KR102215500B1 - 고휘도의 레이저-지속 플라즈마 광대역 광원 - Google Patents

고휘도의 레이저-지속 플라즈마 광대역 광원 Download PDF

Info

Publication number
KR102215500B1
KR102215500B1 KR1020187030297A KR20187030297A KR102215500B1 KR 102215500 B1 KR102215500 B1 KR 102215500B1 KR 1020187030297 A KR1020187030297 A KR 1020187030297A KR 20187030297 A KR20187030297 A KR 20187030297A KR 102215500 B1 KR102215500 B1 KR 102215500B1
Authority
KR
South Korea
Prior art keywords
plasma
laser
gas
light source
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020187030297A
Other languages
English (en)
Korean (ko)
Other versions
KR20180122014A (ko
Inventor
융-호 알렉스 추앙
샤오쉬 루
저스틴 디안후안 리오우
존 필든
Original Assignee
케이엘에이 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 케이엘에이 코포레이션 filed Critical 케이엘에이 코포레이션
Publication of KR20180122014A publication Critical patent/KR20180122014A/ko
Application granted granted Critical
Publication of KR102215500B1 publication Critical patent/KR102215500B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M16/00—Devices for influencing the respiratory system of patients by gas treatment, e.g. ventilators; Tracheal tubes
    • A61M16/10—Preparation of respiratory gases or vapours
    • A61M16/1005—Preparation of respiratory gases or vapours with O2 features or with parameter measurement
    • A61M16/101—Preparation of respiratory gases or vapours with O2 features or with parameter measurement using an oxygen concentrator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/32—Means for additional adjustment of the rate of flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/06—Closures, e.g. cap, breakable member
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/125—Selection of substances for gas fillings; Specified operating pressure or temperature having an halogenide as principal component
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/302—Vessels; Containers characterised by the material of the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2203/00—Vessel construction, in particular walls or details thereof
    • F17C2203/06—Materials for walls or layers thereof; Properties or structures of walls or their materials
    • F17C2203/0634—Materials for walls or layers thereof
    • F17C2203/0636—Metals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0311—Closure means
    • F17C2205/032—Closure means pierceable
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/011—Oxygen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/02—Applications for medical applications
    • F17C2270/025—Breathing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Emergency Medicine (AREA)
  • Pulmonology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Anesthesiology (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Hematology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Plasma Technology (AREA)
  • Discharge Lamp (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • X-Ray Techniques (AREA)
KR1020187030297A 2016-03-28 2017-03-27 고휘도의 레이저-지속 플라즈마 광대역 광원 Active KR102215500B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201662314169P 2016-03-28 2016-03-28
US62/314,169 2016-03-28
US15/285,333 2016-10-04
US15/285,333 US9865447B2 (en) 2016-03-28 2016-10-04 High brightness laser-sustained plasma broadband source
PCT/US2017/024339 WO2017172631A1 (en) 2016-03-28 2017-03-27 High brightness laser-sustained plasma broadband source

Publications (2)

Publication Number Publication Date
KR20180122014A KR20180122014A (ko) 2018-11-09
KR102215500B1 true KR102215500B1 (ko) 2021-02-10

Family

ID=59899044

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187030297A Active KR102215500B1 (ko) 2016-03-28 2017-03-27 고휘도의 레이저-지속 플라즈마 광대역 광원

Country Status (7)

