KR102327038B1 - A liquid isolator for vertical continuous plating apparatus - Google Patents

Abstract

The present invention relates to a liquid removing device, which is installed on a treatment tank of a vertical continuous plating facility to remove treatment liquid adhering to a substrate to be plated, which passes the treatment tank, is appropriate for storing the treatment liquid in the treatment tank and maintaining the level of the treatment liquid, and is optimized for guiding a substrate while preventing the separation and crumpling of the substrate. Disclosed is a liquid removal device of a vertical continuous plating facility, comprising: a lower plate; a first upper plate and a second upper plate installed above the lower plate with a gap therebetween in a lateral direction; a first front guide roller and a first rear guide roller installed between the lower plate and the first upper plate to be able to rotate, arranged adjacently to one side of an object to be plated, which is transported along the treatment tank, and installed in the transporting direction of the object to be plated with a gap therebetween; a second front guide roller and a second rear guide roller installed between the lower plate and the second upper plate to be able to rotate, arranged adjacently to the other side of the object to be plated, which is transported along the treatment tank, and installed in the transporting direction of the object to be plated with a gap therebetween; a first liquid removal belt hung on the first front guide roller and the first rear guide roller and installed to be in surface contact with one side surface of the object to be plated; and a second liquid removal belt hung on the second front guide roller and the second rear guide roller and installed to be in surface contact with the other side surface of the object to be plated.

Description

A liquid isolator for vertical continuous plating apparatus

The present invention relates to a liquid-reducing device for a vertical continuous plating facility, and is particularly suitable for confining and storing a treatment liquid in each treatment tank in an electroplating facility including pre-treatment and post-treatment, and has a water level control function and In addition, it relates to a liquid removal device of a vertical continuous plating facility that guides the entry of the substrate when the substrate, which is the object to be plated, enters the processing bath and removes the processing liquid adhered to the substrate that has passed through the processing bath.

In a vertical continuous plating facility, each treatment tank that isolates the treatment liquid for the pre-treatment tank and the post-treatment tank as well as the plating tank in the process of one cycle for plating. It is ideal to

In the existing electroplating facility, in order to continuously pass the substrate through each treatment tank, the substrate chucked by the conductive clamp is raised from the end of the previous treatment tank, transferred to the next treatment tank, lowered, and deposited into the next treatment tank. Because of this, as described above, a time delay due to the up-down operation of the substrate is inevitable to process the entire plating process (pre-processing, plating, and post-processing processes) while continuously transferring the substrate.

Accordingly, development of a vertical continuous plating facility that can perform plating while continuously transferring a substrate without an up-down operation of the substrate during substrate transfer continues. A passage is formed, and a liquid-removing device is installed in the passage portion to trap and isolate the treatment liquid in the treatment tank as much as possible.

As a technology related to such a liquid-removing device, Korean Patent Application Laid-Open No. 10-2012-0069804 (published on June 29, 2012) "Vertical plating apparatus equipped with a glass liquid-removing rod" (hereinafter referred to as 'prior art') is presented. has been

In the prior art, "a plating bath in which a passage is formed and opened at one end and the other end vertically, respectively, and a receiving portion is formed in which a plating solution is filled; a liquid mounted vertically in the passage and in contact with the substrate inserted into the passage A vertical plating apparatus equipped with a glass liquid cutting rod, characterized in that made of a cutting rod, wherein the passage includes an inlet formed at one end of the plating bath and an outlet formed at the other end of the plating bath, and the liquid cutting rod is made of a glass material "It's about technology.

In the prior art, the liquid-removing rod in contact with the substrate is made of a glass material, so that chemical and thermal deformation caused by the plating solution and scratches on the outer circumferential surface of the liquid-removing rod can be minimized. It is difficult to precisely set and it is difficult to apply to thin substrates with a thickness of 0.1 mm or less, and especially when applied to a flexible substrate in the form of a sheet, there is a problem that damage such as wrinkling occurs in the substrate, so it is not suitable.

[Document 1] Korean Patent Publication No. 10-2012-0069804 (published on June 29, 2012)

The present invention is optimal for confining and storing the treatment liquid in each process treatment tank of the pre-treatment, plating and post-treatment processes in a plating facility that continuously transfers the substrate without elevating or lowering the substrate. To provide a liquid removal device for a vertical continuous plating facility that guides the substrate entry into the treatment tank without wrinkling or separation of the substrate when entering the substrate, which is the object to be plated, and removes the treatment liquid on the substrate that has passed through the treatment tank. is putting

The problems to be solved by the present invention are not limited to the aforementioned problems. Other technical problems not mentioned will be clearly understood by those of ordinary skill in the art to which the present invention pertains from the following description.

