KR102447357B1 - A producing system highly pure industrial water based on a cartridge filter - Google Patents

Abstract

The present specification discloses a high-purity industrial water production system based on a cartridge filter. A high-purity industrial water production system according to an embodiment of the present invention includes a pretreatment process system and a pure water process system installed in a central supply facility; and an ultrapure water process system installed at each workplace; wherein the ultrapure water process system includes a cartridge filter for filtering out contaminants caused by a transfer pipe between the central supply facility and the individual workplace.

Description

A producing system highly pure industrial water based on a cartridge filter}

The present invention relates to a high-purity industrial water production system, and more particularly, to an ultra-pure water production system based on a cartridge filter.

Ultrapure water refers to high-purity water with extremely low impurity content and is used in manufacturing processes in various industrial fields, such as the chemical industry, pharmaceutical industry, and semiconductor industry.

1 is a view showing an example of a high-purity industrial water production system used in individual workplaces.

As shown here, the high-purity industrial water production system is largely composed of a pretreatment process system, a pure water process system, and an ultrapure water process system. Through this high-purity industrial water production system, a pretreatment process, a pure water process, and an ultrapure water process are sequentially performed on raw water (purified water) to obtain ultrapure grade water.

It is common to produce and use ultrapure water by having the entire high-purity industrial water production system for each individual business site.

The present invention is an invention derived in consideration of the above-mentioned problems of the prior art, and the main purpose of the present invention is to break away from the conventional method of equipping the entire high-purity industrial water production system for each individual business site to increase the efficiency and economic feasibility of producing high-purity industrial water. have.

In order to achieve the above object, the present invention is a pretreatment process system and a pure water process system installed in a central supply facility; and an ultrapure water process system installed in individual workplaces; wherein the ultrapure water process system includes a cartridge filter for filtering out contaminants caused by a transfer pipe between the central supply facility and the individual workplace. Based on a cartridge filter It provides a high-purity industrial water production system.

The cartridge filter may be connected to the EDI provided in the pure water process system through the transfer pipe.

The filter media of the cartridge filter may be composed of five layers and have a structure in which a hard mesh, a nonwoven fabric, a polyether sulfones (PES) membrane, a nonwoven fabric, and a hard mesh are sequentially overlapped.

The high-purity industrial water production system may further include a cartridge filter cleaning system, and isopropylene alcohol (IPA) supplied from the IPA tank provided in the cartridge filter cleaning system and UPWT provided in the ultrapure water process system Production supplied The number may be sequentially provided to the cartridge filter to be cleaned.

First and second bypass pipes for bypassing the production water through the pre-stabilized cartridge filter (2) provided in the cartridge filter cleaning system during the replacement period of the cartridge filter (1) provided in the ultrapure water process system (21, 22); a third bypass pipe 31 provided to supply washing water for stabilization thereto after the cartridge filter 1 is replaced with a new one; and a fourth bypass pipe 32 for guiding the washing water discharged from the cartridge filter 1 to a particle counter and a TOC measuring device provided in the cartridge filter washing system.

IPA (isopropylene alcohol) supplied from the IPA tank in the cartridge filter cleaning system through the third bypass pipe 31 and the production water supplied from the UPWT in the ultrapure water process system are sequentially supplied to the cartridge filter 1 can

According to the present invention, the central supply facility performs a pretreatment process and a pure water process on purified water (raw water) to produce pure water from raw water and supplies it to individual business sites. This will produce and use the production water (ultra-pure water) of the desired target water quality at the relevant business site. Instead of having the entire high-purity industrial water production system at individual plants as in the past, the central supply facility is equipped with a pre-treatment process system and pure water process system, and individual plants only have ultra-pure water process systems, which increases production efficiency and improves economic feasibility.

