KR102250917B1 - 구리-세라믹 복합체 - Google Patents
구리-세라믹 복합체 Download PDFInfo
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- KR102250917B1 KR102250917B1 KR1020187025786A KR20187025786A KR102250917B1 KR 102250917 B1 KR102250917 B1 KR 102250917B1 KR 1020187025786 A KR1020187025786 A KR 1020187025786A KR 20187025786 A KR20187025786 A KR 20187025786A KR 102250917 B1 KR102250917 B1 KR 102250917B1
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- Prior art keywords
- copper
- ceramic
- ceramic substrate
- aluminum oxide
- max
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/88—Metals
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- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
- C04B35/111—Fine ceramics
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/021—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles in a direct manner, e.g. direct copper bonding [DCB]
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- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
- C04B41/5111—Ag, Au, Pd, Pt or Cu
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- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
- C04B41/5127—Cu, e.g. Cu-CuO eutectic
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/20—Arrangements for cooling
- H10W40/25—Arrangements for cooling characterised by their materials
- H10W40/255—Arrangements for cooling characterised by their materials having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
- H10W70/69—Insulating materials thereof
- H10W70/692—Ceramics or glasses
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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- C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
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- C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
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- C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
- C04B2235/782—Grain size distributions
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
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- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/54—Oxidising the surface before joining
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/60—Forming at the joining interface or in the joining layer specific reaction phases or zones, e.g. diffusion of reactive species from the interlayer to the substrate or from a substrate to the joining interface, carbide forming at the joining interface
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Products (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP16157594.9 | 2016-02-26 | ||
| EP16157594 | 2016-02-26 | ||
| PCT/EP2017/053450 WO2017144332A1 (de) | 2016-02-26 | 2017-02-16 | Kupfer-keramik-verbund |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20180111938A KR20180111938A (ko) | 2018-10-11 |
| KR102250917B1 true KR102250917B1 (ko) | 2021-05-12 |
Family
ID=55443148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020187025786A Active KR102250917B1 (ko) | 2016-02-26 | 2017-02-16 | 구리-세라믹 복합체 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11584696B2 (https=) |
| EP (1) | EP3419949B1 (https=) |
| JP (1) | JP6858786B2 (https=) |
| KR (1) | KR102250917B1 (https=) |
| CN (1) | CN108698935B (https=) |
| HU (1) | HUE053549T2 (https=) |
| WO (1) | WO2017144332A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016203112B4 (de) | 2016-02-26 | 2019-08-29 | Heraeus Deutschland GmbH & Co. KG | Kupfer-Keramik-Verbund |
| DE102016203058B3 (de) * | 2016-02-26 | 2017-05-18 | Heraeus Deutschland GmbH & Co. KG | Kupfer-Keramik-Verbund und Modul |
| CN113929486B (zh) * | 2020-06-29 | 2022-12-09 | 比亚迪股份有限公司 | 一种陶瓷覆铜板及其制备方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010120801A (ja) * | 2008-11-19 | 2010-06-03 | Panasonic Corp | セラミックス基板 |
