TWI695749B - Split tool, and method of using split tool - Google Patents

Abstract

An object of the present invention is to provide a segmentation tool capable of reliably and efficiently dividing a plate-shaped object whose segmentation starting point has been formed in a ring shape, and a method of using the segmentation tool. According to the present invention, the solution means can provide a splitting tool and a method of using the splitting tool. The splitting tool divides a plate-like object formed from the starting point of the division into an inner side and an outer side, The inner inner pressing member forming the divided starting point, the outer outer pressing member pressing the divided starting point formed annularly, and the connecting member connecting the inner pressing member and the outer pressing member, the inner pressing member is opposite to the The connecting member is installed to move forward and backward freely, and the potential energy is applied so that the front end of the inner pressing member will protrude more in the pressing direction than the front end of the outer pressing member in the non-pressing state. The flexible sheet arranging step and the dividing step are constituted by arranging a plate-like object having a ring-shaped starting point divided on the flexible sheet, and the dividing step is While pressing the inner pressing member against the inner side of the divided starting point formed on the plate-like object, the outer pressing member presses the outer side to divide.

Description

Split tool, and method of using split tool

Field of the Invention The present invention relates to a dividing tool for dividing a plate-like object whose division starting point has been formed into an inside and an outside, and a method of using the dividing tool.

BACKGROUND OF THE INVENTION A wafer in which a plurality of devices such as IC, LSI, LED, SAW device, and power device are formed on the front side by dividing a predetermined line is divided by a division starting point formed by a laser processing device It is an individual component and is used in electrical equipment such as mobile phones, personal computers, and lighting fixtures (see, for example, Patent Document 1).

In addition, when a circular member is cut out of plate-shaped glass, sapphire, lithium tantalate (LT), lithium niobate (LN), silicon carbide, or the like, it is possible to use a ring-shaped starting point Laser processing device.

As the laser processing apparatus, there are the following types: as shown in the above-mentioned Patent Document 1, a type of apparatus that performs ablation processing by irradiating laser light of a wavelength having an absorbance to the workpiece to form a division starting point, A type of device (refer to 2) that locates the condensing point of laser light with a wavelength that is transparent to the workpiece to be irradiated inside the workpiece to perform the reforming layer forming process and form the division starting point, and Further, the focusing point of the laser light with a wavelength that is transparent to the workpiece is positioned at a desired position, and the pores and the amorphous material surrounding the pores are formed from the front to the back A shield-type through-hole is processed to form a device that divides the starting point (see, for example, Patent Document 3).

In particular, when forming a ring-shaped dividing starting point as a dividing starting point with respect to a substrate such as a glass plate and separating the inner side and the outer side of the dividing starting point, it is preferable to form a shield with a fragile layer from the front to the back The through hole is used as the starting point of division. Prior Art Literature Patent Literature

Patent Document 1: Japanese Patent Laid-Open No. 10-305420 Patent Document 2: Japanese Patent Laid-Open No. 3408805 Patent Document 3: Japanese Patent Laid-Open No. 2014-221483

SUMMARY OF THE INVENTION PROBLEM TO BE SOLVED BY THE INVENTION However, in the case where a ring-shaped dividing starting point for cutting out a circular part is formed by a shield-type through hole and is separated, since the inside of the ring dividing starting point is different from The outside is closely curved, so it is difficult to divide the two efficiently and surely. It must rely on the manual work of skilled personnel, and there is a problem of poor processing efficiency.

The present invention is made in view of the above facts, and its main technical problem is to provide a dividing tool capable of reliably and efficiently dividing a plate-like object having a divided starting point and a method of using the dividing tool . Means to solve the problem

In order to solve the above-mentioned main technical problems, according to the present invention, there can be provided a dividing tool which divides a plate-like object having a ring-shaped starting point into an inner side and an outer side, and includes: an inner pressing member that presses The inner side of the divided starting point that has been formed annularly; the outer pressing member that presses the outer side of the divided starting point that has been formed annularly; and the connecting member that connects the inner pressing member and the outer pressing member, the inner pressing member is relative to the The connecting member is installed so as to move forward and backward, and the potential energy is applied so that the front end of the inner pressing member protrudes in the pressing direction more than the front end of the outer pressing member in the non-pressing state.

It may be configured that the inner pressing member is provided with potential energy in the pressing direction with respect to the connecting member by a telescopic member, or the outer pressing member may be configured on the outer side with the inner pressing member as the center Set 4. In addition, it may be configured that a plurality of the inner pressing members are installed at predetermined intervals with respect to the coupling member, and a plurality of the outer pressing members are installed corresponding to the inner pressing members.

