KR102176561B1 - 기판들의 두께 제어 - Google Patents

기판들의 두께 제어 Download PDF

Info

Publication number
KR102176561B1
KR102176561B1 KR1020197023987A KR20197023987A KR102176561B1 KR 102176561 B1 KR102176561 B1 KR 102176561B1 KR 1020197023987 A KR1020197023987 A KR 1020197023987A KR 20197023987 A KR20197023987 A KR 20197023987A KR 102176561 B1 KR102176561 B1 KR 102176561B1
Authority
KR
South Korea
Prior art keywords
laser beam
preselected
substrate
glass
glass substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020197023987A
Other languages
English (en)
Korean (ko)
Other versions
KR20190099098A (ko
Inventor
필립 로버트 르블랑
코레이 로버트 유스타니크
Original Assignee
코닝 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 코닝 인코포레이티드 filed Critical 코닝 인코포레이티드
Publication of KR20190099098A publication Critical patent/KR20190099098A/ko
Application granted granted Critical
Publication of KR102176561B1 publication Critical patent/KR102176561B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06Forming glass sheets
    • C03B17/064Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06Forming glass sheets
    • C03B17/067Forming glass sheets combined with thermal conditioning of the sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B18/00Shaping glass in contact with the surface of a liquid
    • C03B18/02Forming sheets
    • C03B18/04Changing or regulating the dimensions of the molten glass ribbon
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00Re-forming shaped glass
    • C03B23/02Re-forming glass sheets
    • C03B23/037Re-forming glass sheets by drawing
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Laser Beam Processing (AREA)
  • Surface Treatment Of Glass (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
KR1020197023987A 2012-11-06 2013-10-31 기판들의 두께 제어 Active KR102176561B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/669,994 US8904822B2 (en) 2012-11-06 2012-11-06 Thickness control of substrates
US13/669,994 2012-11-06
PCT/US2013/067714 WO2014074384A1 (en) 2012-11-06 2013-10-31 Thickness control of substrates

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020157014445A Division KR102013426B1 (ko) 2012-11-06 2013-10-31 기판들의 두께 제어

Publications (2)

Publication Number Publication Date
KR20190099098A KR20190099098A (ko) 2019-08-23
KR102176561B1 true KR102176561B1 (ko) 2020-11-10

Family

ID=50621108

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020157014445A Active KR102013426B1 (ko) 2012-11-06 2013-10-31 기판들의 두께 제어
KR1020197023987A Active KR102176561B1 (ko) 2012-11-06 2013-10-31 기판들의 두께 제어

Family Applications Before (1)

Application Number Title Priority Date Filing Date
KR1020157014445A Active KR102013426B1 (ko) 2012-11-06 2013-10-31 기판들의 두께 제어

Country Status (6)

Country Link
US (1) US8904822B2 (enExample)
JP (1) JP6158342B2 (enExample)
KR (2) KR102013426B1 (enExample)
CN (1) CN104768883B (enExample)
TW (1) TWI588305B (enExample)
WO (1) WO2014074384A1 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9290403B2 (en) * 2013-02-25 2016-03-22 Corning Incorporated Repositionable heater assemblies for glass production lines and methods of managing temperature of glass in production lines
US9556051B2 (en) * 2014-09-22 2017-01-31 Corning Incorporated Methods for controlling the thickness wedge in a glass ribbon
DE102014119064A1 (de) 2014-12-18 2016-06-23 Schott Ag Glasfilm mit speziell ausgebildeter Kante, Verfahren zu dessen Herstellung sowie dessen Verwendung
JP6498933B2 (ja) * 2014-12-29 2019-04-10 AvanStrate株式会社 ディスプレイ用ガラス基板の製造方法および製造装置
KR20180059476A (ko) * 2015-09-24 2018-06-04 코닝 인코포레이티드 유리 제조 방법 및 장치
JP2017119617A (ja) * 2015-12-28 2017-07-06 AvanStrate株式会社 ガラス基板の製造方法、及び、ガラス基板の製造装置
DE102017101808B4 (de) * 2016-02-04 2024-12-24 Schott Ag Verfahren zur Dickenkontrolle eines Substrates
DE102018111543A1 (de) 2017-05-22 2018-11-22 Schott Ag Verfahren und Vorrichtung zur Dickenkontrolle eines Materialbands
TW201912597A (zh) * 2017-08-24 2019-04-01 美商康寧公司 用於選擇性地改變玻璃基製品的虛擬溫度之方法及設備
WO2019173358A1 (en) * 2018-03-06 2019-09-12 Corning Incorporated Apparatus and method for controlling substrate thickness
WO2020005555A1 (en) 2018-06-28 2020-01-02 Corning Incorporated Continuous methods of making glass ribbon and as-drawn glass articles from the same
CN113631521B (zh) 2019-01-25 2023-09-15 康宁公司 用于熔融下拉玻璃形成的双升降式边缘辊系统
US20220212976A1 (en) * 2019-04-12 2022-07-07 Corning Incorporated Methods and apparatus for manufacturing a ribbon
WO2021050651A1 (en) * 2019-09-13 2021-03-18 Corning Incorporated Systems and methods for forming glass ribbon using a heating device
JP7675710B2 (ja) * 2019-10-22 2025-05-13 コーニング インコーポレイテッド フュージョンガラスシステム及び方法のレーザ厚さ制御のためのエネルギ送達の最適化
JP7646662B2 (ja) * 2019-12-02 2025-03-17 コーニング インコーポレイテッド ガラスリボンを製造する方法及び装置
CN115734947A (zh) * 2020-06-19 2023-03-03 康宁公司 制造玻璃带的方法
CN112279499B (zh) * 2020-10-22 2022-06-07 科立视材料科技有限公司 一种用于控制玻璃带应力的方法和装置
KR20240115274A (ko) * 2021-11-23 2024-07-25 코닝 인코포레이티드 고해상도 가열을 통한 유리 줄무늬 개선을 위한 시스템들 및 방법들
WO2024258546A1 (en) * 2023-06-14 2024-12-19 Corning Incorporated Laser thickness control of fusion glass