In order to solve the above problems, a liquid-removing device for a vertical continuous type plating facility according to an embodiment of the present invention includes a lower plate; a first upper plate and a second upper plate installed to be spaced apart from each other left and right on the upper side of the lower plate; The first front guide roller and the first front guide roller installed rotatably between the lower plate and the first upper plate and disposed close to one side of the object to be plated to be transported along the treatment tank and spaced apart from each other along the transport direction of the object to be plated 1Rear guide roller; A second front guide roller and a second front guide roller installed rotatably between the lower plate and the second upper plate and disposed close to the other side of the object to be plated to be transported along the treatment tank and spaced apart from each other along the transport direction of the object to be plated 2Rear guide roller; a first liquid-removing belt caught by the first front guide roller and the first rear guide roller and installed in surface contact with one side of the object to be plated; and a second liquid-removing belt caught by the second front guide roller and the second rear guide roller and installed in surface contact with the other side of the object to be plated.

In an embodiment of the present invention, a first seating groove in which the first liquid-removing belt is seated is formed on the first front guide roller and the first rear guide roller, and the second front guide roller and the second rear guide roller have the A second seating groove in which the second liquid control belt is seated is formed, and the first and second seating grooves are recessed to a depth corresponding to the thickness of the first and second liquid control belts, respectively.

In an embodiment of the present invention, a first engaging portion and a second engaging portion are respectively protruded inside the first and second liquid separation belts, and the first front guide roller and the first rear guide roller have the first A first locking groove is formed in which the locking part enters and is caught, and a second locking groove in which the second locking part enters and is caught is formed in the second front guide roller and the second rear guide roller.

In an embodiment of the present invention, the first and second locking portions are formed at lower ends of the first and second liquid-removing belts, respectively.

In an embodiment of the present invention, it further includes a first tension maintaining means for maintaining the tension of the first liquid-removing belt, wherein the first tension-maintaining means includes the lower plate and the first upper plate so as to be in contact with the first liquid-removing belt. a first pressure roller installed rotatably between the a first lower fixing part installed on the lower plate to be spaced apart from the first pressing roller along the flow direction of the first pressing roller; and a first lower spring member installed between the first lower fixing part and the first pressing roller to press the first pressing roller toward the first liquid-removing belt.

In an embodiment of the present invention, the first tension maintaining means includes a first upper fixing part and the first upper part installed on the first upper plate so as to be spaced apart from the first pressing roller along the flow direction of the first pressing roller. A first upper spring member installed between the fixed part and the first pressure roller to press the first pressure roller toward the first liquid-removing belt; further comprising, wherein the first upper spring member includes the first lower spring It has a lower elastic force than the member.

In an embodiment of the present invention, it further comprises a driving unit for rotating the first liquid transfer belt and the second liquid transfer belt, wherein the driving unit is installed in front of the first front guide roller and catches the first liquid transfer belt a first driving roller; a second driving roller installed in front of the second front guide roller and on which the second liquid-removing belt is caught; a driving motor connected to the first driving roller to rotate the first driving roller; a first electric part connecting the driving motor and the first driving roller to transmit the rotational force of the driving motor to the first driving roller; and a second transmission unit that connects the first driving roller and the second driving roller to transmit the rotational force of the first driving roller to the second driving roller.

In an embodiment of the present invention, the frame further includes a frame installed between the lower plate and the first upper plate and the second upper plate so as to surround each of the guide rollers, the driving rollers, and each liquid transfer belt, wherein the frame comprises: , first and second side plates respectively installed between the lower plate and the first upper plate and between the lower plate and the second upper plate to form both sides of the frame; a first rear plate installed at the rear end of the first side plate to block the space between the first side plate and the first rear guide roller; and a second rear plate installed at the rear end of the second side plate to block the space between the second side plate and the second rear guide roller, and the first side plate and the second side plate are introduced into the frame. An opening for discharging the treated liquid to the outside is formed.

In the liquid-removing device of a vertical continuous plating facility according to an embodiment of the present invention, the first liquid-removing belt and the second liquid-removing belt are installed in a position where they are in surface contact with both sides of the object to be plated, respectively, so that the A significant amount of the treatment liquid can be effectively removed, and in particular, the effect of trapping and isolating the treatment liquid by a very small gap between the rollers is great, and accordingly, the effect will be large in maintaining the water level in the treatment tank.

In addition, the liquid transfer device for a vertical continuous type plating facility according to an embodiment of the present invention operates to guide the substrate in the belt transfer direction by rotating the first liquid transfer belt and the second liquid transfer belt while in contact with the object to be plated. , in the case of a thin substrate, when the substrate enters the processing bath with the processing liquid exiting from the inlet side of the processing bath, the substrate is guided in an unfolded state and transferred into the processing bath by preventing the separation and wrinkling of the substrate. have.

For this reason, since the substrate is continuously transferred without an up-down operation in each treatment tank of the plating facility and processed while minimizing one cycle time of the plating process, the plating process can be performed without defects in the product (substrate), which can increase the production yield. It works.

On the other hand, in the present invention, since the substrate is guided by the belt rotating at the same speed as the feeding speed of the substrate transferred by the clamp, even a thin substrate of 0.1t or less can pass through the liquid section without wrinkling or damage.

In the present invention described above, the difference in height should be small enough not to interfere with the lower end of the clamp and the upper end of the roller on which the belt is wound, so as to reduce the amount of the treatment liquid overflowing the upper part of the roller during the process in which the lower end of the clamp is submerged.