In addition, according to the present invention, a method for using a dividing tool can be provided, which is the above-mentioned method for using a dividing tool, and is composed of at least the following steps: a flexible sheet disposing step, the starting point of the dividing has been looped The plate-like material formed on the ground is arranged on the flexible sheet; and the dividing step is to press the outer pressing member while pressing the inner pressing member against the inner side of the divided starting point formed on the plate-like object Splitting is performed on the outer side, and the splitting step may be performed by expanding the flexible sheet during pressing by the inner pressing member and the outer pressing member. Invention effect

According to the splitting tool of the present invention, and a method of using the splitting tool, the splitting tool is configured to include an inner pressing member that presses the inside of the divided starting point that has been circularly formed, and that presses the outer side of the dividing starting point that has been circularly formed An outer pressing member and a connecting member connecting the inner pressing member and the outer pressing member, the inner pressing member is movably installed with respect to the connecting member, and is endowed with potential energy such that the front end of the inner pressing member is In the pressing state, it will protrude more in the pressing direction than the front end of the outer pressing member, whereby the inner pressing member first contacts the inside of the ring-shaped dividing start point and presses, and then the outer pressing member can be pressed by pressing The area outside the ring-shaped division starting point causes shear stress to act on the ring-shaped division starting point to reliably divide the inner area and the outer area of the plate-shaped object formed with the ring-shaped division starting point.

Modes for Carrying Out the Invention Hereinafter, a dividing tool constructed according to the present invention and a method of using the dividing tool will be described with reference to the drawings.

In FIG. 1(a), each structure for explaining the structure of the dividing tool 1 of the present invention is exploded and displayed. The split tool 1 is formed in a rectangular shape in a plan view, and is roughly due to the connection member 2 provided with the outer pressing member 3 on the lower surface side, and installed in the through-hole portion 2a formed in the center of the connection member 2 and advancing and retreating A columnar inner pressing member 4 that is freely held, and a grip member 9 disposed on the upper surface side of the coupling member 2 and formed in a gate shape.

The outer pressing member 3 is arranged at each of the four corners on the lower surface side of the connecting member 2 to press the outer region of the plate-like object described later. Further, the inner pressing member 4 is provided with a coil spring 7 as a telescopic member on the shaft portion 41, and the rear end portion is inserted into the through-hole portion 2a formed in the coupling member 2 from the lower surface side, and the coupling On the upper surface side of the member 2, the female screw portion 81 of the fixing member 8 is screwed to the male screw portion 42 formed at the rear end of the shaft portion 41. With such a configuration, the outer pressing member 3 and the inner pressing member 4 can be connected through the connecting member 2. Since the fixing member 8 has its outer diameter set to be larger than the inner diameter of the through-hole portion 2a, it can function as an anti-detachment structure of the inner pressing member 4 (see FIG. 1(b)).

A pressing portion 43 having a larger diameter than the shaft portion 41 is formed on the front end side of the inner pressing member 4 and can press an inner region of a divided starting point of a plate-shaped object to be described later. The coil spring 7 is held between the pressing portion 43 formed with a larger diameter than the shaft portion 41 and the lower surface of the coupling member 2, and functions to impart potential energy to the inner pressing member 4 toward the lower side in the figure. In the non-pressing state where the dividing tool 1 is not pressing the plate-like object, the lower end of the inner pressing member 4 (that is, the lower end of the pressing portion 43) protrudes downward more than the lower end of the outer pressing member 3. In addition, it is preferable that the size of the lower surface (pressing surface) of the pressing portion 43 is set to be slightly smaller than the area of the inner region of the circular dividing starting point of the plate-shaped object to be described later, and Poor segmentation should not be too small. Furthermore, it is preferable that the outer pressing member 3 and the inner pressing member 4 are made of acrylic resin, etc., so as not to be placed on a glass plate, a sapphire plate, etc., which are constituent plates of the divided body Damage, damage, etc.

The laser processing for forming a division starting point for cutting out a circular member having a diameter of 25 mm from the plate-like object 10 composed of a glass plate that can be divided by the dividing tool of the present invention will be described using FIG. 2. The plate-like object 10 shown in FIG. 2(a) is a square with a side of 50 mm, and its thickness is 1 mm. For the laser processing apparatus that forms the division starting point, for example, a conventional laser processing apparatus disclosed in the above-mentioned Patent Document 3 can be used, but since it does not constitute a main part of the present invention, description of the overall configuration will be omitted. Furthermore, the size of the plate-like object to be processed and the circular member cut out is not limited to this, but can be set arbitrarily.

