JP2017019143A - Pressurizing apparatus and individualizing apparatus including the same, resin molding apparatus, device manufacturing apparatus, and pressurizing method and individualizing method including the same, resin molding method, and device manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pressurizing apparatus and a pressurizing method which are capable of saving energy and saving space.SOLUTION: A pressurizing apparatus comprises a pressurizing source that applies pressurizing force to a plurality of pressurizing plates arranged in an alternately laminated manner and a plurality of pressurized objects, in which the plurality of pressurizing plates include a first pressurizing plate, a second pressurizing plate and a third pressurizing plate, and the pressurizing apparatus further comprises an opening/closing mechanism which is capable of enlarging a space between the first pressurizing plate and the second pressurizing plate while holding pressurizing force between the second pressurizing plate and the third pressurizing plate, and capable of enlarging a space between the second pressurizing plate and the third pressurizing plate while holding pressurizing force between the first pressurizing plate and the second pressurizing plate. The plurality of pressurized objects sandwiched by a pair of pressurizing plates are pressurized.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a pressurizing apparatus, a singulation apparatus including the same, a resin molding apparatus, a device manufacturing apparatus, and a pressing method and a singulation method including the same, a resin molding method, and a device manufacturing method.

  2. Description of the Related Art Conventionally, there is an apparatus that corrects warpage of a pressurized object by holding the pressurized object for a certain period of time in a heating furnace.

  Conventionally, there is also a device that corrects the warpage of the object to be pressed by sandwiching both surfaces of the object to be pressed with a heated pressure plate and holding the pressure for a certain time.

Japanese Patent Laid-Open No. 08-112827

  As shown in FIG. 11, the conventional warpage correction apparatus for an object to be pressed has an upper / lower pressure plate (11A / 12A, 11B / 12B, 11C / 12C) for each of the objects to be pressed 20A, 20B, 20C. ) And pressurize in the directions of arrows A, B, and C, respectively. Therefore, in order to increase the processing capacity, it is necessary to add a pressurization mechanism composed of upper and lower pressurization plates so that they are arranged horizontally or vertically, and a pressurization mechanism corresponding to the number of objects to be pressed is required (energy Efficiency), and the area and height for installing them are also necessary (decrease in space efficiency).

  This invention is made | formed in view of the above problems, and the objective of this invention is providing the pressurization apparatus and pressurization method in which energy saving and space saving are possible.

  A pressurizing apparatus according to the present invention is a pressurizing apparatus provided with a pressurizing mechanism that applies a pressurizing force to a plurality of pressurizing plates and a plurality of objects to be pressed that are alternately stacked. The pressure plate includes a first pressure plate, a second pressure plate, and a third pressure plate, and the pressure device includes the first pressure plate and the second pressure plate. It is possible to expand the space between the second pressure plate and the third pressure plate while maintaining the pressure between the pressure plate and the second pressure plate. And an opening / closing mechanism capable of expanding the space between the first pressure plate and the second pressure plate while maintaining the pressure between the first pressure plate and the third pressure plate.

  In one embodiment, in the pressure device, the opening / closing mechanism includes an arm capable of holding an arbitrary pressure plate among the plurality of pressure plates, and the above-described arbitrary pressure plate. A moving mechanism capable of moving the arm in a direction away from another pressure plate facing the arbitrary pressure plate with the object to be pressed interposed therebetween, and the arm with respect to the other pressure plate And a drive mechanism capable of applying a force having a magnitude equal to the above-mentioned applied pressure in the direction opposite to the moving direction.

  In one embodiment, in the pressurizing device, the drive mechanism is fixed to the arm.

  In one embodiment, in the pressurizing device, the driving mechanism is fixed to the moving mechanism.

  In one embodiment, in the pressurizing device, the plurality of pressurizing plates and the plurality of objects to be pressed are arranged along a vertical direction, and the pressurizing device includes the plurality of objects to be pressed by gravity. A mechanism is further provided that suppresses variations in pressure applied to the pressurized object.

  In one embodiment, in the pressure device, the plurality of pressure plates and the plurality of objects to be pressed are arranged in a horizontal direction.

