KR102410764B1 - 프린트 기판의 레이저 가공 방법 및 프린트 기판의 레이저 가공기 - Google Patents

프린트 기판의 레이저 가공 방법 및 프린트 기판의 레이저 가공기 Download PDF

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Publication number
KR102410764B1
KR102410764B1 KR1020190177827A KR20190177827A KR102410764B1 KR 102410764 B1 KR102410764 B1 KR 102410764B1 KR 1020190177827 A KR1020190177827 A KR 1020190177827A KR 20190177827 A KR20190177827 A KR 20190177827A KR 102410764 B1 KR102410764 B1 KR 102410764B1
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KR
South Korea
Prior art keywords
laser
aperture
hole
diameter
insulating layer
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KR1020190177827A
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English (en)
Korean (ko)
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KR20200084299A (ko
Inventor
쿠니오 아라이
야수히코 카나야
Original Assignee
오퓨나 테크놀러지 주식회사
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Publication of KR20200084299A publication Critical patent/KR20200084299A/ko
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Publication of KR102410764B1 publication Critical patent/KR102410764B1/ko

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
KR1020190177827A 2019-01-01 2019-12-30 프린트 기판의 레이저 가공 방법 및 프린트 기판의 레이저 가공기 KR102410764B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2019-008844 2019-01-01
JP2019008844 2019-01-01

Publications (2)

Publication Number Publication Date
KR20200084299A KR20200084299A (ko) 2020-07-10
KR102410764B1 true KR102410764B1 (ko) 2022-06-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190177827A KR102410764B1 (ko) 2019-01-01 2019-12-30 프린트 기판의 레이저 가공 방법 및 프린트 기판의 레이저 가공기

Country Status (4)

Country Link
JP (2) JP2020109820A (ja)
KR (1) KR102410764B1 (ja)
CN (1) CN111390380B (ja)
TW (1) TWI705749B (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022098586A (ja) * 2020-12-22 2022-07-04 大船企業日本株式会社 プリント基板レーザ加工装置に装着されるアパーチャにおける加工点パワーの調整方法と、該プリント基板レーザ加工装置に装着されるアパーチャにおける加工点パワーの調整方法を実施してなるプリント基板レーザ加工装置
JP2022105463A (ja) * 2021-01-02 2022-07-14 大船企業日本株式会社 プリント基板のレーザ加工方法およびプリント基板のレーザ加工機
JP2022140405A (ja) * 2021-03-12 2022-09-26 大船企業日本株式会社 プリント基板のレーザ加工方法およびプリント基板のレーザ加工機
CN114273777A (zh) * 2021-12-14 2022-04-05 深圳市韵腾激光科技有限公司 一种提升电路板钻孔效率的激光加工系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018181678A1 (ja) * 2017-03-30 2018-10-04 太陽誘電株式会社 配線基板及びその製造方法

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JPH09107168A (ja) * 1995-08-07 1997-04-22 Mitsubishi Electric Corp 配線基板のレーザ加工方法、配線基板のレーザ加工装置及び配線基板加工用の炭酸ガスレーザ発振器
JP3126316B2 (ja) * 1996-11-20 2001-01-22 イビデン株式会社 多層プリント配線板の製造装置及び製造方法
JP3395141B2 (ja) * 1998-03-02 2003-04-07 住友重機械工業株式会社 レーザ加工装置
JP3883708B2 (ja) 1998-09-11 2007-02-21 日立ビアメカニクス株式会社 レーザ加工機におけるアパーチャ交換装置
JP4489899B2 (ja) 2000-03-08 2010-06-23 イビデン株式会社 多層プリント配線板用両面回路基板の製造方法
JP2003053560A (ja) 2001-08-09 2003-02-26 Ngk Spark Plug Co Ltd レーザ加工方法及びプリント配線基板の製造方法
DE10145184B4 (de) * 2001-09-13 2005-03-10 Siemens Ag Verfahren zum Laserbohren, insbesondere unter Verwendung einer Lochmaske
JP2003136267A (ja) 2001-11-01 2003-05-14 Hitachi Via Mechanics Ltd レーザ加工方法およびレーザ加工装置
JP2003204137A (ja) 2002-01-09 2003-07-18 Hitachi Via Mechanics Ltd レーザー穴あけ加工方法
CN101372071B (zh) * 2008-09-12 2011-06-08 上海美维科技有限公司 一种采用二氧化碳激光直接钻盲孔的方法
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Also Published As

Publication number Publication date
TWI705749B (zh) 2020-09-21
KR20200084299A (ko) 2020-07-10
CN111390380B (zh) 2022-06-28
CN111390380A (zh) 2020-07-10
TW202027578A (zh) 2020-07-16
JP2020108904A (ja) 2020-07-16
JP2020109820A (ja) 2020-07-16
JP7098093B2 (ja) 2022-07-11

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