KR102368013B1 - Temperature control system for process cooling water and thermostat apparatus including the same - Google Patents

Abstract

Disclosed are a system for controlling a temperature of process coolant, and a thermostat having the same. According to an embodiment of the present invention, the system for controlling a temperature of process coolant, which is included in a thermostat distinguished from a factory facility in which a manufacturing process is performed, comprises: a radiator module including a radiator for cooling or heating process coolant recovered from a thermostatic bath for maintaining chemicals supplied from a factory facility at a constant temperature with heat exchange through a fin structure having an extended surface area for each pipe while passing through a plurality of pipes, and a radiator fan for cooling or heating the radiator through air circulation by a rotary motion; a process coolant storage tank for storing the process coolant passing through the radiator module, and maintaining a temperature of the process coolant at a set temperature; a cooling module located on one surface of the process coolant storage tank, and cooling or heating the process coolant storage tank through air circulation by a thermoelectric effect and a rotary motion; a coolant pump for supplying the process coolant satisfying the set temperature from the process coolant storage tank to the thermostatic bath; and a process coolant control module for maintaining the temperature of the process coolant stored in the process coolant storage tank at the set temperature and controlling the supply to the thermostatic bath by controlling the radiator module, the cooling module and the coolant pump on the basis of a temperature of the thermostatic bath and the temperature of the process coolant measured by a coolant temperature sensor provided in the process coolant storage tank by communicating with a thermostatic bath control module for controlling the temperature of the thermostatic bath. Therefore, an increase in productivity and an economic effect are provided.

Description

Process cooling water temperature control system and thermostat having the same

The present invention relates to a process cooling water temperature control system and a thermostat having the same. In more detail, a technology that enables more efficient and precise temperature control by integrating a temperature control system for process cooling water (PCW) in a thermostat that corrects the temperature of chemical substances and controlling it in conjunction with the thermostat is about

In general, a thermostat provides a function of maintaining a constant temperature of a chemical (chemical) storage tank (container) or a process chamber used in a semiconductor, a display manufacturing process, or a manufacturing process in the chemical field. It is very important to keep the temperature of the storage tank or process chamber containing these chemicals constant, and when the temperature of the chemicals is kept constant, the manufacturing process can be stabilized and the quality of the final product is directly affected. am.

To this end, a constant heat transfer medium (eg, constant temperature water) may be circulated and supplied to the storage tank or process chamber, or a thermostat may be connected to circulate the chemical substance itself inside the storage tank or process chamber. Since the constant temperature water of a constant temperature is continuously circulated and supplied by the constant temperature bath, the temperature of the storage tank or the process chamber can be kept constant, and the chemical substance itself inside the storage tank or the process chamber is circulated to the constant temperature bath to maintain a constant temperature. may be

1 is a schematic configuration diagram of one of the conventional general thermostat structures.

Referring to FIG. 1, the thermostat includes a storage tank 10, a thermostat 20, valves V1, V2, V3, a pump P, a temperature sensor T, and a thermostat control module 30. can be

More specifically, among the areas divided into the factory facility (A) and the thermostat (B), if the thermostat (B) is mainly described, first, when V1 (input valve) is opened, chemicals (chemicals) are released. It is transported (IN) from the factory facility (A) and filled in the storage tank (10). At this time, V2 (circulation valve) and V3 (drain valve) are locked, and the pump (P) and the thermostat 20 are also stopped. state can be maintained. The plurality of valves V1, V2, and V3 may be air valves, and the pump P may be a circulating pump for circulating a fluid.

Subsequently, when the storage tank 10 is filled to a certain level with a chemical substance, V1 (input valve) is locked and V2 (circulation valve) is opened at the same time as the pump P is operated, and the thermostat 20 can be operated.

Then, when the thermostat 20 is operated, the thermostat control module 30 measures the temperature of the chemical in the storage tank 10 through the temperature sensor T provided in the storage tank 10, and this Compared with the set temperature, the temperature of the thermostat 20 can be precisely controlled. At this time, process cooling water (PCW) is used to cool the heat generated while the thermostat 20 is operating, and this process cooling water (PCW) is supplied at a constant temperature ( For example, a large-capacity storage tank is required because it must be continuously supplied (SUPPLY, RETURN) at a temperature of 18 to 20 degrees Celsius, and there is a problem in that a cooling tower to maintain a constant temperature must also be installed separately. In particular, long-distance transport (IN) from the factory facility (A) located outside to the constant temperature device (B) and a large length of pipe need to be installed to transport it again (DRAIN), which occupies a large amount of cost and volume. It has limitations.

