KR102272431B9 - 탄화규소 분말, 이의 제조방법 및 탄화규소 단결정 - Google Patents

탄화규소 분말, 이의 제조방법 및 탄화규소 단결정

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Publication number
KR102272431B9
KR102272431B9 KR20140070688A KR20140070688A KR102272431B9 KR 102272431 B9 KR102272431 B9 KR 102272431B9 KR 20140070688 A KR20140070688 A KR 20140070688A KR 20140070688 A KR20140070688 A KR 20140070688A KR 102272431 B9 KR102272431 B9 KR 102272431B9
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KR
South Korea
Prior art keywords
silicon carbide
fabrication
single crystal
same
powder method
Prior art date
Application number
KR20140070688A
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English (en)
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KR102272431B1 (ko
KR20150142246A (ko
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Priority to KR1020140070688A priority Critical patent/KR102272431B1/ko
Publication of KR20150142246A publication Critical patent/KR20150142246A/ko
Application granted granted Critical
Publication of KR102272431B1 publication Critical patent/KR102272431B1/ko
Publication of KR102272431B9 publication Critical patent/KR102272431B9/ko

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KR1020140070688A 2014-06-11 2014-06-11 탄화규소 분말, 이의 제조방법 및 탄화규소 단결정 KR102272431B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020140070688A KR102272431B1 (ko) 2014-06-11 2014-06-11 탄화규소 분말, 이의 제조방법 및 탄화규소 단결정

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020140070688A KR102272431B1 (ko) 2014-06-11 2014-06-11 탄화규소 분말, 이의 제조방법 및 탄화규소 단결정

Publications (3)

Publication Number Publication Date
KR20150142246A KR20150142246A (ko) 2015-12-22
KR102272431B1 KR102272431B1 (ko) 2021-07-02
KR102272431B9 true KR102272431B9 (ko) 2021-10-27

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KR1020140070688A KR102272431B1 (ko) 2014-06-11 2014-06-11 탄화규소 분말, 이의 제조방법 및 탄화규소 단결정

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102491237B1 (ko) * 2015-12-31 2023-01-25 (주)에스테크 탄화규소 분말 및 이의 제조방법
KR102192815B1 (ko) 2019-03-21 2020-12-18 에스케이씨 주식회사 잉곳의 제조방법, 잉곳 성장용 원료물질 및 이의 제조방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4162923B2 (ja) * 2001-06-22 2008-10-08 株式会社ブリヂストン 炭化ケイ素単結晶の製造方法
JP4480349B2 (ja) 2003-05-30 2010-06-16 株式会社ブリヂストン 炭化ケイ素単結晶の製造方法及び製造装置
KR100705561B1 (ko) 2005-02-28 2007-04-11 네오세미테크 주식회사 탄화규소 단결정 성장 방법
JP2010090012A (ja) 2008-10-10 2010-04-22 Bridgestone Corp 炭化珪素単結晶の製造方法
JP2011102205A (ja) * 2009-11-10 2011-05-26 Sumitomo Osaka Cement Co Ltd α型炭化ケイ素粉体の粒径制御方法及び炭化ケイ素単結晶
KR102017689B1 (ko) * 2012-10-18 2019-10-21 엘지이노텍 주식회사 탄화규소 분말의 제조 방법

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Publication number Publication date
KR102272431B1 (ko) 2021-07-02
KR20150142246A (ko) 2015-12-22

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