KR102421825B1 - 다중-레벨의 회절 광학 소자 박막 코팅 - Google Patents

다중-레벨의 회절 광학 소자 박막 코팅 Download PDF

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KR102421825B1
KR102421825B1 KR1020180095665A KR20180095665A KR102421825B1 KR 102421825 B1 KR102421825 B1 KR 102421825B1 KR 1020180095665 A KR1020180095665 A KR 1020180095665A KR 20180095665 A KR20180095665 A KR 20180095665A KR 102421825 B1 KR102421825 B1 KR 102421825B1
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layer
reflective structure
layers
reflective
doe
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KR20190019029A (ko
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존 마이클 밀러
곤살로 윌스
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루멘텀 오퍼레이션즈 엘엘씨
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G02B5/1871—Transmissive phase gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/44—Grating systems; Zone plate systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B2005/1804—Transmission gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1086—Beam splitting or combining systems operating by diffraction only
    • G02B27/1093—Beam splitting or combining systems operating by diffraction only for use with monochromatic radiation only, e.g. devices for splitting a single laser source
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4272—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Optical Integrated Circuits (AREA)
KR1020180095665A 2017-08-16 2018-08-16 다중-레벨의 회절 광학 소자 박막 코팅 Active KR102421825B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201762546172P 2017-08-16 2017-08-16
US62/546,172 2017-08-16
US16/044,081 US10802185B2 (en) 2017-08-16 2018-07-24 Multi-level diffractive optical element thin film coating
US16/044,081 2018-07-24

Publications (2)

Publication Number Publication Date
KR20190019029A KR20190019029A (ko) 2019-02-26
KR102421825B1 true KR102421825B1 (ko) 2022-07-15

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Country Status (7)

Country Link
US (2) US10802185B2 (enExample)
EP (1) EP3444643B1 (enExample)
JP (2) JP7330675B2 (enExample)
KR (1) KR102421825B1 (enExample)
CN (1) CN109407191A (enExample)
IL (1) IL261086B2 (enExample)
TW (2) TWI756459B (enExample)

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US10802185B2 (en) 2017-08-16 2020-10-13 Lumentum Operations Llc Multi-level diffractive optical element thin film coating
US10712475B2 (en) 2017-08-16 2020-07-14 Lumentum Operations Llc Multi-layer thin film stack for diffractive optical elements
EP3762778B1 (en) * 2018-03-06 2025-07-09 Applied Materials, Inc. Method of building a 3d functional optical material stacking structure
US11347087B2 (en) 2019-04-16 2022-05-31 Korea Advanced Institute Of Science And Technology Acousto-optic interactive structure
KR102357157B1 (ko) * 2019-04-16 2022-01-28 한국과학기술원 음향 광학 상호 작용 구조체
US11892619B2 (en) * 2019-09-04 2024-02-06 Lumentum Operations Llc MEMS device with a three-layer comb actuator structure and a two-layer hinge
US11782195B2 (en) 2019-09-30 2023-10-10 Himax Technologies Limited Diffractive optical element and method for fabricating the diffractive optical element
WO2021224450A1 (en) * 2020-05-08 2021-11-11 Nil Technology Aps Multi-level structures and methods for manufacturing the same
US20230266715A1 (en) * 2022-02-24 2023-08-24 The Government Of The United States Of America, As Represented By The Secretary Of The Navy MicroDial -- Miniaturized apparatus for solar time keeping

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US10712475B2 (en) 2017-08-16 2020-07-14 Lumentum Operations Llc Multi-layer thin film stack for diffractive optical elements

Also Published As

Publication number Publication date
TWI756459B (zh) 2022-03-01
CN109407191A (zh) 2019-03-01
US11686890B2 (en) 2023-06-27
JP2019035954A (ja) 2019-03-07
US20210026051A1 (en) 2021-01-28
EP3444643B1 (en) 2024-10-09
KR20190019029A (ko) 2019-02-26
US20190056542A1 (en) 2019-02-21
JP2022130387A (ja) 2022-09-06
TWI809675B (zh) 2023-07-21
US10802185B2 (en) 2020-10-13
JP7330675B2 (ja) 2023-08-22
IL261086B2 (en) 2023-06-01
IL261086A (en) 2019-01-31
EP3444643A1 (en) 2019-02-20
JP7348991B2 (ja) 2023-09-21
TW202219629A (zh) 2022-05-16
TW201910915A (zh) 2019-03-16

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