KR102256426B1 - Cylindrical sputtering target and manufacturing method therefor - Google Patents

Abstract

By easily and reliably joining the cylindrical target material and the backing tube, damage to the cylindrical sputtering target is prevented and the efficiency of use is improved. One end of the backing tube 40 is closed by a dummy stopper 60 to be the sealing end 42, and the concave joint material having a substantially circular cross section into which the backing tube formed in the bonding material filling jig 70 can be inserted is maintained. The bonding material 30 in the molten state is stored in the part 72, and the backing tube 40 with the sealing end 42 facing downward is placed inside the target material 20 which is mounted on the bonding material filling jig 72. By inserting with a gap (g) and inserting it into the bonding material holding part 72 through the target material 20, the bonding material 30 in a molten state is extruded from the bonding material holding part 72, and the target material 20 After filling the gap g between the inner circumferential surface and the outer circumferential surface of the backing tube 40, it is solidified and removed from the bonding material filling jig 70, and the dummy stopper 60 is removed.

Description

Cylindrical sputtering target and its manufacturing method TECHNICAL FIELD

The present invention relates to a cylindrical sputtering target used in a magnetron sputtering device and a method of manufacturing the same.

This application claims priority based on Japanese Patent Application No. 2012-159966 filed in Japan on July 18, 2012 and Japanese Patent Application No. 2013-122295 filed in Japan on June 11, 2013, I won here.

As a magnetron sputtering device, there is a magnetron sputtering device provided with a cylindrical sputtering target that sputters while rotating the target. In this magnetron sputtering device, sputtering is performed while rotating the target while cooling the target by disposing the magnet inside the cylindrical target and flowing cooling water inside the target.

The sputtering apparatus using such a cylindrical sputtering target is suitable for film formation of a large area, and has a characteristic that the use efficiency of the target is very high. Since cooling water can flow inside the cylindrical target, cooling efficiency is high, and therefore, high electric power can be applied to the target, and film formation can be performed at high speed. Further, in general, a flat target has a use efficiency of about tens to 30%, whereas in a cylindrical target, the entire surface of the target material becomes an erosion region, so that a very high use efficiency of about 80% can be obtained.

Such cylindrical targets have conventionally been mainly used in film forming apparatuses for surface coating of building glass, and have hardly been applied to the manufacture of electronic parts requiring strict management of the film forming atmosphere. However, in recent years, large-scale targets such as solar cells and flat panel displays A rotating cathode sputtering device for manufacturing electronic components is being developed. For this reason, it is required to manufacture a high-quality cylindrical target at low cost.

In Patent Document 1, the bonding material attracts air by filling the bonding material (solder material) tightly using a pressure difference in the space formed between the cylindrical target material and the cylindrical base material (backing tube) arranged concentrically. It is described to prevent this.

Patent Document 2 describes that the bonding material is prevented from attracting air by using an adapter when injecting the bonding material between the cylindrical target material and the cylindrical backing tube.

In Patent Document 3, the lower end of the cylindrical target material is blocked by inserting a backing tube in which the upper end is closed to the lower end of the cylindrical target material arranged along the vertical direction, and the bonding agent in a molten state is stored in this cylindrical target material, and in this state It is described that a bonding agent is filled between the cylindrical target material and the backing tube by pushing the backing tube toward the upper end of the cylindrical target material.

In Patent Document 4, it is described that a bonding material in a molten state is put into a cylindrical target material having a closed lower end portion, and a bonding material is filled between the cylindrical target material and the cylindrical base body by pushing the cylindrical base body with the lower end closed therein.

Japanese Patent Laid-Open Publication No. 2010-70842 Japanese Unexamined Patent Application Publication No. 2011-84795 Japanese Unexamined Patent Publication No. 2011-127138 Japanese Laid-Open Patent Publication No. Hei 8-60351

In the case of injecting the molten bonding material between the cylindrical target material and the cylindrical backing tube, if the molten bonding material attracts air bubbles, the heat transfer in the bubble portion becomes uneven, reducing the cooling efficiency or cracking or peeling the sputtering target after bonding. There is a risk of damage to the back. In order to prevent such a situation, a method such as pushing a bonding material with pressure or applying vibration to push out air bubbles has been proposed. On the other hand, although there is a demand for a structure capable of reliably holding a cylindrical sputtering target used in a rotating state, such a structure may not be obtained depending on the manufacturing method.