  The singulation apparatus according to the present invention includes the above-described pressurizing apparatus and an individualizing unit that divides the work pressed by the above-described pressurizing apparatus.

  A resin molding apparatus according to the present invention includes a resin molding unit and the above-described pressurizing apparatus that pressurizes a workpiece molded by the resin molding unit.

  A device manufacturing apparatus according to the present invention separates a resin molding unit, the above-described pressurizing apparatus that pressurizes the resin molded by the resin molding unit, and the work pressed by the pressurizing apparatus. And a singulation unit.

  The pressurizing method according to the present invention includes a step of alternately stacking a plurality of pressure plates and a plurality of objects to be pressed, the plurality of pressure plates arranged alternately and the plurality of objects to be pressed. A step of applying a pressure to the pressure object, and a step of removing the pressure force applied to at least one object to be pressurized among the plurality of objects to be pressurized and taking out the at least one object to be pressurized.

  In one embodiment, in the pressurizing method, the step of taking out the at least one pressurized object includes holding an arbitrary pressurization plate among the plurality of pressurization plates; Applying a force in a direction away from the arbitrary pressure plate to another pressure plate opposite to the arbitrary pressure plate, and moving the arbitrary pressure plate away from the other pressure plate Moving.

  In one embodiment, in the step of taking out the at least one object to be pressurized, the arbitrary pressure plate is held by an arm, and the arbitrary pressure plate is fixed to the other pressure plate by a driving mechanism fixed to the arm. A force in a direction away from the pressure plate and having a magnitude equal to the pressure is applied.

  In one embodiment, in the step of taking out the at least one object to be pressurized, the other pressure plate is moved by a driving mechanism fixed to a moving mechanism that moves the arbitrary pressure plate away from the other pressure plate. A force in a direction away from the arbitrary pressure plate and a force equal to the applied pressure is applied to the pressure plate.

  In one embodiment, in the pressurizing method, the plurality of pressure plates and the plurality of objects to be pressed are alternately stacked so as to be aligned along the vertical direction, and applied to the plurality of objects to be pressed by gravity. A force for suppressing pressure variation is applied to at least a part of the plurality of pressure plates.

  In one embodiment, in the pressurizing method, the plurality of pressure plates and the plurality of objects to be pressed are alternately stacked so as to be aligned along the horizontal direction.

  The singulation method according to the present invention divides the plurality of objects to be pressed by the above-described pressurizing method, and divides the plurality of objects to be pressed that have been pressed by the above-described pressurizing method. A process.

  The resin molding method according to the present invention includes a step of resin molding a plurality of workpieces, and a step of pressing the plurality of workpieces as the plurality of objects to be pressed by the above-described pressing method.

  The device manufacturing method according to the present invention includes a step of resin-molding a plurality of workpieces, a step of pressing the plurality of workpieces as the plurality of workpieces by the above-described pressurizing method, and a pressurizing method. And dividing the pressed plurality of workpieces into individual pieces.

  According to the present invention, a pressurizing apparatus and a pressurizer capable of supplying and taking out an arbitrary pressurized object while maintaining a pressurizing force with respect to another pressurized object, and saving energy and space. A method can be provided.

It is a schematic diagram which shows the 1st state of the pressurization apparatus which concerns on Embodiment 1 of this invention. It is a schematic diagram which shows the 2nd state of the pressurization apparatus which concerns on Embodiment 1 of this invention. It is a schematic diagram which shows the 3rd state of the pressurization apparatus which concerns on Embodiment 1 of this invention. It is a figure which shows the structure of the pressurization plate in the pressurization apparatus shown in FIGS. It is a schematic diagram which shows the 1st state of the pressurization apparatus which concerns on Embodiment 2 of this invention. It is a schematic diagram which shows the 2nd state of the pressurization apparatus which concerns on Embodiment 2 of this invention. It is a schematic diagram which shows the 3rd state of the pressurization apparatus which concerns on Embodiment 2 of this invention. It is a schematic diagram which shows the 1st state of the pressurization apparatus which concerns on Embodiment 3 of this invention. It is a schematic diagram which shows the 2nd state of the pressurization apparatus which concerns on Embodiment 3 of this invention. It is a schematic diagram which shows the 3rd state of the pressurization apparatus which concerns on Embodiment 3 of this invention. It is a figure which shows typically the structure of the conventional pressurization apparatus.

