KR102443418B1 - 토출 장치 및 임프린트 장치 - Google Patents

토출 장치 및 임프린트 장치 Download PDF

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Publication number
KR102443418B1
KR102443418B1 KR1020190000987A KR20190000987A KR102443418B1 KR 102443418 B1 KR102443418 B1 KR 102443418B1 KR 1020190000987 A KR1020190000987 A KR 1020190000987A KR 20190000987 A KR20190000987 A KR 20190000987A KR 102443418 B1 KR102443418 B1 KR 102443418B1
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South Korea
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unit
imprint material
space
opening
discharging
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English (en)
Korean (ko)
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KR20190086373A (ko
Inventor
히사시 남바
노리야스 하세가와
겐 가츠타
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캐논 가부시끼가이샤
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/002—Component parts, details or accessories; Auxiliary operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/026—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing of layered or coated substantially flat surfaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
KR1020190000987A 2018-01-12 2019-01-04 토출 장치 및 임프린트 장치 Active KR102443418B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018003497A JP2019125619A (ja) 2018-01-12 2018-01-12 吐出装置およびインプリント装置
JPJP-P-2018-003497 2018-01-12

Publications (2)

Publication Number Publication Date
KR20190086373A KR20190086373A (ko) 2019-07-22
KR102443418B1 true KR102443418B1 (ko) 2022-09-15

Family

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Family Applications (1)

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KR1020190000987A Active KR102443418B1 (ko) 2018-01-12 2019-01-04 토출 장치 및 임프린트 장치

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Country Link
US (1) US11143956B2 (enExample)
JP (1) JP2019125619A (enExample)
KR (1) KR102443418B1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7374680B2 (ja) * 2019-09-11 2023-11-07 キヤノン株式会社 吐出材吐出装置、インプリント装置、及び検出方法
JP7566614B2 (ja) * 2020-12-18 2024-10-15 キヤノン株式会社 インプリント装置および物品の製造方法
CN115192981B (zh) * 2022-07-19 2023-07-28 四川大学华西医院 一种高度能够调节的康复座椅

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006095878A (ja) 2004-09-29 2006-04-13 Fuji Photo Film Co Ltd 液体吐出ヘッド及び脱気処理方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5341162A (en) * 1992-08-24 1994-08-23 Xerox Corporation Liquid deagassing apparatus
JP2005059476A (ja) * 2003-08-18 2005-03-10 Dainippon Printing Co Ltd インク供給装置
JP2006008849A (ja) * 2004-06-25 2006-01-12 Fuji Photo Film Co Ltd 着色剤含有樹脂粒子の非水溶媒分散液の製造方法およびインクジェットプリンター用油性インク
JP5402033B2 (ja) * 2008-10-28 2014-01-29 株式会社リコー 画像形成装置
JP5418423B2 (ja) * 2010-06-25 2014-02-19 コニカミノルタ株式会社 インクジェット記録装置
JP5498307B2 (ja) * 2010-07-30 2014-05-21 富士フイルム株式会社 液体供給装置及び液体吐出装置
JP5590321B2 (ja) * 2010-09-28 2014-09-17 セイコーエプソン株式会社 液体噴射ヘッド及びこれを有する液体噴射装置
JP5838506B2 (ja) * 2011-09-29 2016-01-06 株式会社ミマキエンジニアリング 液体供給装置およびインクジェット記録装置
JP5777581B2 (ja) * 2012-08-10 2015-09-09 株式会社ミヤコシ インクジェット記録装置
JP6362109B2 (ja) * 2013-10-04 2018-07-25 キヤノン株式会社 インプリント装置および部品の製造方法
JP6700794B2 (ja) * 2015-04-03 2020-05-27 キヤノン株式会社 インプリント材吐出装置
US20160288378A1 (en) * 2015-04-03 2016-10-06 Canon Kabushiki Kaisha Imprint material discharging device
WO2017042936A1 (ja) * 2015-09-10 2017-03-16 富士通周辺機株式会社 インクジェットプリンタ
JPWO2017094515A1 (ja) * 2015-12-01 2018-09-20 コニカミノルタ株式会社 インクジェット記録装置
JP2018006470A (ja) * 2016-06-29 2018-01-11 キヤノン株式会社 インプリント材吐出装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006095878A (ja) 2004-09-29 2006-04-13 Fuji Photo Film Co Ltd 液体吐出ヘッド及び脱気処理方法

Also Published As

Publication number Publication date
KR20190086373A (ko) 2019-07-22
JP2019125619A (ja) 2019-07-25
US11143956B2 (en) 2021-10-12
US20190219918A1 (en) 2019-07-18

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