KR102256830B1 - 비정질 합금을 이용한 압력센서 - Google Patents

비정질 합금을 이용한 압력센서 Download PDF

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Publication number
KR102256830B1
KR102256830B1 KR1020180099461A KR20180099461A KR102256830B1 KR 102256830 B1 KR102256830 B1 KR 102256830B1 KR 1020180099461 A KR1020180099461 A KR 1020180099461A KR 20180099461 A KR20180099461 A KR 20180099461A KR 102256830 B1 KR102256830 B1 KR 102256830B1
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KR
South Korea
Prior art keywords
thin film
pressure detection
detection thin
substrate
strain
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KR1020180099461A
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English (en)
Korean (ko)
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KR20190022415A (ko
Inventor
박원욱
이제원
손근용
문지성
김태훈
박성준
김진아
Original Assignee
인제대학교 산학협력단
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Publication of KR20190022415A publication Critical patent/KR20190022415A/ko
Application granted granted Critical
Publication of KR102256830B1 publication Critical patent/KR102256830B1/ko

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    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C45/00—Amorphous alloys
    • C22C45/001—Amorphous alloys with Cu as the major constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C45/00—Amorphous alloys
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C45/00—Amorphous alloys
    • C22C45/005—Amorphous alloys with Mg as the major constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C45/00—Amorphous alloys
    • C22C45/04—Amorphous alloys with nickel or cobalt as the major constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C45/00—Amorphous alloys
    • C22C45/08—Amorphous alloys with aluminium as the major constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C45/00—Amorphous alloys
    • C22C45/10—Amorphous alloys with molybdenum, tungsten, niobium, tantalum, titanium, or zirconium or Hf as the major constituent
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)
KR1020180099461A 2017-08-24 2018-08-24 비정질 합금을 이용한 압력센서 KR102256830B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20170107220 2017-08-24
KR1020170107220 2017-08-24

Publications (2)

Publication Number Publication Date
KR20190022415A KR20190022415A (ko) 2019-03-06
KR102256830B1 true KR102256830B1 (ko) 2021-05-28

Family

ID=65439137

Family Applications (1)

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KR1020180099461A KR102256830B1 (ko) 2017-08-24 2018-08-24 비정질 합금을 이용한 압력센서

Country Status (2)

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KR (1) KR102256830B1 (fr)
WO (1) WO2019039921A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102331191B1 (ko) * 2020-06-08 2021-11-25 인제대학교 산학협력단 비정질 합금을 이용한 탄성 변형 부재 및 이를 이용한 압력 센서
KR102398725B1 (ko) * 2020-08-04 2022-05-17 주식회사 멤스팩 반도체형 풀 브리지 스트레인 게이지 모듈 및 이를 적용한 로드셀
KR200495431Y1 (ko) * 2020-10-27 2022-05-23 인제대학교 산학협력단 비정질 금속층을 포함하는 유연성 필름을 이용한 정밀 저울

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59132327A (ja) * 1983-01-18 1984-07-30 Aisin Seiki Co Ltd 圧力センサ
JPH06200357A (ja) * 1991-12-18 1994-07-19 Hitachi Metals Ltd 非晶質合金
JPH06248399A (ja) * 1993-02-23 1994-09-06 Kyowa Electron Instr Co Ltd ひずみゲージ用アモルファス合金およびひずみゲージ
KR20010105084A (ko) 2000-05-19 2001-11-28 김정희 압력변환기를 위한 고온용 금속 박막 스트레인 게이지의제조방법
KR101811214B1 (ko) * 2015-05-29 2017-12-22 고려대학교 세종산학협력단 비정질 금속을 이용한 유연한 압력 센서와, 압력 및 온도를 동시에 감지하는 유연한 이중모드 센서

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Publication number Publication date
KR20190022415A (ko) 2019-03-06
WO2019039921A1 (fr) 2019-02-28

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