KR102288420B1 - 고 강성 기판을 갖는 반사 광학 소자 - Google Patents

고 강성 기판을 갖는 반사 광학 소자 Download PDF

Info

Publication number
KR102288420B1
KR102288420B1 KR1020187029488A KR20187029488A KR102288420B1 KR 102288420 B1 KR102288420 B1 KR 102288420B1 KR 1020187029488 A KR1020187029488 A KR 1020187029488A KR 20187029488 A KR20187029488 A KR 20187029488A KR 102288420 B1 KR102288420 B1 KR 102288420B1
Authority
KR
South Korea
Prior art keywords
layer
graphite
base substrate
delete delete
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020187029488A
Other languages
English (en)
Korean (ko)
Other versions
KR20180121628A (ko
Inventor
제임스 스콧 서덜랜드
레너드 제라드 웜볼트
케네스 스미스 우다드
Original Assignee
코닝 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 코닝 인코포레이티드 filed Critical 코닝 인코포레이티드
Publication of KR20180121628A publication Critical patent/KR20180121628A/ko
Application granted granted Critical
Publication of KR102288420B1 publication Critical patent/KR102288420B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Ceramic Products (AREA)
  • Laminated Bodies (AREA)
KR1020187029488A 2016-03-18 2017-03-16 고 강성 기판을 갖는 반사 광학 소자 Expired - Fee Related KR102288420B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662310201P 2016-03-18 2016-03-18
US62/310,201 2016-03-18
PCT/US2017/022653 WO2017161084A1 (en) 2016-03-18 2017-03-16 Reflective optical element with high stiffness substrate

Publications (2)

Publication Number Publication Date
KR20180121628A KR20180121628A (ko) 2018-11-07
KR102288420B1 true KR102288420B1 (ko) 2021-08-11

Family

ID=58455670

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187029488A Expired - Fee Related KR102288420B1 (ko) 2016-03-18 2017-03-16 고 강성 기판을 갖는 반사 광학 소자

Country Status (7)

Country Link
US (1) US10816702B2 (cg-RX-API-DMAC7.html)
EP (1) EP3430447A1 (cg-RX-API-DMAC7.html)
JP (1) JP2019513241A (cg-RX-API-DMAC7.html)
KR (1) KR102288420B1 (cg-RX-API-DMAC7.html)
CN (1) CN108780161A (cg-RX-API-DMAC7.html)
CA (1) CA3018211A1 (cg-RX-API-DMAC7.html)
WO (1) WO2017161084A1 (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018204376B4 (de) * 2018-03-22 2022-07-07 Infineon Technologies Ag Siliziumcarbidvorrichtungen und Verfahren zur Herstellung derselben
US11226438B2 (en) * 2018-10-03 2022-01-18 Corning Incorporated Reflective optical element
US11619764B2 (en) * 2020-03-27 2023-04-04 Raytheon Company High-performance optical surface
US12345851B2 (en) 2021-01-27 2025-07-01 Corning Incorporated Corrosion-resistant coatings for IR-transmitting substrates
CN117735991B (zh) * 2023-12-20 2024-06-28 扬州北方三山工业陶瓷有限公司 一种用于反射镜的b4c复合材料及其制备方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011222958A (ja) * 2010-03-25 2011-11-04 Komatsu Ltd ミラーおよび極端紫外光生成装置

