KR102177675B1 - Split tool and method for using split tool - Google Patents

Abstract

An object of the present invention is to provide a dividing tool capable of reliably and efficiently dividing a plate-like object formed with an annular dividing starting point, and a method of using the dividing tool.
According to the present invention, as a dividing tool for dividing a plate-like object formed in an annular shape into an inner and an outer portion, an inner pressing member for pressing the inside of the dividing starting point formed in an annular shape, and an outer side for pressing the outside of the dividing starting point formed in an annular shape A pressing member and a connecting member connecting the inner pressing member and the outer pressing member, the inner pressing member is mounted so as to move forward and backward with respect to the connecting member, and the tip of the inner pressing member is in a non-compressed state A splitting tool deflected so as to protrude in a pressing direction from a front end of the outer pressing member, and a method of using the splitting tool, comprising: a flexible sheet installation step of installing a plate-like object formed in an annular shape into a flexible sheet; There is provided a method of using a dividing tool comprising at least a dividing step of dividing by pressing the outer side by pressing the outer pressing member while pressing the inner side of the dividing starting point annularly formed in water with the inner pressing member.

Description

How to use split tool and split tool {SPLIT TOOL AND METHOD FOR USING SPLIT TOOL}

The present invention relates to a dividing tool for dividing a plate-like object formed with an annular dividing starting point into an inner and an outer portion, and a method of using the dividing tool.

A wafer formed on the surface of a plurality of devices, such as IC, LSI, LED, SAW device, power device, etc., is divided by a division scheduled line, and is divided into individual devices by a division starting point formed by a laser processing device, and , It is used for electric devices such as personal computers and lighting equipment (see, for example, Patent Document 1).

In addition, when a circular member is cut out of plate-like glass, sapphire, lithium tantalate (LT), lithium niobate (LN), silicon carbide, etc., a laser processing device capable of forming a division starting point in an annular shape is used. do.

As the above-mentioned laser processing apparatus, as shown in Patent Document 1, a type in which ablation processing is performed by irradiating a laser beam of a wavelength having an absorption property to a workpiece to form a division starting point, and having transmittance to the workpiece A type in which the condensing point of the laser beam of the wavelength is placed inside the workpiece and irradiated to form a dividing starting point (for example, refer to Patent Document 2), and further, transmittance to the workpiece. A type in which the condensing point of the laser beam having a wavelength is positioned at a required position, reaches the back surface from the surface, and forms a shield tunnel made of pores and amorphous surrounding the pores to form a division starting point (e.g., See Patent Document 3) exists.

In particular, in the case of separating the inside and outside of the division by forming an annular division starting point as a division starting point for a substrate such as a glass plate, it is preferable to use a shield tunnel in which a weak layer extending from the surface to the back surface is formed as the division starting point. Do.

[Patent Document 1] Japanese Patent Laid-Open Publication No. 10-305420 [Patent Document 2] Japanese Patent Publication No. 3408805 [Patent Document 3] Japanese Patent Laid-Open No. 2014-221483

However, even if the circular division starting point is formed and separated by a shield tunnel in order to cut out a circular part, the inside and the outside of the circular division starting point are in close contact with each other in a curved shape. There is a problem of poor processing efficiency because it is difficult to divide in a way, and it is necessary to rely on the manual work of an expert.

The present invention has been made in view of the above facts, and its main technical problem is to provide a dividing tool capable of reliably and efficiently dividing a plate-like object formed with an annular division starting point, and a method of using the dividing tool. have.

In order to solve the above main technical problem, according to the present invention, according to the present invention, as a dividing tool for dividing a plate-like object formed in an annular shape into an inner and an outer shape, an inner pressing member for pressing the inside of the dividing starting point formed in an annular shape, An outer pressing member for pressing the outer side of the formed division starting point, and a connection member connecting the inner pressing member and the outer pressing member, and the inner pressing member is mounted so as to move forward and backward with respect to the connection member, and the inside pressing A dividing tool is provided in which the distal end of the member is deflected so as to protrude in the pressing direction from the distal end of the outer pressing member in an uncompressed state.