1 is a front view showing a state of use of a liquid-removing device of a vertical continuous plating facility according to an embodiment of the present invention.
2 is a plan view showing a state of use of a liquid-removing device of a vertical continuous plating facility according to an embodiment of the present invention.
Figure 3 is an enlarged view of the region [A] of Figure 2;
Figure 4 is a side view showing the use state of the liquid-removing device of the vertical continuous plating facility according to an embodiment of the present invention.
Figure 5 is a perspective view showing the front, side and upper surface of the liquid-removing device of the vertical continuous plating facility according to an embodiment of the present invention.
6 is an exploded perspective view of the upper plate in FIG. 5;
7 is a perspective view showing the front, side and lower surface of the liquid-removing device of the vertical continuous plating facility according to an embodiment of the present invention.
8 is a plan view of a liquid-removing device of a vertical continuous plating facility according to an embodiment of the present invention.
9 is a side view showing the coupling structure of each guide roller and each liquid-removing belt in the liquid-removing device of a vertical continuous plating facility according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. For convenience of description, components shown in the drawings may be exaggerated, omitted, or schematically represented.

1 to 4, the liquid control device 10 of the vertical continuous plating facility according to the embodiment of the present invention is the inlet side and the outlet side of each treatment tank 20 that passes when the substrate is transferred. It is installed in the treatment tank 20 to reduce the leakage of the treatment liquid to the inlet and outlet side of the treatment tank 20, thereby trapping the treatment liquid in the treatment tank, so that the water level of the treatment liquid can be maintained.

The interior of the treatment tank 20 is divided into a treatment space 22 in the center by partition walls 21 at both ends thereof, and installation spaces 24 formed on both sides of the treatment space 22 . The liquid removal device 10 of the present invention is installed in the installation space 24 , and the processing liquid is accommodated in the processing space 22 . Slots 23 extending vertically in the center of the partition wall 21 so that the object 30 to be plated can move through the partition wall 21 to move between the processing space 22 and the installation space 24 (see FIG. 3 ) this is formed At the bottom of the installation space 24, the processing liquid flowing into the installation space 24 after overflowing and passing through the liquid-removing device of the present invention in the processing tank is recovered and re-supplied to the processing space 22 in the processing tank A drain hole 25 is formed. Accordingly, a pipe connecting the drain port 25 and the treatment space 22 is installed in the drain port 25 , and a pump for recovering the treatment liquid flowing into the drain port 25 into the treatment space 22 is installed in the pipe. is installed Although not shown separately in the drawing, the installation space 24 in which the drain hole 25 is installed is a step with a certain height between other neighboring process parts so that the treatment liquids overflowed from different process treatment tanks do not mix with each other. It goes without saying that the overflow inflow treatment liquid is configured to isolate so that it is recovered to the treatment tank of each process through the drain holes 25 of each of the neighboring processes.

Here, the treatment tank 20 is a generic term for a tank in which various treatment liquids used in the plating process, such as a plating liquid, a degreasing liquid, a washing liquid, and hot water for bath washing, are contained.

That is, the liquid removal device 10 of the present invention is installed in various treatment tanks 20 of plating equipment, such as a degreasing tank, a water washing tank, a hot water bath, and a plating tank, and the object to be plated 30 passes through each treatment tank 20 . When passing through, the treatment liquid attached to the object to be plated 30 is removed from the treatment tank 20 of the previous process, and then enters the treatment tank 20 of the post process to prevent loss and mixing of the treatment liquid. do.

As shown in FIGS. 5 to 9, the liquid removal device of the vertical continuous plating facility according to the embodiment of the present invention is largely a lower plate 100, an upper plate 200, a front guide roller 300, a rear guide roller 400, It consists of a liquid-removing belt 500 , a tension maintaining means 600 , a driving unit 700 , and a frame 800 .

The lower plate 100 is installed below the front guide roller 300 and the rear guide roller 400 to rotatably support them.

The lower plate 100 is mounted on the support 26 installed in the lower portion of the installation space 24 and is installed to be spaced apart from the bottom of the installation space 24 upward.

The lower plate 100 may include a first lower plate 110 and a second lower plate 120 divided to form a symmetric structure in the left and right sides.

The upper plate 200 is installed on the upper side of the lower plate 100 to rotatably support the upper ends of the front guide roller 300 and the rear guide roller 400 .

The upper plate 200 includes a first upper plate 210 and a second upper plate 220 that are installed to be spaced apart from each other left and right. A clamp 40 (refer to FIG. 4 ) of a plating facility or the object to be plated 30 fixed to the clamp 40 passes between the first upper plate 210 and the second upper plate 220 .

The front guide roller 300 is rotatably installed between the lower plate 100 and the upper plate 200 , and is a first front guide roller installed between the first lower plate 110 and the first upper plate 210 . 310 and a second front guide roller 320 installed between the second lower plate 120 and the second upper plate 220 .