The present invention has been made in view of such circumstances, by easily and reliably joining a cylindrical target material and a cylindrical backing tube to form a target that can be reliably held in use, and the cylindrical sputtering target at the time of manufacture and use. It aims at preventing breakage and improving the efficiency of use in a cylindrical sputtering target.

The present invention is a method of manufacturing a cylindrical sputtering target by joining an outer circumferential surface of a cylindrical backing tube and an inner circumferential surface of a cylindrical target material with a bonding material, wherein one end of the cylindrical backing tube is closed with a dummy stopper to serve as a sealing end, The cylindrical backing tube in which the molten bonding material is stored in a concave bonding material holding portion having a substantially circular cross section into which the cylindrical backing tube formed in the bonding material filling jig can be inserted, and the sealing end is directed downward, is provided with the bonding material filling jig. By inserting with a gap into the inside of the cylindrical target material placed on the cylinder, and inserting the bonding material holding portion through the cylindrical target material, the bonding material in a molten state is extruded from the bonding material holding portion, and the inner circumferential surface of the cylindrical target material and the cylindrical shape It is a manufacturing method of a cylindrical sputtering target in which the gap of the outer circumferential surface of a backing tube is filled, and then solidified, and removed from the bonding material filling jig to remove the dummy stopper.

According to this manufacturing method, the sealing end of the cylindrical backing tube sealed with a dummy stopper is inserted into the bonding material holding portion filled with the bonding material in a molten state, so that the bonding material is extruded and filled into the gap between the inner circumferential surface of the cylindrical target material and the outer circumferential surface of the cylindrical backing tube. . And, after the bonding material is solidified, a cylindrical sputtering target formed by bonding a cylindrical target material and a cylindrical backing tube can be easily obtained by simply removing unnecessary parts such as a dummy stopper or a portion where the bonding material protrudes from the bonding material filling jig. have. In this case, since the bonding material is filled in the gap between the cylindrical target material and the cylindrical backing tube so as to rise from the bottom, the generation of voids due to the remaining air bubbles is prevented, while firmly bonding the cylindrical target material and the cylindrical backing tube, these It is possible to improve the heat transfer property of the cooling property.

In addition, when filling the bonding material in the bonding material filling jig, the cylindrical backing tube inserted in the bonding material holding portion protrudes from one end of the cylindrical target material, so that the cylindrical sputtering target in which the cylindrical material backing tube protrudes from both ends of the cylindrical target material is easily achieved. Can be manufactured. At this time, by appropriately adjusting the capacity of the bonding material holding portion, the size of the dummy stopper, and the like, the amount of the bonding material extruded and filled between the members can be adjusted.

In this manufacturing method, it is preferable to form a spacer forming a constant interval with respect to the inner circumferential surface of the cylindrical target material on at least a part of the outer circumferential surface of the cylindrical backing tube. In this case, a cylindrical target material is disposed concentrically with respect to the cylindrical backing tube, so that a cylindrical sputtering target without eccentricity can be obtained. Further, since the gap between the cylindrical backing tube and the cylindrical target material is made uniform over the entire circumference by the spacer, heat transfer becomes uniform, and damage of the cylindrical sputtering target due to thermal expansion at the time of manufacture and use can be prevented.

Moreover, in this manufacturing method, it is preferable that the said spacer is made from copper or SUS. Since copper has high thermal conductivity, the heat transfer property of the cylindrical backing tube and the cylindrical target material is improved. On the other hand, since SUS is excellent in strength, it is difficult to cause bending or the like, and it improves workability when inserting a cylindrical backing tube into a cylindrical target material. Moreover, there is no case of impairing the heat transfer property.