Country Link
US (2) US9865447B2 (https=)
JP (1) JP6921108B2 (https=)
KR (1) KR102215500B1 (https=)
CN (1) CN108780732B (https=)
IL (1) IL261746B (https=)
TW (1) TWI709159B (https=)
WO (1) WO2017172631A1 (https=)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103792606B (zh) * 2014-01-26 2016-02-10 清华大学深圳研究生院 一种全息光栅的曝光方法及曝光光路
WO2017137074A1 (de) * 2016-02-10 2017-08-17 Trumpf Lasersystems For Semiconductor Manufacturing Gmbh Treiberlaseranordnung mit einem optischen isolator und euv-strahlungserzeugungsvorrichtung damit
US10345565B2 (en) 2016-03-22 2019-07-09 Robert David Frankel Depth and speed enhanced orthogonal beam stimulated fluorescent and stimulated Raman emission for in-vivo imaging
US10054778B2 (en) * 2016-03-22 2018-08-21 Robert David Frankel Orthogonal confocal stimulated emission microscopy
US9865447B2 (en) * 2016-03-28 2018-01-09 Kla-Tencor Corporation High brightness laser-sustained plasma broadband source
US11366455B2 (en) 2016-05-09 2022-06-21 Strong Force Iot Portfolio 2016, Llc Methods and systems for optimization of data collection and storage using 3rd party data from a data marketplace in an industrial internet of things environment
US11067389B2 (en) 2018-03-13 2021-07-20 Kla Corporation Overlay metrology system and method
US10714327B2 (en) * 2018-03-19 2020-07-14 Kla-Tencor Corporation System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination
US10823943B2 (en) * 2018-07-31 2020-11-03 Kla Corporation Plasma source with lamp house correction
US11262591B2 (en) 2018-11-09 2022-03-01 Kla Corporation System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution
JP7262217B2 (ja) * 2018-12-17 2023-04-21 住友重機械工業株式会社 光共振器
US10921261B2 (en) 2019-05-09 2021-02-16 Kla Corporation Strontium tetraborate as optical coating material
US11255797B2 (en) 2019-07-09 2022-02-22 Kla Corporation Strontium tetraborate as optical glass material
US10811158B1 (en) * 2019-07-19 2020-10-20 Kla Corporation Multi-mirror laser sustained plasma light source
US11596048B2 (en) * 2019-09-23 2023-02-28 Kla Corporation Rotating lamp for laser-sustained plasma illumination source
US11417492B2 (en) * 2019-09-26 2022-08-16 Kla Corporation Light modulated electron source
US11844172B2 (en) * 2019-10-16 2023-12-12 Kla Corporation System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sources
US10964523B1 (en) 2020-03-05 2021-03-30 Rnd-Isan, Ltd Laser-pumped plasma light source and method for light generation
US10770282B1 (en) * 2020-03-10 2020-09-08 Rnd-Isan, Ltd Laser-pumped plasma light source and plasma ignition method
JP6885636B1 (ja) * 2020-03-05 2021-06-16 アールアンドディー−イーサン，リミテッド レーザ励起プラズマ光源およびプラズマ点火方法
CN115362281A (zh) * 2020-04-09 2022-11-18 马克思-普朗克科学促进协会 热激光蒸发系统和在源处提供热激光束的方法
RU2735947C1 (ru) * 2020-06-08 2020-11-11 Федеральное государственное бюджетное учреждение науки Институт проблем механики им. А.Ю. Ишлинского Российской академии наук (ИПМех РАН) Устройство и способ подавления колебаний оптического разряда
RU2734074C1 (ru) * 2020-06-08 2020-10-12 Федеральное государственное бюджетное учреждение науки Институт проблем механики им. А.Ю. Ишлинского Российской академии наук (ИПМех РАН) Приспособление и способ стабилизации излучения оптического разряда