When laser processing is performed on the plate-shaped object 10, the plate-shaped object 10 is placed on and held fixed with respect to a holding device not shown in the figure of the laser processing apparatus (the entire figure is omitted). The laser processing apparatus includes a laser beam irradiation device 20, and the laser beam irradiation device 20 includes a condenser 22 including a condenser lens (not shown) capable of irradiating the workpiece with laser beam. The holding device is formed so that it can move relative to the condenser 22 in the X-axis direction and the Y-axis direction in the figure, and not only can it move linearly in the X-axis direction and the Y-axis direction, but also The movements in the X-axis direction and the Y-axis direction are combined to move the holding device to draw a circular orbit, and combined with the irradiation of laser light to form a circular division starting point. In addition, the laser processing device can form a starting point of an arbitrary shape with respect to the plate by storing the information of the processing data in a control device not shown in advance.

As shown in the figure, first, before forming the ring-shaped division starting point 10a, the holding device is linearly moved in the X-axis direction and the Y-axis direction to form a direction in which the center of the ring-shaped division starting point 10a crosses at right angles Straight starting point 10b. After the linear division starting point 10b has been formed, the holding device is then moved while drawing a circle in the horizontal plane formed by the X-axis direction and the Y-axis direction while irradiating the laser light to form a ring-shaped division starting point 10a. With this, the laser processing is performed such that the linear division starting point 10b is centered on the ring-shaped division starting point 10a, and the outer region thereof is divided into four equal parts.

In addition, the above-mentioned laser processing is processing performed under the following processing conditions, for example, and the processing is as follows: positioning the condensing point of laser light of a wavelength having a penetrability to the workpiece at a desired position From the front side to the back side, a shield-type through hole is formed as a fragile part composed of fine holes and amorphous material surrounding the fine holes. Plate was: edge length of 50mm square and a thickness of 1mm wavelength: 1030nm Average output: 3W repetition frequency: 50kHz Pulse width: 10ps spot diameter: numerical aperture of the condenser lens φ10μm / glass plate of refractive index: 0.05 to 0.2 Processing Feeding speed: 500mm/s sub-shield type through hole: 500mm/sec sub-shield type through hole: φ1μm pore, φ10μm amorphous

By performing the laser processing described above, it is possible to obtain the plate-shaped object 10 formed with the division starting points 10a and 10b as shown in FIG.

After obtaining the plate-shaped object 10 having the divided starting points 10a and 10b, as shown in FIG. 3(a), the plate-shaped object 10 is placed on the flexible sheet 30 (the flexible sheet arrangement step ). In addition, in FIG. 3(a), in order to facilitate the explanation of the case where the inner pressing member 4 is positioned on the plate-like object 10, it is shown in a state where part of the connecting member 2 and the outer pressing member 3 are cut away, and The outer pressing region 52 pressed by the outer pressing member 3 is displayed in diagonal lines. In addition, the flexible sheet 30 has a thickness of about 1 to 3 mm and has stretchability, and is set so that a plate-like object pressed from above can be formed to sink appropriately.

After placing the plate-shaped object 10 on the flexible sheet 30, let the operator hold the holding member 9 of the above-mentioned dividing tool 1, and position the pressing portion 43 of the inner pressing member 4 of the dividing tool 1 on the plate-shaped object On the inner pressing region 50 of the circular division starting point 10a of 10, each of the four outer pressing members 3 is positioned on the outer pressing region 52 divided into four outer portions divided by the linear dividing starting point 10b. At this time, since the pressing portion 43 of the inner pressing member 4 protrudes downward than the front end of the outer pressing member 3 in the non-pressing state, it will abut on the plate-shaped object 10 before the front end of the outer pressing member 3 ( (See Fig. 3(b)).

The operator presses the pressing portion 43 against the inner pressing area 50 existing in the center of the plate-like object 10, and further presses in against the elastic force of the coil spring 7 as a telescopic member, thereby making the outer pressing member 3 abut on The outer pressing region 52 of the division starting point 10a of the plate-shaped object 10 is. After the outer pressing member 3 has abutted on the outer pressing region 52 of the plate 10, the dividing tool 1 is further pressed downward. The flexible sheet 30 on which the above-mentioned plate-shaped object 10 is placed is composed of a material exhibiting flexibility such as urethane with a thickness of about 1 to 3 mm, and is divided into rings on one side The inner pressing area 50 of the starting point 10a is pressed by the pressing portion 43, and the outer pressing area 52 is pressed by the outer pressing member 3 to sink into the flexible sheet 30. At this time, the flexible sheet 30 is formed so that the four corners expand toward the outside, so as to ease the adhesion between the inside and the outside of the dividing starting point 10a during the dividing process. When a defect or the like occurs at the division starting point 10a at the boundary of division, the division step (see FIGS. 3(c) and (d)) is completed, and the desired circular member is cut out.

