invention, in any one of the first to sixth inventions, when the liquid is sucked into the pump chamber, the suction passage communicating with the pump chamber is opened, and the A suction-side on-off valve that closes the suction passage when the liquid is discharged from the pump chamber, and closes the discharge passage when the liquid is sucked into the pump chamber and discharges the liquid from the pump chamber. A configuration including a discharge-side on-off valve that opens the discharge passage may be employed.

The schematic diagram which shows the circuit of a pump system. Sectional drawing which shows the discharge state of a pump unit. Sectional drawing which shows the suction state of a pump unit. The time chart which shows operation | movement of a pump system. The schematic diagram which shows the modification of the circuit of a pump system. The schematic diagram which shows the other modification about the circuit of a pump system.

  Hereinafter, an embodiment embodied in a pump system that discharges a predetermined amount of liquid such as an electrolyte used in a battery will be described with reference to the drawings.

  As shown in FIG. 1, this pump system includes a liquid circulation system (pump unit) including a suction passage 61, a pump 10, a discharge passage 62, and the like, a branch passage 71 (branch passages 71a, 71b, 71c), a collecting passage. 72, a working gas flow system including an air supply passage 73 and the like, and a pump unit control system including a timer 50.

  The liquid flow system (pump unit) includes a pump 10 that sucks and discharges electrolyte as a liquid, a suction passage 61 that communicates with the pump chamber 11 of the pump 10, and a suction-side valve 20 that opens and closes the suction passage 61 ( A suction side opening / closing valve), a discharge passage 62 communicating with the pump chamber 11 of the pump 10, and a discharge side valve 30 (discharge side opening / closing valve) for opening and closing the discharge passage 62. The liquid discharged from the pump unit is not limited to the electrolytic solution, and a resist used in a semiconductor manufacturing process or the like can also be used.

  An overview of the pump 10, the suction side valve 20, and the discharge side valve 30 will be described with reference to FIG. 1 and FIG. 2 or FIG. 2 shows a state in which the pump unit discharges the electrolytic solution, and FIG. 3 shows a state in which the pump unit sucks the electrolytic solution.

  The pump 10 sucks the electrolytic solution from the suction passage 61 into the pump chamber 11 based on the supply of the working air as the working gas, and discharges the electrolytic solution from the pump chamber 11 to the discharge passage 62 based on the discharge of the working air. . Specifically, when the working air is supplied to the working chamber 12, the driving member 13 is driven to expand the volume of the pump chamber 11, and the electrolyte is sucked into the pump chamber 11 from the suction passage 61. On the other hand, when the working air is discharged from the working chamber 12, the driving member 13 is driven to reduce the volume of the pump chamber 11, and the electrolytic solution is discharged from the pump chamber 11 to the discharge passage 62. Here, the driving member 13 includes a spring 14a, a piston 14b, and the like so as to pressurize the electrolyte in the pump chamber 11, that is, to discharge the electrolyte from the pump chamber 11 to the discharge passage 62. It is energized by (energizing means). As shown in FIG. 3, when the electrolyte is sucked, the working air is supplied to the working chamber 12 through the operation port 15, and the piston 14 b connected to the driving member 13 expands the volume of the working chamber 12. While being driven against the urging force, air in the spring chamber 18 is discharged through the exhaust port 17. As shown in FIG. 2, when discharging the electrolytic solution, the working air is discharged from the working chamber 12 through the operation port 15, and the piston 14 b connected to the driving member 13 reduces the volume of the working chamber 12. Driven by the urging force, air is sucked into the spring chamber 18 through the exhaust port 17.

  The suction side valve 20 is a normally closed air-operated valve that opens the suction passage 61 based on the supply of working air and closes the suction passage 61 based on the discharge of the working air. Specifically, when the working air is supplied to the working chamber 22, the valve body 23 is driven to open the suction passage 61, and when the working air is discharged from the working chamber 22, the valve body 23 is sucked. It is driven to close the passage 61. Here, the valve body 23 is urged by an urging portion 24 including a spring 24a, a piston 24b, and the like so as to close the suction passage 61. As shown in FIG. 3, when the suction side valve 20 is opened, the working air is supplied to the working chamber 22 through the operation port 25, and the piston 24 b connected to the valve body 23 expands the volume of the working chamber 22. While being driven against the urging force of the spring 24 a, the air in the spring chamber 28 is discharged through the exhaust port 27. As shown in FIG. 2, when the suction side valve 20 is closed, the working air is discharged from the working chamber 22 through the operation port 25, and the piston 24 b connected to the valve body 23 reduces the volume of the working chamber 22. Driven by the urging force of the spring 24 a, air is sucked into the spring chamber 28 through the exhaust port 27.