Accordingly, there is a need for development of a temperature control system technology capable of more efficiently circulating the process cooling water PCW to the thermostat B and enabling precise temperature control.

Laid-open Patent Publication No. 10-2004-0045606 (published date of publication: 2004.06.02)

Therefore, the present invention is to solve all the problems of the prior art as described above, first, a temperature control system for process cooling water (PCW) is integrally configured with a thermostat for correcting the temperature of a chemical substance. There is a purpose.

Second, another object of the present invention is to implement more efficient and precise temperature control by controlling the process cooling water temperature control system in conjunction with a constant temperature device (thermostat control module).

Third, another object of the present invention is to implement a process (primary constant temperature, secondary constant temperature) of cooling or heating process cooling water (PCW) in stages (radiator module, cooling module) to incubate at a constant temperature.

Fourth, another object of the present invention is to remove contaminants (air bubbles, particles, etc.) generated during the circulation of process coolant and to exhaust thermal energy to the outside.

The above object of the present invention is, as a system for temperature control of process cooling water included in a thermostat separated from the factory equipment in which the manufacturing process is performed, is recovered from a thermostat that maintains the chemical substances supplied from the factory equipment at a constant temperature. A radiator that cools or heats the process coolant through heat exchange through a fin structure extending the surface area of each pipe while passing a plurality of pipes, and a radiator fan that cools or heats the radiator through air circulation by rotational motion, a radiator module configured; a process coolant storage tank that stores the process coolant that has passed through the radiator module and maintains a temperature of the process coolant at a set temperature; a cooling module located on one surface of the process coolant storage tank and cooling or heating the process coolant storage tank through air circulation by thermoelectric effect and rotational motion; a cooling water pump supplying the process cooling water satisfying the set temperature from the process cooling water storage tank to the constant temperature tank; and the radiator module, the cooling module, and the coolant pump based on the constant temperature bath temperature and the process coolant temperature measured from the coolant temperature sensor provided in the process coolant storage tank in communication with the thermostat control module for controlling the temperature of the thermostat and a process coolant control module for controlling the temperature of the process coolant stored in the process coolant storage tank at the set temperature and controlling the supply to the constant temperature tank. do.

In addition to this, other systems and apparatus for implementing the present invention and a computer readable recording medium for recording a computer program for executing a process of the system are achieved.

According to the present invention, first, a temperature control system for process cooling water (PCW) is integrally configured with a constant temperature device for correcting the temperature of chemical substances, and a cooling facility that is planted in a factory facility is separately expanded or Since there is no need for a separate piping line construction, there is an increase in productivity and an economical effect.

Second, according to the present invention, the effect of implementing more efficient and precise temperature control can be expected by controlling the process cooling water temperature control system in conjunction with the thermostat (thermostat control module).

Third, according to the present invention, it is possible to implement a process (primary constant temperature, secondary constant temperature) of incubating the process cooling water (PCW) at a constant temperature by cooling or heating it step-by-step (radiator module, cooling module). Cost and time can be reduced, and process cooling water (PCW) can be secured more stably.

Fourth, according to the present invention, it is possible to remove contaminants (air bubbles, particles, etc.) generated in the process of circulating the process cooling water, and to exhaust thermal energy to the outside, thereby improving the circulation efficiency of the process cooling water and preventing failures and loads in the system. It can be expected to have the effect of preventing catching.

1 is a schematic configuration diagram of one of the conventional general thermostat structures.
2 is an overall configuration diagram of a thermostat having a process cooling water temperature control system according to an embodiment of the present invention.
3 is a detailed configuration diagram of a process cooling water temperature control system 400 according to an embodiment of the present invention.
4 is a detailed configuration diagram of a radiator module 410 according to an embodiment of the present invention.
5 is a detailed configuration diagram of a cooling module 430 according to an embodiment of the present invention.
6 is a diagram illustrating in detail the internal configuration of the process coolant control module 440 according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0010] Reference is made to the accompanying drawings, which show by way of illustration specific embodiments in which the present invention may be practiced. It should be understood that the various embodiments of the present invention are different but need not be mutually exclusive. For example, certain shapes, structures, and characteristics described herein with respect to one embodiment may be implemented in other embodiments without departing from the spirit and scope of the invention. In addition, it should be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the present invention. Accordingly, the detailed description set forth below is not intended to be taken in a limiting sense, and the scope of the present invention, if properly described, is limited only by the appended claims, along with all scope equivalents as those claimed. In the drawings, like reference numerals refer to the same or similar functions in various aspects, and the length, area, thickness, and the like may be exaggerated for convenience.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those of ordinary skill in the art can easily practice the present invention.