  Embodiments of the present invention will be described below. Note that the same or corresponding portions are denoted by the same reference numerals, and the description thereof may not be repeated.

  Note that in the embodiments described below, when referring to the number, amount, and the like, the scope of the present invention is not necessarily limited to the number, amount, and the like unless otherwise specified. In the following embodiments, each component is not necessarily essential for the present invention unless otherwise specified.

  The pressurizing apparatus according to the first to third embodiments described later applies pressure to a plurality of alternately arranged pressure plates 10 (11 to 14) and a plurality of objects to be pressurized 20 (21 to 23). A pressurizing mechanism 30 is provided. Examples of the object to be pressed 20 include a printed circuit board (sealed substrate) in which a semiconductor chip is sealed with a resin, a resin substrate such as a glass epoxy substrate, a ceramic substrate, a silicon wafer, and SiC. Examples thereof include semiconductor wafers such as wafers and glass materials. Furthermore, as an example of the pressed object 20, a printed circuit board (printed wiring board) using a resin substrate as a base material can be cited.

  In the pressurizing apparatus according to the first to third embodiments, pressure is applied to the plurality of pressurizing plates 10 (11 to 14) and the plurality of objects to be pressed 20 (21 to 23) arranged alternately. A single pressurizing mechanism 30 can pressurize a plurality of objects to be pressed. As a result, energy saving and space saving are possible.

  In some cases, it is desired to take out only a part of the objects to be pressurized out of the plurality of objects to be pressurized 20 and continue to apply pressure to the other objects to be pressurized. When one pressurization mechanism 30 is shared by the plurality of objects to be pressed 20 (21 to 23), it is necessary to provide a special configuration in order to meet such a request.

  In the pressurization apparatus according to Embodiments 1 to 3, the opening / closing mechanism 40 can remove, for example, only the pressure applied to the pressurized object 22 among the multiple pressurized objects 21 to 23. As a result, the pressurized object 22 can be taken out while maintaining the pressure applied to the pressurized objects 21 and 23.

(Embodiment 1)
1 to 3 are schematic views showing a first state to a third state of the pressurizing apparatus according to Embodiment 1 of the present invention.

  As shown in FIGS. 1-3, the pressurization apparatus which concerns on this Embodiment pressurizes the some to-be-pressurized object 20 (21-23). Each pressurization object 20 is arranged substantially along the horizontal direction, in other words, the main surface of each pressurization object 20 (the upper surface and the lower surface on the paper surface of FIG. 1) is substantially along the horizontal plane. In addition, the objects 20 to be pressed are arranged so as to be aligned along the vertical direction. The pressurizing apparatus according to the present embodiment includes a plurality of pressurizing plates 10 (11 to 14) and a plurality of pressurized objects 20 (21 to 23) arranged alternately in the vertical direction. The pressurizing mechanism 30 for applying pressure, the opening / closing mechanism 40 capable of eliminating the pressurizing force to the pressurized object 22 among the plural pressurized objects 20, and the pressurizing to the plural pressurized objects 20 by gravity. A self-weight canceling mechanism 50 for suppressing variations in pressure. This will be described in more detail below.

  The pressurizing apparatus according to the present embodiment pressurizes a plurality of objects 20 to be pressed simultaneously in the vertical direction. In order to sandwich the object 21 to be pressed arranged at the top, the pressure plates 11 and 12 are provided so as to be lined up and down.

  The second object 22 to be pressed from above is sandwiched between the lower pressure plate 12 for sandwiching the uppermost object 21 to be pressed and the pressure plate 13 disposed at the lower stage. The third pressurizing object 23 from the top (the lowest) includes the lower pressurizing plate 13 for sandwiching the second pressurizing object 22 from the top, and the pressurization disposed further below the pressurizing plate 13. It is clamped by the plate 14.