| WO2010114126A1 (ja) | 2009-04-03 | 2010-10-07 | 株式会社住友金属エレクトロデバイス | セラミックス焼結体およびそれを用いた半導体装置用基板 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3744120A (en) | 1972-04-20 | 1973-07-10 | Gen Electric | Direct bonding of metals with a metal-gas eutectic |
| US3766634A (en) | 1972-04-20 | 1973-10-23 | Gen Electric | Method of direct bonding metals to non-metallic substrates |
| US3994430A (en) | 1975-07-30 | 1976-11-30 | General Electric Company | Direct bonding of metals to ceramics and metals |
| DE3204167A1 (de) | 1982-02-06 | 1983-08-11 | Brown, Boveri & Cie Ag, 6800 Mannheim | Verfahren zum direkten verbinden von metallstuecken mit oxidkeramiksubstraten |
| DE4004844C1 (de) | 1990-02-16 | 1991-01-03 | Abb Ixys Semiconductor Gmbh | Verfahren zur Herstellung einer strukturierten Kupfermetallisierung auf einem Keramiksubstrat |
| DE4318241C2 (de) | 1993-06-02 | 1995-06-29 | Schulz Harder Juergen | Metallbeschichtetes Substrat mit verbesserter Widerstandsfähigkeit gegen Temperaturwechselbeanspruchung |
| DE4319944C2 (de) | 1993-06-03 | 1998-07-23 | Schulz Harder Juergen | Mehrfach-Substrat sowie Verfahren zu seiner Herstellung |
| JP2000239542A (ja) * | 1999-02-18 | 2000-09-05 | Matsushita Electric Ind Co Ltd | 粉体組成物及びその製造方法、並びに、熱伝導基板及びその製造方法 |
| DE19927046B4 (de) | 1999-06-14 | 2007-01-25 | Electrovac Ag | Keramik-Metall-Substrat als Mehrfachsubstrat |
| JP3929660B2 (ja) * | 1999-10-29 | 2007-06-13 | 京セラ株式会社 | 絶縁性アルミナ質基板およびアルミナ質銅貼回路基板 |
| JP4206915B2 (ja) * | 2002-12-27 | 2009-01-14 | 三菱マテリアル株式会社 | パワーモジュール用基板 |
| DE102004012231B4 (de) | 2004-03-09 | 2006-03-23 | Curamik Electronics Gmbh | Metall-Keramik-Substrat |
| WO2011152363A2 (ja) * | 2010-05-31 | 2011-12-08 | 西村陶業株式会社 | 熱放射部材用セラミックスの製造方法、熱放射部材用セラミックス、該セラミックスを用いてなる太陽電池モジュールおよびled発光モジュール |
| JP2012026863A (ja) | 2010-07-23 | 2012-02-09 | Toray Ind Inc | フィルムの検査装置、検査方法、及び製造方法 |
| JP5534610B2 (ja) | 2011-03-31 | 2014-07-02 | Jx日鉱日石金属株式会社 | Cu−Co−Si系合金条 |
| JP2013032265A (ja) * | 2011-07-01 | 2013-02-14 | Maruwa Co Ltd | 半導体装置用アルミナジルコニア焼結基板及びその製造方法 |
| JP6129738B2 (ja) * | 2011-07-14 | 2017-05-17 | 株式会社東芝 | セラミックス回路基板 |
| KR101548091B1 (ko) * | 2011-07-28 | 2015-08-27 | 가부시끼가이샤 도시바 | 산화물계 세라믹스 회로 기판의 제조 방법 및 산화물계 세라믹스 회로 기판 |
| DE102012110322B4 (de) | 2012-10-29 | 2014-09-11 | Rogers Germany Gmbh | Metall-Keramik-Substrat sowie Verfahren zum Herstellen eines Metall-Keramik-Substrates |
| CN104072186B (zh) | 2013-03-27 | 2016-03-30 | 比亚迪股份有限公司 | 一种陶瓷覆铜板的制备方法 |
| JP6076486B2 (ja) * | 2014-02-26 | 2017-02-08 | 日本碍子株式会社 | 半導体用複合基板のハンドル基板 |
| DE102016203030B4 (de) | 2016-02-26 | 2025-05-08 | Heraeus Electronics Gmbh & Co. Kg | Kupfer-Keramik-Verbund und ein diesen Verbund enthaltendes Modul |
| DE102016203112B4 (de) | 2016-02-26 | 2019-08-29 | Heraeus Deutschland GmbH & Co. KG | Kupfer-Keramik-Verbund |
-
2017
- 2017-02-16 US US16/078,662 patent/US11584696B2/en active Active
- 2017-02-16 CN CN201780012066.4A patent/CN108698935B/zh active Active
- 2017-02-16 WO PCT/EP2017/053450 patent/WO2017144332A1/de not_active Ceased
- 2017-02-16 HU HUE17708176A patent/HUE053549T2/hu unknown
- 2017-02-16 EP EP17708176.7A patent/EP3419949B1/de active Active
- 2017-02-16 JP JP2018544121A patent/JP6858786B2/ja active Active
- 2017-02-16 KR KR1020187025786A patent/KR102250917B1/ko active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010120801A (ja) * | 2008-11-19 | 2010-06-03 | Panasonic Corp | セラミックス基板 |
| WO2010114126A1 (ja) | 2009-04-03 | 2010-10-07 | 株式会社住友金属エレクトロデバイス | セラミックス焼結体およびそれを用いた半導体装置用基板 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2019515853A (ja) | 2019-06-13 |
| EP3419949B1 (de) | 2020-12-16 |
| CN108698935A (zh) | 2018-10-23 |
| EP3419949A1 (de) | 2019-01-02 |
| JP6858786B2 (ja) | 2021-04-14 |
| HUE053549T2 (hu) | 2021-07-28 |
| WO2017144332A1 (de) | 2017-08-31 |
| CN108698935B (zh) | 2021-05-25 |
| US20190055167A1 (en) | 2019-02-21 |
| US11584696B2 (en) | 2023-02-21 |
| KR20180111938A (ko) | 2018-10-11 |
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