  The discharge side valve 30 is a normally open type air operated valve that closes the discharge passage 62 based on supply of working air and opens the discharge passage 62 based on discharge of working air. Specifically, when the working air is supplied to the working chamber 32, the valve body 33 is driven to close the discharge passage 62, and when the working air is discharged from the working chamber 32, the valve body 33 is discharged. Driven to open passage 62. Here, the valve body 33 is urged by an urging portion 34 including a spring 34a, a piston 34b, and the like so as to open the discharge passage 62. As shown in FIG. 3, when the discharge side valve 30 is closed, the working air is supplied to the working chamber 32 through the operation port 35, and the piston 34 b connected to the valve body 33 expands the volume of the working chamber 32. While being driven against the urging force of the spring 34 a, the air in the spring chamber 38 is discharged through the exhaust port 37. As shown in FIG. 2, when the discharge valve 30 is opened, the working air is discharged from the working chamber 32 through the operation port 35, and the piston 34 b connected to the valve body 33 reduces the volume of the working chamber 32. Driven by the biasing force of the spring 34 a, air is sucked into the spring chamber 38 through the exhaust port 37.

  As shown in FIG. 1, the working gas flow system includes branch passages 71 (branch passages 71a, 71b, 71c) connected to the pump 10, the suction side valve 20 and the discharge side valve 30, respectively, and these branch passages. It includes a collecting passage 72 in which 71a, 71b, 71c are gathered, an air supply passage 73 to which working air is supplied, and an electromagnetic valve 40 (switching means) for switching the supply and discharge of the working air in the collecting passage 72. Note that the working gas is not limited to air, and nitrogen or the like may be employed.

  The branch passages 71a, 71b, 71c supply the working air supplied from the collecting passage 72 to the pump 10, the suction side valve 20 and the discharge side valve 30, respectively, and from the pump 10, the suction side valve 20 and the discharge side valve 30, respectively. The exhausted working air is discharged to the collecting passage 72. Specifically, the branch passages 71a, 71b, 71c are connected to the operation ports 15, 25, 35 (see FIGS. 2 and 3) of the pump 10, the suction side valve 20, and the discharge side valve 30, respectively. The operation is performed between the branch passages 71a, 71b, 71c and the operation chambers 12, 22, 32 of the pump 10, the suction side valve 20, and the discharge side valve 30 through the operation ports 15, 25, 35. Air is supplied and discharged.

  The branch passage 71a is provided with a variable throttle portion 81 (throttle portion) that adjusts the flow rate of the working air flowing through the branch passage 71a and a bypass passage 82 that bypasses the variable throttle portion 81. The bypass passage 82 is provided with a check valve 83 (a check valve) that allows operating air to flow only from the pump 10 toward the collecting passage 72.

  For this reason, when working air is supplied from the collecting passage 72 toward the pump 10, the working air cannot pass through the check valve 83, and the working air is supplied to the pump 10 through the variable restrictor 81. . Accordingly, the flow rate of the working air supplied to the pump 10 through the branch passage 71a is smaller than the flow rates of the working air supplied to the suction side valve 20 and the discharge side valve 30 through the branch passages 71b and 71c, respectively. In this case, the flow rate of the working air supplied through the branch passage 71a can be adjusted by the variable throttle 81. On the other hand, when the working air is discharged from the pump 10 toward the collecting passage 72, the working air can pass through the check valve 83. For this reason, the flow rate of the working air discharged from the pump 10 through the branch passage 71a is larger than the flow rate of the working air supplied to the pump 10 through the branch passage 71a.

  The collecting passage 72 is connected to an electromagnetic valve 40 that switches between a state in which the collecting passage 72 is opened to the atmosphere and a state in which the collecting passage 72 is connected to the air supply passage 73. The supply air 73 is supplied with working air adjusted to a set pressure by an electropneumatic regulator or the like. The electromagnetic valve 40 is a two-position, three-port type electromagnetic switching valve. One port is connected to the collecting passage 72, one of the remaining two ports is opened to the atmosphere, and the other is connected to the air supply passage 73. It is connected. When the drive signal is input, the solenoid valve 40 connects the collecting passage 72 to the air supply passage 73 and switches to a supply state in which operating air is supplied from the air supply passage 73 to the collecting passage 72. On the other hand, when the drive signal is not input, the solenoid valve 40 opens the collecting passage 72 to the atmosphere and switches to a discharge state in which the working air is discharged from the collecting passage 72 to the atmosphere.

  The control system of the pump unit includes a timer 50 as control means for controlling the switching state of the electromagnetic valve 40. The timer 50 transmits a drive signal to the electromagnetic valve 40 based on the elapsed time, and causes the electromagnetic valve 40 to switch between the supply state and the discharge state. As a result, the operating states of the pump 10, the suction side valve 20, and the discharge side valve 30 are changed, and the suction and discharge of the electrolytic solution by the pump 10 are performed. Note that the controller is not limited to the timer 50, and a controller including a microcomputer or the like can also be employed.

  Next, the configuration of the pump 10 will be described in detail with reference to FIGS. 2 shows a state where the pump unit discharges the electrolytic solution and the communication between the pump chamber 11 and the discharge passage 62 is cut off, and FIG. 3 shows a state where the pump unit sucks the electrolytic solution.

  The pump 10 includes a pump housing 41 provided with an electrolyte flow path, the drive member 13 having a flexible portion 13a made of a diaphragm, a cylinder body 42 connected to the pump housing 41, and an inside of the cylinder body 42. The piston 14b that slides, the spring 14a that biases the piston 14b, the cover 43 that is connected to the cylinder body 42, the operation unit 44 that adjusts the sliding range of the piston 14b, and the operation unit 44 are fixed. And a fixing portion 45 to be provided. The pump housing 41 and the drive member 13 are made of a material having high chemical resistance such as PTFE.