[Embodiment of the present invention]

As used herein, the term "thermostat" refers to equipment that provides a function of maintaining a constant temperature of chemicals (chemicals) used in manufacturing processes such as semiconductors, display manufacturing processes, or chemical fields. will have to be interpreted. In the following embodiment, the factory facilities around the constant temperature device as a center are shown and described as a whole. However, this is a preferred example for convenience of description, and the present invention is not limited thereto, and the various configurations and functions shown or described in the preferred embodiment of the present invention are similar to or identical to those of the same configuration. It should be understood as belonging to the invention.

Overall composition of the thermostat

2 is an overall configuration diagram of a thermostat having a process cooling water temperature control system according to an embodiment of the present invention.

Referring to FIG. 2 , in an area composed of a factory facility (A) in which a manufacturing process is performed and a thermostat (B) for correcting the temperature of chemicals used in the manufacturing process, according to an embodiment of the present invention Looking at the thermostat (B), the storage tank 100, the thermostat 200, the thermostat control module 300, the process cooling water temperature control system 400, the valves V1, V2, V3, and the pump P1. And it may be configured to include a temperature sensor (T1).

First, the storage tank 100 according to an embodiment of the present invention maintains a constant temperature while storing (storing) chemicals (chemicals) used in manufacturing processes such as semiconductors, display manufacturing processes, or chemical fields. function can be performed.

More specifically, when V1 (input valve) is opened from the factory facility A, the storage tank 100 is transported in the input direction IN and filled with a certain amount of the chemical substance. It is circulated to the constant temperature bath 200 to maintain a constant temperature, and is transported in the discharge direction DRAIN of the factory facility A to be used in the manufacturing process of the factory. At this time, the storage tank 100 according to an embodiment of the present invention is not necessarily limited to a liquid chemical storage container as shown, and may be a chamber using a gaseous chemical.

Next, the thermostat 200 according to an embodiment of the present invention may perform a function of cooling or heating the chemical substances stored in the storage tank 100 at a constant temperature through a circulation process.

More specifically, this constant temperature tank 200 is connected to the drain line of the storage tank 100, and it can be maintained at a constant temperature by cooling or heating it. It is possible to repeatedly maintain a cycle in which chemicals at a constant temperature are filled. In addition, the thermostat 200 can stably compensate the temperature by the process cooling water (PCW) supplied (circulated) from the process cooling water temperature control system 400 according to the present invention.

Next, the thermostat control module 300 according to an embodiment of the present invention may be a control device capable of controlling the operation of the thermostat 200 to adjust the chemical substances in the storage tank 100 to a constant temperature.

More specifically, the thermostat control module 300 measures the chemical temperature in the storage tank 100 through the temperature sensor T1 provided in the storage tank 100 , and compares it with the set temperature of the thermostat 200 . Thus, the temperature of the thermostat 200 can be precisely controlled. At this time, the temperature of the thermostat 200 can be precisely maintained by the process cooling water (PCW) used to cool the heat generated while the thermostat 200 is operating. This process cooling water (PCW) is a process cooling water to be described later It will be possible to clearly understand its function and operating process by the temperature control system 400 .

Next, the process cooling water temperature control system 400 according to an embodiment of the present invention is a constant temperature bath 200 that corrects the chemical substances stored in the storage tank 100 to a constant temperature, and process cooling water (PCW) It may be a system that performs the function of supplying and circulating.

More specifically, the process cooling water temperature control system 400 includes a temperature control means for supplying the process cooling water (PCW) to the thermostat 200 integrally inside the thermostat B, and this is combined with the thermostat 200 and By interlocking control, more efficient and precise temperature control may be possible. In particular, the process cooling water temperature control system 400 communicates with the thermostat control module 300 for controlling the temperature of the thermostat 200 to receive the temperature information of the thermostat 200 , and based on this, the process cooling water (PCW) ) Precise temperature control may be possible by cooling or heating to maintain the temperature at the set temperature.