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011149800A2 (en) * 2010-05-26 2011-12-01 Corning Incorporated Apparatus and method for controlling thickness of a flowing ribbon of molten glass

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3694181A (en) * 1971-06-01 1972-09-26 Ppg Industries Inc Apparatus for controlling glass fractures
JP3589486B2 (ja) * 1994-06-29 2004-11-17 株式会社町田製作所 マイクロレンズの製造方法
US5604635A (en) * 1995-03-08 1997-02-18 Brown University Research Foundation Microlenses and other optical elements fabricated by laser heating of semiconductor doped and other absorbing glasses
US5768022A (en) * 1995-03-08 1998-06-16 Brown University Research Foundation Laser diode having in-situ fabricated lens element
US5742026A (en) * 1995-06-26 1998-04-21 Corning Incorporated Processes for polishing glass and glass-ceramic surfaces using excimer laser radiation
JPH1097715A (ja) * 1996-07-31 1998-04-14 Asahi Komagu Kk 磁気記録媒体用基板および磁気記録媒体
US6291797B1 (en) 1996-08-13 2001-09-18 Nippon Sheet Glass Co., Ltd. Laser machining method for glass substrate, diffraction type optical device fabricated by the machining method, and method of manufacturing optical device
DE19918936A1 (de) * 1999-04-27 2000-11-02 Schott Glas Verfahren und Vorrichtung zur Herstellung von Einzelglasscheiben
DE10128636C1 (de) * 2001-06-13 2002-08-01 Schott Glas Verfahren zur selektiven Beeinflussung der Glasdicke bei der Herstellung von Flachglas und Vorrichtung zur Durchführung des Verfahrens
JP2003307602A (ja) * 2002-04-18 2003-10-31 Nippon Sheet Glass Co Ltd 平板レンズおよび平板レンズアレイの製造方法
US20050160767A1 (en) * 2004-01-28 2005-07-28 Robert Novak Horizontal sheet movement control in drawn glass fabrication
CN101160267B (zh) * 2005-04-15 2010-09-22 旭硝子株式会社 缩小存在于玻璃板内部的泡的直径的方法
US20070140311A1 (en) * 2005-12-20 2007-06-21 House Keith L Method and apparatus for characterizing a glass ribbon
KR101042871B1 (ko) * 2006-05-11 2011-06-20 아사히 가라스 가부시키가이샤 용융 유리의 거품 제거 방법 및 제거 장치, 그리고 유리의제조 방법
US7570366B2 (en) * 2007-02-21 2009-08-04 Corning Incorporated Apparatus for measuring defects in a glass sheet
TWI370894B (en) * 2007-02-26 2012-08-21 Corning Inc Method for measuring distortion
TWI400499B (zh) * 2007-07-16 2013-07-01 Corning Inc 使用雷射軟化玻璃凸塊微調準
JP5327702B2 (ja) 2008-01-21 2013-10-30 日本電気硝子株式会社 ガラス基板の製造方法
US20090217705A1 (en) * 2008-02-29 2009-09-03 Filippov Andrey V Temperature control of glass fusion by electromagnetic radiation
WO2009151513A1 (en) * 2008-05-01 2009-12-17 Corning Incorporated Raised features on transparent substrates and related methods
US7920257B2 (en) * 2008-08-27 2011-04-05 Corning Incorporated Systems and methods for determining the shape of glass sheets
US8899078B2 (en) * 2008-11-26 2014-12-02 Corning Incorporated Glass sheet stabilizing system, glass manufacturing system and method for making a glass sheet
DE102009008292B4 (de) * 2009-02-10 2014-09-25 Schott Ag Kondensator und Verfahren zur Herstellung eines solchen
US8037716B2 (en) 2009-02-27 2011-10-18 Corning Incorporated Thermal control of the bead portion of a glass ribbon
JP5746641B2 (ja) * 2009-02-27 2015-07-08 コーニング インコーポレイテッド ガラスリボン上の領域を成形する方法
US8590873B2 (en) * 2009-04-08 2013-11-26 Corning Incorporated Method and device for restraining movement of continuously traveling glass sheet
ATE551304T1 (de) * 2009-05-13 2012-04-15 Corning Inc Verfahren und anlagen zum formen von endlosen glasscheiben
TWI395630B (zh) 2009-06-30 2013-05-11 Mitsuboshi Diamond Ind Co Ltd 使用雷射光之玻璃基板加工裝置
KR101835157B1 (ko) * 2009-10-14 2018-03-06 코닝 인코포레이티드 시트 두께 제어 방법 및 그 장치
US20110100058A1 (en) * 2009-10-30 2011-05-05 Dickinson Jr James Edward Formation of glass bumps with increased height using thermal annealing
JP5685264B2 (ja) * 2009-11-24 2015-03-18 コーニング インコーポレイテッド 制御された厚さを有するガラスシートを製造する方法および装置
WO2011102175A1 (ja) * 2010-02-18 2011-08-25 日本電気硝子株式会社 ガラスフィルムの製造方法およびその製造装置
JP5720885B2 (ja) * 2010-03-03 2015-05-20 日本電気硝子株式会社 ガラスロール、及びガラスロールの製造方法
US9656901B2 (en) * 2010-03-03 2017-05-23 Nippon Electric Glass Co., Ltd. Method of manufacturing a glass roll
US8397536B2 (en) 2010-05-26 2013-03-19 Corning Incorporated Apparatus and method for controlling thickness of a flowing ribbon of molten glass
US9676649B2 (en) * 2011-08-26 2017-06-13 Corning Incorporated Glass substrates with strategically imprinted B-side features and methods for manufacturing the same
US8459062B2 (en) * 2011-09-27 2013-06-11 Corning Incorporated Apparatus and methods for producing a glass ribbon
US8677783B2 (en) * 2011-11-28 2014-03-25 Corning Incorporated Method for low energy separation of a glass ribbon