  In the present embodiment, the drive member 13 blocks communication between the pump chamber 11 and the discharge passage 62 in a state where the pressurization of the electrolytic solution by the drive member 13 is completed. For this reason, the outflow of the electrolytic solution from the pump chamber 11 to the discharge passage 62 stops with the end of pressurization of the electrolytic solution by the driving member 13. In other words, when the drive member 13 blocks communication between the pump chamber 11 and the discharge passage 62, pressurization of the electrolyte solution by the drive member 13 is terminated. The suction passage 61 communicating with the pump chamber 11 is driven by driving the drive member 13 so as to increase the volume of the pump chamber 11 from the state where the communication between the pump chamber 11 and the discharge passage 62 is blocked by the drive member 13. Then, the electrolytic solution is sucked into the pump chamber 11. For this reason, the suction of the electrolytic solution can be started from the state where the electrolytic solution does not flow in and out between the pump chamber 11 and the discharge passage 62. In short, in the present embodiment, the liquid discharge pump 10 has a function as a shutoff valve.

  The pump housing 41 is provided with a pump chamber 11 and a suction passage 61 and a discharge passage 62 respectively communicating with the pump chamber 11 as a flow path for the electrolytic solution. A valve seat 41a is provided in the flow path of the electrolytic solution. When the driving member 13 comes into contact with the valve seat portion 41a, the communication between the pump chamber 11 and the discharge passage 62 is blocked, that is, the flow path of the electrolytic solution is closed and the flow of the electrolytic solution is blocked. . The valve seat portion 41a is provided on an extension in a direction in which the driving member 13 is driven when pressurizing the electrolyte solution in the pump chamber 11 in the flow path. The valve body part 13b is provided in the part which opposes.

  Specifically, the valve seat 41a of the pump housing 41 is formed in an annular protrusion, and the inner peripheral side of the annular protrusion is a flow path for the electrolyte. The valve body portion 13b of the drive member 13 is in contact with the annular protrusion over the entire circumference, whereby the flow of the electrolyte solution between the valve seat portion 41a and the valve body portion 13b is blocked, and the flow path of the electrolyte solution Is closed. The valve body portion 13b is provided with a surface portion that comes into contact with the valve seat portion 41a.

  Further, in the state where the driving member 13 is in contact with the valve seat 41a, that is, in the state where the pump 10 discharges the electrolytic solution, the flow path of the electrolytic solution is the shape of the driving member 13 in order to reduce the volume of the pump chamber 11. It is a shape along. More specifically, the wall surface 41b of the flow path is approached along the shape of the convex portion 13c provided on the valve body portion 13b. For this reason, the applied pressure of the electrolyte solution by the drive member 13 can be improved.

  The cylinder body 42 is fixed to the pump housing 41 with the periphery of the flexible portion 13a of the drive member 13 interposed therebetween. Sliding portions 42a and 42b provided on the cylinder body 42 and a sliding portion 43a provided on the cover 43 slide with the piston 14b, respectively. For this reason, the reciprocating motion of the piston 14b is guided by these sliding portions 42a, 42b, 43a. The piston 14b has a flange 14c, and the gap between the flange 14c and the sliding portion 42a is sealed by a seal member 14d. The flange 14c of the piston 14b is biased toward the pump chamber 11 by the spring 14a, and the drive member 13 connected to the piston 14b is biased toward the valve seat 41a. Here, the urging force of the spring 14a is set so that the flow of the electrolyte from the pump chamber 11 to the discharge passage 62 is blocked in a state where the drive member 13 is in contact with the valve seat portion 41a. Then, when the drive member 13 is biased by the spring 14a, the pump chamber 11 and the discharge passage 62 are the same each time as compared with the case where the drive member 13 is driven based on the operation pressure or the drive of the motor. It becomes easy to operate the drive member 13 until the communication is cut off. The cylinder body 42 is provided with the operation port 15 and the exhaust port 17.

  The operation unit 44 adjusts the sliding range of the piston 14b connected to the driving member 13, that is, the moving range of the driving member 13 connected to the piston 14b, and the driving direction of the piston 14b when the electrolyte is sucked. It is provided on the extension. The distance between the operation unit 44 and the piston 14b is changed by the movement of the operation unit 44 provided in the cover 43 so as to be able to advance and retreat, and the piston 14b and the drive member 13 coupled thereto are moved until the operation unit 44 comes into contact. Driven. For this reason, the volume of the pump chamber 11 when the electrolyte solution is sucked can be changed by adjusting the operation unit 44, and the amount of the electrolyte solution sucked in one suction can be adjusted. The fixing unit 45 fixes the operation unit 44 so that the amount of electrolyte sucked by the pump 10 does not change.

  In the pump system having such a configuration, in order to improve the accuracy of the suction amount and discharge amount of the electrolytic solution, the timing at which the pump 10 starts to suck and discharge the electrolytic solution, the timing at which the suction side valve 20 is opened and closed, It is necessary to appropriately set the timing for opening and closing the discharge side valve 30.