As such, the process cooling water temperature control system 400 implementing an important function in the present invention may be more clearly understood by the following detailed description with reference to FIGS. 3 to 6 .

Next, the valves (V1, V2, V3) according to an embodiment of the present invention are V1 ( input valve), V2 (circulation valve) that controls the opening/closing of transport of chemical substances circulating from the storage tank 100 to the thermostat 200, and the chemical substances that maintain a constant temperature in the storage tank 100 back to factory facilities (A) can be composed of V3 (drain valve) to control open/close to transport (DRAIN). At this time, the chemical substance exceeding the water level of a certain capacity in the storage tank 100 may be discharged in the discharge direction (DRAIN).

Next, the pump P1 according to an embodiment of the present invention may be a circulating pump that circulates the chemicals discharged from the storage tank 100 .

More specifically, when V1 (input valve) is opened, a chemical (chemical) is transported (IN) from the factory facility (A) and filled in the storage tank 100. At this time, V2 (drain valve) and V3 (circulation) valve) is in a locked state, and the pump P1 and the thermostat 200 may also maintain a stopped state. Subsequently, when the storage tank 100 is filled to a certain level with a chemical substance, V1 (input valve) is locked and V2 (circulation valve) is opened at the same time as the pump P1 is operated, and the thermostat 200 can be operated.

A plurality of these valves (V1, V2, V3) may be an air valve (Air Valve), the pump (P) may be a circulating pump (circulating pump) for circulating a fluid, but the present invention is not limited thereto. Any device having a valve function and a known pump function may be applied to the present invention without limitation.

Finally, the temperature sensor T1 according to an embodiment of the present invention is provided in the storage tank 100 and measures the chemical temperature stored (stored) therein, and transmits it to the thermostat control module 300 . It may be a temperature measurement means for performing

More specifically, when the thermostat 200 is operated, the thermostat control module 300 measures the temperature of the chemical in the storage tank 100 through the temperature sensor T1 provided in the storage tank 100, and this ), it is possible to precisely control the temperature of the thermostat 200 compared to the set temperature. As the temperature sensor T1, any known temperature measuring means may be used without limitation.

Meanwhile, in order to help understanding the functions and operations of a more specific configuration of the process cooling water temperature control system 400 according to the present invention described above, an example will be given in the following detailed description.

Process coolant temperature control system (400)

In the following detailed description, the internal configuration of the process cooling water temperature control system 400 that performs an important function for the implementation of the present invention, the function of each component, and the operation process will be described.

3 is a detailed configuration diagram of a process cooling water temperature control system 400 according to an embodiment of the present invention.

3, the process coolant temperature control system 400 according to an embodiment of the present invention includes a radiator module 410, a process coolant storage tank 420, a cooling module 430, a coolant pump P2, The cooling water temperature sensor T2, the process cooling water control module 440 and the exhaust port 450 may be included and configured.

First, the radiator module 410 according to an embodiment of the present invention allows the process cooling water (PCW) recovered from the thermostat 200 to pass through a plurality of pipes while extending the surface area of each pipe through a fin structure to heat exchange and It can perform a function of cooling or heating through air circulation by rotational motion.

Referring to FIG. 4 for a more detailed description, FIG. 4 is a detailed configuration diagram of a radiator module 410 according to an embodiment of the present invention. Such a radiator module 410 may be configured to include a radiator 411 and a radiator fan 412 as shown, (a) of FIG. 4 is a plan view of the radiator module 410, (b) is the above The cross section from I to I' in (a) is shown.

The radiator 411 allows the process cooling water (PCW) recovered from the thermostat 200 to pass through a plurality of pipes 411a while extending the surface area of each pipe 411a as heat exchange through a fin (411b, fin) structure. The process cooling water (PCW) may be cooled or heated. As an example, the fin 411b structure is preferably in a zigzag shape so as to be in contact with a lot of air, and various known fin structure shapes can be used without limitation.

Then, the radiator fan 412 can efficiently cool or heat the radiator 411 through air circulation by the rotational motion of the fan blades 412a that are rotated by a motor (not shown). In this case, a fitting (not shown) fixed to return and recover the process cooling water PCW from the thermostat 200 may be installed. It can be installed in the same way when supplying in the opposite direction.