The rear guide roller 400 is rotatably installed between the lower plate 100 and the upper plate 200, and the first lower plate 110 so as to be spaced apart from the rear of the first front guide roller 310. The second lower plate 120 and the second upper plate 220 are disposed to be spaced apart from the rear of the first rear guide roller 410 and the second front guide roller 320 installed between the first upper plate 210 and the second lower plate 120 . ) is composed of a second rear guide roller 420 installed between.

At this time, the first front guide roller 310 and the first rear guide roller 410 are disposed adjacent to one side of the object to be plated 30 transferred along the treatment tank 20, the object 30 to be plated. are spaced apart from each other along the transport direction of the

In addition, the second front guide roller 320 and the second rear guide roller 420 are disposed adjacent to the other side of the object to be plated 30 transferred along the treatment tank 20, They are arranged to be spaced apart from each other along the transport direction.

Each of the guide rollers 310 , 320 , 410 , 420 preferably has a height adjacent to the clamp 40 within a range where the upper end does not interfere with the lower end of the clamp 40 . This is because the difference in height between the upper end of each of the guide rollers 310, 320, 410 and 420 and the lower end of the clamp 40 is small, so that the upper side of each guide roller 310, 320, 410, 420. This is because the amount of overflow of the treatment liquid can be minimized.

The liquid removal belt 500 is in contact with the object to be plated 30 to remove the treatment liquid adhered to the object 30 to be plated, and the first front guide roller 310 and the first rear guide roller 410 . It consists of a first liquid-removing belt 510 installed so as to be caught on the

At this time, the first liquid-removing belt 510 comes into contact with one side of the object to be plated 30 by the distance the first front guide roller 310 and the first rear guide roller 410 are spaced apart, so that the object to be plated ( 30) will be interviewed.

In addition, the second liquid-removing belt 520 comes into contact with the other side of the object 30 to be plated by the distance the second front guide roller 320 and the second rear guide roller 420 are spaced apart. ) will be interviewed with the other side of the

As shown in FIG. 8 , the tension maintaining means 600 maintains the first tension maintaining means 610 for maintaining the tension of the first liquid transfer belt 510 and the tension of the second liquid transfer belt 520 . It is composed of a second tension maintaining means for

Here, the first tension maintaining means 610 is a first pressing roller 611 , a first upper fixing part 612 , a first lower fixing part 613 , and a first upper part as shown in FIGS. 6 and 8 . It comprises a spring member (614) and a first lower spring member (615).

The first pressure roller 611 is rotatably installed between the lower plate 100 and the first upper plate 210 so as to be in contact with the first liquid transfer belt 510 , and presses the first liquid transfer belt 510 . It is installed to be movable in the direction of At this time, the first upper plate 210 and the first lower plate 110 are formed with a first long hole 211 (see FIG. 6 ) into which the upper and lower rotation shafts of the first pressing roller 611 are respectively inserted. The first long hole 211 is elongated along the direction in which the first pressure roller 611 presses the first liquid transfer belt 510 , so that the first pressure roller 611 moves the first liquid transfer belt 510 . Allow it to flow in the direction of pressure.

The first upper plate 210 and the first upper fixing part 612 and the first lower fixing part 613 are spaced apart from the first pressing roller 611 along the flow direction of the first pressing roller 611 . ) and the first lower plate 110, respectively.

The first upper spring member 614 and the first lower spring member 615 are formed of a coil spring, and between the first upper fixing part 612 and the first pressing roller 611, the first lower fixing part ( 613) and the first pressing rollers 611 are respectively installed. Accordingly, the first upper spring member 614 and the first lower spring member 615 are first applied to the first pressure roller 611 by pressing the first pressure roller 611 toward the first liquid-removing belt 510 side. A pressure for maintaining the tension of the liquid transfer belt 510 is provided. The first upper spring member 614 and the first lower spring member 615 maintain the tension of the first liquid transfer belt 510 on the first pressing roller 611 by using an elastic force like a rubber band in addition to the coil spring method. Various methods that can provide pressure for

On the other hand, the first upper spring member 614 has a lower elastic force than that of the first lower spring member 615 so that the flexible belt is stretched upward without overlapping while the belt of a flexible material is driven downwards. will do More specifically, the first upper spring member 614 and the first lower spring member 615 apply tension to the first liquid transfer belt 510, so that the first liquid transfer belt 510 having flexibility is applied to gravity. Damage to the object 30 to be plated in contact with the upper portion of the first liquid transfer belt 510 as the tension weakens from the lower part to the upper part of the first liquid transfer belt 510. can be minimized.

In other words, the lower end of the object to be plated 30 fixed to the clamp 40 has a height that does not reach the lower end of the first liquid transfer belt 510 . The lower end of the contacting first liquid transfer belt 510 has a high tension, and the tension is gradually set higher toward the upper part of the first liquid transfer belt 510 . It is possible to prevent the upper end of 30 from being damaged by friction with the first liquid-removing belt 510 .

