KR102240813B1 - 절대 압력 및 차압 변환기 - Google Patents

절대 압력 및 차압 변환기 Download PDF

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Publication number
KR102240813B1
KR102240813B1 KR1020167004046A KR20167004046A KR102240813B1 KR 102240813 B1 KR102240813 B1 KR 102240813B1 KR 1020167004046 A KR1020167004046 A KR 1020167004046A KR 20167004046 A KR20167004046 A KR 20167004046A KR 102240813 B1 KR102240813 B1 KR 102240813B1
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South Korea
Prior art keywords
pressure
cavity
absolute
differential pressure
transducer
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Korean (ko)
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KR20160051743A (ko
Inventor
존 엠. 룰
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일리노이즈 툴 워크스 인코포레이티드
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/48—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by a capillary element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/001—Means for regulating or setting the meter for a predetermined quantity
    • G01F15/002—Means for regulating or setting the meter for a predetermined quantity for gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0046—Fluidic connecting means using isolation membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Volume Flow (AREA)
  • Measuring Fluid Pressure (AREA)
KR1020167004046A 2013-09-06 2014-08-18 절대 압력 및 차압 변환기 Active KR102240813B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361874830P 2013-09-06 2013-09-06
US61/874,830 2013-09-06
PCT/US2014/051560 WO2015034663A2 (en) 2013-09-06 2014-08-18 Absolute and differential pressure transducer

Publications (2)

Publication Number Publication Date
KR20160051743A KR20160051743A (ko) 2016-05-11
KR102240813B1 true KR102240813B1 (ko) 2021-04-14

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020167004046A Active KR102240813B1 (ko) 2013-09-06 2014-08-18 절대 압력 및 차압 변환기

Country Status (5)

Country Link
US (1) US9562796B2 (enExample)
JP (1) JP6522624B2 (enExample)
KR (1) KR102240813B1 (enExample)
CN (1) CN105518419B (enExample)
WO (1) WO2015034663A2 (enExample)

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EP3112830B1 (en) 2015-07-01 2018-08-22 Sensata Technologies, Inc. Temperature sensor and method for the production of a temperature sensor
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US10520383B2 (en) * 2016-09-30 2019-12-31 Rosemount Inc. Temperature-compensating absolute pressure sensor
JP6871721B2 (ja) 2016-11-17 2021-05-12 株式会社堀場エステック 圧力式流量計
US10428716B2 (en) 2016-12-20 2019-10-01 Sensata Technologies, Inc. High-temperature exhaust sensor
US9889995B1 (en) 2017-03-15 2018-02-13 Core Flow Ltd. Noncontact support platform with blockage detection
WO2018184191A1 (zh) * 2017-04-07 2018-10-11 沛喆科技股份有限公司 差压传感器及其制造方法
US10502641B2 (en) 2017-05-18 2019-12-10 Sensata Technologies, Inc. Floating conductor housing
US11073846B2 (en) * 2018-01-30 2021-07-27 Illinois Tool Works Inc. Mass flow controller with absolute and differential pressure transducer
JP2020020736A (ja) * 2018-08-03 2020-02-06 アズビル株式会社 層流型差圧流量計
US11608840B2 (en) * 2018-08-21 2023-03-21 Michael Yuan Piezoelectric ring bender servo valve assembly for aircraft flight control actuation and fuel control systems
EP3853563B1 (en) 2018-09-18 2024-11-06 Swagelok Company Fluid monitoring module arrangements
WO2020061127A1 (en) 2018-09-19 2020-03-26 Swagelok Company Flow restricting fluid component
US11675374B2 (en) 2018-10-26 2023-06-13 Illinois Tool Works Inc. Mass flow controller with advanced zero trending diagnostics
US12379238B2 (en) 2018-10-26 2025-08-05 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics
CN109349921B (zh) * 2018-11-09 2021-04-13 青岛歌尔微电子研究院有限公司 电压力锅内部气压的检测结构、控制方法及电压力锅
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
US12259739B2 (en) * 2019-04-30 2025-03-25 Illinois Tool Works Inc. Advanced pressure based mass flow controllers and diagnostics
CN110793586A (zh) * 2019-12-04 2020-02-14 南通松达智能科技有限公司 一种层流差压超声波复合流量计
US12181328B2 (en) * 2020-04-17 2024-12-31 Illinois Tool Works Inc. Flow through pressure sensor structured to remove dead volume
CN111948091A (zh) * 2020-09-09 2020-11-17 中国科学技术大学 气体浓度测量装置及方法
CN112432675B (zh) * 2020-11-04 2023-10-24 合肥科迈捷智能传感技术有限公司 一种基于位置传感器的差压流量计零点偏置自动修正方法
CN112504547A (zh) * 2020-11-25 2021-03-16 成都凯天电子股份有限公司 一种长期稳定性的高精度动压测量方法及系统
US11940307B2 (en) 2021-06-08 2024-03-26 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
CN114111932A (zh) * 2021-10-19 2022-03-01 兆思科技(深圳)有限公司 流量测量单元、制氧机和流量测量方法
DE102021130134A1 (de) * 2021-11-18 2023-05-25 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Vorrichtung zur Fluidbegrenzung und Vorrichtung zum Messen einer Eigenschaft eines Prozessfluids
US12000723B2 (en) * 2022-02-18 2024-06-04 Mks Instruments, Inc. Method and apparatus for pressure based mass flow control
CN114719917B (zh) * 2022-03-17 2025-07-08 深圳市为朗仪表有限公司 一种压差流量计
US12436049B2 (en) 2023-02-16 2025-10-07 Te Connectivity Solutions Gmbh Sensor die with a diaphragm
US12313483B2 (en) 2023-03-31 2025-05-27 Te Connectivity Solutions Gmbh Sensor having a plurality of diaphragms
US12449322B2 (en) 2023-04-05 2025-10-21 Te Connectivity Solutions Gmbh Sensor assembly
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US20250076141A1 (en) * 2023-09-01 2025-03-06 Te Connectivity Solutions Gmbh Sensor Having a Package with a Sensor Die
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Also Published As

Publication number Publication date
JP6522624B2 (ja) 2019-05-29
US20160195415A1 (en) 2016-07-07
KR20160051743A (ko) 2016-05-11
CN105518419B (zh) 2019-10-18
US9562796B2 (en) 2017-02-07
WO2015034663A3 (en) 2015-05-07
CN105518419A (zh) 2016-04-20
JP2016531299A (ja) 2016-10-06
WO2015034663A2 (en) 2015-03-12

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