Next, the process coolant storage tank 420 according to an embodiment of the present invention stores (stores) the process coolant that has passed through the radiator module 410, and performs a function of maintaining a constant temperature of the process coolant. It may be a device that

More specifically, the process coolant storage tank 420 is filled with a certain amount of process coolant that has been transported through the radiator module 410 , and then circulated to the thermostat 200 to stably maintain the temperature of the thermostat 200 . can support In this case, the process coolant storage tank 420 may include a filter (not shown) capable of removing contaminants generated during the circulation of the process coolant, and such a filter is the air generated during the circulation of the process coolant. By effectively removing bubbles, circulation efficiency is improved, and foreign substances that may be generated in the process of circulating the process cooling water can be further removed, thereby preventing system failure. The filter can also secure the safety of the system by detecting particles above a certain standard and sending a warning sound or message to the manager.

Next, the cooling module 430 according to an embodiment of the present invention is located on one surface of the process coolant storage tank 420, and cools the process coolant storage tank 420 through air circulation by thermoelectric effect and rotational motion. Or it may perform a function of heating.

Referring to FIG. 5 for a more detailed description, FIG. 5 is a detailed configuration diagram of a cooling module 430 according to an embodiment of the present invention. The cooling module 430 may be configured to include a thermoelectric element 431 , a heat sink 432 , and a heat radiation fan 433 as shown.

The thermoelectric element 431 is in contact with one surface of the process coolant storage tank 420, and can cool or heat the process coolant storage tank 420 by using the Peltier effect, which is a thermoelectric effect. The device 431 cools or heats the process coolant storage tank 420 by using a cooling or heating method using the principle that heat is absorbed or generated when a current is passed through different types of conductors or semiconductor contacts. can That is, one surface of the thermoelectric element 431 may be a cooling surface, and the other surface may be a heating surface. At this time, if the direction of the current is changed, the direction of generation and absorption of heat can also be conveniently changed.

Subsequently, the heat sink 432 may contact the other surface and one surface of the thermoelectric element 431 , and may radiate thermal energy transmitted through the thermoelectric element 431 to the outside. In this case, the other surface of the heat sink 432 may have a fin-shaped structure that can secure a surface area for efficient heat energy dissipation. Preferably, an aluminum material having high thermal conductivity may be used as a metal plate.

Then, the heat dissipation fan 433 is in contact with the other surface of the heat dissipation plate 432 and one side is in contact with the heat dissipation plate 432 through air circulation by the rotational motion of the fan blade 433a rotated by a motor (not shown) to efficiently heat the heat dissipation plate 432 . can be cooled or heated. In this case, the thermoelectric element 431 , the heat sink 432 , and the heat dissipation fan 433 can be in close contact with each other, so that a more efficient cooling and heating process can be performed.

Meanwhile, although not shown, in order to maximize the effect of the cooling module 430 , a separate heat sink (not shown) is additionally installed between the process coolant storage tank 420 and the thermoelectric element 431 to store the process coolant storage tank. The effect of sucking the heat from the 420 and sending out the cold air of the thermoelectric element 431 can be expected.

Next, the coolant pump P2 according to an embodiment of the present invention may perform a function of supplying the process coolant maintained at a set temperature from the process coolant storage tank 420 to the thermostat 200 .

More specifically, the process coolant cooled or heated to a constant temperature through the radiator module 410 and the cooling module 430 described above is filled in the process coolant storage tank 420. When a certain temperature and a certain amount are filled, As the cooling water pump P2 is operated, process cooling water may be supplied to the constant temperature tank 200 .

The coolant pump P2 may be a circulating pump that circulates a fluid (process coolant) from the process coolant storage tank 420, but the present invention is not limited thereto. It may be applied to the present invention without limitation.

Next, the cooling water temperature sensor T2 according to an embodiment of the present invention is provided in the process cooling water storage tank 420 and can perform a function of measuring the temperature of the process cooling water stored in the cooling water storage tank 420 . there is.

More specifically, the cooling water temperature sensor T2 is located inside the process cooling water storage tank 420 , and a known temperature measuring means capable of measuring the temperature of the process cooling water stored in the cooling water storage tank 420 . sensor) can be applied without limitation. It may be a non-contact temperature sensor. In this case, the process coolant temperature information inside the coolant storage tank 420 measured by the coolant temperature sensor T2 may be transmitted to the process coolant control module 440 to be utilized for precise process coolant temperature control.