Further, in this manufacturing method, it is preferable that the bonding material is metallic, and the outer circumferential surface of the cylindrical backing tube and the inner circumferential surface of the cylindrical target material are metallized in advance. When a metal material such as an In-based low melting point solder is used as the bonding material, by metallizing the outer circumferential surface of the cylindrical backing tube and the inner circumferential surface of the cylindrical target material in advance, the bonding material flows smoothly to each circumferential surface, making it easy to attach. It is possible to manufacture a cylindrical sputtering target capable of uniform heat transfer without forming air bubbles or the like between the and the cylindrical target material.

In addition, the present invention provides a cylindrical target material, a cylindrical backing tube protruding from both ends of the cylindrical target material and joined by a bonding material to the inner circumferential surface of the cylindrical target material, and at least between the inner circumferential surface of the cylindrical target material and the outer circumferential surface of the cylindrical backing tube. It is a cylindrical sputtering target having spacers disposed at both ends.

According to this cylindrical sputtering target, since the backing tube protrudes from both ends of the target material, it is easy to be reliably held in the sputtering apparatus, and the entire surface of the target material can be used efficiently. Further, since the bonding material is filled between the cylindrical target material and the cylindrical backing tube by the spacer without a gap, the heat transfer property is improved, so that damage due to heat shrinkage is unlikely to occur.

According to the cylindrical sputtering target of the present invention and its manufacturing method, a cylindrical target material and a cylindrical backing tube are easily and reliably joined to form a target that can be reliably held in use, and the cylindrical sputtering target in manufacturing and use While preventing damage, it is possible to improve the efficiency of use in a cylindrical sputtering target.

1 is a cross-sectional view showing one step in a method for manufacturing a cylindrical sputtering target according to the present invention.
Fig. 2 is a cross-sectional view showing a step following the step shown in Fig. 1 in the method for manufacturing a cylindrical sputtering target according to the present invention.
3 is a cross-sectional view showing a cylindrical sputtering target according to the present invention.

Hereinafter, an embodiment of a cylindrical sputtering target according to the present invention and a manufacturing method thereof will be described. The cylindrical sputtering target 10 is a cylindrical target material (hereinafter referred to as "target material") 20 and a bonding material 30 protruding from both ends of the target material 20 to the inner circumferential surface 21 of the target material 20 Cylindrical backing tube (hereinafter referred to as ``backing tube'') 40 joined by means of metal and disposed at least at both ends between the inner circumferential surface 21 of the target material 20 and the outer circumferential surface 41 of the backing tube 40 It is equipped with a spacer 50 (Fig. 3).

In FIGS. 1 to 3, each step of manufacturing a cylindrical sputtering target 10 by bonding the outer peripheral surface 41 of the backing tube 40 and the inner peripheral surface 21 of the target material 20 with a bonding material 30 is shown. First, before these processes, one end of the backing tube 40 is closed by a dummy stopper 60 to form the sealing end 42, and at least a part of the outer peripheral surface 41 of the backing tube 40 Thus, a spacer 50 forming a constant interval with respect to the inner circumferential surface 21 of the target material 20 is formed (FIG. 1).

The spacer 50 is preferably made of copper or made of SUS, and is preferably made into a wire shape having a diameter of 0.8 mm, for example. In addition, this spacer 50 can be installed by attaching it to the backing tube 40 with a heat-resistant tape, but while the target material 20 can be concentrically disposed with respect to the backing tube 40 , It is preferable to form so as not to impede the flow of the bonding material 30 in a molten state to be filled afterwards. That is, it is preferable to form a plurality of points in the circumferential direction and extending in the longitudinal direction at least near both ends of the backing tube 40.

