KR102128301B1 - Pressing apparatus and fragmentation apparatus provided with the same, resin molding apparatus, device manufacturing apparatus, and pressing method and fragmentation method comprising same, resin molding method, device manufacturing method - Google Patents

Abstract

The pressing device is a pressing device having a plurality of pressing plates arranged alternately and a pressing source for applying a pressing force to a plurality of pressurized objects, wherein the plurality of pressing plates includes a first pressing plate and a second A pressure plate and a third pressure plate, the pressure device, the second pressure plate and the third pressure while maintaining the pressing force between the first pressure plate and the second pressure plate It is possible to expand between the plates, and further, between the first pressure plate and the second pressure plate while maintaining the pressing force between the second pressure plate and the third pressure plate. An opening/closing mechanism capable of expanding is also provided. A plurality of pressurized objects sandwiched by a pair of pressurizing plates are pressed.

Description

Pressing apparatus and fragmentation apparatus provided with the same, resin molding apparatus, device manufacturing apparatus, and pressing method and fragmentation method comprising same, resin molding method, device manufacturing method

The present invention relates to a pressing device, a fragmentation apparatus having the same, a resin molding apparatus, a device manufacturing apparatus, and a pressing method and a fragmentation method comprising the same, a resin molding method, and a device manufacturing method.

In a heating furnace, an apparatus for correcting the warpage of a to-be-pressed object exists by holding the to-be-pressed object for a certain period of time.

Conventionally, an apparatus for correcting the warpage of a to-be-pressed object by inserting both surfaces of the to-be-pressed object by a heated pressurized plate and holding the pressure for a certain time exists.

Japanese Patent Publication No. 08-112827

Conventional apparatus for correcting the warpage of a pressurized object, as shown in Fig. 11, for each pressurized object 20A, 20B, 20C, upper/lower press plates 11A/12A, 11B/12B, 11C/12C), and it is necessary to press in the directions of the arrows A, B, and C, respectively. Therefore, in order to increase the processing capacity, it is necessary to expand the pressing mechanism made of the upper and lower press plates to be arranged in the horizontal direction or the vertical direction, and a pressing mechanism corresponding to the number of objects to be pressed is required (lower energy efficiency). The area and height for installation are also required (decreased space efficiency).

The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a pressurization device and a pressurization method capable of saving energy and saving space.

A pressurizing device according to the present invention is a pressurizing device comprising a plurality of pressurizing plates arranged alternately stacked and a pressing mechanism for applying a pressing force to a plurality of pressurized objects, wherein the plurality of pressurizing plates comprises a first pressurizing plate and , A second pressure plate and a third pressure plate, the pressure device, the second pressure plate and the second pressure plate while maintaining the pressing force between the first pressure plate and the second pressure plate It is possible to spread between a third pressure plate, and further, while maintaining a pressing force between the second pressure plate and the third pressure plate, the first pressure plate and the agent An opening/closing mechanism capable of expanding between the two pressure plates is also provided.

In one embodiment, in the pressing device, the opening/closing mechanism includes an arm capable of holding an arbitrary pressing plate among the plurality of pressing plates, and the arm holding the arbitrary pressing plate, the pressurized object And a moving mechanism capable of moving in a direction away from another pressing plate facing the arbitrary pressing plate and applying a force equal to the pressing force in the opposite direction to the moving direction of the arm with respect to the other pressing plate. It includes a possible driving mechanism.

In one embodiment, in the pressing device, the driving mechanism is fixed to the arm.

In one embodiment, in the pressing device, the driving mechanism is fixed to the moving mechanism.

In one embodiment, in the pressing device, the plurality of pressing plates and the plurality of pressurized objects are arranged to line up in a vertical direction, and the pressing device comprises: the plurality of pressurized objects by gravity It is also provided with a mechanism for suppressing the deviation of the pressing force against the.

In one embodiment, in the pressing device, the plurality of pressing plates and the plurality of pressurized objects are arranged to line up in a horizontal direction.