Next, the process coolant control module 440 according to an embodiment of the present invention includes a radiator module 410, a process coolant storage tank 420, and a cooling module 430 that are internal components of the process coolant temperature control system 400 . , control the driving of the cooling water pump P2 and the cooling water temperature sensor T2 and the transmission and reception of information, and communicate with the external thermostat control module 300 and control it in connection therewith.

More specifically, the process cooling water control module 440 communicates with the constant temperature bath control module 300 for controlling the temperature of the constant temperature bath 200 , and the cooling water temperature sensor T2 provided in the constant temperature temperature and the process cooling water storage tank 420 . ) based on the measured process coolant temperature, the radiator module 410, the cooling module 430, and the coolant pump P2 are controlled to change the process coolant temperature stored in the process coolant storage tank 420 to the set temperature. can keep That is, the temperature information of the thermostat 200 and the temperature information of the process cooling water storage tank 420 (process cooling water measurement temperature) respectively correct the difference from the set temperature based on the temperature information of the cooling water temperature control system 400 . The operation of the configuration can be precisely controlled, and the detailed internal configuration and function of the process cooling water control module 440 according to an embodiment of the present invention can be understood in more detail by the following detailed description with reference to FIG. 6 . There will be.

Finally, the exhaust port 450 according to an embodiment of the present invention may perform a function of exhausting thermal energy emitted from the radiator module 410 and the cooling module 430 to the outside. Accordingly, since thermal energy can be exhausted to the outside, the effect of improving the circulation efficiency of the process cooling water and preventing a failure and load on the system can be expected.

In the above detailed description, a plurality of heat dissipation means, temperature sensors, valves and pumps are described as examples, but this is the most representative application process for convenience of description, and the present invention is not necessarily limited thereto, It will be apparent that the position and quantity of the components can be changed and adjusted as needed, and accordingly other components of the present invention can also be increased and implemented.

Internal configuration of the process coolant control module 440

In the following detailed description, the internal configuration of the hardware/software aspect of the process cooling water control module 440 that performs an important function for the implementation of the present invention and the function of each component will be described.

6 is a diagram illustrating in detail the internal configuration of the process coolant control module 440 according to an embodiment of the present invention.

Referring to FIG. 6 , the process cooling water control module 440 according to an embodiment of the present invention includes a recovery management unit 441 , a primary constant temperature management unit 442 , a secondary constant temperature management unit 443 , a supply management unit 444 , It may be configured to include a memory unit 445 , a communication unit 446 , and a control unit 447 .

According to this embodiment of the present invention, the collection management unit 441, the primary constant temperature management unit 442, the secondary constant temperature management unit 443, the supply management unit 444, the memory unit 445, the communication unit 446 and the control unit At 447, at least a portion of the radiator module 410, the process coolant storage tank 420, the cooling module 430, the coolant pump P2 and/or the coolant temperature inside the process coolant temperature control system 400 They may be program modules that transmit/receive data to/from the sensor T2 and transmit/receive data in conjunction with an external thermostat control module 300 . These program modules may be included in the process cooling water control module 440 in the form of an operating system, an application program module, and other program modules, and may be physically stored in various known storage devices, hardware components ( For example, it may be implemented as a general-purpose processor, a dedicated processor) and/or a software component (eg, firmware, an application, a program module) and a combination thereof. In addition, these program modules may be stored in a remote storage device capable of communicating with the process coolant control module 440 . Meanwhile, these program modules include routines, subroutines, programs, objects, components, data structures, etc. that perform specific tasks to be described later or execute specific abstract data types according to the present invention, but the present invention is not limited thereto. .

First, the recovery management unit 441 according to an embodiment of the present invention may perform a function of controlling whether the process cooling water is recovered from the thermostat 200 .

More specifically, the recovery management unit 441 includes a fitting (not shown) fixed to return and recover the process coolant from the thermostat 200 and a valve (not shown) for controlling opening/closing of the recovered process coolant. shown) to control whether the process coolant flowing into the process coolant temperature control system 400 is recovered.

Next, the primary constant temperature management unit 442 according to an embodiment of the present invention performs a function of primarily managing the temperature of the process coolant at a constant temperature (constant temperature) while passing through the radiator module 410. can

More specifically, the primary constant temperature management unit 442 may control the flow rate and speed of the process cooling water transported through the recovery management unit 441 while passing through the pipe 411a of the radiator 411. . In this case, the flow rate and speed of the process coolant may be implemented through a path of the pipe 411a or a control means (not shown, for example, a valve) capable of controlling the flow rate of the pipe. In addition, by controlling the rotational movement of the radiator fan 412 (eg, rotational speed, rotational direction, etc.), the temperature of the process coolant passing through the radiator module 410 can be primarily cooled or heated. .