In addition, in order to maximize the effect of upwardly stretching the belt as described above and to simplify the structure of the first tension maintaining means 610 , the first tension maintaining means 610 is the first upper height A structure in which the top 612 and the first upper spring member 614 are omitted is also possible. That is, the first tension maintaining means 610 consists only of the first pressing roller 611 , the first lower fixing part 613 , and the first lower spring member 615 so that only the tension in the lower part of the belt acts on the belt. The upper part of the belt can be stretched upwards during driving.

The second tension maintaining means 620 may be configured substantially the same as or similarly to the first tension maintaining means 610 if there is no drooping of the upper part of the belt while the belt is being driven.

That is, the second tension maintaining means 620 is disposed between the second lower plate 120 and the second upper plate 220 so as to be in contact with the second liquid-removing belt 520 as shown in FIGS. 6 and 8 . Doedoe rotatably installed on the second pressure roller 621 is installed to be able to flow in the direction of pressing the second liquid-removing belt (520); A second upper fixing part 622 installed on the second upper plate 220 and the second lower plate 120 to be spaced apart from the second pressing roller 621 along the flow direction of the second pressing roller 621, respectively. and a second lower fixing part 623; and between the second upper fixing part 622 and the second pressing roller 621 and between the second lower fixing part 623 and the second pressing roller 621, respectively, the second pressing roller and a second upper spring member 624 and a second lower spring member 625 that press the 621 toward the second liquid-removing belt 520 .

As in the case of the first tension maintaining means 610 , the second upper spring member 624 preferably has a lower elastic force than the second lower spring member 625 . Also, the second tension maintaining means 620 may have a structure in which the second upper fixing part 622 and the second upper spring member 624 are excluded. That is, the second tension maintaining means 620 may be composed of only the second pressing roller 621 , the second lower fixing part 623 , and the second lower spring member 625 .

The driving unit 700 serves to rotate the first liquid transfer belt 510 and the second liquid transfer belt 520 , and includes a first driving roller 710 installed in front of the first front guide roller 310 ; a second driving roller 720 installed in front of the second front guide roller 320; a driving motor (not shown) connected to the first driving roller 710 to rotate the first driving roller 710; a first transmission unit 740 (refer to FIG. 4) for connecting the driving motor and the first driving roller 710 to transmit the rotational force of the driving motor to the first driving roller 710; and a second transmission unit 750 connecting the first driving roller 710 and the second driving roller 720 to transmit the rotational force of the first driving roller 710 to the second driving roller 720 ; is done by

Here, the first liquid separation belt 510 is caught on the first driving roller 710 , and the second liquid separation belt 520 is caught on the second driving roller 720 .

The driving motor may be configured to be used in combination with a motor for driving the clamp 40 of the plating facility, and if necessary, plating so as not to interfere with the clamp 40 of the plating facility or a device for driving the clamp 40 It may be separately provided at a certain place of the facility.

As shown in FIG. 4 , the first electric part 740 includes a sprocket 741 coupled to the upper rotation shaft of the first driving roller 710 and a chain 742 connecting the sprocket 741 and the driving motor. ) can be composed of As shown in FIG. 4 , the upper rotating shaft of the first driving roller 710 passes through the first upper plate 210 and is installed to protrude upward, and accordingly, the sprocket 741 is the first upper plate 210 . ) is installed on the upper side and connected to the chain 742 for driving the clamp 40 of the plating facility. That is, in the embodiment of the present invention, the driving motor and the chain 742 are configured for both the motor and the chain for transporting the clamp 40 of the plating equipment, and accordingly, the first electric part 740 is the clamp It is configured to be able to rotate the first driving roller 710 by using a driving force for transferring the 40 .

The second transmission unit 750 is a first gear 751 coupled to the lower end of the first driving roller 710, as shown in FIGS. 4 and 7, at the lower end of the second driving roller 760. The coupled second gear 752, the third gear 753 coupled to the first lower plate 110 to mesh with the first gear 751, and the third gear 753 and the second gear 752 ) and a fourth gear 754 coupled to the second lower plate 120 to engage.

As a result, in the driving unit 700 , as the rotational force of the driving motor is transmitted to the first driving roller 710 through the first electric unit 740 , the first liquid-removing belt caught on the first driving roller 710 . 510 is rotated, and then the rotational force of the first driving roller 710 is transmitted through the first gear 751 - the third gear 753 - the fourth gear 754 - the second gear 752. As it is transmitted to the second driving roller 720 , the second liquid-removing belt 520 caught on the second driving roller 720 is rotated.

The driving unit 700 is configured so that the portion that comes into contact with the object 30 to be plated in each of the liquid transfer belts 510 and 520 moves along the transfer direction of the object to be plated 30 in each liquid transfer belt 510 and 520 . It is preferable to rotate That is, when the object to be plated 30 is transferred from left to right based on FIG. 8 , it is preferable that the first liquid removal belt 510 rotate in a counterclockwise direction and the second liquid removal belt 520 rotate in a clockwise direction. do.