The fragmentation apparatus which concerns on this invention is equipped with the above-mentioned pressurization apparatus, and the fragmentation unit which fragments the workpiece pressurized by the said pressurization apparatus.

The resin molding apparatus according to the present invention includes a resin molding unit and the above-described pressurizing apparatus for pressing a resin-molded work by the resin molding unit.

The device manufacturing apparatus according to the present invention includes a resin molding unit, a pressurizing device for pressing the resin-molded work by the resin molding unit, and a fragmentation unit for breaking down the work pressed by the pressing device. To be equipped.

The pressing method according to the present invention includes a step of alternately stacking a plurality of press plates and a plurality of pressurized objects, and a step of applying a pressing force to the plurality of press plates and the plurality of pressurized objects alternately stacked. , A process of removing the pressing force for at least one pressing object among the plurality of pressing objects and taking out the at least one pressing object.

In one embodiment, in the pressurization method, the step of taking out the at least one pressurized object may include maintaining any pressurized plate among the plurality of pressurized plates, sandwiching the pressurized object, and pressing the arbitrary pressurized object. And applying a force in a direction away from the arbitrary pressure plate to another pressure plate opposite the plate, and moving the arbitrary pressure plate in a direction away from the other pressure plate.

In one embodiment, in the process of taking out the at least one pressurized object, the arbitrary pressure plate is held by an arm, and the arbitrary pressure plate is attached to the other pressure plate by a driving mechanism fixed to the arm. A force equal to the above pressing force is applied as a force in a direction away from.

In one embodiment, in the step of taking out the at least one pressurized object, the other pressing plate is moved to the other pressing plate by a driving mechanism fixed to a moving mechanism that moves the arbitrary pressing plate in a direction away from the other pressing plate. A force equal to the pressing force is applied as a force in a direction away from an arbitrary pressure plate.

In one embodiment, in the pressing method, the plurality of pressing plates and the plurality of pressurized objects are alternately stacked to be arranged along the vertical direction, and the deviation of the pressing force on the plurality of pressurized objects due to gravity is determined. A force for suppression is applied to at least a portion of the plurality of pressure plates.

In one embodiment, in the pressing method, the plurality of pressing plates and the plurality of pressurized objects are alternately stacked to be arranged in a horizontal direction.

The fragmentation method which concerns on this invention comprises the process of pressurizing the said several to-be-pressed object by the above-mentioned pressing method, and the process of fragmenting the said several to-be-pressed object by the said pressing method.

The resin molding method according to the present invention includes a step of resin molding a plurality of workpieces, and a step of pressing the plurality of workpieces as the plurality of pressurized objects by the above-described pressing method.

The device manufacturing method according to the present invention includes a step of resin molding a plurality of workpieces, a step of pressing the plurality of workpieces as the plurality of pressurized objects by the above-mentioned pressing method, and the above-described pressing method. A step of reorganizing a plurality of workpieces is provided.

Advantageous Effects of Invention According to the present invention, it is possible to provide a pressurizing device and a pressurizing method capable of supplying and taking out any pressurized product while maintaining a pressing force with respect to other pressurized objects, and also capable of saving energy and saving space.

1 is a schematic diagram showing a first state of a pressure device according to Embodiment 1 of the present invention.
2 is a schematic diagram showing a second state of the pressure device according to Embodiment 1 of the present invention.
3 is a schematic diagram showing a third state of the pressure device according to the first embodiment of the present invention.
FIG. 4 is a view showing structures around the pressure plate and the object to be pressed in the pressure device shown in FIGS. 1 to 3;
5 is a schematic diagram showing a first state of a pressure device according to Embodiment 2 of the present invention.
6 is a schematic diagram showing a second state of the pressing device according to Embodiment 2 of the present invention.
7 is a schematic diagram showing a third state of the pressing device according to Embodiment 2 of the present invention.
8 is a schematic diagram showing a first state of a pressure device according to Embodiment 3 of the present invention.
9 is a schematic diagram showing a second state of the pressing device according to Embodiment 3 of the present invention.
10 is a schematic diagram showing a third state of the pressing device according to Embodiment 3 of the present invention.
11 is a diagram schematically showing a configuration of a conventional pressing device.

