KR102194652B1 - 고강성, 슬립 방지 스크러버 브러쉬 조립체, 고강성 맨드릴, 하위조립체 및 조립 방법 - Google Patents

고강성, 슬립 방지 스크러버 브러쉬 조립체, 고강성 맨드릴, 하위조립체 및 조립 방법 Download PDF

Info

Publication number
KR102194652B1
KR102194652B1 KR1020147033267A KR20147033267A KR102194652B1 KR 102194652 B1 KR102194652 B1 KR 102194652B1 KR 1020147033267 A KR1020147033267 A KR 1020147033267A KR 20147033267 A KR20147033267 A KR 20147033267A KR 102194652 B1 KR102194652 B1 KR 102194652B1
Authority
KR
South Korea
Prior art keywords
scrubber brush
mandrel
sleeve
brush assembly
reinforcing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020147033267A
Other languages
English (en)
Korean (ko)
Other versions
KR20150016274A (ko
Inventor
후이 첸
훙 첸
짐 앳킨슨
데이비드 디. 후오
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20150016274A publication Critical patent/KR20150016274A/ko
Application granted granted Critical
Publication of KR102194652B1 publication Critical patent/KR102194652B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B3/00—Brushes characterised by the way in which the bristles are fixed or joined in or on the brush body or carrier
    • A46B3/005—Bristle carriers and bristles moulded as a unit
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B13/00—Brushes with driven brush bodies or carriers
    • A46B13/001—Cylindrical or annular brush bodies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02096—Cleaning only mechanical cleaning

Landscapes

  • Brushes (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
KR1020147033267A 2012-04-26 2013-04-08 고강성, 슬립 방지 스크러버 브러쉬 조립체, 고강성 맨드릴, 하위조립체 및 조립 방법 Expired - Fee Related KR102194652B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/456,796 2012-04-26
US13/456,796 US9119461B2 (en) 2012-04-26 2012-04-26 High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods
PCT/US2013/035682 WO2013162864A1 (en) 2012-04-26 2013-04-08 High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods

Publications (2)

Publication Number Publication Date
KR20150016274A KR20150016274A (ko) 2015-02-11
KR102194652B1 true KR102194652B1 (ko) 2020-12-24

Family

ID=49476037

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147033267A Expired - Fee Related KR102194652B1 (ko) 2012-04-26 2013-04-08 고강성, 슬립 방지 스크러버 브러쉬 조립체, 고강성 맨드릴, 하위조립체 및 조립 방법

Country Status (5)

Country Link
US (1) US9119461B2 (enExample)
JP (1) JP2015516862A (enExample)
KR (1) KR102194652B1 (enExample)
TW (1) TWI577311B (enExample)
WO (1) WO2013162864A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024257947A1 (ko) * 2023-06-15 2024-12-19 윤스랩 주식회사 웨이퍼 세정용 브러쉬

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9202723B2 (en) 2011-11-29 2015-12-01 Illinois Tool Works, Inc. Brush with cantilevered nodules
US20140059913A1 (en) * 2012-03-14 2014-03-06 Advanced Innovation and Manufacturing, Inc. Suppressor sleeves and heat resistant weapon accessories
US9140511B2 (en) * 2012-03-14 2015-09-22 Frank J. Michal Barrel and suppressor sleeves and heat resistant weapon accessories
US8778087B2 (en) 2012-04-03 2014-07-15 Illinois Tool Works Inc. Conical sponge brush for cleaning semiconductor wafers
CN110216088A (zh) * 2019-04-30 2019-09-10 广东隽诺环保科技股份有限公司 一种清洗刀辊以及具有清洗刀辊的清洗机
CN110335837A (zh) * 2019-07-05 2019-10-15 北京理工大学 一种半导体晶圆清洗用多孔亲水材料和组件的制备方法
KR102366741B1 (ko) * 2019-10-15 2022-02-22 윤정혜 기판세정장치
CN114438552B (zh) * 2022-02-08 2022-09-16 广东嘉元科技股份有限公司 一种电解铜箔生产表面处理装置
JP7714819B2 (ja) * 2022-05-31 2025-07-29 インテグリス・インコーポレーテッド 半導体作製プロセスのための洗浄ブラシ
KR102664024B1 (ko) * 2022-06-17 2024-05-13 주식회사 브러쉬텍 내경이 확장된 웨이퍼 세정용 브러쉬

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070209135A1 (en) * 2006-03-07 2007-09-13 Applied Materials, Inc. Scrubber brush with sleeve and brush mandrel for use with the scrubber brush
US20080141475A1 (en) 2001-04-20 2008-06-19 Drury Thomas J Foam Composition roller brush with embedded mandrel