  The pressure mechanism 30 includes a pressure source 31 provided above the pressure plate 11 and a pressure receiving plate 32 that supports the pressure plate 14 from below. A constant pressure is applied to the uppermost pressure plate 11 by the pressure source 31. This applied pressure is evenly transmitted to the lowermost pressure plate 14 via the pressure plates 12 and 13 and the objects to be pressed 21 to 23.

  The opening / closing mechanism 40 includes an opening / closing arm 41 capable of holding an arbitrary pressure plate among the plurality of pressure plates 10, a cylinder mechanism 42 fixed to the opening / closing arm 41, and the opening / closing arm 41 and the cylinder mechanism 42. A base 43 to be supported and a ball screw 43A (moving mechanism) capable of moving the base 43 in the vertical direction are provided.

  The open / close arm 41 and the cylinder mechanism 42 are slidable in the vertical direction and the horizontal direction with respect to the base 43. The cylinder mechanism 42 includes a cylinder body 42A, a plunger 42B, and an opening / closing arm 42C. The open / close arm 42C is fixed to the plunger 42B. The plunger 42B and the opening / closing arm 42C are urged downward by the fluid pressure (air pressure) in the cylinder 42A. The open / close arms 41 and 42C can be engaged with an arbitrary pressure plate 10.

  The dead weight canceling mechanism 50 is provided for each of the pressure plates 11 to 13. The self-weight canceling mechanism 51 for the pressure plate 11 is fixed to the cylinder 51A, the pressure control valve 51B for controlling the fluid pressure (air pressure) of the cylinder 51A, and the pressure plate 11, and is urged upward by the cylinder 51A. Self-weight canceling pawl 51C.

  Similarly, the self-weight canceling mechanism 52 for the pressure plate 12 includes a cylinder 52A, a pressure control valve 52B, and a self-weight canceling claw 52C. The dead weight cancellation mechanism 53 for the pressure plate 13 includes a cylinder 53A, a pressure control valve 53B, and a dead weight cancellation claw 53C. As for the lowermost pressure plate 14, the pressurizing object 20 does not exist below the pressure plate 14, so that the self-weight canceling mechanism is not necessary.

  The cylinder 51A applies an urging force enough to cancel the weight of the pressure plate 11 to the weight cancellation claw 51C. The cylinder 52A applies an urging force sufficient to cancel the weight of the pressure plate 12 and the pressed object 21 to the weight cancellation claw 52C. The cylinder 53A applies an urging force enough to cancel the weight of the pressure plate 13 and the pressurized object 22 to the weight cancellation claw 53C.

  As an example, the weight of the pressure plate 10 is 30 kg per piece, the weight of the pressurized object 20 is 1 kg or less, and the pressure applied by the pressure source 31 is 1000 N (101.97 kgf). If it is about this level, it is possible to ignore the weight of the article 20 to be pressurized, and the pressure control valves 51B, 52B, and 53B may be integrated.

  From the state shown in FIG. 1, the open / close arm 41 and the cylinder mechanism 42 are slid up and down and left and right, and the open / close arm 41 is engaged with the pressure plate 12 and the open / close arm 42C is added as shown in FIG. Engage with the pressure plate 13. In this state, the cylinder body 42A applies an urging force equivalent to the pressing force A by the pressurizing source 31 to the plunger 42B and the opening / closing arm 42C.

  As a result, the opening / closing arm 42 </ b> C urges the pressure plate 13 downward with a force equivalent to the pressure A applied by the pressure source 31. Further, due to the reaction of the urging force, the open / close arm 41 urges the pressure plate 12 upward with a force equivalent to the pressure A applied by the pressure source 31. As a result, the applied pressure acting on the pressurized object 22 sandwiched between the pressure plates 12 and 13 becomes substantially zero. On the other hand, the original pressure A is continuously applied to the workpieces 21 and 23. The resultant force acting on the base 43 in the vertical direction is almost zero.

  From the state shown in FIG. 2, the base 43 is moved upward by the ball screw 43A. As a result, as shown in FIG. 3, a gap is formed between the upper surface of the workpiece 22 and the pressure plate 12, and the workpiece 22 can be taken out and re-supplied.