The frame 800 is configured to surround each of the guide rollers 310, 320, 410, 420, the driving rollers 710 and 720, and each of the liquid transfer belts 510 and 520. It is installed between the lower plate 100 and the upper plate 200 , between the first lower plate 110 and the first upper plate 210 , and between the second lower plate 120 and the second upper plate 220 . a first side plate 810 and a second side plate 820 respectively installed to form both sides of the frame 800; a first rear plate 830 installed at the rear end of the first side plate 810 to block between the first side plate 810 and the first rear guide roller 410; a second rear plate 840 installed at the rear end of the second side plate 820 to block the space between the second side plate 820 and the second rear guide roller 420; a first shielding plate 850 coupled to the first rear plate 830 to cover the rear of the first rear guide roller 410; and a second shielding plate 860 coupled to the second rear plate 840 to cover the rear of the second rear guide roller 420 .

Here, the opposite ends of the first shielding plate 850 and the second shielding plate 860 are disposed close to each other with a gap sufficient to allow the object to be plated 30 to pass therethrough.

As a result, the frame 800 surrounds each of the guide rollers 310, 320, 410 and 420, each of the driving rollers 710 and 720, and each of the liquid articulation belts 510 and 520. The plated object ( 30) is installed to pass through.

The rear ends of each of the side plates 810 and 820 are installed to protrude rearward past the respective rear plates 830 and 840 . The rear ends of each of the protruding side plates 810 and 820 are installed to be in close contact with the partition wall 21 , so that the treatment liquid introduced through the slot 23 of the partition wall 21 flows out of the frame 800 . blocking it from being

In addition, in the frame 800, the gap between the rear guide rollers 410 and 420 can be minimized by each of the rear plates 830 and 840 and the shielding plates 850 and 860, so that the It is possible to minimize the inflow of the treatment liquid flowing into the installation space 24 through the slot 23 of the partition wall 21 into the inside of the frame 800 .

Openings 811 and 821 for discharging the treatment solution flowing into the frame 800 to the outside may be formed in the first side plate 810 and the second side plate 820 . The openings 811 and 821 are formed between the first rear guide roller 410 and the second rear guide roller 420, and between the rear plates 830 and 840 and the rear guide rollers 410 and 410 ( The processing liquid introduced into the frame 800 through the gaps 420 may be smoothly discharged to the outside of the frame 800 . In addition, the treatment liquid discharged to the outside of the frame 800 is returned to the treatment space 22 through the drain hole 25 , thereby preventing loss of the treatment liquid.

The front guide roller 300, the rear guide roller 400, each pressing roller 611, 621 and each driving roller 710, 720 are preferably made of a material having excellent chemical resistance, heat resistance, abrasion resistance, etc. . For example, ultra high molecular weight polyethylene (UPE) may be used.

In addition, the liquid-removing belt 500 is preferably made of a material having excellent flexibility along with chemical resistance, heat resistance, abrasion resistance, and the like. For example, a belt made of Teflon or a belt made of silicon may be used. In particular, the belt made of Teflon has very good chemical resistance, so it can be used in processes such as etching and development.

On the other hand, as shown in FIG. 9 , the first front guide roller 310 so that the first liquid transfer belt 510 and the second liquid transfer belt 520 are fixed at a constant height and rotated without moving up and down. and the first rear guide roller 410 are formed with first seating grooves 311 and 411 in which the first liquid transfer belt 510 is seated, the second front guide roller 320 and the second rear guide roller ( Second seating grooves 321 and 421 in which the second liquid-removing belt 520 is seated may be formed in the 420 .

At this time, the first seating grooves 311 and 411 and the second seating grooves 321 and 421 are recessed to a depth corresponding to the thickness of the first and second liquid transfer belts 510 and 520, respectively. can be formed. Here, the above-mentioned "corresponding depth" means that the depth of each seating groove 311, 411, 321, 421 is the same as the thickness of each liquid joint belt 510 and 520 and is recessed. No, it means a range in which each liquid-removing belt is seated in each seating groove and does not flow up and down while maintaining contact with the object 30 to be plated. For example, when the thickness of each liquid control belt is about 0.25 mm, the depth of each seating groove may be about 0.75 mm.

In addition, in order to more effectively prevent the respective liquid-removal belts 510 and 520 from flowing up and down, as shown in FIG. A first locking part 511 and a second locking part 521 are formed, respectively, and the first locking part 511 enters the first front guide roller 310 and the first rear guide roller 410, The first locking grooves 312 and 412 to be caught are formed, and the second locking part 521 enters and gets caught in the second front guide roller 320 and the second rear guide roller 420 . Locking grooves 322 and 422 may be formed.

It is preferable to prepare each of the locking parts 511 and 521 by attaching them to each of the liquid transfer belts 510 and 520 after manufacturing them separately from each liquid transfer belt 510 and 520 under the manufacturing conditions. It may be formed integrally with the liquid removal belts 510 and 520 .

In addition, it is easy to manufacture the engaging portions 511 and 521 of the belt in a linear structure without frictional resistance during driving so that the engaging portions are formed from the lowermost end of the inner surface of the belts 510 and 520 .