Next, the secondary constant temperature management unit 443 according to an embodiment of the present invention sets the temperature of the process coolant subjected to the primary constant temperature treatment to 2 while passing through the process coolant storage tank 420 and the cooling module 430 . Secondarily, it can perform the function of managing at a constant temperature (constant temperature).

More specifically, the secondary constant temperature management unit 443 controls the temperature difference between the cooling surface and the heating surface of the thermoelectric element 431 by current controlling the thermoelectric element 431, and controls the rotational movement of the heat dissipation fan 433 ( For example, rotational speed, rotational direction, etc.), the temperature of the first incubated process coolant in the process coolant storage tank 420 may be secondarily cooled or heated. In this case, the thermoelectric element 431 may implement the temperature difference between the cooling surface and the heating surface using the Peltier effect, which is a thermoelectric effect. According to the set temperature of the process cooling water of the process cooling water storage tank 420, The temperature difference between the cooling surface of the thermoelectric element 431 in contact with the cooling water storage tank 420 and the heating surface of the thermoelectric element 431 in contact with the heat sink 432 can be controlled through current control by the process cooling water control module 440 there is. A more detailed description will be omitted as it overlaps with the description with reference to FIG. 5 described above.

Next, when the supply management unit 444 according to an embodiment of the present invention controls the cooling water pump P2 to satisfy the set temperature of the second constant temperature-treated process cooling water, in the process cooling water storage tank 420, the thermostat ( 200) to supply the corresponding process cooling water.

More specifically, the supply management unit 444 controls the cooling water pump P2 to cool or heat to a constant temperature through the primary and secondary constant temperature treatment process through the radiator module 410 and the cooling module 430 described above. When the processed cooling water satisfies the set temperature (the temperature set by the manager), the operation of the cooling water pump P2 may be controlled to be supplied to the thermostat 200 . The coolant pump P2 may be a method of controlling a circulating pump that circulates a fluid (process coolant) from the process coolant storage tank 420 .

Next, the memory unit 445 according to an embodiment of the present invention includes the collected process coolant temperature information (measured temperature of T2), set temperature information (temperature set by the administrator), process coolant flow rate information, and device operation information. It is a storage device that can store etc.

Next, the communication unit 446 according to an embodiment of the present invention transmits and receives status information and control signals including temperature information of the thermostat 200 from the thermostat control module 300 through the communication network, and based on this, the cooling water It can perform a function to transmit and receive a control signal in conjunction with the internal components of the temperature control system 400 .

Finally, the and control unit 447 according to an embodiment of the present invention includes the collection management unit 441 , the primary constant temperature management unit 442 , the secondary constant temperature management unit 443 , the supply management unit 444 , and the memory unit 445 . ) and/or a function of controlling the flow of data between the communication unit 446 . That is, the control unit 447 according to the present invention controls the flow of data from the outside or between each component of the cooling water temperature control system 400 , so that the recovery management unit 441, the primary constant temperature management unit 442, 2 The vehicle constant temperature management unit 443 , the supply management unit 444 , the memory unit 445 , and/or the communication unit 446 may be controlled to perform their own functions, respectively.

In particular, the first and second constant temperature treatment processes in which the first constant temperature management unit 442 and the second constant temperature management unit 443 manage the process cooling water at a constant temperature (constant temperature) are performed in the constant temperature bath 200 collected from the constant temperature bath control module 300 . ) and temperature information measured in the process cooling water storage tank 420 (measured temperature of the process cooling water) may be controlled. Therefore, based on the thermostat temperature and the measured cooling water temperature, in order to maintain the set temperature of the process coolant in the process coolant storage tank 420, the operation (cooling and heating degree) of the internal configuration of the coolant temperature control system 400 is performed. Since each is precisely controlled, the temperature of the process coolant stored in the process coolant storage tank 420 can be efficiently corrected to satisfy the set temperature.

The embodiments according to the present invention described above may be implemented in the form of program instructions that can be executed through various computer components and recorded in a computer-readable recording medium. The computer-readable recording medium may include program instructions, data files, data structures, etc. alone or in combination. In addition, in the above detailed description, the present invention has been described with specific details such as specific components and limited embodiments and drawings, but these are only provided to help a more general understanding of the present invention. It is not limited to, and those of ordinary skill in the art to which the present invention pertains can devise various modifications and variations from these descriptions.

