KR102443887B1 - 유체기기 - Google Patents

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Publication number
KR102443887B1
KR102443887B1 KR1020160061849A KR20160061849A KR102443887B1 KR 102443887 B1 KR102443887 B1 KR 102443887B1 KR 1020160061849 A KR1020160061849 A KR 1020160061849A KR 20160061849 A KR20160061849 A KR 20160061849A KR 102443887 B1 KR102443887 B1 KR 102443887B1
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KR
South Korea
Prior art keywords
flow path
fluid
flow
members
valve
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KR1020160061849A
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English (en)
Korean (ko)
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KR20160143515A (ko
Inventor
아츠시 이노우에
Original Assignee
사파스고교 가부시키가이샤
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Publication of KR20160143515A publication Critical patent/KR20160143515A/ko
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Publication of KR102443887B1 publication Critical patent/KR102443887B1/ko
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/02—Branch units, e.g. made in one piece, welded, riveted
    • F16L41/03—Branch units, e.g. made in one piece, welded, riveted comprising junction pieces for four or more pipe members
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Valve Housings (AREA)
KR1020160061849A 2015-06-04 2016-05-20 유체기기 Active KR102443887B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2015-114088 2015-06-04
JP2015114088A JP6751552B2 (ja) 2015-06-04 2015-06-04 流体機器

Publications (2)

Publication Number Publication Date
KR20160143515A KR20160143515A (ko) 2016-12-14
KR102443887B1 true KR102443887B1 (ko) 2022-09-15

Family

ID=56292443

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160061849A Active KR102443887B1 (ko) 2015-06-04 2016-05-20 유체기기

Country Status (4)

Country Link
US (1) US10260649B2 (enExample)
EP (1) EP3101319B1 (enExample)
JP (1) JP6751552B2 (enExample)
KR (1) KR102443887B1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE1024953B1 (fr) * 2017-01-31 2018-08-30 Out And Out Chemistry Sprl Méthode pour connecter au moins deux vannes fluidiques et le système de communication fluidique mis en œuvre
EP3621450B1 (en) 2017-05-10 2025-02-19 Nordic Bioproducts Group Oy Lignin containing microcellulose as an animal feed additive
US11493275B2 (en) 2017-10-10 2022-11-08 Tps Ip, Llc Oven with renewable energy capacities
US11299925B2 (en) 2017-10-11 2022-04-12 Tps Ip, Llc Oven with split doors
US11585701B2 (en) 2017-10-27 2023-02-21 Tps Ip, Llc Intelligent oven
US10794508B2 (en) * 2017-11-14 2020-10-06 Tps Ip, Llc Atmosphere control manifold
US10798947B2 (en) 2017-12-08 2020-10-13 Tps Ip, Llc Oven with augmented reality functionality
US11346560B2 (en) 2017-12-29 2022-05-31 Tps Ip, Llc Oven wall compositions and/or structures
JP7061794B2 (ja) * 2018-08-10 2022-05-02 アドバンス電気工業株式会社 ダイヤフラム部材
JP7321110B2 (ja) * 2020-02-05 2023-08-04 愛三工業株式会社 電動式バルブ装置
WO2022054121A1 (ja) * 2020-09-08 2022-03-17 昭和機器計装株式会社 集合配管ユニット
EP4345362A1 (de) * 2022-09-27 2024-04-03 Eugen Seitz AG Verteiler eines fluidversorgungssystems
CN116658727A (zh) * 2023-04-21 2023-08-29 北京机械设备研究所 一种柔性气源提供装置及其使用方法
JP2025095881A (ja) 2023-12-15 2025-06-26 サーパス工業株式会社 流体機器システム

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008089085A (ja) 2006-10-02 2008-04-17 Ckd Corp 流体機器のマニホールド構造体及びそれに用いられるボディブロック
JP4283884B2 (ja) * 2002-10-21 2009-06-24 シーケーディ株式会社 ガス集積弁
US20120222750A1 (en) 2011-03-02 2012-09-06 Henry Wong Length-adjustable pressure-retaining piping components
JP2013080424A (ja) * 2011-10-05 2013-05-02 Horiba Stec Co Ltd 流体制御システム
KR101425009B1 (ko) 2007-05-25 2014-08-13 사파스고교 가부시키가이샤 유체기기 유니트 구조

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5275201A (en) * 1992-07-23 1994-01-04 Tri-Clover, Inc. Manifold valve assembly with removable valve seat
JP3207782B2 (ja) * 1997-04-16 2001-09-10 アドバンス電気工業株式会社 マニホールドバルブ
JP3766749B2 (ja) * 1998-03-16 2006-04-19 シーケーディ株式会社 電磁弁
AU4002699A (en) * 1998-05-18 1999-12-06 Swagelok Company, The Modular surface mount manifold assemblies
US7036528B2 (en) 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
DE50101712D1 (de) 2001-08-08 2004-04-22 Festo Ag & Co Matrixartige Ventilanordnung
JP4296138B2 (ja) * 2004-08-04 2009-07-15 シーケーディ株式会社 ガス供給集積ユニット
JP5079393B2 (ja) * 2007-05-25 2012-11-21 サーパス工業株式会社 流体機器ユニット構造
PL2281132T3 (pl) * 2008-05-30 2012-09-28 Gea Tuchenhagen Gmbh Urządzenie do rurowania instalacji procesowych w przemyśle środków spożywczych i napojów
DE102008026149A1 (de) 2008-05-30 2009-12-03 Gea Tuchenhagen Gmbh Verrohrungssystem für Prozessanlagen der Nahrungsmittel- und Getränkeindustrie
JP5274518B2 (ja) * 2009-06-30 2013-08-28 Ｃｋｄ株式会社 ガス供給ユニット及びガス供給装置
DE102010022624B4 (de) * 2010-06-04 2013-06-27 Festo Ag & Co. Kg Ventilanordnung
KR101940325B1 (ko) * 2011-10-05 2019-01-18 가부시키가이샤 호리바 에스텍 유체 기구 및 상기 유체 기구를 구성하는 지지 부재 및 유체 제어 시스템

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4283884B2 (ja) * 2002-10-21 2009-06-24 シーケーディ株式会社 ガス集積弁
JP2008089085A (ja) 2006-10-02 2008-04-17 Ckd Corp 流体機器のマニホールド構造体及びそれに用いられるボディブロック
KR101425009B1 (ko) 2007-05-25 2014-08-13 사파스고교 가부시키가이샤 유체기기 유니트 구조
US20120222750A1 (en) 2011-03-02 2012-09-06 Henry Wong Length-adjustable pressure-retaining piping components
JP2013080424A (ja) * 2011-10-05 2013-05-02 Horiba Stec Co Ltd 流体制御システム

Also Published As

Publication number Publication date
KR20160143515A (ko) 2016-12-14
JP6751552B2 (ja) 2020-09-09
EP3101319B1 (en) 2019-03-13
US20160356388A1 (en) 2016-12-08
JP2017002919A (ja) 2017-01-05
US10260649B2 (en) 2019-04-16
EP3101319A1 (en) 2016-12-07

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