Hereinafter, embodiment of this invention is described. In addition, the same reference numerals are assigned to the same or equivalent parts, and the description may not be repeated.

In addition, in the embodiment described below, when referring to the number, quantity, etc., the scope of the present invention is not necessarily limited to the number, quantity, etc., except where specifically stated. In addition, in the following embodiments, each component is not necessarily essential in the present invention, except where specifically described.

The pressurizing devices according to Embodiments 1 to 3 to be described later are pressurizing mechanisms for applying a pressing force to a plurality of press plates 10 (11 to 14) and a plurality of pressurized objects 20 (21 to 23) arranged alternately. It is provided with (30). As an example of the to-be-pressed object 20, a resin substrate such as a printed substrate (sealed substrate) on which a semiconductor chip is resin-sealed, a glass epoxy substrate, a ceramic substrate, a silicon wafer, etc. , A semiconductor wafer such as a SiC wafer (semiconductor wafer), and a glass material. Moreover, as an example of the to-be-pressed object 20, the printed wiring board which uses a resin substrate as a base material is mentioned.

In the pressurizing device according to the first to third embodiments, in order to apply a pressing force to a plurality of pressing plates 10 (11 to 14) and a plurality of pressurized objects 20 (21 to 23) alternately arranged, A plurality of objects to be pressed can be pressed by the pressing mechanism 30. As a result, energy saving and space saving are possible.

In some cases, only some of the to-be-pressed objects are taken out of the plurality of to-be-pressed objects 20, and it is sometimes desired to continuously apply a pressing force to the other to-be-pressed objects. When a plurality of pressurized objects 20 (21 to 23) share one pressing mechanism 30, it is necessary to provide a special configuration in order to respond to this request.

In the pressurizing device according to the first to third embodiments, only the pressing force on the pressurized object 22 among the plurality of pressurized objects 21 to 23 can be removed by the opening/closing mechanism 40. . Thereby, it is possible to take out the object 22 while maintaining the pressing force to the objects 21 and 23.

(Embodiment 1)

1 to 3 are schematic diagrams each showing a first state to a third state of the pressure device according to the first embodiment of the present invention.

1 to 3, the pressure device according to the present embodiment presses a plurality of pressurized objects 20 (21 to 23). In the horizontal direction, the main surfaces (the upper and lower surfaces on the ground surface of Fig. 1) of each of the pressurized objects 20 are, in other words, the horizontal surfaces. Almost accordingly, it is placed. In addition, each to-be-pressed object 20 is arrange|positioned so that it may line up along a vertical direction. The pressing device according to the present embodiment applies a pressing force to a plurality of pressing plates 10 (11 to 14) and a plurality of pressurized objects 20 (21 to 23) which are alternately stacked and arranged along the vertical direction. Of the pressing mechanism 30, the plurality of pressurized objects 20, the opening/closing mechanism 40 capable of removing the pressing force on the pressurized object 22, and the plurality of pressurized objects 20 by gravity It includes a self-weight canceling mechanism (50) for suppressing variations in the pressing force. It will be described in more detail below.

The pressing device according to the present embodiment is to press a plurality of pressurized objects 20 simultaneously in the vertical direction. In order to fit the to-be-pressed object 21 disposed at the top, pressure plates 11 and 12 are provided to line up and down.

The second pressurized object 22 from the top includes a pressurizing plate 12 at the lower end for fitting the upper pressurized object 21 and a pressurizing plate 13 disposed at the lower end. It is not fitted by. The third (lowest) pressurized object 23 from the top includes a pressurizing plate 13 at the bottom for supporting the second pressurized object 22 from above and a pressurizing plate disposed at the bottom thereof. (14).