The material and dimensions of the target material 20 and the backing tube 40 are not particularly limited, but, for example, the target material 20 is made of a metal such as Cu, Ag, Ti or ceramics, and has an inner diameter of 135 mm and a length of 1 As for the normal member of -3 m and the backing tube 40, a normal member made of Ti or SUS with an outer diameter of 133 mm and a length of 1 to 3 m can be used. Although the bonding material 30 is not particularly limited, for example, a metallic material such as an In-based low melting point solder material can be used. When the target material 20 has an inner diameter of 135 mm and the backing tube 40 has an outer diameter of 133 mm, the gap g thereof is 1 mm in radius, but the inner diameter of the target material 20 is 134 mm to 137 mm. In that case, it can be applied, and in that case, the gap g is preferably from 0.5 mm to 2 mm. When the gap (g) is less than 0.5 mm, the bonding material 30 is small and there is a possibility that the cushioning property may be weakened against impact, and when it exceeds 2 mm, it becomes difficult to obtain a cooling effect at the time of use, and the bonding material 30 ) Is wasted.

Further, the inner peripheral surface 21 of the target material 20 and the outer peripheral surface 41 of the backing tube 40 are metallized in advance. Metallization is performed, for example, by disposing the bonding material 30 in a molten state on each surface in a heated state, and applying the bonding material 30 while applying ultrasonic vibration using an ultrasonic iron or the like equipped with a heater. Metallization promotes the removal of contamination on each surface, reduction of the oxide film, removal of air bubbles, and the like, so that the bonding material 30 can be well fused to each surface.

And as shown in FIGS. 1 to 3, the target material 20 and the backing tube 40 are bonded using the bonding material filling jig 70. The bonding material filling jig 70 is formed on the inside of the target material holding part 71 to which the lower end surface of the target material 20 arranged along the vertical direction is in close contact, and the backing tube ( 40) It has a concave bonding material holding|maintenance part 72 of which the cross section which can be inserted is substantially circular. The inner diameter of the bonding material holding portion 72 is larger than the outer diameter of the backing tube 40 and is set substantially the same as the inner diameter of the target material 20. In the target material holding portion 71, a ring plate-shaped packing P for preventing leakage of the molten bonding material 30 by bringing the lower end surface of the target material 20 and the bonding material filling jig 70 into close contact is disposed. Has been.

First, as shown in FIG. 1, while storing the bonding material 30 in a molten state in the bonding material holding portion 72 of the bonding material filling jig 70, the target material 20 is provided in the target material holding portion 71. Hold and arrange along the vertical direction. Then, the backing tube 40 provided with the spacer 50 on the outer circumferential surface 41 is inserted into the target material 20 with the sealing end 42 sealed by the dummy stopper 60 facing downward. And, it is inserted into the bonding material holding|maintenance part 72 through this target material 20.

As shown in FIG. 2, since a gap g is formed between the inner circumferential surface of the target material 20 and the outer circumferential surface of the backing tube 40, when the backing tube 40 is inserted into the bonding material holding portion 72, melting The bonding material 30 in the state is extruded from the bonding material holding portion 72 and filled in the gap g between the inner peripheral surface 21 of the target material 20 and the outer peripheral surface 41 of the backing tube 40. After the bonding material 30 filled in the gap g is solidified, as shown in FIG. 3, the backing tube 40 and the target material 20 bonded to each other by the bonding material 30 are combined with a bonding material filling jig ( The cylindrical sputtering target 10 is obtained by removing it from 70) and removing the unnecessary dummy stopper 60, the protruding bonding material 30, and the like.

In addition, the volume of the whole bonding material holding part 72 is when the lower end of the backing tube 40 is inserted and the lower end surface of the dummy stopper 60 reaches the bottom surface of the bonding material holding part 72, the backing tube 40 ) And the total volume of the gap formed between the inner circumferential surface of the bonding material holding portion 72 and the inner circumferential surface of the target material 20, and the bonding material 30 at the upper end of the target material 20 as shown in FIG. It is good to have a little bulging out.

By the manufacturing method according to the embodiment of the present invention described above, as shown in FIG. 3, the cylindrical target material 20 and the inner peripheral surface of the cylindrical target material 20 protruding from both ends of the cylindrical target material 20 Arranged at least at both ends between the cylindrical backing tube 40 bonded to 21 by the bonding material 30 and the inner circumferential surface 21 of the cylindrical target material 20 and the outer circumferential surface 41 of the cylindrical backing tube 40 A cylindrical sputtering target 10 according to the present invention provided with a metal spacer 50 is obtained.