  FIG. 4 is a diagram showing a structure around the pressure plate 10 and the object to be pressed 20 in the pressure device according to the present embodiment. As shown in FIG. 4, the open / close arms 41 and 42 </ b> C are each provided with two pressure plates 10 on both the left and right sides (left and right on the paper surface of FIG. 4). Also, two dead weight canceling claws 53 </ b> C are provided on each of the left and right sides of the pressure plate 13.

  In FIG. 4, only the self weight canceling claw 53 </ b> C of the pressure plate 13 is shown for convenience of illustration, but the pressure plates 11 and 12 are also provided with a similar self weight canceling claw.

(Embodiment 2)
5-7 is a schematic diagram which respectively shows the 3rd state from the 1st state of the pressurization apparatus which concerns on Embodiment 2 of this invention. 5, 6 and 7 correspond to the states of FIGS. 1, 2 and 3 in the first embodiment.

  As shown in FIGS. 5 to 7, the pressurizing apparatus according to the present embodiment is a modification of the processing apparatus according to the first embodiment, and for example, a cylinder mechanism 42 that biases the pressurizing plate 13 downward. Is fixed to the base 43 instead of the opening / closing arm 41.

  Since the pressurizing apparatus according to the present embodiment also operates basically in the same manner as the pressurizing apparatus according to the first embodiment, detailed description will not be repeated.

  However, according to the pressurizing device according to the present embodiment, since the open / close arm 41 and the cylinder mechanism 42 slide separately from the base 43, the open / close arm 42C of the cylinder mechanism 42 faces the pressurizing plate 13 downward. There may be a slight time difference from when the opening / closing arm 41 biases the pressure plate 12 upward. Due to this time difference, a pressure twice as large as the pressure A (the sum of the pressure A shown and the pressure applied by the open / close arm 42C) temporarily acts on the object 23 to be pressurized. For example, there may be a case where it is not acceptable for the pressurized object 23 to receive double pressure as in the case where the pressurized object 20 is a brittle material such as a glass plate or glass material. In this case, after the opening / closing arm 41 is securely engaged with the pressure plate 12, the pressure applied by the pressure source 31 is loosened once, and the opening / closing arm 41 starts to slide downward, and then the pressure source 31 applies pressure. It is also possible to restore the pressure. The opening / closing mechanism 40 may be controlled such that the sliding movement (lowering) of the opening / closing arm 42C and the sliding movement (upward) of the opening / closing arm 41 are performed substantially simultaneously.

(Embodiment 3)
8-10 is a schematic diagram which respectively shows the 3rd state from the 1st state of the pressurization apparatus which concerns on Embodiment 3 of this invention. 8, FIG. 9, and FIG. 10 correspond to the states of FIG. 1, FIG. 2, and FIG. 3 in the first embodiment.

  As shown in FIGS. 8 to 10, the pressurizing apparatus according to the present embodiment is a modification of the processing apparatus according to the first embodiment, and adds a plurality of objects to be pressurized 20 (21 to 23). Press. Each pressurization object 20 is disposed substantially along the vertical direction, in other words, its main surface (the left surface and the right surface on the paper surface of FIG. 8) is approximately along the vertical surface. In addition, the objects to be pressed 20 are arranged so as to be aligned along the horizontal direction. The pressurizing apparatus according to the present embodiment is characterized in that a plurality of pressurizing plates 10 and an object to be pressed 20 are arranged so as to be alternately stacked in a horizontal direction.

  Since the pressurizing apparatus according to the present embodiment also operates basically in the same manner as the pressurizing apparatus according to the first embodiment, detailed description will not be repeated.

  However, in the present embodiment, since it is not necessary to consider the variation in the applied pressure due to the weight of the pressure plate 10 and the pressurized object 20, the weight cancellation mechanism 50 provided in the first embodiment is not necessary. .

(Supplementary explanation)
In the above-described first to third embodiments, typically, the pressure plate 10 has either a heating mechanism or a cooling mechanism. Examples of the heating mechanism include resistance heating, electromagnetic induction heating, a method using a heat medium, and the like. Examples of the cooling mechanism include air cooling and liquid cooling. However, the heating mechanism and the air cooling mechanism may not be used depending on the characteristics of the pressurized object 20.

