KR102212985B9 - 탄화규소 분말 제조방법 - Google Patents

탄화규소 분말 제조방법

Info

Publication number
KR102212985B9
KR102212985B9 KR20140049614A KR20140049614A KR102212985B9 KR 102212985 B9 KR102212985 B9 KR 102212985B9 KR 20140049614 A KR20140049614 A KR 20140049614A KR 20140049614 A KR20140049614 A KR 20140049614A KR 102212985 B9 KR102212985 B9 KR 102212985B9
Authority
KR
South Korea
Prior art keywords
silicon carbide
carbide powder
preparing method
preparing
powder
Prior art date
Application number
KR20140049614A
Other languages
English (en)
Other versions
KR102212985B1 (ko
KR20150123114A (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR1020140049614A priority Critical patent/KR102212985B1/ko
Publication of KR20150123114A publication Critical patent/KR20150123114A/ko
Application granted granted Critical
Publication of KR102212985B1 publication Critical patent/KR102212985B1/ko
Publication of KR102212985B9 publication Critical patent/KR102212985B9/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • C01B32/963—Preparation from compounds containing silicon
    • C01B32/97—Preparation from SiO or SiO2
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
    • C30B23/066—Heating of the material to be evaporated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
KR1020140049614A 2014-04-24 2014-04-24 탄화규소 분말 제조방법 KR102212985B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020140049614A KR102212985B1 (ko) 2014-04-24 2014-04-24 탄화규소 분말 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020140049614A KR102212985B1 (ko) 2014-04-24 2014-04-24 탄화규소 분말 제조방법

Publications (3)

Publication Number Publication Date
KR20150123114A KR20150123114A (ko) 2015-11-03
KR102212985B1 KR102212985B1 (ko) 2021-02-08
KR102212985B9 true KR102212985B9 (ko) 2021-09-17

Family

ID=54599231

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140049614A KR102212985B1 (ko) 2014-04-24 2014-04-24 탄화규소 분말 제조방법

Country Status (1)

Country Link
KR (1) KR102212985B1 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102491237B1 (ko) * 2015-12-31 2023-01-25 (주)에스테크 탄화규소 분말 및 이의 제조방법
KR102496031B1 (ko) * 2016-01-19 2023-02-06 (주)에스테크 탄화규소 분말, 이의 제조방법 및 탄화규소 단결정
KR102035786B1 (ko) * 2017-12-26 2019-10-23 주식회사 포스코 탄화규소 단결정 성장 방법
KR102090082B1 (ko) * 2018-09-17 2020-03-17 에스케이씨 주식회사 탄화규소 단결정 잉곳을 성장시키는 방법
KR102269878B1 (ko) * 2019-10-24 2021-06-30 하나머티리얼즈(주) 탄화 규소 분말 및 단결정 탄화 규소의 제조 방법
KR102293576B1 (ko) 2019-11-28 2021-08-26 한국과학기술연구원 고순도 과립 α-상 탄화규소 분말의 제조방법
CN114990689B (zh) * 2022-04-28 2024-03-22 中电化合物半导体有限公司 一种碳化硅粉料的合成方法及应用

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100548127B1 (ko) * 2003-12-30 2006-01-31 네오세미테크 주식회사 탄화규소 단결정 성장 방법
KR20130085841A (ko) * 2012-01-20 2013-07-30 엘지이노텍 주식회사 탄화규소 분말 및 이의 제조방법

Also Published As

Publication number Publication date
KR102212985B1 (ko) 2021-02-08
KR20150123114A (ko) 2015-11-03

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Legal Events

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A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
G170 Publication of correction