The pressurizing mechanism 30 includes a pressurizing source 31 provided above the pressurizing plate 11 and a presser plate 32 for holding the pressurizing plate 14 from below. Includes. A constant pressing force is applied to the uppermost pressure plate 11 by the pressure source 31. This pressing force is evenly transmitted to the lowermost pressing plate 14 through the pressing plates 12 and 13 and the pressurized objects 21 to 23.

The opening/closing mechanism 40 includes an opening/closing arm 41 capable of holding any pressure plate among the plurality of pressure plates 10, a cylinder mechanism 42 fixed to the opening/closing arm 41, and an opening/closing arm 41 ) And a base 43 supporting the cylinder mechanism 42, and a ball screw 43A (moving mechanism) capable of moving the base 43 in the vertical direction.

The opening/closing arm 41 and the cylinder mechanism 42 can slide with respect to the base 43 in a vertical direction and a horizontal direction. The cylinder mechanism 42 includes a cylinder body 42A, a plunger 42B, and an opening/closing arm 42C. The opening/closing arm 42C is fixed to the plunger 42B. By the fluid pressure (air pressure) in the cylinder 42A, the plunger 42B and the opening/closing arm 42C are forced downward. The opening/closing arms 41 and 42C can be engaged with any pressure plate 10.

The self-weight canceling mechanisms 50 are provided for the pressure plates 11 to 13, respectively. The self-weight canceling mechanism 51 for the pressure plate 11 is fixed to the cylinder 51A, the pressure control valve 51B for controlling the fluid pressure (air pressure) of the cylinder 51A, and the pressure plate 11 And a self-weighting canceling pole 51C added upward by the cylinder 51A.

Similarly, the self-weight canceling mechanism 52 for the pressure plate 12 includes a cylinder 52A, a pressure control valve 52B, and a self-weight canceling pole 52C. The self-weight canceling mechanism 53 for the pressure plate 13 includes a cylinder 53A, a pressure control valve 53B, and a weight 53C for self-weight canceling. With respect to the lowermost pressure plate 14, the self-weighted canceling mechanism is not necessary because the pressure object 20 does not exist below the pressure plate 14.

The cylinder 51A adds a force sufficient to cancel the self-weight of the pressure plate 11 to the self-weight canceling pole 51C. The cylinder 52A adds a force sufficient to cancel the self-weight of the pressure plate 12 and the to-be-pressed object 21 to the self-weight canceling pole 52C. The cylinder 53A adds an urging force sufficient to cancel the self-weight of the pressure plate 13 and the object 22 to the self-weighted pole 53C.

As an example, the self-weight of the pressure plate 10 is 30 kg per piece, the self-weight of the pressurized object 20 is 1 kg or less per piece, and the pressing force by the pressure source 31 is 1000 N (101.97 kgf). If it is this level, it is possible to ignore the self-weight of the to-be-pressed object 20, and the pressure control valves 51B, 52B, 53B may be integrated.

From the state shown in FIG. 1, the opening/closing arm 41 and the cylinder mechanism 42 are slid and moved in the vertical and horizontal directions, and as shown in FIG. 2, the opening/closing arm 41 is attached to the pressure plate 12. The engaging arm 42C is engaged to the pressure plate 13. In this state, the plunger 42B and the opening/closing arm 42C are applied to the plunger 42B by the cylinder body 42A, and an equivalent force to the pressing force A by the pressure source 31 is applied.

Thereby, the opening/closing arm 42C pushes the pressure plate 13 downward with the force equivalent to the pressing force A by the pressure source 31. In addition, by the reaction of this pressing force, the opening/closing arm 41 forces the pressing plate 12 upward with a force equivalent to the pressing force A by the pressing source 31. Thereby, the pressing force acting on the to-be-pressed object 22 fitted to the press plates 12 and 13 is almost zero. On the other hand, the original pressing force A is continuously applied to the objects 21 and 23 to be pressed. In addition, the vertical force acting on the base 43 is almost zero.

