KR102245812B1 - Aod 이동 저감을 위한 aod 툴 정착을 위한 레이저 시스템 및 방법 - Google Patents

Aod 이동 저감을 위한 aod 툴 정착을 위한 레이저 시스템 및 방법 Download PDF

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KR102245812B1
KR102245812B1 KR1020157022813A KR20157022813A KR102245812B1 KR 102245812 B1 KR102245812 B1 KR 102245812B1 KR 1020157022813 A KR1020157022813 A KR 1020157022813A KR 20157022813 A KR20157022813 A KR 20157022813A KR 102245812 B1 KR102245812 B1 KR 102245812B1
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South Korea
Prior art keywords
speed
positioning system
workpiece
laser
aod
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KR1020157022813A
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English (en)
Korean (ko)
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KR20150130278A (ko
Inventor
마크 에이 언라스
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일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/386—Removing material by boring or cutting by boring of blind holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/388—Trepanning, i.e. boring by moving the beam spot about an axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
KR1020157022813A 2013-03-15 2014-03-14 Aod 이동 저감을 위한 aod 툴 정착을 위한 레이저 시스템 및 방법 Active KR102245812B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361791656P 2013-03-15 2013-03-15
US201361791160P 2013-03-15 2013-03-15
US61/791,160 2013-03-15
US61/791,656 2013-03-15
PCT/US2014/027439 WO2014152526A1 (en) 2013-03-15 2014-03-14 Laser systems and methods for aod tool settling for aod travel reduction

Publications (2)

Publication Number Publication Date
KR20150130278A KR20150130278A (ko) 2015-11-23
KR102245812B1 true KR102245812B1 (ko) 2021-04-30

Family

ID=51522887

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Application Number Title Priority Date Filing Date
KR1020157022813A Active KR102245812B1 (ko) 2013-03-15 2014-03-14 Aod 이동 저감을 위한 aod 툴 정착을 위한 레이저 시스템 및 방법

Country Status (6)

Country Link
US (1) US9724782B2 (enExample)
JP (2) JP6636417B2 (enExample)
KR (1) KR102245812B1 (enExample)
CN (2) CN107150168B (enExample)
TW (1) TWI637803B (enExample)
WO (1) WO2014152526A1 (enExample)

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US10613513B2 (en) * 2013-02-11 2020-04-07 The Aerospace Corporation Systems and methods for modifying material substrates
KR102309213B1 (ko) * 2015-03-06 2021-10-05 인텔 코포레이션 레이저 빔 조향용 음향 광학 편향기 및 거울
SG10201804397UA (en) * 2015-06-22 2018-06-28 Electro Scientific Industries Inc Multi-axis machine tool and methods of controlling the same
US11077526B2 (en) * 2015-09-09 2021-08-03 Electro Scientific Industries, Inc. Laser processing apparatus, methods of laser-processing workpieces and related arrangements
JP7146770B2 (ja) 2016-12-30 2022-10-04 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド レーザ加工装置における光学部品の寿命を延ばすための方法及びシステム
CN116275467A (zh) 2018-06-05 2023-06-23 伊雷克托科学工业股份有限公司 激光加工设备、其操作方法以及使用其加工工件的方法
JP6684872B2 (ja) * 2018-08-17 2020-04-22 株式会社アマダホールディングス レーザ加工機及びレーザ加工方法
US11090765B2 (en) * 2018-09-25 2021-08-17 Saudi Arabian Oil Company Laser tool for removing scaling
KR102864252B1 (ko) * 2020-03-04 2025-09-26 삼성디스플레이 주식회사 전자 장치 제조 방법
EP4046741B1 (fr) 2021-02-23 2023-11-01 DM Surfaces SA Procede d'usinage laser d'un composant horloger

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Also Published As

Publication number Publication date
KR20150130278A (ko) 2015-11-23
JP2016517352A (ja) 2016-06-16
WO2014152526A1 (en) 2014-09-25
TW201446372A (zh) 2014-12-16
US20140263223A1 (en) 2014-09-18
CN105121088A (zh) 2015-12-02
TWI637803B (zh) 2018-10-11
CN105121088B (zh) 2017-03-08
JP2020037135A (ja) 2020-03-12
JP6636417B2 (ja) 2020-01-29
US9724782B2 (en) 2017-08-08
CN107150168A (zh) 2017-09-12
CN107150168B (zh) 2019-06-21

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