  In the above-described first to third embodiments, typically, the pressure plate 10 has a heat insulating material except for the contact portion of the pressed object 20.

  In the above-described first to third embodiments, the pressed object 20 may be an interposer having a resin-sealed lead frame or resin material.

  In the above-described first to third embodiments, the fluid pressure of the cylinder mechanism 42 that is a drive mechanism may be air pressure or hydraulic pressure. Furthermore, instead of the cylinder mechanism 42, a combination of a motor and a rack and pinion, a combination of a motor, a ball screw and a ball nut, an electric linear actuator, or the like may be used as the drive mechanism.

  In the case where the pressurizing apparatus according to the first to third embodiments is used for manufacturing a device, for example, a plurality of works are resin-molded, and the works as the plurality of objects to be pressed 20 are used by using the above-described pressurizing apparatus. Pressurize to correct warpage and divide a plurality of pressurized workpieces. For example, a plurality of sealed substrates (corresponding to a resin-molded workpiece) in which semiconductor chips, LED chips, and the like are resin-sealed are pressed using the above-described pressure device to correct warpage. A plurality of sealed substrates whose warpage has been corrected are sequentially separated into individual pieces. As a result, semiconductor devices, LED packages, and the like, which are products, are manufactured. The pressurization device (pressurization unit) described above may be connected to the singulation unit, and the pressurization device may be incorporated into the singulation device. The pressurizing apparatus (pressurizing unit) and the singulation unit may be connected to each other, and the pressurization unit and the singulation unit may be incorporated into the device manufacturing apparatus.

  The pressurizing device according to the first to third embodiments is employed in a hot press device, a warp correction device, or the like used when manufacturing a resin substrate or a printed circuit board. The pressurizing device described above is employed in a hot press device, a warp correction device, and the like used when manufacturing a plywood and a decorative plate. In addition, the pressurizing device described above is a resin molding device used when a molded product is manufactured by pressurizing and heating a fibrous member impregnated with a flowable resin to cure the flowable resin. Used in straightening devices. The above-described pressure device (pressure unit) may be connected to the resin molding unit, and the pressure unit may be incorporated in the resin molding device.

(Function and effect)
In the pressurizing apparatus according to the first to third embodiments, the pressure is collectively supplied to the uppermost pressurizing plate 11, so that the energy efficiency is good.

  Moreover, in the pressurization apparatus according to Embodiments 1 and 2, even if the number of objects to be pressed 20 increases, the exclusive area does not increase. On the other hand, in the pressurizing apparatus according to the third embodiment, it is not necessary to provide the self-weight canceling mechanism 50 that cancels the weight.

  In addition, the pressure plate 10 may be provided by the number of the pressurized objects 20 added by one, so that the conventional example in which two pressurization plates are provided for each pressurized object is provided. Compared with, capital investment can be reduced.

  Moreover, in the pressurization apparatus according to the first to third embodiments, heat loss can be reduced by minimizing the operating range of the opening / closing mechanism 40.

  Although the embodiments of the present invention have been described above, the embodiments disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  10-14 pressure plate, 20-23 object to be pressurized, 30 pressure mechanism, 31 pressure source, 32 pressure receiving plate, 40 opening / closing mechanism, 41 opening / closing arm, 42 cylinder mechanism, 42A cylinder body, 42B plunger, 42C Open / close arm, 43 base, 50-53 self-weight canceling mechanism, 51A, 52A, 53A cylinder, 51B, 52B, 53B pressure control valve, 51C, 52C, 53C self-weight canceling claw.