The inner pressing member may be configured to be biased and mounted in the pressing direction by the elastic member with respect to the connecting member, and the outer pressing member may be configured such that four outer pressing members are provided around the inner pressing member. good. In addition, a plurality of the inner pressing members may be mounted at predetermined intervals with respect to the connection member, and a plurality of the outer pressing members may be mounted corresponding to the inner pressing members.

In addition, according to the present invention, as a method of using the dividing tool, the flexible sheet installation process of installing a plate-shaped object formed in an annular shape with a division starting point on the flexible sheet, and the inner side of the division starting point formed in an annular shape on the plate-shaped article. There is provided a method of using a dividing tool comprising at least a dividing step of dividing by pressing the outer side by pressing the outer pressing member while pressing with the inner pressing member, wherein the dividing step is performed when the inner pressing member and the outer pressing member are pressed. Either, the flexible sheet may be expanded and implemented.

According to the dividing tool and the method of using the dividing tool according to the present invention, the dividing tool includes an inner urging member for urging the inside of the dividing starting point formed in an annular shape, and an outer urging member for urging the outside of the dividing starting point formed in an annular shape. And, a connecting member connecting the inner pressing member and the outer pressing member, the inner pressing member is mounted so as to move forward and backward with respect to the connecting member, and the tip of the inner pressing member is in a non-compressed state, By being configured to be deflected to protrude in the pressing direction than the tip of the outer pressing member, first, the inner pressing member is brought into contact with the inner side of the annular division starting point, and further pressing, the outer pressing member touches the outer region of the annular division starting point. By pressing, shear stress acts on the circular division starting point, so that the inner region and the outer region of the plate-like object in which the circular division starting point is formed can be reliably divided.

1 is an exploded view and an overall perspective view of a split tool constructed in accordance with the present invention.
Fig. 2 is an explanatory view for explaining a step of forming a division starting point in a plate-like object divided by the division tool of the present invention.
3 is an explanatory diagram for explaining a method of using a splitting tool in the present invention.
4 is a diagram showing another embodiment constructed in accordance with the present invention.

Hereinafter, a dividing tool constructed based on the present invention and a method of using the dividing tool will be described with reference to the accompanying drawings.

In Fig. 1A, each configuration is exploded and shown in order to explain the structure of the dividing tool 1 of the present invention. The dividing tool 1 has a rectangular shape in plan view, and is formed in a connecting member 2 provided with an outer pressing member 3 on the lower surface side, and a through hole 2a formed at the center of the connecting member 2. It is substantially constituted of a columnar inner pressing member 4 that is attached and held so as to be able to advance and retreat, and a gripping member 9 installed on the upper surface side of the connecting member 2 to form a gate shape.

The outer pressing member 3 is provided in each of the four corners on the lower surface side of the connecting member 2, and presses the outer region of the plate-like article described later. In addition, in the inner pressing member 4, a coil spring 7 as an elastic member is mounted on the shaft portion 41, and a rear end portion is inserted from the lower surface side to the through hole portion 2a formed in the connecting member 2, On the upper surface side of the connecting member 2, the female threaded portion 81 of the fixing member 8 and the male threaded portion 42 formed at the rear end of the shaft portion 41 are screwed. With this configuration, the outer pressing member 3 and the inner pressing member 4 are connected via the connecting member 2. Since the fixing member 8 has an outer diameter set larger than the inner diameter of the through-hole portion 2a, it functions as preventing the inner pressing member 4 from coming off (Fig. 1(b)). Reference).

On the distal end side of the inner pressing member 4, a pressing portion 43 having a diameter larger than that of the shaft portion 41 is formed, and presses the inner region of the division starting point formed in an annular shape of a plate-like article to be described later. The coil spring 7 is held on the lower surface of the pressing portion 43 formed with a larger diameter than the shaft portion 41 and the connecting member 2, and has a function of deflecting the inner pressing member 4 toward the lower side in the drawing. Exert. In a non-compressed state in which the dividing tool 1 does not press the plate-like object, the lower end of the inner pressing member 4, that is, the lower end of the pressing portion 43, protrudes downward from the lower end of the outer pressing member 3 Consists of. In addition, the size of the lower surface (compression surface) of the pressing portion 43 is preferably set to be slightly smaller than the area of the inner region of the division starting point formed in a circular shape of a plate-like object to be described later, and in order not to cause division failure It is not desirable to be too small. In addition, it is preferable that the outer pressing member 3 and the inner pressing member 4 are made of acrylic resin or the like so as not to cause scratches, cracks, or the like on a glass plate or a sapphire plate constituting a plate-like object to be divided.