From the state shown in FIG. 2, the base 43 is moved upward by the ball screw 43A. As a result, as shown in Fig. 3, a gap is formed between the upper surface of the object 22 to be pressed and the pressure plate 12, and it becomes possible to take out and re-supply the object 22.

4 is a diagram showing structures around the pressure plate 10 and the object to be pressed 20 in the pressure device according to the present embodiment. As shown in Fig. 4, two opening/closing arms 41 and 42C are provided on the left and right sides (left and right on the paper in Fig. 4) of the pressure plate 10, respectively. In addition, two self-weighting cancellation poles 53C are provided on the left and right sides of the pressure plate 13, respectively.

In addition, in FIG. 4, for convenience of illustration, only the self-weighting canceling pole 53C of the pressure plate 13 is shown, but the pressure plates 11 and 12 are also provided with the same self-weighting canceling poles.

(Embodiment 2)

5 to 7 are schematic diagrams showing the first to third states of the pressure device according to the second embodiment of the present invention, respectively. 5, 6, and 7 correspond to the states of FIGS. 1, 2, and 3 in the first embodiment.

5 to 7, the pressing device according to the present embodiment is a modified example of the pressing device according to the first embodiment, for example, a cylinder mechanism for pressing the pressing plate 13 downward ( It characterized in that the 42) is fixed to the base 43 of the opening/closing arm 41.

The pressurizing device according to the present embodiment also basically operates in the same manner as the pressurizing device according to the first embodiment, and thus detailed description is not repeated.

However, according to the pressing device according to the present embodiment, since the opening/closing arm 41 and the cylinder mechanism 42 slide relative to the base 43, the opening/closing arm 42C of the cylinder mechanism 42 is pressurized. After the plate 13 is downwardly applied, a slight time difference may occur until the opening/closing arm 41 presses the pressure plate 12 upward. Due to this time difference, a pressing force twice (the sum of the pressing force A shown and the pressing force by the opening/closing arm 42C) acts temporarily on the to-be-pressed object 23. For example, there may be a case where the to-be-pressed object 23 cannot be allowed to receive twice the pressing force, such as when the to-be-pressed object 20 is a brittle material such as a glass plate or a glass material. In this case, after the opening/closing arm 41 is reliably engaged with the pressure plate 12, the pressing force by the pressure source 31 is alleviated once, and the opening/closing arm 41 is started to slide downward, and then pressurized. It is also conceivable to return the pressing force by the circle 31 to the original. The opening/closing mechanism 40 may be controlled so that the slide movement (falling) of the opening/closing arm 42C and the sliding movement (rising) of the opening/closing arm 41 are executed substantially simultaneously.

(Embodiment 3)

8 to 10 are schematic diagrams showing the first to third states of the pressure device according to the third embodiment of the present invention, respectively. 8, 9, and 10 correspond to the states of FIGS. 1, 2, and 3 in the first embodiment.

8 to 10, the pressing device according to the present embodiment presses a plurality of pressurized objects 20 (21 to 23) as a modification of the pressing device according to the first embodiment. . Each to-be-pressed object 20 is arrange|positioned substantially along the vertical direction, in other words, the main surfaces (left and upper surfaces on the paper in FIG. 8) along the vertical surface. In addition, each to-be-pressed object 20 is arrange|positioned so that it may line up along a horizontal direction. The pressing device according to the present embodiment is characterized in that a plurality of pressing plates 10 and a to-be-pressed object 20 are alternately stacked and arranged in a horizontal direction.

The pressurizing device according to the present embodiment also basically operates in the same manner as the pressurizing device according to the first embodiment, and thus detailed description is not repeated.

However, in the present embodiment, since it is not necessary to consider variations in the pressing force due to the self-weight of the pressure plate 10 and the object to be pressed 20, the self-weight canceling mechanism 50 provided in the first embodiment is unnecessary. .