When each of the locking parts 511 and 521 is separately manufactured and then attached to each of the liquid control belts 510 and 520 , each of the locking parts 511 and 521 is the same as each of the liquid control belts 510 and 520 . material or different materials. When each of the locking parts 511 and 521 is made of a material different from that of each of the liquid-removing belts 510 and 520 , each of the locking parts 511 and 521 is made of a material having superior durability than each of the liquid-removing belts 510 and 520 . It is preferable to consist of

Each of the separately manufactured locking parts 511 and 521 may be attached to each of the liquid control belts 510 and 520 by adhesion. And, when each of the locking parts 511 and 521 and each of the liquid transfer belts 510 and 520 is made of a material that is difficult to adhere to, for example, each of the locking parts 511 and 521 and each liquid transfer belt 510 ( When the 520 is made of Teflon, each of the locking parts 511 and 521 may be attached to each of the liquid articulation belts 510 and 520 by sewing.

Meanwhile, as shown in FIG. 9 , the first and second locking parts 511 and 521 are preferably formed at the lower ends of the first and second liquid-removing belts 510 and 520 , respectively. do. According to this, the first locking part 511 and the second locking part 521 are not in contact with the object 30 to be plated in the first liquid transfer belt 510 and the second liquid transfer belt 520 . By being positioned in the portion, it is possible to prevent damage to the object 30 to be plated by the first and second locking parts 511 and 521 .

The first seating grooves 311 and 411 and the first locking grooves 312 and 412 may also be formed in the first pressing roller 611 and the first driving roller 710 . Similarly, the second seating grooves 321 and 421 and the second locking grooves 322 and 422 may also be formed in the second pressing roller 621 and the second driving roller 720 .

In the liquid-removing device for a vertical continuous-type plating facility according to an embodiment of the present invention configured as described above, the first liquid-removing belt 510 and the second liquid-removing belt 520 are installed so as to be in surface contact with both sides of the object 30 to be plated, respectively. As a result, the treatment liquid adhering to the object to be plated 30 passing through the treatment tank 20 can be more effectively removed.

In addition, according to the liquid transfer device of the vertical continuous plating facility according to the embodiment of the present invention, the first liquid transfer belt 510 and the second liquid transfer belt 520 are rotated at the same speed as the moving speed of the object 30 to be plated. By bringing the object to be plated 30 in contact with the object 30 to be plated with a thickness of 0.1 mm or less, it is possible to easily guide and guide the object to be plated 30, so that the object 30 to be plated in the case of a flexible substrate is not prone to wrinkling, etc. It is possible to pass the axillary part without damage.

In addition, according to the liquid removal device of the vertical continuous plating facility according to the embodiment of the present invention, the plating process can be performed while the object to be plated is continuously transferred like a conveyor method without an up-down operation in each treatment tank of the plating facility. There is an effect that one cycle process time by plating equipment can be shortened by eliminating time loss due to operation.

The liquid-removing device of the vertical continuous plating facility according to the embodiment of the present invention is particularly applied to the plating equipment for the object 30 in the form of a sheet, and the liquid-removal device 30 keeps the distance between each object to be plated 30 accurately. By being able to pass through the portion, it is more meaningful to prevent the wrinkling of the plated object 30 . The liquid removal device for a vertical continuous type plating facility according to an embodiment of the present invention can be directly applied to a facility for plating the object 30 to be plated in a roll to roll method.

In the foregoing, the present invention has been described with reference to limited embodiments and drawings, but it will be apparent to those skilled in the art that various modifications are possible within the scope of the technical idea of the present invention. Accordingly, the protection scope of the present invention should be defined by the description of the claims and their equivalents.

10: liquid removal device 20: treatment tank
21: bulkhead 22: processing space
23: slot 24: installation space
25: drain 26: support
30: object to be plated 40: clamp
100: lower plate 110: first lower plate
120: second lower plate 200: upper plate
210: the first top plate 211: the first long hole
220: second upper plate 300: front guide roller
310: first front guide roller 311: first seating groove
312: first locking groove 320: second front guide roller
321: second seating groove 322: second locking groove
400: rear guide roller 410: first rear guide roller
411: first seating groove 412: first locking groove
420: second rear guide roller 421: second seating groove
422: second locking groove 500: liquid belt belt
510: first liquid section belt 511: first locking part
520: second liquid section belt 521: second locking part
600: tension maintaining means 610: first tension maintaining means
611: first pressing roller 612: first upper fixing part
614: first upper spring member 620: second tension maintaining means
621: second pressing roller 622: second upper fixing part
624: second upper spring member 700: driving unit
710: first driving roller 720: second driving roller
740: first transmission 741: sprocket
742: chain 750: second electric part
751: first gear 752: second gear
753: third gear 754: fourth gear
800: frame 810: first side plate
811: opening 820: second side plate
821: opening 830: first rear plate
840: second rear plate 850: first blanking plate
860: second blanking plate

Claims (8)