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011149800A2 (en) * 2010-05-26 2011-12-01 Corning Incorporated Apparatus and method for controlling thickness of a flowing ribbon of molten glass

Also Published As

Publication number Publication date
TW201420822A (zh) 2014-06-01
TWI588305B (zh) 2017-06-21
JP6158342B2 (ja) 2017-07-05
WO2014074384A1 (en) 2014-05-15
US20140123703A1 (en) 2014-05-08
KR20190099098A (ko) 2019-08-23
US8904822B2 (en) 2014-12-09
KR102013426B1 (ko) 2019-08-22
CN104768883A (zh) 2015-07-08
JP2015536895A (ja) 2015-12-24
CN104768883B (zh) 2018-01-16
KR20150083098A (ko) 2015-07-16

Similar Documents

Publication Publication Date Title
KR102176561B1 (ko) 기판들의 두께 제어
US8383983B2 (en) Substrate cutting apparatus and method of cutting substrate using the same
JP6272300B2 (ja) レーザ加工装置及びレーザ加工方法
WO2014156689A1 (ja) レーザ加工装置及びレーザ加工方法
KR102670445B1 (ko) 기판 두께를 제어하기 위한 장치 및 방법
US20230182484A1 (en) Printing apparatus
WO2021015943A1 (en) Laser devit removal system and methods
US12304851B2 (en) Energy delivery optimization for laser thickness control of fusion glass system and methods
KR20240115274A (ko) 고해상도 가열을 통한 유리 줄무늬 개선을 위한 시스템들 및 방법들
JP2002224865A (ja) レーザマーキング装置
JP6764993B2 (ja) レーザーパッケージング方法及びレーザーパッケージング装置
JP6606239B1 (ja) 塗布物質塗布済対象物の製造方法
EP1215875B1 (en) Thermal scan line bow adjustment in an optical scanning system
WO2024102275A1 (en) Method of processing green tape ceramic material to form ceramic ribbon and battery comprising the ceramic material of the ribbon
TWI899091B (zh) 雷射脫玻物去除系統與方法
CN116113603A (zh) 用于狭槽玻璃下拉的可调式边缘冷却构件的系统及方法
CN116137858A (zh) 用于硬化透明材料的设备和方法

Legal Events

Date Code Title Description
A107 Divisional application of patent
A201 Request for examination
PA0104 Divisional application for international application

St.27 status event code: A-0-1-A10-A18-div-PA0104

St.27 status event code: A-0-1-A10-A16-div-PA0104

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 6