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969131A (en) 1972-07-24 1976-07-13 Westinghouse Electric Corporation Coated graphite members and process for producing the same
US4268124A (en) 1978-06-21 1981-05-19 Trw Inc. Optical reflector having a nickel-iron alloy reflecting surface
DE3018785C2 (de) 1980-05-16 1982-04-15 Heraeus Quarzschmelze Gmbh, 6450 Hanau Leichtgewichtsspiegel, insbesondere für astronomische Zwecke und Verfahren zu seiner Herstellung
US4376803A (en) * 1981-08-26 1983-03-15 The Aerospace Corporation Carbon-reinforced metal-matrix composites
FR2552554A1 (fr) 1983-09-23 1985-03-29 Leteurtre Jean Miroir pour faisceau lumineux, notamment laser de puissance
US4623228A (en) 1984-10-25 1986-11-18 United Technologies Corporation Composite mirror substrate
US4659548A (en) * 1986-02-13 1987-04-21 The United States Of America As Represented By The Secretary Of The Navy Fabrication of metal matrix composite mirror
JP2585300B2 (ja) * 1987-10-06 1997-02-26 キヤノン株式会社 Ｘ線又は真空紫外線用多層膜反射鏡
US5071596A (en) 1989-10-23 1991-12-10 Cvd Incorporated Fabrication of lightweight ceramic mirrors by means of a chemical vapor deposition process
US4997678A (en) * 1989-10-23 1991-03-05 Cvd Incorporated Chemical vapor deposition process to replicate the finish and figure of preshaped structures
JPH0774839B2 (ja) * 1991-09-30 1995-08-09 東芝セラミックス株式会社 Ｓｏｒ用ミラー
US5565052A (en) 1992-03-05 1996-10-15 Industrieanlagen-Betriebsgesellschaft Gmbh Method for the production of a reflector
US5912777A (en) * 1997-06-26 1999-06-15 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High temperature solar reflector, its preparation and use
US6377655B1 (en) 1998-05-08 2002-04-23 Nikon Corporation Reflective mirror for soft x-ray exposure apparatus
ES2161171B1 (es) 1998-11-10 2003-04-01 Bwx Technologies Inc Un dispositivo optico reflector para lata temperatura.
US6206531B1 (en) * 1999-05-25 2001-03-27 Ultramet Lightweight precision optical mirror substrate and method of making
US7132309B2 (en) * 2003-04-22 2006-11-07 Chien-Min Sung Semiconductor-on-diamond devices and methods of forming
US6749309B1 (en) 2001-09-27 2004-06-15 Gsi Lumonics Corporation Optical element for scanning system and method of manufacture thereof
US7866343B2 (en) 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
US6921177B2 (en) 2003-02-24 2005-07-26 Raytheon Company High precision mirror, and a method of making it
US7022629B2 (en) 2003-08-12 2006-04-04 Raytheon Company Print through elimination in fiber reinforced matrix composite mirrors and method of construction
KR101120789B1 (ko) 2003-09-26 2012-04-20 쓰리엠 이노베이티브 프로퍼티즈 컴파니 촉매, 활성화제, 지지 매체, 및 특히 물리증착을 이용하여지지 매체 상에 촉매 증착시 촉매 시스템 제조에 유용한관련 방법
US7688495B2 (en) 2006-03-03 2010-03-30 Gentex Corporation Thin-film coatings, electro-optic elements and assemblies incorporating these elements
US8602576B1 (en) 2010-07-29 2013-12-10 Exelis, Inc. Lightweight mirror blanks by deposition
WO2012041697A1 (en) * 2010-09-27 2012-04-05 Carl Zeiss Smt Gmbh Mirror, projection objective comprising such a mirror, and projection exposure apparatus for microlithography comprising such a projection objective
US9575223B2 (en) * 2011-05-13 2017-02-21 Raytheon Company Magnesium mirrors and methods of manufacture thereof
DE102011103746A1 (de) * 2011-05-31 2012-12-06 Ixys Semiconductor Gmbh Verfahren zum Fügen von Metall-Keramik-Substraten an Metallkörpern
DE102012204833A1 (de) * 2012-03-27 2013-02-28 Carl Zeiss Smt Gmbh Glatte euv-spiegel und verfahren zu ihrer herstellung
US9488760B2 (en) * 2013-02-28 2016-11-08 Corning Incorporated Enhanced, durable silver coating stacks for highly reflective mirrors
JP2015018228A (ja) * 2013-06-10 2015-01-29 旭化成イーマテリアルズ株式会社 ペリクル膜及びペリクル
GB201313824D0 (en) 2013-08-01 2013-09-18 Orbital Power Ltd A Rotary Engine
US20160024648A1 (en) 2014-07-24 2016-01-28 Lauren Bolton Process for making triple graded CVC-CVD-CVC silicon carbide products

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011222958A (ja) * 2010-03-25 2011-11-04 Komatsu Ltd ミラーおよび極端紫外光生成装置

Also Published As

Publication number Publication date
JP2019513241A (ja) 2019-05-23
CN108780161A (zh) 2018-11-09
EP3430447A1 (en) 2019-01-23
US20180231698A1 (en) 2018-08-16
WO2017161084A1 (en) 2017-09-21
KR20180121628A (ko) 2018-11-07
US10816702B2 (en) 2020-10-27
CA3018211A1 (en) 2017-09-21

Similar Documents

Publication Publication Date Title
US10816702B2 (en) Reflective optical element with high stiffness substrate
JP2019513241A5 (cg-RX-API-DMAC7.html)
KR102360078B1 (ko) 향상된 성능의 금속계 광학 미러 기판
US20130057952A1 (en) Substrate made of an aluminum-silicon alloy or crystalline silicon, metal mirror, method for the production thereof, and use thereof
US20100022174A1 (en) Grinding tool and method for fabricating the same
JP5418231B2 (ja) 焼結体およびその製造方法ならびに光学部品
EP1597614B1 (en) High precision mirror, and a method of making it
CA2313438C (en) High quality optical surface and method of producing same
EP3722268B1 (en) Functional element, method for manufacturing functional element, and electronic device
JP2017536475A (ja) 高品質仕上げ可能な耐食性コーティングを有する反射鏡基体
US20170050890A1 (en) Advanced Mirrors Utilizing Polymer-Derived-Ceramic Mirror Substrates
US11226438B2 (en) Reflective optical element
CN120936493A (zh) 制造用于进一步加工成用于光学光导元件的复合板的基板叠层的方法
US9588338B2 (en) Reflective optical element for a dynamic deflection of a laser beam and method for manufacture thereof
CN113994267B (zh) 镜装配构件、使用它的位置计测用镜和曝光装置
JP2019510273A (ja) 反射光学系のためのグラファイト基体
WO2017083707A1 (en) Advanced mirrors utilizing polymer-derived mirror substrates
US20210157085A1 (en) Optical mount
US9933617B2 (en) Mirror including polycrystalline diamond body for use with a motor, scanning systems including the same, and related methods
CN103268006A (zh) 硫系玻璃透镜阵列圆片制造远红外镜头的结构和方法
JP2025104615A (ja) 撥水体、撥水部品及び撥水体の製造方法
Aggarwal et al. Recent developments in transparent polycrystalline spinel for electro-optic applications
CN121232335A (zh) 一种铍金属表面玻璃化双平面反射镜及其制备方法
Woida et al. Sol-gel coating of composite mirrors to provide a surface for optical figuring
JP2006058473A (ja) 誘電体多層膜フィルタ及びその製造方法

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20250805

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

H13 Ip right lapsed

Free format text: ST27 STATUS EVENT CODE: N-4-6-H10-H13-OTH-PC1903 (AS PROVIDED BY THE NATIONAL OFFICE); TERMINATION CATEGORY : DEFAULT_OF_REGISTRATION_FEE

Effective date: 20250805

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20250805