It is installed in the treatment tank 20 of the vertical continuous plating facility to remove the treatment liquid attached to the object 30 to be plated,
lower plate 100;
a first upper plate 210 and a second upper plate 220 installed to be spaced apart from each other left and right on the upper side of the lower plate 100;
It is rotatably installed between the lower plate 100 and the first upper plate 210 and is disposed close to one side of the object to be plated 30 transferred along the treatment tank 20, A first front guide roller 310 and a first rear guide roller 410 installed to be spaced apart from each other along the transport direction;
It is rotatably installed between the lower plate 100 and the second upper plate 220 and is disposed close to the other side of the object to be plated 30 transferred along the treatment tank 20, a second front guide roller 320 and a second rear guide roller 420 installed to be spaced apart from each other along the conveying direction;
a first liquid-removing belt 510 caught by the first front guide roller 310 and the first rear guide roller 410 and installed in surface contact with one side of the object to be plated 30 ; and
and a second liquid removal belt 520 caught on the second front guide roller 320 and the second rear guide roller 420 and installed in surface contact with the other side of the object to be plated 30; A liquid-removing device of a vertical continuous plating facility.
According to claim 1,
The first front guide roller 310 and the first rear guide roller 410 are formed with first seating grooves 311 and 411 in which the first liquid transfer belt 510 is seated,
The second front guide roller 320 and the second rear guide roller 420 are formed with second seating grooves 321 and 421 in which the second liquid-removing belt 520 is seated,
The first seating grooves 311 and 411 and the second seating grooves 321 and 421 are recessed to a depth corresponding to the thickness of the first and second liquid transfer belts 510 and 520, respectively. A liquid-removing device for a vertical continuous plating facility.
According to claim 1,
A first locking part 511 and a second locking part 521 are respectively formed to protrude on the inside of the first liquid separation belt 510 and the second liquid transfer belt 520,
The first front guide roller 310 and the first rear guide roller 410 are formed with first locking grooves 312 and 412 through which the first locking part 511 enters and is caught,
The second front guide roller 320 and the second rear guide roller 420 are vertically continuous, characterized in that second locking grooves 322 and 422 into which the second locking part 521 enters and is caught are formed. Liquid removal device of plating equipment.
4. The method of claim 3,
The first and second locking parts 511 and 521 are respectively formed at the lower ends of the first and second liquid transfer belts 510 and 520, respectively.
According to claim 1,
Further comprising a first tension maintaining means (610) for maintaining the tension of the first liquid-removing belt (510),
The first tension maintaining means 610 is,
The first liquid transfer belt 510 is rotatably installed between the lower plate 100 and the first upper plate 210 so as to be in contact with the first liquid transfer belt 510 , and is movably installed in the direction of pressing the first liquid transfer belt 510 . pressure roller 611;
a first lower fixing part 613 installed on the lower plate 100 so as to be spaced apart from the first pressing roller 611 along the flow direction of the first pressing roller 611; and
A first lower spring member 615 installed between the first lower fixing part 613 and the first pressing roller 611 to press the first pressing roller 611 toward the first liquid-removing belt 510 . ); A liquid-removing device for a vertical continuous plating facility, characterized in that it includes.
6. The method of claim 5,
The first tension maintaining means 610 is,
a first upper fixing part 612 installed on the first upper plate 210 to be spaced apart from the first pressing roller 611 along the flow direction of the first pressing roller 611; and
A first upper spring member 614 installed between the first upper fixing part 612 and the first pressing roller 611 to press the first pressing roller 611 toward the first liquid-removing belt 510 . ); further including;
The first upper spring member (614) has a lower elastic force than that of the first lower spring member (615).
7. The method according to any one of claims 1 to 6,
Further comprising a driving unit 700 for rotating the first liquid transfer belt 510 and the second liquid transfer belt 520,
The driving unit 700,
a first driving roller 710 installed in front of the first front guide roller 310 and on which the first liquid transfer belt 510 is caught;
a second driving roller 720 installed in front of the second front guide roller 320 and on which the second liquid-removing belt 520 is caught;
a driving motor connected to the first driving roller 710 to rotate the first driving roller 710;
a first electric part 740 connecting the driving motor and the first driving roller 710 to transmit the rotational force of the driving motor to the first driving roller 710; and
Including; A liquid-removing device for a vertical continuous plating facility, characterized in that it is made.
8. The method of claim 7,
Each of the guide rollers 310, 320, 410, 420, each of the driving rollers 710 and 720, and the lower plate 100 and the Further comprising a frame 800 installed between the first upper plate 210 and the second upper plate 220,
The frame 800 is
The first side plate 810 and the second side plate 810 and the second are respectively installed between the lower plate 100 and the first upper plate 210 and between the lower plate 100 and the second upper plate 220 to form both sides of the frame 800 . side plate 820;
a first rear plate 830 installed at the rear end of the first side plate 810 to block between the first side plate 810 and the first rear guide roller 410; and
A second rear plate 840 installed at the rear end of the second side plate 820 to block between the second side plate 820 and the second rear guide roller 420;
Vertical continuous plating facility, characterized in that the first side plate 810 and the second side plate 820 are formed with openings 811 and 821 for discharging the treatment liquid flowing into the frame 800 to the outside. of liquid control device.

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