RU2734112C1 (ru) * 2020-06-08 2020-10-13 Федеральное государственное бюджетное учреждение науки Институт проблем механики им. А.Ю. Ишлинского Российской академии наук (ИПМех РАН) Устройство и способ избавления от неустойчивостей оптического разряда
RU2738461C1 (ru) * 2020-06-08 2020-12-14 Федеральное государственное бюджетное учреждение науки Институт проблем механики им. А.Ю. Ишлинского Российской академии наук (ИПМех РАН) Устройство и способ устранения колебаний оптического разряда
RU2734162C1 (ru) * 2020-06-08 2020-10-13 Федеральное государственное бюджетное учреждение науки Институт проблем механики им. А.Ю. Ишлинского Российской академии наук (ИПМех РАН) Устройство и способ стабилизации излучения оптического разряда
RU2734026C1 (ru) * 2020-06-08 2020-10-12 Федеральное государственное бюджетное учреждение науки Институт проблем механики им. А.Ю. Ишлинского Российской академии наук (ИПМех РАН) Устройство и способ избавления от колебаний оптического разряда
JP2023536367A (ja) * 2020-08-06 2023-08-24 アイエスティーイーキュー ビー．ヴィー． 高輝度レーザー励起プラズマ光源および収差低減方法
US11862922B2 (en) * 2020-12-21 2024-01-02 Energetiq Technology, Inc. Light emitting sealed body and light source device
US12015046B2 (en) 2021-02-05 2024-06-18 Kla Corporation Back-illuminated sensor with boron layer deposited using plasma atomic layer deposition
US12072606B2 (en) 2021-07-30 2024-08-27 Kla Corporation Protective coating for nonlinear optical crystal
US20230083057A1 (en) 2021-09-10 2023-03-16 Alliance Sports Group, LP Hand Held Spotlight
EP4405732A1 (en) * 2021-09-20 2024-07-31 ASML Netherlands B.V. Optical module for extreme ultraviolet light source
KR20230048655A (ko) 2021-10-05 2023-04-12 삼성전자주식회사 웨이퍼 검사 방법 및 이를 수행하기 위한 장치
USD1031106S1 (en) 2021-10-27 2024-06-11 Alliance Sports Group, L.P. Spotlight
USD1030106S1 (en) 2021-10-27 2024-06-04 Alliance Sports Group, L.P. Spotlight
US20250021009A1 (en) * 2021-12-23 2025-01-16 Asml Netherlands B.V. An assembly for a laser-operated light source and method of use
US12144072B2 (en) * 2022-03-29 2024-11-12 Hamamatsu Photonics K.K. All-optical laser-driven light source with electrodeless ignition
EP4548144A1 (en) * 2022-07-01 2025-05-07 Illumina, Inc. Multiband scanning and fiber bundle to enable reduced light source intensity and improved imaging quality
CN118103946B (zh) * 2022-09-08 2025-12-16 伊斯泰克私人有限公司 激光泵浦光源和用于激光点火等离子体的方法
US20240276625A1 (en) * 2023-02-14 2024-08-15 Kla Corporation Vuv laser-sustained plasma light source with long-pass filtering
US12198921B2 (en) * 2023-03-09 2025-01-14 Kla Corporation Laser-sustained plasma light source with tapered window
JP2024158398A (ja) * 2023-04-27 2024-11-08 浜松ホトニクス株式会社 発光封体
US12578076B2 (en) 2023-06-05 2026-03-17 Hamamatsu Photonics K.K. Dual-output laser-driven light source
US20250251275A1 (en) * 2024-02-07 2025-08-07 Kla Corporation Reduced fluctuations and increased brightness uniformity of laser sustained plasma sources
US20260005008A1 (en) * 2024-07-01 2026-01-01 Kla Corporation Multi-spot laser-sustained plasma light source