(Supplementary explanation)

In the above-described Embodiments 1 to 3, the pressure plate 10 typically has either a heating mechanism or a cooling mechanism. Examples of the heating mechanism include resistance heating, electromagnetic induction heating, and a method using a heat medium. Air cooling, liquid cooling, etc. are mentioned as an example of a cooling mechanism. However, depending on the characteristics of the to-be-pressed object 20, a heating mechanism or an air cooling mechanism may not be used.

In the above-described Embodiments 1 to 3, the pressing plate 10 typically has a heat insulating material except for the contact portion of the to-be-pressed object 20.

In the above-described Embodiments 1 to 3, the to-be-pressed object 20 may be an interposer having a resin-filled lead frame or a resin material.

In the above-described Embodiments 1 to 3, the fluid pressure of the cylinder mechanism 42 as the driving mechanism may be air pressure or hydraulic pressure. As the driving mechanism, a combination of a motor and a rack-and-pinion, a combination of a motor and a ball screw and a ball nut, an electric linear actuator, or the like may be used instead of the cylinder mechanism 42.

In the case where the pressurizing apparatuses according to the first to third embodiments are used for the manufacture of a device, for example, a plurality of workpieces are resin molded, and the above-described pressurizing apparatuses are used to form a plurality of workpieces 20. Press to correct the warpage, and to separate the pressurized plural workpieces. For example, a plurality of sealed substrates (corresponding to a resin molded work piece) in which a semiconductor chip, an LED chip, or the like are resin-sealed is pressed using the above-described pressing device to correct the warpage. The plurality of sealed substrates whose curvature is corrected are sequentially reorganized. Thus, a semiconductor device, an LED package, and the like, which are products, are manufactured. The above-described pressing device (pressing unit) may be connected to the individualizing unit, and the pressing device may be assembled to the individualizing unit. The above-described pressurizing device (pressing unit) and the fragmentation unit may be connected to assemble the pressurization unit and fragmentation unit to the device manufacturing apparatus.

The pressurizing devices according to the first to third embodiments are employed in a resin substrate, a hot press device used in manufacturing a printed substrate, a warpage correction device, or the like. The above-described pressurizing device is employed in a hot press device used in manufacturing plywood and decorative plates, a warpage correcting device, and the like. In addition, the above-described pressurizing apparatus is employed in a resin molding apparatus, a warpage correcting apparatus, or the like, which is used when manufacturing a molded article by pressing and heating a fibrous member impregnated with a fluid resin to cure the fluid resin. The above-described pressing device (pressing unit) may be connected to the resin molding unit, and the pressing unit may be assembled to the resin molding apparatus.

(Action effect)

In the pressure device according to the first to third embodiments, since the pressure is collectively supplied to the uppermost pressure plate 11, energy efficiency is good.

In addition, in the pressurizing apparatuses according to the first and second embodiments, even if the number of pressurized objects 20 increases, the whole milk area does not increase. On the other hand, in the pressure device according to the third embodiment, there is no need to provide a self-weighted cancellation mechanism 50 to offset the weight.

In addition, since the pressure plate 10 may be installed as many as the number of sheets added to the quantity of the object to be pressed 20, compared to the conventional case in which two pieces of the pressure plate are provided for each piece of object to be pressed, the amount of equipment investment is Can be suppressed.

In addition, in the pressure devices according to the first to third embodiments, the heat loss can be reduced by minimizing the operating range of the opening/closing mechanism 40.

As mentioned above, although embodiment of this invention was described, it should be thought that embodiment disclosed this time is an illustration and restrictive at no points. The scope of the present invention is indicated by the claims, and is intended to include all changes within the meaning and range equivalent to the scope of the claims.