Using Fig. 2, a description will be given of laser processing for forming a division starting point for cutting a circular member having a diameter of 25 mm from a plate-like object 10 made of a glass plate divided by the dividing tool of the present invention. The plate-like object 10 shown in Fig. 2A is a square having one side of 50 mm, and its thickness is 1 mm. As for the laser processing device for forming the division starting point, for example, a known laser processing device disclosed in Patent Document 3 can be used, but since it does not constitute a main part of the present invention, a description of the entire configuration thereof will be omitted. In addition, the dimensions of the plate-like object and the circular member to be cut out are not limited thereto, and can be arbitrarily set.

When performing laser processing on the plate-like object 10, the plate-like object 10 is disposed and held and fixed with respect to a holding means (not shown) of a laser processing apparatus (all drawings are omitted). The laser processing apparatus includes a laser beam irradiation means 20, and the laser beam irradiation means 20 includes a condenser 22 including a condensing lens (not shown) for irradiating a laser beam onto a workpiece. have. The holding means can be moved relative to the condenser 22 in the X-axis direction and Y-axis direction in the drawing, and not only linearly move in the X-axis direction and Y-axis direction, but also the X-axis direction, By combining the movement in the Y-axis direction, the holding means can be moved to draw an annular orbit, and it is possible to form an annular division starting point in combination with irradiation of a laser beam. Further, the laser processing apparatus can form a division starting point of an arbitrary shape with respect to a plate-like object by storing information of the processing data in advance in a control means (not shown).

As shown in the drawing, first, before forming the circular division starting point 10a, the holding means is linearly moved in the X-axis direction and the Y-axis direction, so that it crosses at a right angle from the center of the circular division starting point 10a. A linear division starting point 10b is formed in this direction. If the linear division starting point 10b is formed, then the holding means is irradiated with a laser beam while moving so as to draw a circle in a horizontal plane formed in the X-axis direction and the Y-axis direction, and the circular division starting point 10a is determined. To form. Accordingly, laser processing is performed so that the linear division starting point 10b is centered on the annular division starting point 10a, and the outer region thereof is divided into four equal parts.

In addition, the laser processing is performed under the following processing conditions, for example, by placing a condensing point of a laser beam having a wavelength having transmittance to the workpiece at a required position and reaching the rear surface from the surface to surround the pores and the pores. Is a process of forming a shield tunnel as a weak part made of amorphous material.

Plate shape: square shape with one side of 50 mm, thickness of 1 mm

Wavelength: 1030 nm

Average power: 3 W

Repetition frequency: 50 kHz

Pulse width: 10 ps

Spot diameter: φ 10 ㎛

Numerical aperture of the condensing lens

/Refractive index of glass plate: 0.05∼0.2

Machining feed rate: 500 ㎜/sec

Shield tunnel: φ 1 ㎛ pore, φ 10 ㎛ amorphous

By performing the above-described laser processing, it is possible to obtain a plate-like object 10 having the division starting points 10a and 10b as shown in FIG. 2.

If it was possible to obtain the plate-like object 10 on which the division starting points 10a and 10b were formed, as shown in Fig. 3(a), the plate-like object 10 is placed on the flexible sheet 30 (flexible Sheet installation process). In addition, in (a) of FIG. 3, for convenience of explaining that the inner pressing member 4 is positioned on the plate-like object 10, the connecting member 2 and the outer pressing member 3 are partially cut out. And the outer pressing region 52 pressed by the outer pressing member 3 is indicated by an oblique line. In addition, the flexible sheet 30 has a thickness of about 1 to 3 mm and has elasticity, and it is set so that the plate-like object pressed from above can be appropriately set down.