In addition, according to the present invention, the ultrapure water process system of each plant includes a cartridge filter disposed in the first stage. Industrial water (pure water) produced at the central supply facility is supplied to individual business sites through a transfer pipe. During the transport process through these pipes, industrial water may be contaminated by particles and impurities resulting from the pipe, and the water quality may deteriorate. By placing the cartridge filter in the first stage of the ultrapure water process system, it is possible to compensate for the deterioration of water quality due to the transfer piping. In addition, these cartridge filters can be provided with specifications according to the target water quality of each business site, thereby reducing operating and maintenance costs.

In addition, according to the present invention, the high-purity industrial water production system may further include a cartridge washing system, and through its introduction, the stabilization time of the cartridge filter can be greatly shortened.

In addition, according to the present invention, by further including the bypass pipe (21, 22, 31, 32) in the high-purity industrial water production system, the produced water is transferred to the cartridge filter (2) stabilized in advance while replacing the cartridge filter (1). By branch transfer, the entire process can be continued without interruption even during the replacement period of the cartridge filter 1, and the stabilization process through washing can be performed for the cartridge 1 replaced with a new one during branch transfer.

1 is a view showing an example of a high-purity industrial water production system used in individual workplaces.
2 is a view showing the basic concept of the present invention.
3 is a view showing the high-purity industrial water production system 100 according to the first embodiment of the present invention.
Figure 4 is a view showing a cartridge filter according to the present invention, Figure 5 is a view showing a cross section thereof.
6 is a view showing a high-purity industrial water production system 200 according to a second embodiment of the present invention.
7 is a graph comparing before and after the improvement according to the introduction of the washing process through the cartridge filter washing system.
8 is a view showing a high-purity industrial water production system 300 according to a third embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings.

2 is a view showing the basic concept of the present invention.

As shown in this figure, according to the present invention, pure grade high-purity industrial water is produced at the central supply facility and supplied to individual business sites, and the received high-purity industrial water (pure grade) is treated at individual business sites to produce ultra-pure water of higher purity. , use

There is a difference in the target water quality level required for each business site. Taking ASTM D-5127 standard as an example, the chemical industry requires Type E-1 grade ultrapure water, the pharmaceutical industry requires Type E-1.1 grade ultrapure water, and the semiconductor industry requires Type E-1.2 grade of ultrapure water is required.

The specific water quality requirements for each grade are shown in Table 1.

ASTM D5127 Ultrapure Water Quality Type E-1 Type E-1.1 Type E-1.2 particulate water
(Particles/L) 0.2-0.5 um 500 <100 <10 0.5-1.0 um 200 <50 <5 1.0 um <100 <20 <1

As shown in Table 1 above, the water quality (purity) is high in the order of Type E-1.2 grade, Type E-1.1 grade, and Type E-1 grade.

In the present invention, an ultrapure water process system is provided at each workplace as described below, and a cartridge filter is provided at the front stage of the ultrapure water process system. These cartridge filters can be provided in specifications according to the target water quality of each business site, thereby reducing operating and maintenance costs.

3 is a view showing the high-purity industrial water production system 100 according to the first embodiment of the present invention.

Referring to this, the high purity industrial water production system 100 according to the first embodiment includes a pretreatment process system in which a pretreatment process is performed, a pure water process system in which a pure water process is performed, and an ultrapure water process system in which an ultrapure water process is performed.

Unlike the prior art, a pretreatment process system and a pure water process system are provided at the central supply facility, and an ultrapure water process system is provided at each workplace. Here, the central supply facility may be a public company that supplies industrial water in industrial complexes, etc., and individual business sites may include a chemical factory, a pharmaceutical factory, a semiconductor factory, etc.

Therefore, the central supply facility performs pre-treatment and pure water processes on purified water (raw water) to produce pure water from raw water and supplies it to individual business sites. Production water (ultra-pure water) of the desired target water quality is produced and used at the workplace.

Instead of having the entire high-purity industrial water production system at individual workplaces as in the past, the central supply facility is equipped with a pre-treatment process system and pure water process system, and individual plants only have ultra-pure water process systems, which increases production efficiency and improves economic feasibility.