  Therefore, in the present embodiment, when the solenoid valve 40 switches to a supply state in which operating air is supplied to the collecting passage 72, the suction side valve 20 is opened after the discharge side valve 30 is closed, and then the suction passage. The flow rate of the working air supplied to the pump 10, the suction side valve 20 and the discharge side valve 30 and the urging forces of the springs 14a, 24a and 34a are set so that the electrolyte is sucked into the pump chamber 11 from 61. ing. Further, when the solenoid valve 40 switches to a discharge state in which the working air is discharged from the collecting passage 72, the discharge side valve 30 is opened after the suction side valve 20 is closed, and then the discharge passage 62 from the pump chamber 11 is opened. The flow rate of the working air discharged from the pump 10, the suction side valve 20 and the discharge side valve 30 and the urging force of each of the springs 14a, 24a, 34a are set so that the electrolyte solution is discharged. Specifically, as described above, the variable throttle 81 is provided in the branch passage 71a connected to the pump 10, and the biasing force of the spring 24a of the suction side valve 20 is applied to the spring 34a of the discharge side valve 30. It is set larger than the urging force.

  Next, the operation of the pump system set in this way will be described with reference to the time chart of FIG.

  As shown in FIG. 4, at time t <b> 0, the solenoid valve 40 is in a discharge state in which the working air is discharged from the collecting passage 72, and the suction side valve 20, the pump 10, and the discharge side are passed through the branch passage 71 and the collecting passage 72. The working air is discharged from each working chamber 22, 12, 32 of the valve 30. Therefore, the normally closed suction side valve 20 is closed, and the normally open discharge side valve 30 is opened. Since the pump 10 also has a function as a normally closed shut-off valve, the flow path is closed in a state where the volume of the pump chamber 11 is reduced and the electrolytic solution is discharged to the discharge passage 62.

  At time t1, when the timer 50 transmits a drive signal and the solenoid valve 40 is switched to a supply state in which the working air is supplied to the collecting passage 72, the pump 10 passes through the branch passages 71 (branch passages 71a, 71b, 71c). , Operating air is supplied to the suction side valve 20 and the discharge side valve 30. Since the biasing force of the spring 34a of the discharge side valve 30 is set to be smaller than the biasing force of the spring 24a of the suction side valve 20, the time t3 after the discharge side valve 30 is closed at time t2. The suction side valve 20 is opened. Since the working air is supplied to the pump 10 through the variable restrictor 81, the volume of the pump chamber 11 of the pump 10 starts to increase at the subsequent time t4, and the suction of the electrolytic solution is started.

  From time t4 to time t5, the volume of the pump chamber 11 is gradually expanded by supplying the working air to the pump 10 through the variable throttle 81, and the volume of the pump chamber 11 becomes maximum at time t5, and then this time until time t6. State is maintained. For this reason, the suction of the electrolyte solution by the pump 10 is performed at a low speed, and the accuracy of the suction amount can be improved. In addition, by adjusting the size of the cross-sectional area of the branch passage 71a by the variable throttle 81, the time t4 when the pump 10 starts to suck the electrolyte and the operation period during which the pump 10 sucks the electrolyte (time t4 to t4). The time t5) can be adjusted.

  At time t6, when the timer 50 stops transmitting the drive signal and the solenoid valve 40 is switched to a discharge state in which the working air is discharged from the collecting passage 72, the branch passage 71 (branch passages 71a, 71b, 71c) is used. Operating air is discharged from the pump 10, the suction side valve 20, and the discharge side valve 30. Since the biasing force of the spring 24a of the suction side valve 20 is set larger than the biasing force of the spring 34a of the discharge side valve 30, the time t8 is reached after the suction side valve 20 is closed at time t7. The discharge side valve 30 is opened. The working air is discharged from the pump 10 through the bypass passage 82, but at the subsequent time t <b> 9 according to the settings of the springs 14 a, 24 a, 34 a of the pump 10, the suction side valve 20 and the discharge side valve 30, The volume of the chamber 11 begins to decrease, and the discharge of the electrolyte starts. Note that the flow rate of the working air discharged from the pump 10, the suction side valve 20 and the discharge side valve 30, that is, the working air supplied per unit time, by setting the size of the cross-sectional area of the branch passages 71a, 71b, 71c. It is also possible to set the order of these operations by adjusting the mass or volume.

  From time t9 to time t10, the discharge of the working air from the pump 10 through the bypass passage 82 reduces the volume of the pump chamber 11 in an operation period (time t9 to time t10) shorter than that at the time of suction. The volume of the chamber 11 is minimized and the discharge of the electrolytic solution is completed. At this time, the drive member 13 blocks communication between the pump chamber 11 and the discharge passage 62. Since the drive member 13 blocks the communication between the pump chamber 11 and the discharge passage 62, the discharge-side valve 30 is open without having to close the discharge passage 62. Thus, one suction and discharge are completed in the pump system. Thereafter, the timer 50 repeats the same operation.

  The embodiment described above has the following advantages.