When the plate-like object 10 is placed on the flexible sheet 30, the operator holds the gripping member 9 of the dividing tool 1 described above, and the pressing portion of the inner pressing member 4 of the dividing tool 1 43 is positioned in the inner pressing region 50 of the annular division starting point 10a of the plate-like object 10, and four outer pressing members 3 are divided into four from the linear division starting point 10b. It is positioned in the outer pressing area 52 of the outer part, respectively. At this time, since the pressing portion 43 of the inner pressing member 4 protrudes below the tip end of the outer pressing member 3 in the non-compressed state, it is a plate-like object ( 10) is contacted (see Fig. 3(b)).

The outer pressing member 3 is further pressed against the elastic force of the coil spring 7 as an elastic member while the operator presses the pressing portion 43 to the inner pressing region 50 at the center of the plate-like object 10. It is in contact with the outer pressing region 2 of the division starting point 10a of the plate-like object 10. When the outer pressing member 3 is in contact with the outer pressing region 52 of the plate-like object 10, the dividing tool 1 is further pressed downward. The flexible sheet 30 on which the plate-like material 10 is disposed is made of a material exhibiting flexibility such as urethane having a thickness of about 1 to 3 mm, and the inner pressing area of the annular division starting point 10a ( While 50 is pressed by the pressing portion 43, the outer pressing region 52 is pressed by the outer pressing member 3 and settles on the flexible sheet 30. At that time, the flexible sheet 30 has four corners extended toward the outside, and in the dividing process, the inner and outer contact conditions at the dividing starting point 10a are alleviated, so that the plate-like object 10 is divided. The dividing process is completed without causing chipping or the like at the dividing starting point 10a which becomes the boundary of the (see Figs. 3(c) and (d)), and a desired circular member can be cut out.

In the present embodiment, an example in which one circular member is cut out from one plate-like object has been shown, but the present invention is not limited thereto. Another embodiment is shown below with reference to FIG. 4.

As shown in (a) of FIG. 4, four circular division starting points (100a) and linear division starting points (100b, 100c) are formed on a plate-like object 100 made of a single sheet of glass, The member can be cut out. The plate-like material 100 has a square shape in plan view, and has a side of 100 mm, and the circular member has a diameter of 25 mm, similar to the above-described embodiment. In the plate-like object 100, the four annular division starting points 100a, the linear division starting points 100b formed in a direction orthogonal to the center of the circular region formed by the annular division starting points 100a, and the 4 A linear division starting point 100c orthogonal to the center of the plate-like object 100 is formed by using a laser processing apparatus so as to divide the two regions evenly. In addition, in this embodiment, as shown in Fig. 4B, a dividing tool 1'which becomes a shape in which four dividing tools 1 in the above-described embodiment are adjacent and connected is prepared. . In addition, the configuration of the dividing tool 1 ′ is basically common to the dividing tool 1 described above, and for parts exhibiting the same function, ′ is added to the same number, and the detailed description thereof is Omit it. Hereinafter, a method of dividing a circular member from the plate-like object 100 using the dividing tool 1'will be described.

The plate-like material 100 having the above-described division starting point is disposed on the flexible sheet 30 ′ prepared according to the dimensions of the plate-like material 100. And, if the plate-like material 100 is disposed on the flexible sheet 30', the operator grips the gripping member 9'and presses formed on the tip end of the inner pressing member 4', as in the above-described embodiment. The portion 43' is located in the inner region 50' of the four annular division starting points 100a. Since the pressing portion 43' is set to protrude downward from the outer pressing member 3'in a non-compressed state, it comes into contact with the plate-like object 100 before the outer pressing member 3'. The operator presses the dividing tool 1 ′ further downward against the elastic force of the coil spring 7 ′ while bringing the pressing portion 43 ′ into contact with the annular dividing starting point 100a, thereby pressing the outer pressing member 3 ′. ) Is in contact with the pressing region 52' formed around the annular division starting point 100a, pressing the outer region surrounding the annular division starting point 100a downward, and entering the division starting points 100a-100c. As a starting point, the plate-like object 100 is divided and a circular member is cut out.

In addition, as shown in Fig. 3 (a), in the case of cutting a circular member from one sheet of plate-like object 10 using one annular division starting point 10a as the division starting point, the outer pressing member 3 Although the lower surface of the lower surface was brought into contact with the outer region of the division starting point 10a, in the other embodiment shown in FIG. 4, the region extending over a plurality of adjacent outer regions in the plate-like object 100 is a pressing region 52'. As a result, the region is pressed with one outer pressing member 3'. Accordingly, the dividing tool 1 ′ presses the pressing region 52 ′ of the plate-like object 100 with nine outer pressing members 3 ′, and it is possible to divide and cut four circular members simultaneously. have.