Each plant's ultrapure water process system includes a cartridge filter placed in the first stage. Industrial water (pure water) produced at the central supply facility is supplied to individual business sites through a transfer pipe. During the transport process through these pipes, industrial water may be contaminated by particles and impurities resulting from the pipe, and the water quality may deteriorate. By placing the cartridge filter in the first stage of the ultrapure water process system, it is possible to compensate for the deterioration of water quality due to the transfer piping. In addition, each business site can install and use a cartridge filter of a specification that meets the desired target water quality.

Figure 4 is a view showing a cartridge filter according to the present invention, Figure 5 is a view showing a cross section thereof.

Referring to this, the cartridge filter according to the present invention is a pleated (corrugated) filter, and the filter media disposed between the core and the cage includes a hard mesh, a non-woven fabric, and polyether sulfones (PES). ) It is composed of 5 layers of membrane, non-woven fabric, and hard mesh.

Among the five layers, the PES membrane, which is the median media, has a fine porous surface and thus has the characteristic of removing particles through the difference between the pore size and the particle size.

The hard mesh serves to support the nonwoven fabric and the PES membrane, and the nonwoven fabric serves to protect the outer surface of the PES membrane from being directly damaged.

As the standard of cartridge filter, 131 mm in diameter and 2.1 m2 in effective outer area are applied to show the performance of the high-flow filter. And it is possible to realize precision filtration efficiency by using a membrane material with a uniform pore size of 0.28 um.

The detailed material specifications of the PES membrane of the cartridge filter can be used as shown in Table 2 below. As a result of testing the particle removal rate for each material specification, when 5,000 latex beads are injected, the particle removal rate is all 99% was found to be abnormal.

division Latex Bead 0.2 um Injection Particles 100 ea/ml 5,000 ea/ml number of incoming
(ea/ml) number of production
(ea/ml) Removal rate
(%) number of incoming
(ea/ml) number of production
(ea/ml) Removal rate
(%) PES
(pore 0.28 um) 108.5
(±6.3) 21.2
(±3.5) 80.19
(±6.27) 5160
(±97) 8.2
(±3.5) 99.83
(±0.06) PES
(pore 0.21 um) 112.0
(±5.6) 0.9
(±0.6) 99.23
(±0.57) 5070
(±45) 0.6
(±0.8) 99.99
(±0.02) PES
(pore 0.17 um) 108.4
(±7.0) 0.3
(±0.5) 99.72
(±3.23) 5113
(±125) 0.7
(±0.9) 99.99
(±0.02)

Referring back to FIG. 3, the process and apparatus will be further described as follows.

The pretreatment process is a process to increase the lifespan of the 2Pass RO (reverse osmosis membrane), which is the main process, and the system for this includes an activated carbon filtration tower, a heat exchanger, and a microfiltration device sequentially.

The activated carbon filter tower is a device that adsorbs and removes residual chlorine and organic matter through the activated carbon in the filtering device, and the heat exchanger is a device that adjusts the temperature to 15 ~ 25 ℃ because the water temperature influences the output of the filtering device. It is a device that filters and removes solid materials with a hollow fiber membrane.

The pure water process is a process to obtain pure grade production water by treating water that has undergone a pre-treatment process. The system for this sequentially includes a primary reverse osmosis membrane (RO), a secondary reverse osmosis membrane (RO), a primary UV-OX, a primary membrane degassing device, and EDI.

The primary and secondary reverse osmosis membranes constitute a 2-pass RO. 2pass RO is configured to remove solids, organic substances, ions, etc. by using the pressure difference caused by reverse osmosis between the reverse osmosis membranes. The water produced in the primary reverse osmosis membrane improves the quality of the water produced in the secondary reverse osmosis membrane. Primary UV-OX is a device that oxidizes organic materials using ultraviolet rays. The primary membrane degassing device is a hydrophobic membrane that removes oxygen and carbon dioxide by using the difference in gas partial pressure between the inside and outside of the membrane. EDI is a device that removes ions by inducing negatively charged ions at the positive (-) pole and positive ions at the negative (-) pole using electrochemical principles.