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6299698B1 (en) 1998-07-10 2001-10-09 Applied Materials, Inc. Wafer edge scrubber and method
SG99307A1 (en) * 1999-06-01 2003-10-27 Applied Materials Inc Brush core for disk scrubbing apparatus and method for use thereof
US6728989B2 (en) 2001-01-27 2004-05-04 Applied Materials Inc. Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber
US6904637B2 (en) 2001-10-03 2005-06-14 Applied Materials, Inc. Scrubber with sonic nozzle
KR101158137B1 (ko) * 2003-08-08 2012-06-19 엔테그리스, 아이엔씨. 회전식 기부 상에 주조된 일체형 다공성 패드를 제조하기위한 방법 및 재료
US20050109371A1 (en) 2003-10-27 2005-05-26 Applied Materials, Inc. Post CMP scrubbing of substrates
WO2005072560A2 (en) 2004-01-29 2005-08-11 Applied Materials, Inc. Methods and apparatus for installing a scrubber brush on a mandrel
JP2007289878A (ja) 2006-04-26 2007-11-08 Hitachi High-Technologies Corp ディスク洗浄ブラシ、ディスク洗浄機構およびディスク洗浄装置
TW200809936A (en) 2006-06-05 2008-02-16 Applied Materials Inc Methods and apparatus for supporting a substrate in a horizontal orientation during cleaning
JP2008004618A (ja) * 2006-06-20 2008-01-10 Renesas Technology Corp 半導体装置の製造方法
KR101119951B1 (ko) 2009-09-29 2012-03-16 방선정 반도체 웨이퍼용 브러쉬 롤
TWI594811B (zh) 2010-05-19 2017-08-11 湯瑪士衛斯特公司 用於擦洗基材的裝置與方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080141475A1 (en) 2001-04-20 2008-06-19 Drury Thomas J Foam Composition roller brush with embedded mandrel
US20070209135A1 (en) * 2006-03-07 2007-09-13 Applied Materials, Inc. Scrubber brush with sleeve and brush mandrel for use with the scrubber brush

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024257947A1 (ko) * 2023-06-15 2024-12-19 윤스랩 주식회사 웨이퍼 세정용 브러쉬

Also Published As

Publication number Publication date
JP2015516862A (ja) 2015-06-18
TWI577311B (zh) 2017-04-11
US9119461B2 (en) 2015-09-01
WO2013162864A1 (en) 2013-10-31
TW201406325A (zh) 2014-02-16
KR20150016274A (ko) 2015-02-11
US20130283556A1 (en) 2013-10-31

Similar Documents

Publication Publication Date Title
KR102194652B1 (ko) 고강성, 슬립 방지 스크러버 브러쉬 조립체, 고강성 맨드릴, 하위조립체 및 조립 방법
US20070209135A1 (en) Scrubber brush with sleeve and brush mandrel for use with the scrubber brush
JP2015516862A5 (enExample)
KR101507633B1 (ko) 세정용 스폰지 롤러용 중심 코어
US12207781B2 (en) Cleaner
US20130232702A1 (en) Agitator and cleaner
TWM527298U (zh) 快拆式自動清潔裝置
US20090007352A1 (en) Cleaner
CN107571847A (zh) 用于机动车辆清洗系统的刷构造
US7712520B1 (en) Brush for a well bore casing
US9980556B2 (en) Floor cleaning implement with improved driving interface for use with a floor maintenance machine
EP1806990B1 (en) Tool for cleaning surfaces
US20170208931A1 (en) Multi-surface cleaning apparatus
CN101925476B (zh) 配有止动装置的家具辊子用的转轮
KR20120026056A (ko) 브러시 코어 및 브러시 구동 방법
KR101753495B1 (ko) 청소기의 핸들 및 그립감이 향상되는 디바이스
TW201350052A (zh) 防滑洗滌刷、組件及組合方法
EP1698404A1 (en) Core for washing sponge roller
ES2851249T3 (es) Rodillo de limpieza giratorio y dispositivo de barrido provisto de este rodillo
EP3479744B1 (en) Nozzle, for cleaner, and vacuum cleaner
CN215191246U (zh) 用于手持推杆式吸尘器的地刷
KR102861722B1 (ko) Pva 브러쉬의 균일한 함수율을 확보하고, 공회전, 뒤틀림 및 이탈 방지 기능을 포함하는 브러쉬 코어
JP7566258B2 (ja) ブラシユニット
KR20250110188A (ko) 웨이퍼 세정용 브러쉬
KR101771605B1 (ko) 진공청소기용 브러쉬 조립체

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20231218

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20231218