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150208494A1 (en) * 2014-01-22 2015-07-23 Asml Netherlands B.V. Extreme ultraviolet light source

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61193358A (ja) 1985-02-22 1986-08-27 Canon Inc 光源装置
US4999014A (en) 1989-05-04 1991-03-12 Therma-Wave, Inc. Method and apparatus for measuring thickness of thin films
US5181080A (en) 1991-12-23 1993-01-19 Therma-Wave, Inc. Method and apparatus for evaluating the thickness of thin films
US5608526A (en) 1995-01-19 1997-03-04 Tencor Instruments Focused beam spectroscopic ellipsometry method and system
US6288780B1 (en) 1995-06-06 2001-09-11 Kla-Tencor Technologies Corp. High throughput brightfield/darkfield wafer inspection system using advanced optical techniques
US5999310A (en) 1996-07-22 1999-12-07 Shafer; David Ross Ultra-broadband UV microscope imaging system with wide range zoom capability
US5877859A (en) 1996-07-24 1999-03-02 Therma-Wave, Inc. Broadband spectroscopic rotating compensator ellipsometer
US6278519B1 (en) 1998-01-29 2001-08-21 Therma-Wave, Inc. Apparatus for analyzing multi-layer thin film stacks on semiconductors
US8217304B2 (en) * 2001-03-29 2012-07-10 Gsi Group Corporation Methods and systems for thermal-based laser processing a multi-material device
US6429943B1 (en) 2000-03-29 2002-08-06 Therma-Wave, Inc. Critical dimension analysis with simultaneous multiple angle of incidence measurements
US6751241B2 (en) * 2001-09-27 2004-06-15 Corning Incorporated Multimode fiber laser gratings
US6788404B2 (en) 2002-07-17 2004-09-07 Kla-Tencor Technologies Corporation Inspection system with multiple illumination sources
US7153690B2 (en) * 2002-10-04 2006-12-26 Advanced Technology Materials, Inc. Real-time component monitoring and replenishment system for multicomponent fluids
US6906836B2 (en) * 2002-10-04 2005-06-14 William Parker Full color holographic image combiner system
US7957066B2 (en) 2003-02-21 2011-06-07 Kla-Tencor Corporation Split field inspection system using small catadioptric objectives
US6973164B2 (en) 2003-06-26 2005-12-06 University Of Central Florida Research Foundation, Inc. Laser-produced plasma EUV light source with pre-pulse enhancement
JP4535732B2 (ja) 2004-01-07 2010-09-01 株式会社小松製作所 光源装置及びそれを用いた露光装置
US7345825B2 (en) 2005-06-30 2008-03-18 Kla-Tencor Technologies Corporation Beam delivery system for laser dark-field illumination in a catadioptric optical system
US7435982B2 (en) * 2006-03-31 2008-10-14 Energetiq Technology, Inc. Laser-driven light source
US7705331B1 (en) 2006-06-29 2010-04-27 Kla-Tencor Technologies Corp. Methods and systems for providing illumination of a specimen for a process performed on the specimen
US7525649B1 (en) 2007-10-19 2009-04-28 Kla-Tencor Technologies Corporation Surface inspection system using laser line illumination with two dimensional imaging
JP2010087388A (ja) * 2008-10-02 2010-04-15 Ushio Inc 露光装置
DE112010000850B4 (de) 2009-02-13 2017-04-06 Kla-Tencor Corp. Verfahren und Vorrichtung zum Aufrechterhalten und Erzeugen eines Plasmas
US8259771B1 (en) 2009-07-22 2012-09-04 Kla-Tencor Corporation Initiating laser-sustained plasma
CA2786149C (en) 2010-01-22 2019-11-12 The Board Of Trustees Of The Leland Stanford Junior University Inhibition of axl signaling in anti-metastatic therapy
US8517585B1 (en) 2010-06-30 2013-08-27 Kla-Tencor Corporation Full numerical aperture pump of laser-sustained plasma
DE102010040811A1 (de) * 2010-09-15 2012-03-15 Carl Zeiss Smt Gmbh Abbildende Optik
US8658967B2 (en) 2011-06-29 2014-02-25 Kla-Tencor Corporation Optically pumping to sustain plasma
EP2859410B1 (en) 2012-06-12 2019-11-20 ASML Netherlands B.V. Photon source, metrology apparatus, lithographic system and device manufacturing method
US9390892B2 (en) 2012-06-26 2016-07-12 Kla-Tencor Corporation Laser sustained plasma light source with electrically induced gas flow
KR102088363B1 (ko) * 2013-12-05 2020-04-14 삼성전자주식회사 플라즈마 광원 장치 및 플라즈마 광 생성 방법
NL2014179A (en) * 2014-02-24 2015-08-25 Asml Netherlands Bv Lithographic system.
US9723703B2 (en) 2014-04-01 2017-08-01 Kla-Tencor Corporation System and method for transverse pumping of laser-sustained plasma
KR102197066B1 (ko) 2014-07-01 2020-12-30 삼성전자 주식회사 플라즈마 광원, 그 광원을 구비한 검사 장치 및 플라즈마 광 생성 방법
MX384725B (es) * 2014-08-08 2025-03-14 Quantum Si Inc Dispositivo integrado con fuente de luz externa para el sondeo, detección y análisis de moléculas.
US20160165709A1 (en) * 2014-12-05 2016-06-09 Asml Netherlands B.V. System and Method for Isolating Gain Elements in a Laser System
US10257918B2 (en) 2015-09-28 2019-04-09 Kla-Tencor Corporation System and method for laser-sustained plasma illumination
US10244613B2 (en) 2015-10-04 2019-03-26 Kla-Tencor Corporation System and method for electrodeless plasma ignition in laser-sustained plasma light source
US9865447B2 (en) * 2016-03-28 2018-01-09 Kla-Tencor Corporation High brightness laser-sustained plasma broadband source