In addition, the present invention is not limited to the two embodiments described above, and can be set to any number, for example, the number of circular members divided and cut out from one plate-like object is 6, 9, etc. Do. In addition, in the above-described two embodiments, as the circular division starting point, the division starting point for cutting the circular member was shown, but it is not limited to this, and as long as it is, for example, an elliptical division starting point. The shape is not limited. In addition, in the above embodiment, an example in which a gripping member is provided and an operator presses a dividing tool into a plate-like object from above is shown, but the present invention is not limited to this, and the gripping member is closed, and a connecting plate to a press machine, etc. By attaching, it is also possible to set to mechanically press fit. In particular, when a large number of annular members are cut out from a plate-like object, it is effective to attach them to a press machine. In addition, the pressing portion formed at the distal end of the inner pressing member may be configured to be exchangeable according to the size and shape of the cut-out annular member.

In addition, in the above-described embodiment, as laser processing to form the starting point of division, the condensing point of the laser beam having a wavelength having transmittance to the workpiece is placed at a required position, reaching the back surface from the surface, and surrounding the pores and the pores. Although the process of forming a shield tunnel as a weak part made of amorphous was adopted, the present invention is not limited to this, and the condensing point of the laser beam having a wavelength having transmittance to the workpiece is positioned at a predetermined position inside the plate-like object to be irradiated. By doing so, it may be laser processing to form a modified layer as a weak portion therein. In that case, it can be set as the following processing conditions, for example.

Wavelength: 1342 nm

Average power: 0.18 W

Repetition frequency: 80 kHz

Spot diameter: φ1 ㎛

Machining feed rate: 180 ㎜/sec

Further, in the case of forming the modified layer as a division starting point, in order to obtain a weaker division starting point, laser processing may be performed a plurality of times while changing the position of the condensing point in the depth direction along the predetermined division starting point line. In addition, in the above-described embodiment, an example in which the circumference of the annular division starting point is pressed by the four outer pressing members is shown, but the present invention is not limited thereto. For example, a division starting point 10b is formed so that the outside of the annular division starting point 10a of the plate-like object 10 shown in FIG. 2 is divided into two regions or three regions, and two outer pressing members , Or may be set to three.

1: split tool 2: connecting member
3: outer pressing member 4: inner pressing member
7: coil spring 8: fixing member
9: gripping member 10, 100: glass plate (plate-shaped material)
20: laser beam irradiation means 30, 30': flexible sheet

Claims (6)

As a dividing tool that divides a plate-shaped object formed in an annular shape with a dividing starting point into the inner and outer sides
An inner pressing member for pressing the inner side of the division starting point formed in an annular shape, an outer pressing member for pressing the outside of the division starting point formed in an annular shape, and a connection member connecting the inner pressing member and the outer pressing member,
The inner urging member is mounted so as to be able to advance and retreat with respect to the connection member, and the tip of the inner urging member is deflected so as to protrude in a pressing direction from the tip of the outer urging member in a non-compressed state. tool. The dividing tool according to claim 1, wherein the inner urging member is attached to the connecting member while being biased in the urging direction by an elastic member. The dividing tool according to claim 1 or 2, wherein four outer pressing members are provided on the outer periphery with the inner pressing member as a center. The dividing tool according to claim 1 or 2, wherein a plurality of the inner urging members are attached to the connection member at predetermined intervals, and a plurality of the outer urging members are attached to correspond to the inner urging members. As a method of using the dividing tool according to claim 1 or 2,
A flexible sheet installation process of installing a plate-like object formed in an annular shape with a division starting point on the flexible sheet,
A dividing process of pressing the inside of the division starting point formed in an annular shape on the plate-like object with the inner pressing member while pressing the outside by pressing the outer pressing member
How to use a split tool consisting of at least as. The method of using a dividing tool according to claim 5, wherein the dividing step is performed by expanding the flexible sheet at the time of press by the inner press member and the outer press member.

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