  The drive member 13 is driven so as to change the volume of the pump chamber 11, and the electrolyte in the pump chamber 11 is pressurized by the drive member 13. The pressurized electrolyte solution is discharged from the discharge passage 62 communicating with the pump chamber 11 by a predetermined amount.

  Here, in a state where the pressurization of the electrolyte solution by the drive member 13 is completed, the drive member 13 blocks communication between the pump chamber 11 and the discharge passage 62, so that the pump is simultaneously with the pressurization of the electrolyte solution by the drive member 13. The outflow of the electrolyte from the chamber 11 to the discharge passage 62 stops. For this reason, the amount of the electrolyte discharged from the pump chamber 11 to the discharge passage 62 can be stabilized at a constant amount. In other words, it is possible to suppress the electrolyte in the pump chamber 11 from continuously flowing out to the discharge passage 62 after the pressurization of the electrolyte by the driving member 13 is completed. As a result, it is possible to improve the accuracy of the discharge amount of the electrolyte without having to provide a shut-off valve downstream of the pump chamber 11 and precisely control the closing timing.

  Since the drive member 13 cuts off the communication between the pump chamber 11 and the discharge passage 62 and the pressurization of the electrolyte solution by the drive member 13 is terminated, the communication between the pump chamber 11 and the discharge passage 62 by the drive member 13 is cut off. That is, the pressurization of the electrolyte solution by the driving member 13 is completed. For this reason, the amount of the electrolyte discharged from the pump chamber 11 to the discharge passage 62 can be stabilized at a constant amount.

  In contrast to the basic configuration of the liquid discharge pump, the valve 10 is provided with a valve seat portion 41a in the electrolyte flow path and the valve member portion 13b is provided in the driving member 13, thereby providing the pump 10 with a function as a shut-off valve. Thus, the accuracy of the discharge amount of the electrolytic solution can be improved.

  A biasing portion 14 (spring 14a or the like) that biases the driving member 13 is provided so that the electrolyte in the pump chamber 11 is pressurized by the driving member 13. The driving member 13 is biased by the biasing portion 14. In order to cut off the communication between the pump chamber 11 and the discharge passage 62, the energization of the driving member 13 by the urging portion 14 pressurizes the electrolyte in the pump chamber 11, and the pump chamber 11 and the discharge passage 62. Blocking of communication is performed. Here, when the driving member 13 is urged by the urging unit 14, the pump chamber 11 and the discharge are discharged in the same manner each time as compared with the case where the driving member 13 is driven based on the operation pressure or the driving of the motor. It becomes easy to operate the drive member 13 until the communication with the passage 62 is cut off. As a result, the amount of the electrolyte discharged from the pump chamber 11 to the discharge passage 62 can be further stabilized with a certain amount.

  By driving the drive member 13 so as to increase the volume of the pump chamber 11 from the state where the drive member 13 blocks communication between the pump chamber 11 and the discharge passage 62, the pump is released from the suction passage 61 communicating with the pump chamber 11. Since the electrolytic solution is sucked into the chamber 11, the suction of the electrolytic solution can be started from a state where there is no inflow or outflow of the electrolytic solution between the pump chamber 11 and the discharge passage 62. Therefore, the state in the pump chamber 11 when starting the suction of the electrolytic solution is the same every time as compared with the case of starting the suction of the electrolytic solution from a state where the communication between the pump chamber 11 and the discharge passage 62 is not blocked. It becomes easy to do so. For this reason, the amount of the electrolyte sucked into the pump chamber 11 can be stabilized at a constant amount. As a result, the amount of the electrolyte discharged from the pump chamber 11 to the discharge passage 62 can also be stabilized at a constant amount.

  When the solenoid valve 40 switches to a supply state in which the working air is supplied to the collecting passage 72, the working air is supplied from the collecting passage 72 to the branch passage 71 (branch passages 71a, 71b, 71c). Then, the working air is supplied to the pump 10, the suction side valve 20, and the discharge side valve 30 through the branch passage 71. Based on the supply of the respective working air, the pump 10 sucks the electrolytic solution from the suction passage 61 into the pump chamber 11, the suction side valve 20 opens the suction passage 61, and the discharge side valve 30 closes the discharge passage 62. Therefore, by switching to the supply state of the working air by the electromagnetic valve 40, the electrolytic solution can be sucked from the suction passage 61 into the pump chamber 11 with the discharge passage 62 closed.

  On the other hand, when the solenoid valve 40 switches to a discharge state in which the working air is discharged from the collecting passage 72, the working air is discharged from the branch passage 71 to the collecting passage 72. Then, the working air is discharged from the pump 10, the suction side valve 20 and the discharge side valve 30 to the branch passage 71, respectively. Based on the discharge of each working air, the pump 10 discharges the electrolytic solution from the pump chamber 11 to the discharge passage 62, the suction side valve 20 closes the suction passage 61, and the discharge side valve 30 opens the discharge passage 62. Therefore, by switching to the discharge state of the working air by the electromagnetic valve 40, the electrolytic solution can be discharged from the pump chamber 11 to the discharge passage 62 with the suction passage 61 closed.