In this embodiment, although an example is shown in which one circular member is cut out from one plate-shaped object, the present invention is not limited to this. Referring to FIG. 4, other embodiments are shown below.

As shown in FIG. 4(a), a ring-shaped four divided starting points 100a and linear divided starting points 100b and 100c can be formed on a plate-like object 100 composed of one glass material to cut four circular shapes member. The plate-like object 100 is formed in a square shape in a planar view, and is formed with one side as 100 mm, and the circular member is set to a diameter of 25 mm as in the above embodiment. On the plate-shaped object 100, a laser processing device is used to form the following division starting points: four circular division starting points 100a, and the direction perpendicular to the center of the circular area formed by the circular division starting points 100a The linear division starting point 100b formed above and the linear division starting point 100c orthogonal to the center of the plate-like object 100 divide the four regions. In addition, in this embodiment, as shown in FIG. 4(b), a dividing tool 1'is prepared. The dividing tool 1'is formed such that the four dividing tools 1 in the above-described embodiment are adjacent and connected. shape. The configuration of the dividing tool 1'is basically the same as that of the dividing tool 1 described above, and the same numerals are attached to the parts that can perform the same function, and the detailed description of them is omitted. Hereinafter, a method of dividing the circular member from the plate-like object 100 using the dividing tool 1'will be described.

The plate-shaped object 100 formed with the above-mentioned division starting point is placed on the flexible sheet 30' prepared in accordance with the size of the plate-shaped object 100. In addition, after the plate-like object 100 has been placed on the flexible sheet 30', the operator holds the grip member 9'in the same way as in the above-mentioned embodiment, and will form the front end portion of the inner pressing member 4' The pressing portion 43' is positioned on the inner region 50' of the four ring-shaped division starting points 100a. Since the pressing portion 43' is set to protrude downward more than the outer pressing member 3'in the non-pressing state, it will abut on the plate 100 before the outer pressing member 3'. The operator presses the dividing tool 1'downward while resisting the elastic force of the coil spring 7'while contacting the pressing portion 43' with the ring-shaped dividing starting point 100a, thereby contacting the outer pressing member 3' The pressing area 52' formed around the circular division starting point 100a, and pressing the outer region surrounding the circular division starting point 100a downward, and dividing the plate-like object 100 using the division starting points 100a to 100c as starting points, and Cut out the circular member.

In addition, as shown in FIG. 3( a ), when a circular member is cut out from one plate-shaped object 10 using a ring-shaped division starting point 10 a as a division starting point, the outer pressing member 3 is lowered. The surface is in full contact with the outer region of the division starting point 10a, but in other embodiments as shown in FIG. 4, it is formed such that the region spanning a plurality of adjacent outer regions in the plate-like object 100 is pressed Area 52', and one outer pressing member 3'presses the area. Thereby, the dividing tool 1'presses the pressing area 52' of the plate-like object 100 with nine outer pressing members 3', and it becomes possible to divide and cut out four circular members at the same time.

In addition, the present invention is not limited to the above-mentioned two embodiments, and the number of circular members divided and cut out from one plate-like object may be set to 6, 9, etc., for example. Any number. In addition, in the above two embodiments, although the segmentation starting point for cutting out the circle is shown as the segmentation starting point of the ring, it is not limited to this, and may also be made of, for example The division starting point is not limited as long as it is circular. In addition, in the above-mentioned embodiment, although shown is an example in which a holding member is provided to allow an operator to press the dividing tool into the plate from above, but it is not limited to this, and the holding member may be abolished and connected The board is attached to a press machine or the like, and is set to be pressed in mechanically. In particular, when a large number of ring-shaped members are to be cut out of a plate-like object, it is effective to install them on a press machine. Also, the pressing portion formed at the front end portion of the inner pressing member can be configured to be replaceable in accordance with the size and shape of the ring-shaped member to be cut.