As described above, according to the manufacturing method according to the present invention, by adjusting the depth of the bonding material holding portion 72 and the length of the dummy stopper 60, the target material 20 and the backing tube 40 of any length are bonded. While being able to do so, the length of the backing tube 40 protruding from the end of the target material 20 can be adjusted. Therefore, by protruding both ends of the backing tube 40 from both ends of the target material 20 to an arbitrary length, a cylindrical sputtering target 10 having a portion that can be reliably held during use can be easily manufactured.

In addition, in this cylindrical sputtering target 10, since the bonding material 30 fills the gap g between the target material 20 and the backing tube 40 while rising from the bottom, the generation of voids due to the remaining air bubbles is prevented. Is prevented and is charged without gaps. Therefore, the target material 20 and the backing tube 40 are firmly bonded and the heat transfer property between them is improved, so that the target material 20 can be efficiently cooled, so that damage due to thermal expansion occurs. It is difficult to do, and when used in a sputtering apparatus, a high voltage can be applied to the cylindrical sputtering target 10, and high-speed film formation becomes possible. Moreover, since the backing tube 40 protruding from the target material 20 can be held, the whole target material 20 can be used, and the use efficiency can be improved.

In addition, the present invention is not limited to the configuration of the above-described embodiment, and various changes can be made in the detailed configuration within a range not departing from the spirit of the present invention.

For example, in the embodiment, a gap (g) between the inner circumferential surface of the target material and the outer circumferential surface of the backing tube is formed over the entire circumference, but if the amount of bonding material capable of bonding these target materials and the backing tube can be filled, it is surely Even if a gap is not formed around the entire circumference, it is not prohibited to partially form a gap, such as a gap in a groove shape or a spiral shape along the longitudinal direction of the target material.

10: cylindrical sputtering target
20: cylindrical target material
21: Naejumyeon
30: bonding material
40: cylindrical backing tube
41: outer peripheral surface
42: bag end
50: spacer
60: dummy stopper
70: bonding material filling jig
71: target material holding unit
72: bonding material holding part
P: packing
g: gap

Claims (7)

As a method of manufacturing a cylindrical sputtering target by joining the outer circumferential surface of the cylindrical backing tube and the inner circumferential surface of the cylindrical target material with a bonding material,
One end of the cylindrical backing tube is closed with a dummy stopper to be a sealing end,
A molten bonding material is stored in a concave bonding material holding portion having a circular cross section into which the cylindrical backing tube formed in the bonding material filling jig can be inserted,
The cylindrical backing tube with the sealing end facing downward is inserted into the inside of the cylindrical target material placed on the bonding material filling jig with a gap, and inserted into the bonding material holding portion through the cylindrical target material, thereby in a molten state. A bonding material is extruded from the bonding material holding portion, filled in the gap between the inner circumferential surface of the cylindrical target material and the outer circumferential surface of the cylindrical backing tube, solidified, and removed from the bonding material filling jig to remove the dummy stopper. The manufacturing method of the cylindrical sputtering target made into. The method of claim 1,
A method of manufacturing a cylindrical sputtering target, characterized in that a spacer is formed on at least a portion of the outer circumferential surface of the cylindrical backing tube to form a constant gap with respect to the inner circumferential surface of the cylindrical target material. The method of claim 2,
The method of manufacturing a cylindrical sputtering target, characterized in that the spacer is made of copper or SUS. The method according to any one of claims 1 to 3,
The bonding material is metallic, and the outer circumferential surface of the cylindrical backing tube and the inner circumferential surface of the cylindrical target material are metallized in advance. The method of claim 2,
The spacer is a method of manufacturing a cylindrical sputtering target, characterized in that made of a wire. The method of claim 2,
The spacer is a method of manufacturing a cylindrical sputtering target, characterized in that formed so as to extend in the longitudinal direction of the cylindrical backing tube. delete

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