  Therefore, by supplying the working air to the collecting passage 72 of one system and switching the supply state and the discharge state of the working air by the single solenoid valve 40, the electrolyte can be sucked and discharged by the pump 10. it can. As a result, the configuration and control of the pump system can be simplified.

  In order to improve the accuracy of the amount of electrolyte that is sucked from the suction passage 61 into the pump chamber 11 by the pump 10, the timing at which the pump 10 starts sucking the electrolyte, the timing at which the suction side valve 20 is opened, and the discharge It is necessary to set the timing for closing the side valve 30 appropriately.

  In this regard, when the solenoid valve 40 is switched to a supply state in which operating air is supplied to the collecting passage 72, the suction side valve 20 is opened after the discharge side valve 30 is closed, and then the suction passage 61 is pumped from the suction passage 61. The flow rate of the working air supplied to the pump 10, the suction side valve 20 and the discharge side valve 30 and the urging force of each spring 14a, 24a, 34a are set so that the electrolyte solution is sucked into the chamber 11. The accuracy of the amount of electrolyte sucked into the pump chamber 11 from the suction passage 61 by the pump 10 can be improved.

  In order to improve the accuracy of the discharge amount of the electrolyte discharged from the pump chamber 11 to the discharge passage 62 by the pump 10, the timing at which the pump 10 starts discharging the electrolyte, the timing at which the suction side valve 20 is closed, and the discharge It is necessary to appropriately set the timing for opening the side valve 30.

  In this regard, when the solenoid valve 40 switches to a discharge state in which the working air is discharged from the collecting passage 72, the discharge side valve 30 is opened after the suction side valve 20 is closed, and then the discharge passage from the pump chamber 11 is discharged. Since the flow rate of the working air discharged from the pump 10, the suction side valve 20 and the discharge side valve 30 and the urging force of each spring 14a, 24a, 34a are set so that the electrolytic solution is discharged to 62, The accuracy of the discharge amount of the electrolyte discharged from the pump chamber 11 to the discharge passage 62 by the pump 10 can be improved.

  When the solenoid valve 40 switches to the supply state in which the working air is supplied to the collecting passage 72, the pump 10, the suction side valve 20, and the discharge side valve 30 operate as follows. That is, since the working air is supplied to the pump 10 through the variable restrictor 81, the flow rate of the working air supplied to the pump 10 is smaller than the flow rates of the working air supplied to the suction side valve 20 and the discharge side valve 30. . For this reason, the pump 10 operates later than the suction side valve 20 and the discharge side valve 30. In addition, since the biasing force of the spring 24 a included in the suction side valve 20 is set to be larger than the biasing force of the spring 34 a included in the discharge side valve 30, the suction side valve 20 operates later than the discharge side valve 30. . Therefore, the suction side valve 20 is opened after the discharge side valve 30 is closed, and then the electrolytic solution is sucked into the pump chamber 11 from the suction passage 61.

  On the other hand, when the solenoid valve 40 switches to a discharge state in which the working air is discharged from the collecting passage 72, the pump 10, the suction side valve 20, and the discharge side valve 30 operate as follows. That is, the pump 10 is operated later than the suction side valve 20 and the discharge side valve 30 by the setting of the springs 14 a, 24 a and 34 a of the pump 10, the suction side valve 20 and the discharge side valve 30. Further, since the urging force of the spring 24 a included in the suction side valve 20 is set to be larger than the urging force of the spring 34 a included in the discharge side valve 30, the operating air is faster from the suction side valve 20 than the discharge side valve 30. Then, the suction side valve 20 operates before the discharge side valve 30. Accordingly, the discharge side valve 30 is opened after the suction side valve 20 is closed, and then the electrolytic solution is discharged from the pump chamber 11 to the discharge passage 62.

  A bypass passage 82 that bypasses the variable throttle 81 is provided in the branch passage 71 a connected to the pump 10, and a check valve 83 that allows the working air to flow only in the direction of the collecting passage 72 from the pump 10 is provided in the bypass passage 82. Therefore, when discharging the working air from the pump 10, the flow rate can be made larger than when supplying the working air to the pump 10. For this reason, while the suction of the electrolytic solution by the pump 10 whose accuracy of the suction amount is likely to be reduced at a high speed is performed at a low speed, the discharge of the electrolytic solution by the pump 10 at which the accuracy of the discharge amount is difficult to be reduced even at a high speed Can be done. As a result, the stroke time of the suction and discharge by the pump 10 can be shortened while maintaining the accuracy of the amount of suction and discharge of the electrolyte.

  As described above, by switching between the supply state and the discharge state of the working air by the single solenoid valve 40, the pump 10 can perform the suction and discharge of the electrolytic solution.

  Therefore, a timer 50 for transmitting a drive signal based on the elapsed time is provided, and the solenoid valve 40 operates based on a supply state for supplying operating air to the collecting passage 72 and the collecting passage 72 based on the driving signal from the timer 50. Since the discharge state for discharging the air is switched, the configuration and control of the pump system can be further simplified.

  It is not limited to the said embodiment, For example, it can also implement as follows.