In addition, in the above-mentioned embodiment, although the processing used as the laser processing for forming the division starting point is to position the condensing point of the laser light of a wavelength having a penetrability to the workpiece to be positioned at a desired position from the front Until the back surface is reached, a shield-type through-hole is formed as a fragile portion composed of fine holes and amorphous material surrounding the fine holes, but the present invention is not limited to this, but it can also be achieved by The condensing point of the laser light of the penetrating wavelength is positioned at a predetermined position inside the plate-like object to irradiate, so as to form a laser processing of a modified layer as a fragile part inside. This situation can be set to processing conditions such as the following. Wavelength: 1342nm average output: 0.18W repetition frequency: 80kHz spot diameter: φ1μm processing feed rate: 180mm/sec

Furthermore, in the case where the modified layer is formed as the starting point of division, in order to make a more fragile starting point of division, it may be possible to change the position of the condensing point in the depth direction along the predetermined line of the starting point of division and perform multiple lasers Processing. In addition, in the above-mentioned embodiment, although the example in which four outer pressing members press the circumference of the ring-shaped division starting point is shown, the present invention is not limited to this. For example, the division starting point 10b may be formed such that the outer side of the ring-shaped division starting point 10a of the plate-like object 10 shown in FIG. 2 is divided into two regions or three regions, and the outer pressing member is set to 2. Or 3.

1, 1'‧‧‧ Division tools 10a, 10b, 100a, 100b, 100c ‧‧‧ Division starting point 10, 100‧‧‧ Glass plate (plate-like object) 2‧‧‧Connecting member 2a‧‧‧Through hole part 20 ‧‧‧Laser light irradiation equipment 22‧‧‧‧Concentrator 3, 3′‧‧‧Outside pressing member 30, 30′‧‧‧Flexible sheet 4, 4′‧‧‧Inside pressing member 41‧‧ ‧Shaft part 42‧‧‧Male thread part 43, 43′‧‧‧Press part 50‧‧‧Inside press area 52‧‧‧Outside press area 7, 7′‧‧‧ Coil spring 8‧‧‧ Fixing member 81‧ ‧‧Female thread part 9, 9'‧‧‧ gripping member 50'‧‧‧inner region 52'‧‧‧ pressing area X, Y‧‧‧ direction

1(a) and (b) are an exploded view and an overall perspective view of a dividing tool constructed in accordance with the present invention. FIG. 2 is an explanatory diagram for explaining a step of forming a division starting point on a plate-shaped object divided by the division tool of the present invention. 3(a) to (d) are explanatory diagrams for explaining a method of using a dividing tool in the present invention. 4(a) and (b) are diagrams showing other embodiments constructed in accordance with the present invention.

1‧‧‧ Segmentation tool

2‧‧‧Connecting member

2a‧‧‧Through hole

3‧‧‧Outside pressing member

4‧‧‧Inside pressing member

41‧‧‧Shaft

42‧‧‧Male thread part

43‧‧‧Pressing part

7‧‧‧coil spring

8‧‧‧Fixed member

81‧‧‧Female thread part

9‧‧‧ holding component

Claims (6)

A dividing tool for dividing a plate-shaped object whose starting point of division has been formed into an inner side and an outer side. The dividing tool includes: an inner pressing member that presses the inside of the divided starting point that has been formed annularly; an outer pressing member that presses The outer side of the divided starting point that has been formed in a ring shape; and a connecting member that connects the inner pressing member and the outer pressing member, the inner pressing member is installed in advance and retreat with respect to the connecting member, and is given potential energy The front end of the inner pressing member protrudes in the pressing direction more than the front end of the outer pressing member in the non-pressing state. The dividing tool according to claim 1, wherein the inner pressing member is installed by giving potential energy to the connecting member in the pressing direction by a telescopic member. The dividing tool according to claim 1 or 2, wherein the outer pressing members are arranged on the outer periphery with the inner pressing member as a center. The dividing tool according to claim 1 or 2, wherein the inner pressing member is installed in plural at predetermined intervals with respect to the connecting member, and the outer pressing member is installed in plural corresponding to the inner pressing member. A method of using a segmentation tool is the method of using the segmentation tool of any one of claim 1 to claim 4, and is composed of at least the following steps: A flexible sheet disposing step, disposing a plate-like object having a ring-shaped starting point formed on the flexible sheet; and a dividing step, while pressing the inner pressing member against the plate-like object The inner side of the divided starting point formed in a shape is divided by pressing the outer side with the outer pressing member. The method for using the splitting tool according to claim 5, wherein the splitting step is performed by expanding the flexible sheet during pressing by the inner pressing member and the outer pressing member.

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