Claims (18)

A pressurizing device including a pressurizing mechanism that applies pressure to a plurality of pressurizing plates and a plurality of objects to be pressed that are alternately stacked.
The plurality of pressure plates include a first pressure plate, a second pressure plate, and a third pressure plate,
The pressurizing device holds between the second pressurizing plate and the third pressurizing plate while maintaining the pressurizing force between the first pressurizing plate and the second pressurizing plate. The first pressure plate and the second pressure can be expanded while maintaining the pressure between the second pressure plate and the third pressure plate. A pressurizing apparatus further comprising an opening / closing mechanism capable of expanding between the plates. The opening and closing mechanism is
An arm capable of holding any pressure plate among the plurality of pressure plates;
A moving mechanism capable of moving the arm holding the arbitrary pressure plate in a direction away from another pressure plate facing the arbitrary pressure plate with the object to be pressed interposed therebetween;
The pressure device according to claim 1, further comprising: a driving mechanism capable of applying a force equal to the pressure force to the other pressure plate in a direction opposite to the moving direction of the arm.   The pressure device according to claim 2, wherein the driving mechanism is fixed to the arm.   The pressure device according to claim 2, wherein the driving mechanism is fixed to the moving mechanism. The plurality of pressure plates and the plurality of objects to be pressed are arranged along the vertical direction,
The pressurization apparatus according to any one of claims 1 to 4, further comprising a mechanism that suppresses variation in pressure applied to the plurality of objects to be pressurized due to gravity.   The pressure device according to any one of claims 1 to 4, wherein the plurality of pressure plates and the plurality of objects to be pressed are arranged in a horizontal direction. A pressurizing device according to any one of claims 1 to 6,
An individualizing device comprising: an individualizing unit for individualizing a workpiece pressed by the pressurizing device. A resin molding unit;
The resin molding apparatus provided with the pressurization apparatus in any one of Claims 1-6 which pressurizes the workpiece | work resin-molded by the said resin molding unit. A resin molding unit;
The pressurizing device according to any one of claims 1 to 6, which pressurizes a workpiece molded by the resin molding unit.
A device manufacturing apparatus, comprising: an individualization unit that separates the workpiece pressed by the pressurization. A step of alternately laminating a plurality of pressure plates and a plurality of objects to be pressed;
Applying a pressing force to the plurality of pressure plates and the plurality of objects to be pressed that are alternately stacked, and
And a step of removing pressure applied to at least one object to be pressurized among the plurality of objects to be pressurized, and taking out the at least one object to be pressurized. The step of taking out the at least one object to be pressurized includes
Holding an arbitrary pressure plate among the plurality of pressure plates;
Applying a force in a direction away from the arbitrary pressure plate to another pressure plate facing the arbitrary pressure plate with the object to be pressed interposed therebetween;
The pressure method according to claim 10, comprising moving the arbitrary pressure plate in a direction away from the other pressure plate. In the step of removing the at least one object to be pressurized,
The optional pressure plate is held by an arm;
The pressurization according to claim 11, wherein a force that is in a direction away from the arbitrary pressurization plate and is equal to the pressurization force is applied to the other pressurization plate by a drive mechanism fixed to the arm. Method. In the step of removing the at least one object to be pressurized,
The force in the direction away from the arbitrary pressure plate to the other pressure plate by the driving mechanism fixed to the moving mechanism that moves the arbitrary pressure plate in the direction away from the other pressure plate, The pressurizing method according to claim 11, wherein a force having a magnitude equal to the applied pressure is applied. The plurality of pressure plates and the plurality of objects to be pressed are alternately stacked so as to be aligned along the vertical direction,
The pressurization method according to any one of claims 10 to 13, wherein a force for suppressing variation in pressure applied to the plurality of objects to be pressed due to gravity is applied to at least a part of the plurality of pressurization plates. .   The pressurizing method according to any one of claims 10 to 13, wherein the plurality of pressurizing plates and the plurality of objects to be pressed are alternately stacked so as to be aligned along a horizontal direction. Pressurizing the plurality of objects to be pressurized by the pressurizing method according to claim 10;
And a step of dividing the plurality of objects to be pressed pressurized by the pressure method. A step of resin molding a plurality of workpieces;
A resin molding method comprising: pressing the plurality of workpieces as the plurality of objects to be pressed by the pressing method according to claim 10. A step of resin molding a plurality of workpieces;
Pressurizing the plurality of workpieces as the plurality of objects to be pressed by the pressurizing method according to claim 10;
And a step of separating the plurality of workpieces pressed by the pressing method.

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