  In the above embodiment, the bypass passage 82 that bypasses the variable throttle 81 provided in the branch passage 71a is provided, but the bypass passage 82 may be omitted. In this case, the discharge of the electrolytic solution by the pump 10 is also performed at a low speed.

  In the above embodiment, the operation unit 44 for adjusting the sliding range of the piston 14b connected to the drive member 13, that is, the movement range of the drive member 13 connected to the piston 14b is provided. However, such an operation unit 44 is omitted. Thus, the moving range of the driving member 13 can be made constant.

  In the above embodiment, the variable throttle 81 is provided in the branch passage 71a, but the variable throttle 81 may be changed to a fixed throttle. Further, such a narrowing portion can be omitted. Even in such a case, the setting of the springs 14a, 24a, 34a of the pump 10, the suction side valve 20 and the discharge side valve 30 and the setting of the cross-sectional areas of the branch passages 71a, 71b, 71c The operation order can be set appropriately. Further, even if the pump 10, the suction side valve 20 and the discharge side valve 30 are operated at the same time, or the configuration in which the operation order is reversed as compared with the above-described embodiment, the system 10 is connected to the collective passage 72 of one system. By supplying the working air and switching the supply state and the discharge state of the working air by one electromagnetic valve 40, there is an advantage that the pump 10 can suck and discharge the electrolytic solution.

  In the above embodiment, the biasing portions 14, 24, and 34 are configured to bias the drive member 13 and the valve bodies 23 and 33 by the elastic force of the springs 14a, 24a, and 34a. It is also possible to employ a configuration in which the driving member 13 and the valve bodies 23 and 33 are urged by an operating pressure due to the above, a negative pressure due to vacuum, or the like.

  In the above-described embodiment, the pump unit includes the normally closed suction side valve 20, the pump 10 having the function of a normally closed shut-off valve, and the normally open type discharge side valve 30, but these normally-used pumps are provided. The combination of closed and normally open may be reversed. That is, as shown in FIG. 5, the pump unit includes a normally open suction valve 120, a pump 110 having a normally open shut-off valve function, and a normally closed discharge valve 130. Also good. Specifically, the pump 110 energizes the drive member 113 driven to change the volume of the pump chamber 111 and the drive member 113 so as to suck the electrolyte from the suction passage 161 into the pump chamber 111. The suction side valve 120 includes a valve body 123 and a biasing section 124 that biases the valve body 123 so as to open the suction passage 161, and the discharge side valve 130 includes the valve body 133. And a biasing portion 134 that biases the valve body 133 so as to close the discharge passage 162 can be employed.

  According to the above configuration, in the supply state and the discharge state of the working air as the working gas, the suction and discharge of the electrolytic solution by the pump 110 are performed opposite to the pump 10 of the above embodiment. That is, by switching to the supply state of the working air by the electromagnetic valve 40, the electrolytic solution can be discharged from the pump chamber 111 to the discharge passage 162 with the suction passage 161 closed. On the other hand, by switching to the discharge state of the working gas by the electromagnetic valve 40, the electrolyte can be sucked into the pump chamber 111 from the suction passage 161 with the discharge passage 162 closed. Therefore, even with such a configuration, the working air is supplied to the collecting passage 172 of one system, and the supply and discharge states of the working air are switched by the single solenoid valve 40, whereby the electrolyte is sucked and discharged by the pump 110. And can be done. As a result, the configuration and control of the pump system can be simplified.

  Further, in the above configuration, the branch passage 171a connected to the pump 110 is provided with a variable throttle portion 181 that adjusts the flow rate of the working air flowing through the branch passage 171a and a bypass passage 182 that bypasses the variable throttle portion 181. It has been. The bypass passage 182 is provided with a check valve 183 that allows operating air to flow only from the collecting passage 172 toward the pump 110. According to such a configuration, the pump 110, the suction side valve 120, and the discharge side valve 130 can be operated in the same order as in the above embodiment. The branch passage 171 (branch passages 171a, 171b, 171c) can be branched from the collecting passage 172 at an arbitrary portion. In short, the branch passages 171 (branch passages 171a, 171b, 171c) are gathered to form a collective passage 172, and the branch passage 171 and the working air may be supplied and discharged through the collective passage 172. Further, the controller 150 as the control means may control the plurality of pump units at once by switching the solenoid valves 40 respectively connected to the plurality of pump units, and the plurality of pump units may be controlled by one solenoid valve 40. The plurality of pump units may be collectively controlled by switching to one electromagnetic valve 40.

  In the above embodiment, the discharge side valve 30 that is an air operated valve that opens and closes based on the supply and discharge of the working air is adopted. However, as shown in FIG. A check valve 230 (check valve) that allows the electrolyte to flow only in the direction of the discharge passage 62 may be employed. That is, since the drive member 13 blocks the communication between the pump chamber 11 and the discharge passage 62 in a state where the pump 10 discharges the electrolytic solution, it is not necessary to close the discharge passage 62 at that time. And since the outflow of the electrolyte from the pump chamber 11 to the discharge passage 62 stops with the end of pressurization of the electrolyte by the driving member 13, the amount of the electrolyte discharged from the pump chamber 11 to the discharge passage 62 is constant. Can stabilize. Since the check valve 230 is closed when the pump 10 sucks the electrolytic solution, the pump can suck the electrolytic solution without any trouble. Further, instead of the suction side valve 20, a check valve (check valve) that allows the electrolytic solution to flow only in the direction from the suction passage 61 to the discharge passage 62 may be employed.