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150208494A1 (en) * 2014-01-22 2015-07-23 Asml Netherlands B.V. Extreme ultraviolet light source

Also Published As

Publication number Publication date
CN108780732A (zh) 2018-11-09
JP6921108B2 (ja) 2021-08-18
US20170278694A1 (en) 2017-09-28
TW201801132A (zh) 2018-01-01
CN108780732B (zh) 2020-07-17
US20180114687A1 (en) 2018-04-26
US10032619B2 (en) 2018-07-24
TWI709159B (zh) 2020-11-01
KR20180122014A (ko) 2018-11-09
US9865447B2 (en) 2018-01-09
WO2017172631A1 (en) 2017-10-05
IL261746A (en) 2018-10-31
IL261746B (en) 2022-04-01
JP2019511819A (ja) 2019-04-25

Similar Documents

Publication Publication Date Title
KR102215500B1 (ko) 고휘도의 레이저-지속 플라즈마 광대역 광원
KR102357638B1 (ko) 단일 빔을 이용한 암시야 웨이퍼 나노 결함 검사 시스템
JP5444216B2 (ja) さまざまなパワー・レベルの光を用い試料を検査するシステム及び方法
CN103162832B (zh) 包含参考光束的垂直入射宽带偏振光谱仪及光学测量系统
CN102269623B (zh) 垂直入射宽带偏振光谱仪和光学测量系统
TWI864270B (zh) 用於經埋藏計量目標之成像系統
CN103162831B (zh) 宽带偏振光谱仪及光学测量系统
US9506871B1 (en) Pulsed laser induced plasma light source
JP7570470B2 (ja) ランプハウス補正を備えるプラズマ源のシステム
US20200294785A1 (en) System for portable gas storage and delivery
CN114514596A (zh) 用于含氧激光持续等离子体源的真空紫外灯辅助点火的系统及方法
KR102545985B1 (ko) 인터레이스 펄스 조명 소스들을 갖는 레이저 지속 플라즈마를 펌핑하기 위한 시스템 및 방법
JP2026032015A (ja) マルチミラーレーザ維持プラズマ光源システム及び方法
US7349103B1 (en) System and method for high intensity small spot optical metrology
TWI905302B (zh) 用於磁光科爾效應計量系統之反射小型化透鏡
US10495287B1 (en) Nanocrystal-based light source for sample characterization
KR20250159639A (ko) 이미징 시스템을 위한 경사 균일 조명

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

A201 Request for examination
A302 Request for accelerated examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PA0302 Request for accelerated examination

St.27 status event code: A-1-2-D10-D17-exm-PA0302

St.27 status event code: A-1-2-D10-D16-exm-PA0302

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 6