Accordingly, the spirit of the present invention is not limited to the above-described embodiments, and not only the claims described below but also all modifications equivalently or equivalently to the claims described below belong to the scope of the spirit of the present invention. will do it

10, 100: storage tank
20, 200: constant temperature bath
30, 300: thermostat control module
400: process coolant temperature control system
410: radiator module, 411: radiator, 411a: plumbing, 411b: fins
412: radiator fan, 412a: fan blades
420: process coolant storage tank
430: cooling module
431: thermoelectric element, 432: heat sink, 433: heat dissipation fan, 433a: fan blade
440: process coolant control module
441: recovery management department
442: primary constant temperature management unit
443: secondary constant temperature management unit
444: Supply Management Department
445: memory unit
446: communication department
447: control
450: exhaust port
V1, V2, V3: valve
P, P1: pump
T, T1: temperature sensor
P2: coolant pump, T2: coolant temperature sensor

Claims (6)

As a system for temperature control of process cooling water included in a constant temperature device that is separate from factory equipment where the manufacturing process is performed,
A radiator that cools or heats process cooling water recovered from a constant temperature tank that maintains the chemical substances supplied from the factory facilities at a constant temperature through a plurality of pipes while passing through a plurality of pipes and cools or heats them through heat exchange through a fin structure that extends the surface area of each pipe, and the radiator a radiator module configured to include a radiator fan for cooling or heating through air circulation by rotational motion;
a process coolant storage tank that stores the process coolant that has passed through the radiator module and maintains a temperature of the process coolant at a set temperature;
a cooling module located on one surface of the process coolant storage tank and cooling or heating the process coolant storage tank through air circulation by thermoelectric effect and rotational motion;
a cooling water pump supplying the process cooling water satisfying the set temperature from the process cooling water storage tank to the constant temperature tank; and
The radiator module, the cooling module, and the cooling water pump are controlled based on the constant temperature bath temperature and the process cooling water temperature measured from the cooling water temperature sensor provided in the process cooling water storage tank by communicating with the thermostat control module for controlling the temperature of the thermostat. to maintain the temperature of the process coolant stored in the process coolant storage tank at the set temperature and control the supply of the process coolant to the constant temperature tank
Process cooling water temperature control system comprising a.
According to claim 1,
The cooling module is
a thermoelectric element in contact with one surface of the process coolant storage tank and cooling or heating the process coolant storage tank;
a heat sink in contact with the other surface and one surface of the thermoelectric element and dissipating heat energy transferred through the thermoelectric element to the outside; and
and a heat dissipation fan in contact with the other surface of the heat sink and cooling or heating the heat sink through air circulation by rotational motion.
According to claim 1,
The process cooling water storage tank,
The process cooling water temperature control system, characterized in that it has a built-in filter to remove contaminants generated in the process of circulating the process cooling water.
According to claim 1,
Process cooling water temperature control system, characterized in that it further comprises an exhaust port for exhausting the heat energy emitted from the radiator module and the cooling module to the outside.
3. The method of claim 2,
The process cooling water control module,
a recovery management unit for controlling whether the process cooling water is recovered from the thermostat;
a primary constant temperature management unit for controlling the flow rate and speed of the process coolant passing through the pipe of the radiator, and controlling the rotational motion of the radiator fan to manage the temperature of the process coolant passing through the radiator module;
Controlling the temperature difference between the cooling surface and the heating surface of the thermoelectric element by controlling the current of the thermoelectric element, and controlling the rotational movement of the heat dissipation fan to manage the temperature of the first constant temperature-treated process coolant in the process coolant storage tank secondary constant temperature management unit; and
A supply management unit that controls the coolant pump to supply the process coolant from the process coolant storage tank to the constant temperature tank when the second constant temperature treated process coolant meets a set temperature
Process cooling water temperature control system, characterized in that it comprises.
6. The method of claim 5,
The second constant temperature management unit,
According to the set temperature of the process coolant in the process coolant storage tank, the temperature difference between the cooling surface of the thermoelectric element in contact with the process coolant storage tank and the heating surface of the thermoelectric element in contact with the heat sink is current controlled by the process coolant control module Process cooling water temperature control system, characterized in that.

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