  In the above embodiment, the valve seat portion 41a of the pump housing 41 is formed as an annular protrusion, and the inner peripheral side of the annular protrusion serves as the electrolyte flow path, and the valve body portion 13b of the drive member 13 is By contacting the annular protrusion over the entire circumference, the flow of the electrolytic solution between the valve seat portion 41a and the valve body portion 13b is blocked, and the flow path of the electrolytic solution is closed. However, the shape of the valve seat portion 41a provided in the electrolyte flow path is arbitrary, and the valve body portion 13b of the drive member 13 provided corresponding to the valve seat portion 41a can also adopt an arbitrary shape. . In short, if the drive member 13 is configured to block the communication between the pump chamber 11 and the discharge passage 62 by the valve body portion 13b coming into contact with the valve seat portion 41a, the accuracy of the discharge amount of the electrolyte is improved. Can do.

  In the above embodiment, the exhaust state in which the working air is discharged from the collecting passage 72 is set to the state in which the collecting passage 72 is opened to the atmosphere. However, the port opened to the atmosphere of the electromagnetic valve 40 is used as a negative pressure generation source. It may be connected so that a negative pressure is introduced into the collecting passage 72 as a discharge state of the working air. Further, an electropneumatic regulator may be provided as a switching means instead of the electromagnetic valve 40 to switch between a state in which positive pressure is introduced into the collecting passage 72 and a state in which negative pressure is introduced.

  In the above embodiment, the driving member that pressurizes the electrolytic solution as the liquid is a member that pressurizes the electrolytic solution with a diaphragm, but a configuration that pressurizes the electrolytic solution with a bellows, a configuration that pressurizes the electrolytic solution with a piston, or the like is adopted. You can also In short, the drive member that is driven so as to change the volume of the pump chamber 11 only needs to be configured to block communication between the pump chamber 11 and the discharge passage 62.

  DESCRIPTION OF SYMBOLS 11 ... Pump chamber, 13 ... Drive member, 62 ... Discharge passage.

Claims (6)

A liquid discharge pump unit that pressurizes liquid in the pump chamber by a drive member that is driven so as to change the volume of the pump chamber, and discharges the liquid by a predetermined amount from a discharge passage that communicates with the pump chamber. ,
In a state where pressurization of the liquid by the driving member is completed, the driving member blocks communication between the pump chamber and the discharge passage ,
From the state where the drive member blocks communication between the pump chamber and the discharge passage, by driving the drive member so as to expand the volume of the pump chamber to the maximum, from the suction passage communicating with the pump chamber End one suction step of sucking the liquid into the pump chamber,
By driving the drive member so that the pump member and the discharge passage are disconnected from each other by reducing the volume of the pump chamber to a minimum after the one-time suction step is completed. A liquid discharge pump unit , wherein one discharge step of discharging the liquid from the discharge passage is completed . A liquid discharge pump unit that pressurizes liquid in the pump chamber by a drive member that is driven so as to change the volume of the pump chamber, and discharges the liquid by a predetermined amount from a discharge passage that communicates with the pump chamber. ,
When the drive member blocks communication between the pump chamber and the discharge passage, pressurization of the liquid by the drive member is terminated ,
From the state where the drive member blocks communication between the pump chamber and the discharge passage, by driving the drive member so as to expand the volume of the pump chamber to the maximum, from the suction passage communicating with the pump chamber End one suction step of sucking the liquid into the pump chamber,
By driving the drive member so that the pump member and the discharge passage are disconnected from each other by reducing the volume of the pump chamber to a minimum after the one-time suction step is completed. A liquid discharge pump unit , wherein one discharge step of discharging the liquid from the discharge passage is completed . A valve seat is provided in the liquid flow path including the pump chamber and the discharge passage;
A valve body is provided on the drive member;
3. The liquid discharge pump unit according to claim 1, wherein the driving member blocks communication between the pump chamber and the discharge passage when the valve body portion contacts the valve seat portion. 4. . The valve seat portion is provided on an extension in a direction driven when the driving member pressurizes the liquid in the pump chamber in the flow path,
The liquid discharge pump unit according to claim 3, wherein the valve body portion is provided in a portion of the driving member that faces the valve seat portion. An urging means for urging the drive member so that the liquid in the pump chamber is pressurized by the drive member;
5. The liquid discharge pump unit according to claim 1, wherein the drive member is urged by the urging means to block communication between the pump chamber and the discharge passage. 6. . A suction-side on-off valve that opens a suction passage communicating with the pump chamber when the liquid is sucked into the pump chamber and closes the suction passage when the liquid is discharged from the pump chamber;
A discharge-side on-off valve that closes the discharge passage when the liquid is sucked into the pump chamber and opens the discharge passage when the liquid is discharged from the pump chamber. 6. The liquid discharge pump unit according to any one of 5 above.

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