KR102452990B1 - 안전 기구가 부착된 냉각액 공급 장치 및 열부하의 냉각 방법 - Google Patents

안전 기구가 부착된 냉각액 공급 장치 및 열부하의 냉각 방법 Download PDF

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KR102452990B1
KR102452990B1 KR1020160007908A KR20160007908A KR102452990B1 KR 102452990 B1 KR102452990 B1 KR 102452990B1 KR 1020160007908 A KR1020160007908 A KR 1020160007908A KR 20160007908 A KR20160007908 A KR 20160007908A KR 102452990 B1 KR102452990 B1 KR 102452990B1
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South Korea
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cooling liquid
cooling
coolant
liquid
heat
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Korean (ko)
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KR20160097127A (ko
Inventor
후미아키 시미즈
히데오 모리타
카츠토시 사토
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에스엠시 가부시키가이샤
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F27/00—Control arrangements or safety devices specially adapted for heat-exchange or heat-transfer apparatus
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating
    • H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
    • H05K7/20281—Thermal management, e.g. liquid flow control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
    • F25B41/26—Disposition of valves, e.g. of on-off valves or flow control valves of fluid flow reversing valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/40—Fluid line arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B43/00—Arrangements for separating or purifying gases or liquids; Arrangements for vaporising the residuum of liquid refrigerant, e.g. by heat
    • F25B43/003—Filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B45/00—Arrangements for charging or discharging refrigerant
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Fluid Mechanics (AREA)
KR1020160007908A 2015-02-06 2016-01-22 안전 기구가 부착된 냉각액 공급 장치 및 열부하의 냉각 방법 Active KR102452990B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2015-022201 2015-02-06
JP2015022201A JP6473965B2 (ja) 2015-02-06 2015-02-06 安全機構付き冷却液供給装置及び熱負荷の冷却方法

Publications (2)

Publication Number Publication Date
KR20160097127A KR20160097127A (ko) 2016-08-17
KR102452990B1 true KR102452990B1 (ko) 2022-10-11

Family

ID=56498260

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160007908A Active KR102452990B1 (ko) 2015-02-06 2016-01-22 안전 기구가 부착된 냉각액 공급 장치 및 열부하의 냉각 방법

Country Status (6)

Country Link
US (1) US9756763B2 (enExample)
JP (1) JP6473965B2 (enExample)
KR (1) KR102452990B1 (enExample)
CN (2) CN116007428A (enExample)
DE (1) DE102016102085A1 (enExample)
TW (1) TWI667443B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6626815B2 (ja) * 2016-11-24 2019-12-25 ジャパンスーパーコンダクタテクノロジー株式会社 超電導マグネット装置
JP7129877B2 (ja) * 2018-10-15 2022-09-02 東京エレクトロン株式会社 温度制御システム及び温度制御方法
JP7232651B2 (ja) * 2019-01-25 2023-03-03 東京エレクトロン株式会社 熱媒体の制御方法および熱媒体制御装置
JP7226112B2 (ja) * 2019-05-31 2023-02-21 富士通株式会社 液浸システム
JP7559396B2 (ja) * 2020-07-21 2024-10-02 Smc株式会社 チラー
US20220078942A1 (en) * 2020-09-10 2022-03-10 Scott Douglas Bennett Systems and methods for optimizing flow rates in immersion cooling
JP2022166632A (ja) * 2021-04-21 2022-11-02 Smc株式会社 温調装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009112921A (ja) 2007-11-05 2009-05-28 Miura Co Ltd 水処理システム

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57148400A (en) * 1981-03-11 1982-09-13 Tokyo Shibaura Electric Co Cooler
JPS59224558A (ja) * 1983-06-03 1984-12-17 Nippon Steel Corp 渦流探傷プロ−ブ用冷却装置
JP3493421B2 (ja) * 1997-04-15 2004-02-03 オルガノ株式会社 逆浸透式純水製造装置の運転方法及び装置
JP4324932B2 (ja) * 2000-07-19 2009-09-02 Ｓｍｃ株式会社 恒温冷却液循環装置
TW534972B (en) * 2001-06-26 2003-06-01 Sumitomo Chemical Co Method and device for detecting abnormality in process for exchanging heat
US7127901B2 (en) * 2001-07-20 2006-10-31 Brooks Automation, Inc. Helium management control system
US6878216B2 (en) * 2001-09-03 2005-04-12 Tokyo Electron Limited Substrate processing method and substrate processing system
US20090000779A1 (en) * 2007-06-29 2009-01-01 Caterpillar Inc. Single-loop cooling system having dual radiators
JP2009025150A (ja) 2007-07-19 2009-02-05 Yokogawa Electric Corp 水冷式ｉｃ試験装置
FR2980057B1 (fr) * 2011-09-13 2013-10-04 Renault Sa Refroidissement de moteur electrique par caloducs
JP5097852B1 (ja) * 2011-11-18 2012-12-12 伸和コントロールズ株式会社 空気調和方法および空気調和装置
US8683854B2 (en) * 2012-03-30 2014-04-01 Ford Global Technologies, Llc Engine cooling system control
US9316421B2 (en) * 2012-08-02 2016-04-19 Mitsubishi Electric Corporation Air-conditioning apparatus including unit for increasing heating capacity
CN203185612U (zh) * 2013-02-20 2013-09-11 东莞市恩玛自动化机械有限公司 高温水式模温机

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009112921A (ja) 2007-11-05 2009-05-28 Miura Co Ltd 水処理システム

Also Published As

Publication number Publication date
US9756763B2 (en) 2017-09-05
KR20160097127A (ko) 2016-08-17
TW201641913A (zh) 2016-12-01
TWI667443B (zh) 2019-08-01
DE102016102085A1 (de) 2016-08-11
JP2016145666A (ja) 2016-08-12
JP6473965B2 (ja) 2019-02-27
CN116007428A (zh) 2023-04-25
CN105865250A (zh) 2016-08-17
US20160234969A1 (en) 2016-08-11

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