The ultrapure water process is a process of obtaining ultrapure grade production water by receiving the pure grade production water produced at the central supply facility, and as described above, the ultrapure water processing system is installed at each business site. This ultrapure water process system sequentially includes a cartridge filter, UPWT, secondary UV-OX, primary MBP, secondary membrane degassing unit, secondary MBP and ultrafiltration unit.

As described above, industrial water (pure water) produced at the central supply facility is supplied to individual business sites through a transfer pipe, and in the process of transporting through the pipe, industrial water is contaminated by particles and impurities caused by the pipe, which may deteriorate the water quality. However, the cartridge filter is disposed at the first stage of the ultrapure water process system to remove impurities such as particulates, thereby suppressing the increase in contamination level due to transport.

UPWT is a tank that stores EDI production water and final production water. Secondary UV-OX is a device that oxidizes organic materials using ultraviolet rays. Primary MBP is a non-regenerating ion device that removes trace ions with ion exchange resin. The secondary membrane degassing device is a hydrophobic membrane that removes oxygen and carbon dioxide by using the difference in partial pressure of gas inside and outside the membrane. The secondary MBP is a non-regenerating ion device that removes trace ions with an ion exchange resin. An ultrafiltration device is a device that controls particulates before using ultrapure water.

6 is a view showing a high-purity industrial water production system 200 according to a second embodiment of the present invention.

Referring to this, the high-purity industrial water production system 200 according to the second embodiment includes a pretreatment process system, a pure water process system and an ultra-pure water process system, like the high-purity industrial water production system 100 of the first embodiment described above, In addition, it further includes a cartridge filter cleaning system.

Since the pretreatment process system, the pure water process system, and the ultrapure water process system are the same as those described in the above-described first embodiment, descriptions thereof are omitted because they overlap.

The cartridge filter cleaning system minimizes contamination of high-purity industrial water and deterioration of production efficiency when a new cartridge filter is installed.

The cartridge filter cleaning system includes an IPA (isopropylene alcohol) tank, a particle counter, and a TOC meter.

First, IPA (isopropylene alcohol) is supplied from the IPA tank to the cartridge filter to wash in about 1 minute, and then, the produced water contained in the UPWT is supplied to the cartridge filter and washed in about 30 minutes.

Stabilization of washing water is determined through a particle counter and TOC measuring device, and TOC < 20 ppb and particle count < 10 ea/ml are applied as target water quality conditions for stabilization.

7 is a graph comparing before and after the improvement according to the introduction of the cleaning process through the cartridge filter cleaning system, and Table 3 below summarizes the results.

division Micro-cleaning (before improvement)
Wash (after improvement)
After the filter is installed
water quality Stabilized water quality Time to reach stabilization (hr) After the filter is installed
water quality stabilized
water quality Time to reach stabilization (hr) TOC
(ppb) 2,150 20 7 1,190 17 5.5 number of particles
(ea/ml) 15,827 8 8 1,135 2 0.6

7 and Table 3 above, based on the TOC, it took 7 hours to stabilize when the cartridge filter was not washed (before improvement), whereas when the cartridge filter was washed (after improvement), it took 5.5 hours to stabilize. it took And, based on the number of particles (ea/ml), it took 6 hours to stabilize when the cartridge filter was not washed (before improvement), whereas it took 0.6 hours to stabilize when the cartridge filter was washed (after improvement).

Thus, through the introduction of the cartridge filter cleaning system according to the present invention, the stabilization time of the cartridge filter was greatly shortened.

8 is a view showing a high-purity industrial water production system 300 according to a third embodiment of the present invention.