10-14: Pressing plate
20∼23: Pressed object
30: pressure mechanism
31: pressurization source
32: plate
40: opening and closing mechanism
41: opening and closing arm
42: cylinder mechanism
42A: Cylinder body
42B: Plunger
42C: Opening and closing arm
43: base
50-53: Self-weight cancellation mechanism
51A, 52A, 53A: cylinder
51B, 52B, 53B: Pressure control valve
51C, 52C, 53C: self-weight canceling pole

Claims (18)

A pressurizing device comprising a plurality of pressing plates arranged alternately and a pressing mechanism for applying a pressing force to a plurality of pressurized objects,
The plurality of pressure plates include a first pressure plate, a second pressure plate, and a third pressure plate,
The pressurizing device is capable of expanding between the second pressurizing plate and the third pressurizing plate while maintaining a pressing force between the first pressurizing plate and the second pressurizing plate. It is further provided with an opening/closing mechanism capable of expanding between the first pressure plate and the second pressure plate while maintaining the pressing force between the pressure plate of 2 and the third pressure plate,
The opening/closing mechanism is an arm and a drive for biasing the arbitrary pressurizing plate and the other pressurizing plate in opposite directions from a state in which any pressurizing plate among the plurality of pressurizing plates and another pressing plate opposite to the pressing plate are fitted. And a moving mechanism for moving the arbitrary pressing plate in a direction away from the other pressing plate from a state in which the arbitrary pressing plate and the other pressing plate are reversed from each other by the arm and the driving mechanism. Pressure device, characterized in that. According to claim 1,
The arm can hold any pressure plate among the plurality of pressure plates,
The moving mechanism, the pressing device, characterized in that it is possible to move the arm holding the arbitrary pressing plate in a direction away from another pressing plate facing the arbitrary pressing plate by fitting the pressing object. According to claim 2,
The opening/closing mechanism further includes a driving mechanism capable of applying a force equal to the pressing force to the other pressing plate in a direction opposite to the direction in which the arm moves. According to claim 1,
The drive mechanism includes a cylinder body and a second arm that is biased in the vertical direction to the cylinder body,
The arm and the driving mechanism are supported on a base, and slideable in a vertical direction and a horizontal direction with respect to the base,
The moving mechanism is a pressing device, characterized in that for moving the base in the vertical direction. According to claim 1,
The drive mechanism is fixed to the base,
The moving mechanism is a pressing device, characterized in that for moving the base in the vertical direction. The method according to any one of claims 2 to 5,
The moving mechanism is a pressing device, characterized in that it comprises a ball screw. The method according to any one of claims 2 to 5,
The plurality of pressure plates, the pressure device, characterized in that each comprises a concave portion to which the arm can be coupled. The method according to any one of claims 1 to 5,
The plurality of pressure plates and the plurality of pressurized objects are arranged to be arranged in a vertical direction,
The pressurizing device further comprises a mechanism for suppressing a variation in the pressing force with respect to the plurality of pressurized objects due to gravity. The method according to any one of claims 1 to 5,
The pressing device, characterized in that the plurality of pressing plates and the plurality of pressing objects are arranged to be arranged in a horizontal direction. The pressurizing device according to any one of claims 1 to 5,
And a fragmentation unit for fragmenting the workpiece pressed by the pressing device. A resin molding unit,
A resin molding apparatus comprising the pressing device according to any one of claims 1 to 5 for pressing a resin-molded work by the resin molding unit. A resin molding unit,
The pressurizing device according to any one of claims 1 to 5, which pressurizes the resin-molded work by the resin molding unit,
And a fragmentation unit for fragmenting the workpiece pressed by the pressing device. In the pressing method using the pressing device according to any one of claims 1 to 5,
A step of alternately stacking the plurality of pressurized plates and the plurality of pressurized objects;
A process of applying a pressing force to the plurality of press plates and the plurality of pressurized objects alternately stacked;
And a step of removing a pressing force to at least one of the pressurized objects among the plurality of pressurized objects and taking out the at least one pressurized object. Resin molding a plurality of workpieces,
A resin molding method comprising the step of pressing the plurality of workpieces as the plurality of pressurized objects by the pressing method according to claim 13. Resin molding a plurality of workpieces,
A step of pressing the plurality of workpieces as the plurality of pressurized objects by the pressing method according to claim 13;
And a step of reorganizing the plurality of workpieces pressed by the pressing method. delete delete delete

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