Referring to this, the high-purity industrial water production system 300 according to the third embodiment is a pre-treatment process system, a pure water process system, an ultra-pure water process system, and a cartridge filter washing similarly to the high-purity industrial water production system 200 of the second embodiment described above. system further.

Additionally, the high-purity industrial water production system 300 of the third embodiment further includes four bypass pipes 21 , 22 , 31 , 32 .

By providing these bypass pipes (21, 22, 31, 32), the cartridge filter (2) disposed in the cartridge filter cleaning system is temporarily replaced when the cartridge filter (1) disposed in the ultrapure water process system needs to be replaced with a new one. By using it, the process can be stopped for filter replacement.

More specifically, the water discharged from EDI while replacing the cartridge filter 1 is supplied to and discharged from the cartridge filter 2 through the first and second bypass pipes 21 and 22 . At this time, as the cartridge filter (2), the one whose stabilization process has been completed in advance is used. Through this branching transfer of water, the entire process can be continued without stopping even during the replacement period of the cartridge filter 1 .

As described above, while the cartridge filter 2 is used as a bypass filter, a stabilization process is performed for the cartridge filter 1 replaced with a new one. For this stabilization process, the third and fourth bypass pipes 31 and 32 are used. Specifically, IPA (isopropylene alcohol) supplied from the IPA tank through the third bypass pipe and the production water supplied from the UPWT are sequentially supplied to the newly installed cartridge filter 1 and washing is performed thereon, and the cartridge filter ( The washing water discharged from 1) is supplied to the particle counter and the TOC measuring device through the fourth bypass pipe 32 to determine whether it is stabilized.

100: high-purity industrial water production system according to the first embodiment
200: high-purity industrial water production system according to the first embodiment
300: high-purity industrial water production system according to the first embodiment
11: IPA supply piping
12: washing water supply pipe
13: wash water discharge pipe
21: first bypass pipe
22: second bypass pipe
31: third bypass pipe
32: fourth bypass pipe

Claims (6)

pretreatment process system and pure water process system installed in central supply facility; and
Including; ultrapure water process system installed at individual business sites;
The ultrapure water process system includes a cartridge filter for filtering out contaminants caused by the transfer pipe between the central supply facility and the individual business site,
The high-purity industrial water production system further includes a cartridge filter cleaning system,
Isopropylene alcohol (IPA) supplied from the IPA tank provided in the cartridge filter cleaning system and the production water supplied from the UPWT provided in the ultrapure water process system are sequentially provided to the cartridge filter to be washed,
First and second bypass pipes for bypassing the production water through the pre-stabilized cartridge filter (2) provided in the cartridge filter cleaning system during the replacement period of the cartridge filter (1) provided in the ultrapure water process system (21, 22);
a third bypass pipe 31 provided for supplying washing water for stabilization thereto after the cartridge filter 1 is replaced with a new one; and
A fourth bypass pipe (32) for guiding the washing water discharged from the cartridge filter (1) to a particle counter and a TOC measuring device provided in the cartridge filter washing system; further comprising,
High-purity industrial water production system based on cartridge filter.
The method according to claim 1,
The cartridge filter is connected to the EDI provided in the pure water process system through the transfer pipe,
High-purity industrial water production system based on cartridge filter.
The method according to claim 1,
The filter medium of the cartridge filter is composed of 5 layers and has a structure in which a hard mesh, a nonwoven fabric, a PES (polyether sulfones) membrane, a nonwoven fabric and a hard mesh are sequentially overlapped,
High-purity industrial water production system based on cartridge filter.
delete delete The method according to claim 1,
IPA (isopropylene alcohol) supplied from the IPA tank in the cartridge filter cleaning system through the third bypass pipe 31 and the production water supplied from the UPWT in the ultrapure water process system are sequentially supplied to the cartridge filter 1 ,
High-purity industrial water production system based on cartridge filter.

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